CN1299297A - Fluid flow inlet - Google Patents
Fluid flow inlet Download PDFInfo
- Publication number
- CN1299297A CN1299297A CN99805718A CN99805718A CN1299297A CN 1299297 A CN1299297 A CN 1299297A CN 99805718 A CN99805718 A CN 99805718A CN 99805718 A CN99805718 A CN 99805718A CN 1299297 A CN1299297 A CN 1299297A
- Authority
- CN
- China
- Prior art keywords
- air intake
- intake duct
- duct body
- inert gas
- eddy flow
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D47/00—Separating dispersed particles from gases, air or vapours by liquid as separating agent
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D47/00—Separating dispersed particles from gases, air or vapours by liquid as separating agent
- B01D47/02—Separating dispersed particles from gases, air or vapours by liquid as separating agent by passing the gas or air or vapour over or through a liquid bath
- B01D47/027—Separating dispersed particles from gases, air or vapours by liquid as separating agent by passing the gas or air or vapour over or through a liquid bath by directing the gas to be cleaned essentially tangential to the liquid surface
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Air Transport Of Granular Materials (AREA)
- Incineration Of Waste (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Treating Waste Gases (AREA)
- Separation Of Particles Using Liquids (AREA)
- Filling Or Discharging Of Gas Storage Vessels (AREA)
Abstract
Method and apparatus are described for preventing particulate material from adhering to an inner surface of an inlet (10). A porous wall section (20) and external chamber (25) are adapted to receive a supply (26, 27) of inert gas to form a film (30) of inert gas along an inner surface (22) of a proximal inlet end (15) of the inlet (10). The film (30) of inert gas prevents particulate material from adhering to the proximal inlet end (15) of the inlet. A circumferential reservoir (40) and weir (41) is adapted to receive an injection of fluid in a tangential direction (42) to provide a wall (45) of swirling fluid along an inner surface (37) of a distal exit end (35) of the inlet (10). The wall (45) of swirling fluid prevents particulate material from adhering to the distal exit end (35) of the inlet (10). A solid cone (50) of fluid is formed as the wall (45) of swirling fluid exits the inlet (10). The solid cone (50) of fluid reacts with the particulate material diffusing through the solid cone (50) of fluid, and keeps stray moisture from diffusing back up the inlet (10).
Description
Background of invention
The present invention relates to a kind of granular materials that prevents and adhere to the method and apparatus of air intake duct inner surface.
Some industry is owing to the result of its specific production or manufacture process produces poisonous fume.For example, relevant with semiconductor production chemical vapour deposition and etch processes are used strong poison and pyrophoric gas.Many these gases do not react by treatment facility, and perhaps reaction forms other gaseous matter and/or particle.These gases or particle are discharged and were needed before entering atmosphere from treatment facility then and handle.These waste gas can be by being washed with liquid reactions.Under many situations, this reaction will form particle, and these particles or be rinsed perhaps are collected and remove.Usually, waste gas is introduced into and passes an air intake duct and enter a chamber, and injection stream is with the described gas of liquid hydro-peening in this chamber.These gas materials and liquid reactions form a kind of solid particle in many cases.In processing procedure, because gathering moisture in the above, granular materials tends to adhere to the inner surface of described air intake duct and chamber, and can hinder air-flow and pass described air intake duct and chamber.Proposed various method and apparatus and prevented that granular materials from adhering to the inner surface of air intake duct and chamber.
Referring to Fig. 1, representational washing chamber in the mark mark 1 expression prior art.Washing chamber 1 has a cylindrical chamber 2, water inlet tangentially 3, an exhaust gas entrance 4 and an opening 5 tangentially.Water is tangentially injected cylindrical chamber 2, and the water of injecting forms the wall that one deck spirals downwards along the inner surface of cylindrical chamber 2.Annulus 6 is used as ledge downwards in the described water wall passage that spirals, form the cascade that passes waste gas opening 5.Tangentially waste gas is incorporated in the cylindrical chamber 2.Waste gas passes the described cascade diffusion and the described chamber that upwards spirals.The reaction of granular materials in waste gas and water, and taken away by water by funnel shaped part 7 and outlet 8.
