476658 A7 經濟部中央標準局員工消費合作社印製476658 A7 Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs
經濟部中夬標準局員工消費合作社印製 2 A7 B7 發明説明（ 在—實施例中，本發明關於一種防止粒子物質黏著於 内表面的方法，該内表面界定出一穿過入口主體的通道，、 入口主體含有近側入口末端和遠侧出口末端，該方法包括 的步驟有：在通道内的入口主體的近側入口末端形成二生 性氣體薄膜階段、在入口主體的遠側出口末端之通道内形 成渴流壁、和當渦流的壁離開入口主體時，形成固體狀的 圓錐體。 在另一實施例中，本發明關於一種防止粒子物質黏著 於内表面的裝置，該内表面界定出一穿過入口主體的通道 入口主體含有近侧入口末端和遠侧出口末端，該裝置包 括一用以在通道内，在入口主體的近側入口末端形成惰性 氣體的多孔壁、一出口，用以在通道内，在入口主體的遠 側出口末端形成渦流壁的圓周形成水槽和水壩、當渦流壁 離開入口主體時會形成堅固的圓錐體。 仍是另一實施例，本發明關於一種防止粒子物質黏著 於入口内表面的裝置，該裝置包括一個入口本體，具有界 定一穿過入口主體的通道之一個内表面、在入口主體的近 側入口末端之通道内的惰性氣體薄膜、入口主體的遠側出 口末端的通道内的渦流壁、和在入口主體的出口處的堅固 圓錐體。 …本發明的優點和特徵如下：沿著入口的近側入口末端 之内表面的惰性氣體膜，和沿著入口的遠側出口末端的渦 流壁，會防止固體聚積；當渦流的壁離開入口主體時形成 的堅固的圓錐體可以防止濕氣透過出口的回流；其它的優 本紙張尺度適用中國國家標準（CNS ) A4規格（21〇>^7^着j_ ----------^------、訂----- (請先閱讀背面之注意事項再填寫本頁)Printed by the Consumers' Cooperative of the China Standards Bureau of the Ministry of Economic Affairs 2 A7 B7 Description of the Invention (In the embodiment, the present invention relates to a method for preventing particulate matter from adhering to the inner surface, which defines a passage through the entrance body, The entrance body contains a proximal entrance end and a distal exit end. The method includes the steps of forming a secondary gas film stage at the proximal entrance end of the entrance body in the channel, and in the passage at the distal exit end of the entrance body. A thirsty wall is formed, and a solid cone is formed when the wall of the vortex exits the inlet body. In another embodiment, the present invention relates to a device for preventing particulate matter from adhering to an inner surface, the inner surface defining a penetrating The passage body passing through the inlet body includes a proximal inlet end and a distal outlet end. The device includes a porous wall for forming an inert gas in the passage at the proximal inlet end of the inlet body, and an outlet for the passage. Inside, the circumference of the vortex wall is formed at the end of the distal exit of the inlet body to form a water tank and a dam. The main body will form a strong cone. In still another embodiment, the present invention relates to a device for preventing particulate matter from adhering to the inner surface of an inlet. The device includes an inlet body having an inner portion defining a passage through the inlet body. Surface, inert gas film in the channel at the proximal inlet end of the inlet body, vortex walls in the channel at the distal outlet end of the inlet body, and a strong cone at the outlet of the inlet body. The characteristics are as follows: an inert gas film along the inner surface of the proximal inlet end of the inlet, and a vortex wall along the distal outlet end of the inlet, to prevent solid accumulation; a solid cone formed when the wall of the vortex leaves the main body of the inlet The body can prevent the backflow of moisture through the outlet; other excellent paper sizes apply the Chinese National Standard (CNS) A4 specification (21〇 > ^ 7 ^ 着 j_ ---------- ^ ---- -、 Order ----- (Please read the notes on the back before filling this page)
