EP1062017A1 - Fluid flow inlet - Google Patents
Fluid flow inletInfo
- Publication number
- EP1062017A1 EP1062017A1 EP99908567A EP99908567A EP1062017A1 EP 1062017 A1 EP1062017 A1 EP 1062017A1 EP 99908567 A EP99908567 A EP 99908567A EP 99908567 A EP99908567 A EP 99908567A EP 1062017 A1 EP1062017 A1 EP 1062017A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- inlet
- fluid
- inlet body
- passage
- inert gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D47/00—Separating dispersed particles from gases, air or vapours by liquid as separating agent
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D47/00—Separating dispersed particles from gases, air or vapours by liquid as separating agent
- B01D47/02—Separating dispersed particles from gases, air or vapours by liquid as separating agent by passing the gas or air or vapour over or through a liquid bath
- B01D47/027—Separating dispersed particles from gases, air or vapours by liquid as separating agent by passing the gas or air or vapour over or through a liquid bath by directing the gas to be cleaned essentially tangential to the liquid surface
Definitions
- the invention relates to a method and apparatus for preventing particulate material from adhering to the inner surface of an inlet.
- Certain industries produce toxic gaseous effluent as a result of their particular manufacturing or fabrication process.
- chemical vapor deposition and etch processes associated with semiconductor fabrication utilizes highly toxic and pyrophoric gases. Many of these gases go through the process tool without reacting, or react to form other gaseous species and/or particulate. These gases and particulate are then exhausted from the process tool and require treatment prior to going to the atmosphere.
- the effluent gases may be scrubbed by reacting with liquid. Many times this reaction will cause particulate to form which is either washed away or collected and removed.
- effluent gases are introduced through an inlet into a chamber where jet sprays spray the gases with liquid. The gaseous material reacts with the liquid and many times forms a solid particulate.
- particulate material tends to adhere to the inner surface of the inlet and chamber due to moisture which have collected thereon and may impede the flow of gases through the inlet and chamber.
- Various methods and apparatus have been devised to prevent adherence of particulate material to the inner surfaces of inlets and chambers.
- the scrubbing chamber 1 has a cylindrical chamber 2. tangential water intakes 3. a tangential gaseous effluent intake 4 and opening 5. Water is injected tangentially into cylindrical chamber 2. which forms a downwardly spiraling wall of water along the inner surface of cylindrical chamber 2. Rings 6 serve as ledges in the path of the downwardly spiraling wall of water, forming curtains of water across gaseous effluent opening 5. Gaseous effluent is introduced tangentially into cylindrical chamber 2. The gaseous effluent diffuses through the curtains of water and spirals up the chamber. Particulate material in the gaseous effluent reacts vvith the water and is carried awav bv the water through a funnel section 7 and outlet 8. 2
- the invention relates to a method for preventing particulate material from adhering to an inner surface defining a passage through an inlet body, the inlet body having a proximal inlet end and a distal exit end. comprising the steps of forming a film of inert gas within the passage at the proximal inlet end of the inlet body, forming a wall of swirling fluid within the passage at the distal exit end of the inlet body, and forming a solid cone of fluid as the wall of swirling fluid exits the inlet body.
- the invention in another embodiment, relates to an apparatus for preventing particulate material from adhering to an inner surface defining a passage through an inlet body, the inlet body having a proximal inlet end and a distal exit end. comprising a porous wall for forming a film of inert gas within the passage at the proximal inlet end of the inlet body, an outlet, circumferential reservoir and weir for forming a wall of swirling fluid within the passage at the distal exit end of the inlet body, which, when exiting the inlet body, forms a solid cone of fluid.
- the invention in yet another embodiment, relates to an apparatus for preventing particulate material from adhering to an inner surface of an inlet, comprising an inlet body having an inner surface defining a passage through the inlet body, a film of inert gas within the passage at a proximal inlet end of the inlet body, a wall of swirling fluid within the passage at a distal exit end of the inlet body, and a solid cone of fluid at the exit of the inlet body.
- Advantages and features of the invention include one or more of the following.
- a film of inert gas along the inner surface of the proximal inlet end of the inlet and a wall of swirling fluid along the inner surface of the distal exit end of the inlet prevent solid accumulation.
- a solid cone of fluid formed as the wall of swirling fluid exits the inlet prevents backflow of moisture through the exit.
- Fig. 1 illustrates a prior art method for scrubbing effluent gases.
- Fig. 2 illustrates an inlet according to one embodiment of the present invention.
- Fig. 3 illustrates a closeup view of the method and apparatus for providing a film of inert gas according to the embodiment of Fig. 2.
- Fig. 4 illustrates a closeup view of the method and apparatus for providing a wall of swirling fluid and solid cone of fluid according to the embodiment of Fig. 2.
- an inlet is shown generally at 10.
- the inlet 10 has an inlet body 15.
- An inner surface 16 defines a passage through the inlet body 15.
- the inlet body 15 is threaded at an upper opening 17 so as to enable the inlet to securely engage an outlet 18 from, for example, a combustion chamber (not shown).
- a porous wall section 20, which may be a fritted pipe, is housed within the passage at a proximal inlet end of the inlet body 15.
- An outer surface 21 of porous wall section 20 forms an external chamber 25 with the inner surface 16 of the inlet body 15.
- a gas intake 26 is connected to external chamber 25 by a conduit 27.
- the external chamber 25 receives a supply of inert gas. for example He. Ne. Ar. Kr.
- Reservoir 40 receives a continuous injection of fluid through fluid intake 42 in a tangential direction so as to cause the fluid to swirl around within reservoir 40. As more fluid is injected, the fluid 4 level within reservoir 40 rises up and over weir 41 and down outlet pipe 35. coating an inner surface 37 of outlet pipe 35 with a wall of swirling fluid 45.