Summary of the invention
In one embodiment, the present invention relates to a kind of granular materials that prevents and adhere to the method for the channel inner surface that passes an air intake duct formation, described air intake duct body has a near-end arrival end and a remote outlet end, and described method comprises the following steps: to form one deck inert gas film in the passage at the near-end arrival end place of described air intake duct body; In the passage at the remote outlet end place of described air intake duct body, form one deck eddy flow liquid barrier; When the eddy flow liquid barrier when the air intake duct body is discharged, form the solid circular cone of fluid.
In another embodiment, the present invention relates to a kind of granular materials that prevents and adhere to the device of the channel inner surface that passes an air intake duct body formation, described air intake duct body has a near-end arrival end and a remote outlet end, this device comprises: a porous wall that forms one deck inert gas film in the passage at the near-end arrival end place of air intake duct body, an outlet, in the passage at the remote outlet end place of air intake duct body, form the circumference liquid storage container and the overfall dam of one deck eddy flow barrier, when it was discharged from the air intake duct body, described fluid eddy flow barrier formed the solid circular cone of fluid.
In yet another embodiment, the present invention relates to a kind of granular materials that prevents and adhere to the device of air intake duct inner surface, comprise an air intake duct body, this body has a channel inner surface that passes the air intake duct body and form, one deck inert gas film in the passage at the near-end arrival end place of air intake duct body, one deck eddy flow barrier in the passage at the remote outlet end place of air intake duct body and at the solid circular cone of fluid in air intake duct body exit.
Advantage of the present invention and characteristics comprise following one or more.Prevent solids accumulation along one deck inert gas film of the inner surface of air intake duct near-end arrival end with along one deck eddy flow barrier of air intake duct remote outlet end inner surface.When the eddy flow barrier was discharged described air intake duct, the solid circular cone of the fluid of formation can prevent that moisture from passing the backflow of described outlet.Other advantages and characteristics can be learnt from the following description.
Brief Description Of Drawings:
Fig. 1 is the existing method of scrubbing exhaust gas;
Fig. 2 is the air intake duct according to one embodiment of the invention;
Fig. 3 is the close-up view according to the method and apparatus of one deck inert gas that provides embodiment illustrated in fig. 2;
Fig. 4 is the close up view according to the method and apparatus of vortex fluid that provides embodiment illustrated in fig. 2 and fluid solid-cone.
Preferred embodiment describes in detail
Below with reference to Fig. 2 the preferred embodiments of the present invention are described.
Referring to Fig. 2, air intake duct is totally by 10 expressions of mark mark.Air intake duct has an air intake duct body 15.Inner surface 16 passes air intake duct body 15 and defines a passage.This body 15 has screw thread at upper shed 17 cars, so that make this air intake duct cooperate with a gas off-take 18 securely, this gas off-take for example connects from a combustion chamber (not shown).
A porous wall section 20, it can be a sintered ceramic pipe, is installed in the described pipeline at the nearly arrival end of described air intake duct body 15.The outer surface 21 of porous wall section 20 has formed an exocoel 25 with the inner surface 16 of air intake duct body 15.An air inlet 26 is connected to exocoel 25 by a pipeline 27.Described exocoel 25 receives the inert gas of supplying by air inlet 26 and pipeline 27, for example, and He, Ne, Ar, Kr, Xe, N
2And Rn.The outer surface 21 that inert gas passes porous wall section 20 enters the passage of air intake duct body 15, forms a layer of inert 30 along the inner surface 22 of this porous wall section 20.
Referring now to Fig. 3,, porous wall section 20 comprises pore 23.Be appreciated that hole 23 is spaced apart in porous wall section 20, so that allow inert gas to pass this porous wall section 20 in equally distributed mode.
Referring now to Fig. 4,, eddy flow liquid 45 forms a solid circular cone of fluid 50.When eddy flow liquid 45 was discharged outlet pipe 35, the vorticla motion of this fluid made the solid conical of fluid 50 become.
In the course of work, air intake duct 10 receives waste gas stream by outlet 18, and described waste gas stream may be from for example CVD process chamber.Usually these waste gas seriously are full of the toxic gas material, must be cleaned before being released to atmosphere or " washing ".Some toxic gas materials and reaction of moisture form granular materials, and when the inner surface with air intake duct 10 contacted, these particles can adhere on the air intake duct.Surpass a period of time, one deck granular materials can form at the inner surface of air intake duct 10 and can block this air intake duct 10 and obstruction waste gas stream.