發明説明（3 ) 點和特徵將由以下的說明而一目了然。 1示之簡要 第1圖說明用以刷洗流出氣體的習知技藝方式。 第2圖說明-個根據本發明的—實施例的入:。 第3圖說明一根據第2圖的實施例之用以提供— 體膜的方法和裝置的特寫圖。 ； 第4圖說明一根據第2圖的實施例之用以提供一渦流辟 和流體的堅固圓錐體之方法和裝置的特寫圖。 土 致隹實施例迸詳細說明 訂 以下是根據第2圖之本發明的較佳實施例之說明。 根據第2圖，一入口大致標示為1〇 ;入口 1〇有一入口 主體15 ;内表面16界定流經入口主體15的通道；入口主體 15在上方開口 17做出螺紋，以便使入口能夠牢牢地接合於 一例如燃燒室（未顯示）的出口 18。 一多孔壁部分20，可能是一個燒結管，置於入口主體 15的近侧入口末端之通道内；多孔壁部分2〇的外表面21與 入口主體15的内表面16形成一外室25; —氣體入口 26係藉 由一導管27而連接至外室25 ;外室25透過氣體入口 26和導 管27接受惰性氣體的供給，例如：氦、氖、氬、氪、氙、 氮和氡’；惰性氣體流經多孔壁部分2〇的外表面21，然後 進入入口主體15的通道，沿著多孔壁部分20的内表面22形 成麵龙鼻賴， 出口管35接合於入口主體15的遠側出口末端的通道内 ，藉著使出口管35在螺紋處39螺入入口主體使得出口管35 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） A7 B7 經濟部中央標準局員工消費合作社印製 i、發明説明（4 ) 固定於入口主體15 ;密封件43防止洩漏且形成環狀托座38 一部分的凸緣48所壓縮；托座38將入口 1〇連結於刷洗室； 出口管35的外表面36和入口主體15的内表面16形成一圓周 的水槽40和水壩41 ;為了使流體渦旋於水槽4〇内，水槽4〇 接收有經由流體入口 42在切線方向的流體連續喷射，當更 多的流體注入，在水槽40内的液面高度上升超過水壩41， 並向下至出口管35，用渦流壁45包覆出口管35的内表面37 〇 現在根據第3圖，多孔壁部分2〇包含細孔23，可暸解 的疋細孔23係間隔分佈於多孔壁部分2〇内，以便允許惰性 氣體以平均分佈的方式流經第2〇項多孔壁部分。 現在根據第4圖，渦流壁45形成有一流體的堅固錐狀 體50，當渦流壁45離開出口管35時，其流體的渦流運動， 會形成流體的堅固錐狀體5 〇。 在操作時’入口 10收納經過出口 18的流出氣體流，該 出口可能來自例如一 CVD加工室，這些流出的氣體一般 都充滿著濃密有毒氣體物質，在排到大氣之前必須被清潔 或、、刷洗〃’一些有毒氣體物質將與濕氣反應而形成微粒 物質’微粒物質在與入口 10的内表面接觸時附著於入口上 ，超過一時間後，在入口 10的内表面會形成一層微粒物質 ，可能會堵塞入口 10，且妨礙流出氣體的流動。然而’在第2圖之本發明實施例中可以發現，利用惰 卜生氣體3 0的，堪和渦流壁45，來防止反應物微粒物質附^ 於入口 10的内表面；進入入口 1〇的流出氣體將會碰到在入 本紙張尺度顧f ® 準（CNS ) 2H)X297公着） (請先閱讀背面之注意事項再填寫本頁) ¾衣·Description of the Invention (3) Points and features will be apparent from the following description. Brief description of Figure 1 Figure 1 illustrates a conventional technique for scrubbing outflowing gas. FIG. 2 illustrates an embodiment according to the present invention. FIG. 3 illustrates a close-up view of a method and apparatus for providing a body film according to the embodiment of FIG. 2. Figure 4 illustrates a close-up view of a method and apparatus for providing a turbulent cone and a solid cone of fluid according to the embodiment of Figure 2. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT The following is a description of a preferred embodiment of the present invention according to FIG. According to Figure 2, an inlet is roughly labeled as 10; the inlet 10 has an inlet body 15; the inner surface 16 defines a passage through the inlet body 15; the inlet body 15 is threaded on the upper opening 17 to make the inlet secure Ground is connected to an outlet 18, such as a combustion chamber (not shown). A porous wall portion 20, which may be a sintered tube, is placed in the channel of the proximal inlet end of the entrance main body 15; the outer surface 21 of the porous wall portion 20 and the inner surface 16 of the inlet main body 15 form an outer chamber 25; -The gas inlet 26 is connected to the outer chamber 25 through a conduit 27; the outer chamber 25 receives the supply of inert gas through the gas inlet 26 and the conduit 