- porous wall section 20 contains pores 23. It will be appreciated that pores 23 are spaced within porous wall section 20 so as to allow the inert gas to pass through porous wall section 20 in an evenly distributed manner.
- the wall of swirling fluid 45 forms a solid cone of fluid 50.
- the swirling motion of the fluid causes solid cone of fluid 50 to be formed.
- inlet 10 receives a flow of effluent gases through outlet 18. which may be from, for example, a CVD process chamber.
- effluent gases are heavily laden with toxic gaseous material and must be cleaned, or "scrubbed.” before being released into the atmosphere.
- Some toxic gaseous material will react with moisture to form particulate material, which may adhere to inlet 10 upon contact with the inner surface of inlet 10. Over time, a layer of particulate material may form on the inner surface of inlet 10 and may clog inlet 10 and impede the flow of effluent gases.
- the reactant particulate material is prevented from adhering to the inner surface of inlet 10 by a film of inert gas 30 and wall of swirling fluid 45. Effluent gases entering inlet 10 will encounter a film of inert gas 30 in the proximal inlet end of inlet body 15.
- the film of inert gas 30 serves to cool the reactant particulate material and prevent them from adhering to the proximal inlet end of inlet body 15.
- a wall of swirling fluid 45 at the distal exit end of inlet body 15 is encountered.
- the wall of swirling fluid 45 serves to further cool the particulate material and prevent them from adhering to the distal exit end of inlet body 15. Particulate material that come in contact with wall of swirling fluid 45 are washed away by the fluid.
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Incineration Of Waste (AREA)
- Air Transport Of Granular Materials (AREA)
- Filling Or Discharging Of Gas Storage Vessels (AREA)
- Treating Waste Gases (AREA)
- Separation Of Particles Using Liquids (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Abstract
Description
Claims
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US3777098A | 1998-03-10 | 1998-03-10 | |
US37770 | 1998-03-10 | ||
PCT/US1999/004397 WO1999046027A1 (en) | 1998-03-10 | 1999-03-01 | Fluid flow inlet |
Publications (2)
Publication Number | Publication Date |
---|---|
EP1062017A1 true EP1062017A1 (en) | 2000-12-27 |
EP1062017A4 EP1062017A4 (en) | 2002-02-06 |
Family
ID=21896239
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP99908567A Withdrawn EP1062017A4 (en) | 1998-03-10 | 1999-03-01 | Fluid flow inlet |
Country Status (6)
Country | Link |
---|---|
EP (1) | EP1062017A4 (en) |
JP (1) | JP2002505941A (en) |
KR (1) | KR20010034592A (en) |
CN (1) | CN1147345C (en) |
TW (1) | TW476658B (en) |
WO (1) | WO1999046027A1 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4252702B2 (en) | 2000-02-14 | 2009-04-08 | 株式会社荏原製作所 | Apparatus and method for preventing adhesion of reaction by-products in piping |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4015958A (en) * | 1974-04-05 | 1977-04-05 | Kurt Leschonski | Wet centrifugal separator for gas |
NL7704399A (en) * | 1977-04-22 | 1978-10-24 | Shell Int Research | METHOD AND REACTOR FOR THE PARTIAL BURNING OF COAL POWDER. |
US4279627A (en) * | 1978-08-07 | 1981-07-21 | Dresser Industries, Inc. | Fine particle separation apparatus |
US4388089A (en) * | 1981-06-04 | 1983-06-14 | Santek, Inc. | Self-cleaning electro-inertial precipitator unit |
US4986838A (en) * | 1989-06-14 | 1991-01-22 | Airgard, Inc. | Inlet system for gas scrubber |
US5846275A (en) * | 1996-12-31 | 1998-12-08 | Atmi Ecosys Corporation | Clog-resistant entry structure for introducing a particulate solids-containing and/or solids-forming gas stream to a gas processing system |
-
1999
- 1999-03-01 JP JP2000535436A patent/JP2002505941A/en not_active Withdrawn
- 1999-03-01 EP EP99908567A patent/EP1062017A4/en not_active Withdrawn
- 1999-03-01 KR KR1020007010072A patent/KR20010034592A/en not_active Application Discontinuation
- 1999-03-01 CN CNB998057185A patent/CN1147345C/en not_active Expired - Fee Related
- 1999-03-01 WO PCT/US1999/004397 patent/WO1999046027A1/en not_active Application Discontinuation
- 1999-04-08 TW TW088103612A patent/TW476658B/en not_active IP Right Cessation
Non-Patent Citations (2)
Title |
---|
No further relevant documents disclosed * |
See also references of WO9946027A1 * |
Also Published As
Publication number | Publication date |
---|---|
WO1999046027A1 (en) | 1999-09-16 |
KR20010034592A (en) | 2001-04-25 |
CN1147345C (en) | 2004-04-28 |
EP1062017A4 (en) | 2002-02-06 |
JP2002505941A (en) | 2002-02-26 |
CN1299297A (en) | 2001-06-13 |
TW476658B (en) | 2002-02-21 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
17P | Request for examination filed |
Effective date: 20000918 |
|
AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): AT DE FR GB |
|
A4 | Supplementary search report drawn up and despatched |
Effective date: 20011227 |
|
AK | Designated contracting states |
Kind code of ref document: A4 Designated state(s): AT DE FR GB |
|
RIC1 | Information provided on ipc code assigned before grant |
Free format text: 7B 01D 47/00 A, 7B 01D 47/02 B |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION HAS BEEN WITHDRAWN |
|
18W | Application withdrawn |
Effective date: 20030513 |