, as seeing during the present invention is embodiment illustrated in fig. 2, prevent that by one deck inert gas film 30 and one deck eddy flow liquid barrier 45 described reactant granular materials from adhering to the inner surface of air intake duct 10.The waste gas that enters air intake duct 10 will run into one deck inert gas film 30 at the near-end arrival end of air intake duct body 15.This layer inert gas 30 is used to cool off described reactant granular materials, and prevents that they are adhered to the near-end arrival end of air intake duct body 15.
When waste gas continues across air intake duct 10, will run into one deck eddy flow liquid barrier 45 at the remote outlet end place of air intake duct body 15.This layer eddy flow liquid barrier 45 is used for further cooling off described granular materials, and prevents that them from adhering to the remote outlet end of air intake duct body 15.The granular materials that contacts with described eddy flow liquid barrier 45 will be fallen by this fluid flushing.
After waste gas was discharged from air intake duct 10, they were by the solid circular cone diffusion of fluid 50.The solid circular cone of this fluid 50 be used to prevent the moisture that disperses upwards diffusion turn back to air intake duct 10 inlet/outlet 18 of going forward side by side.Prevent the premature reaction of gas and steam.
Should be understood that above-described embodiment only is illustrated with regard in many specific embodiments of the present invention some, under the prerequisite that does not exceed the scope of the invention, those of ordinary skill in the art can make other design and layout.
Claims (9)
1. one kind prevents that granular materials from adhering to the method for inner surface, and this inner surface defines a passage that passes the air intake duct body, and described air intake duct body has a near-end arrival end and a remote outlet end, and described method comprises the following steps:
In the described passage at the described near-end arrival end place of described air intake duct body, form one deck inert gas film;
In the described passage at the described remote outlet end place of described air intake duct body, form one deck eddy flow liquid barrier; And
When described eddy flow liquid barrier when described air intake duct body is discharged, form the solid circular cone of fluid.
2. the method for claim 1 is characterized in that, the described step that forms the inert gas film comprises:
Inert gas is fed in the exterior chamber that the outer surface by the described inner surface of described air intake duct body and a porous wall section forms, described porous wall section is positioned at the described near-end inlet end of described air intake duct body, described inert gas passes the described outer surface of described porous wall section and enters described passage, and forms described inert gas film along the inner surface of described porous wall section.
3. the method for claim 1 is characterized in that, the described step that forms the eddy flow liquid barrier comprises:
Liquid tangentially is ejected in the intrinsic circumference liquid storage container of described air intake duct, makes described liquid eddy flow in described liquid storage container, and with described fluid discharge in described passage, on described inner surface, form one deck eddy flow liquid barrier coatings.
4. one kind prevents that granular materials from adhering to the device of inner surface, and this inner surface defines a passage that passes the air intake duct body, and described air intake duct body has a near-end arrival end and a remote outlet end, and this device comprises:
Be used in the described passage at the described near-end arrival end place of described air intake duct body, forming the device of one deck inert gas film;
Be used in the described passage at the described remote outlet end place of described air intake duct body, forming the device of one deck eddy flow liquid barrier; With
When described eddy flow liquid barrier is discharged described air intake duct body, be used to form the device of a solid circular cone of fluid.
5. device as claimed in claim 4 is characterized in that, the described device that is used to form the inert gas film comprises:
Be installed in an interior porous wall section of described passage of the described near-end arrival end of described air intake duct body;
Form the inner surface of the described air intake duct body of an exterior chamber with the outer surface of described porous wall section;
The inert gas that is suitable for supplying with puts described exterior chamber within it; With
Pass the described outer surface of described porous wall section and enter described passage and form the described inert gas of described inert gas film along the inner surface of described porous wall section.
6. device as claimed in claim 4 is characterized in that, the described device that forms described eddy flow liquid barrier comprises:
Be bonded on an interior outlet of described passage of the described remote outlet end of described air intake duct body;
Form the described inner surface of the described air intake duct body of a circumference liquid storage container and overfall dam with described outlet;
Described liquid storage container, it is suitable for tangentially receiving the fluid injection stream and makes described fluid eddy flow in described liquid storage container rise and cover described overfall dam and flow down along described outlet, and applies one deck eddy flow liquid barrier at the inner surface of described outlet.