27, such as: helium, neon, argon, krypton, xenon, nitrogen and krypton '; The inert gas flows through the outer surface 21 of the porous wall portion 20 and then enters the passage of the inlet main body 15 along the inner surface 22 of the porous wall portion 20 to form a lobe, and the outlet tube 35 is connected to the distal outlet of the inlet body 15 In the passage at the end, the outlet pipe 35 is screwed into the main body of the inlet by screwing the outlet pipe 35 at the threaded position to make the outlet pipe 35. The paper size applies to the Chinese National Standard (CNS) A4 specification (210X297 mm) A7 B7 Employee Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs Printed i. Description of the invention (4) Fixed to the inlet body 15; The seal 43 prevents leakage and is compressed by the flange 48 forming a part of the annular bracket 38; the bracket 38 connects the inlet 10 to the scrubbing chamber; the outlet pipe 35 Outer surface 36 and the inner surface 16 of the inlet body 15 form a circumferential water tank 40 and dam 41; in order for the fluid to vortex in the water tank 40, the water tank 40 receives a continuous jet of fluid in a tangential direction via the fluid inlet 42. When more The fluid level in the water tank 40 rises above the dam 41 and goes down to the outlet pipe 35. The inner surface 37 of the outlet pipe 35 is covered with a vortex wall 45. Now according to FIG. 3, the porous wall portion 2 The pores 23 are included. It can be understood that the pores 23 are distributed in the porous wall portion 20 at intervals, so as to allow the inert gas to flow through the porous wall portion 20 in an evenly distributed manner. Now according to FIG. 4, the vortex wall 45 is formed with a solid cone 50 of a fluid. When the vortex wall 45 leaves the outlet pipe 35, the vortex movement of the fluid will form a solid cone 50 of the fluid. In operation, the 'inlet 10 receives the outflow gas flow through the outlet 18, which may come from, for example, a CVD processing chamber. These outflowing gases are generally filled with dense toxic gas substances, and must be cleaned or scrubbed before being discharged to the atmosphere. 〃 'Some toxic gas substances will react with moisture to form particulate matter' The particulate matter attaches to the entrance when it comes into contact with the inner surface of the inlet 10, and after a period of time, a layer of particulate matter will form on the inner surface of the inlet 10. It can block the inlet 10 and hinder the flow of outflowing gas. However, in the embodiment of the present invention shown in FIG. 2, it can be found that the use of the inert gas 30 and the vortex wall 45 to prevent the reactant particulate matter from attaching to the inner surface of the inlet 10; The outflowing gas will meet the specifications of the paper (Gus ® (CNS) 2H) X297) (please read the precautions on the back before filling this page).
、tT d 7 476658 Α7 Β7 五、發明説明（5 ) 口主體15的近側入口末端中的惰性氣體薄膜3〇，惰性氣體 薄膜30會冷卻反應物微粒物質並防止它們附著於入口主體 15的近侧入口末端。 當流出氣體繼續流經入口 1〇，會在入口主體15的遠侧 出口末端碰到渦流壁45，渦流壁45會進一步地冷卻此微粒 物質且防止其附著於入口主體15的遠側出口末端；與渦流 壁45接觸的微粒物質會被流體清洗掉。 當流出氣體離開出口 1〇，流出氣體會經由流體的堅固 圓錐體50而擴政’流體的堅固圓錐體5〇可以防止漂流的往 上回到人口 10且進人出口 18，以防止這些氣體過早與水蒸 汽反應。 應該暸解的疋’上述實施例僅例示說明本發明之很多 特定實施例中的部份，其他的設置可在不背離本發明之範 圍下，由熟於此技藝者在發明做出之時設計出。 (請先閱讀背面之注意事項再填寫本頁) 訂 經濟部中央標準局員工消費合作社印製 本紙張尺度通用中國國冬標準（CNS ) A4規格（21 Οχ297公酱） 476658 A7 B7 五、發明説明（ 元件標號對照 經濟部中央標準局員工消費合作社印製 1···刷洗室 23··· 細孔 2…圓柱室 25··· 外室 3···切線入水口 26"· 氣體入口 4···切線氣體流出入口 27··· 導管 5…切線氣體流出開口 30"· 惰性氣體膜 6…環 35“· 出口管 7…漏斗 37". 出口管的内表面 8…出〇 38"· 環狀托座 10…入口 39"· 螺紋 15…入口主體 40"· 水槽 16…内表面 41… 水壩 17…上方開口 42"· 流體入口 18…出口 43··· 密封件 2 0…多孑L壁 45··· 满流壁 21…外表面 48… 凸緣 22…内表面 50". 流體的堅固錐狀體 (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐）TT d 7 476658 Α7 B7 V. Description of the invention (5) Inert gas film 30 in the proximal inlet end of the mouth body 15 The inert gas film 30 will cool the particulate matter of the reactants and prevent them from adhering to the vicinity of the inlet body 15 Side entrance ends. When the effluent gas continues to flow through the inlet 10, it will meet the vortex wall 45 at the distal outlet end of the inlet body 15, and the vortex wall 45 will further cool the particulate matter and prevent it from adhering to the distal outlet end of the inlet body 15; The particulate matter in contact with the vortex wall 45 is washed away by the fluid. When the effluent gas leaves the outlet 10, the effluent gas will expand through the solid cone 50 of the fluid. The solid cone 50 of the fluid can prevent drifting back up to the population 10 and enter the exit 18 to prevent these gases from passing through. Reacts early with water vapor. It should be understood that the above-mentioned embodiments merely illustrate some of the many specific embodiments of the present invention. Other settings can be designed by those skilled in the art when the invention is made without departing from the scope of the present invention. . (Please read the precautions on the back before filling this page) Order the paper size printed by the Central Standards Bureau Staff Consumer Cooperative of the Ministry of Economic Affairs General Chinese National Winter Standard (CNS) A4 specification (21 〇χ297 公 酱) 476658 A7 B7 V. Description of the invention (The component numbers are printed against the Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs. 1 ··· Brushing Room 23 ···· 2 · Cylinder Room 25 ··· Outer Room 3 ·· Tangent Water Inlet 26 " · Gas Inlet 4 · ·· Tangent gas outflow inlet 27 ··· Conduit 5… Tangent gas outflow opening 30 " · Inert gas membrane 6 ... Ring 35 "· Outlet tube 7 ... Funnel 37 ". Inner surface of the outlet tube 8 ... Out 〇38 " Shaped bracket 10 ... Inlet 39 " · Thread 15 ... Inlet body 40 " Sink 16 ... Inner surface 41 ... Dam 17 ... Open above 42 " Fluid inlet 18 ... Outlet 43 ... Seal 2 0 ... Multiple L wall 45 ··· full flow wall 21… outer surface 48… flange 22… inner surface 50 ". solid cone of fluid (please read the precautions on the back before filling this page) This paper size applies to Chinese national standard (C NS) A4 size (210X297 mm)