7. one kind prevents that granular materials from adhering to the device of an air intake duct inner surface, and this device comprises:
Air intake duct body with inner surface, described inner surface define a passage that passes described air intake duct body;
One deck inert gas film that in the described passage at the near-end arrival end place of described air intake duct body, forms;
One deck eddy flow liquid barrier that in the described passage at the described remote outlet end place of described air intake duct body, forms; With
A solid circular cone of fluid that when described eddy flow liquid barrier is discharged described air intake duct, forms.
8. device as claimed in claim 7 is characterized in that, described inert gas film is along the inner surface setting of described porous wall section;
Described porous wall section is installed in the described passage of described near-end arrival end of described air intake duct body;
The described inner surface of described air intake duct body and the outer surface of described porous wall section form exterior chamber; And
Described exterior chamber is suitable for receiving the inert gas of being supplied.
9. device as claimed in claim 7 is characterized in that, described eddy flow liquid barrier is positioned on the inner surface of outlet;
Described outlet is bonded in the described passage at described remote outlet end place of described air intake duct body;
The described inner surface of described outlet and described air intake duct body forms a circumference liquid storage container and overfall dam; And
Described liquid storage container is suitable for tangentially receiving the fluid injection stream, and make described fluid eddy flow in described liquid storage container rise and cover described overfall dam and flow down, and apply the described eddy flow liquid barrier of one deck at the inner surface of described outlet along described outlet.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US3777098A | 1998-03-10 | 1998-03-10 | |
| US09/037,770 | 1998-03-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1299297A true CN1299297A (en) | 2001-06-13 |
| CN1147345C CN1147345C (en) | 2004-04-28 |
Family
ID=21896239
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB998057185A Expired - Fee Related CN1147345C (en) | 1998-03-10 | 1999-03-01 | Fluid flow inlet |
Country Status (6)
| Country | Link |
|---|---|
| EP (1) | EP1062017A4 (en) |
| JP (1) | JP2002505941A (en) |
| KR (1) | KR20010034592A (en) |
| CN (1) | CN1147345C (en) |
| TW (1) | TW476658B (en) |
| WO (1) | WO1999046027A1 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4252702B2 (en) | 2000-02-14 | 2009-04-08 | 株式会社荏原製作所 | Apparatus and method for preventing adhesion of reaction by-products in piping |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4015958A (en) * | 1974-04-05 | 1977-04-05 | Kurt Leschonski | Wet centrifugal separator for gas |
| NL7704399A (en) * | 1977-04-22 | 1978-10-24 | Shell Int Research | METHOD AND REACTOR FOR THE PARTIAL BURNING OF COAL POWDER. |
| US4279627A (en) * | 1978-08-07 | 1981-07-21 | Dresser Industries, Inc. | Fine particle separation apparatus |
| US4388089A (en) * | 1981-06-04 | 1983-06-14 | Santek, Inc. | Self-cleaning electro-inertial precipitator unit |
| US4986838A (en) * | 1989-06-14 | 1991-01-22 | Airgard, Inc. | Inlet system for gas scrubber |
| US5846275A (en) * | 1996-12-31 | 1998-12-08 | Atmi Ecosys Corporation | Clog-resistant entry structure for introducing a particulate solids-containing and/or solids-forming gas stream to a gas processing system |
-
1999
- 1999-03-01 WO PCT/US1999/004397 patent/WO1999046027A1/en not_active Application Discontinuation
- 1999-03-01 EP EP99908567A patent/EP1062017A4/en not_active Withdrawn
- 1999-03-01 CN CNB998057185A patent/CN1147345C/en not_active Expired - Fee Related
- 1999-03-01 JP JP2000535436A patent/JP2002505941A/en not_active Withdrawn
- 1999-03-01 KR KR1020007010072A patent/KR20010034592A/en not_active Application Discontinuation
- 1999-04-08 TW TW088103612A patent/TW476658B/en not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| JP2002505941A (en) | 2002-02-26 |
| EP1062017A4 (en) | 2002-02-06 |
| WO1999046027A1 (en) | 1999-09-16 |
| KR20010034592A (en) | 2001-04-25 |
| TW476658B (en) | 2002-02-21 |
| EP1062017A1 (en) | 2000-12-27 |
| CN1147345C (en) | 2004-04-28 |
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| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |