EP1021654B1 - Screw vacuum pump provided with rotors - Google Patents

Screw vacuum pump provided with rotors Download PDF

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Publication number
EP1021654B1
EP1021654B1 EP98937515A EP98937515A EP1021654B1 EP 1021654 B1 EP1021654 B1 EP 1021654B1 EP 98937515 A EP98937515 A EP 98937515A EP 98937515 A EP98937515 A EP 98937515A EP 1021654 B1 EP1021654 B1 EP 1021654B1
Authority
EP
European Patent Office
Prior art keywords
rotor
pump
pump according
housing
suction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP98937515A
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German (de)
French (fr)
Other versions
EP1021654A1 (en
Inventor
Rudolf Bahnen
Thomas Dreifert
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold Vakuum GmbH
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Filing date
Publication date
Application filed by Leybold Vakuum GmbH filed Critical Leybold Vakuum GmbH
Publication of EP1021654A1 publication Critical patent/EP1021654A1/en
Application granted granted Critical
Publication of EP1021654B1 publication Critical patent/EP1021654B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/24—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves
    • F04C28/26—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves using bypass channels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/082—Details specially related to intermeshing engagement type pumps
    • F04C18/084—Toothed wheels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/008—Hermetic pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum

Definitions

  • the invention relates to a screw vacuum pump with the features of the preamble of the claim 1.
  • a screw pump is the one here affected species known.
  • the sections on the suction side the rotors have a larger thread profile than the sections arranged on the pressure side.
  • the content of US-A-3 also belongs to the prior art 807 911. Disclosed is a compressor whose rotors also rotor sections with different thread profiles exhibit.
  • the present invention is based on the object a screw vacuum pump of the type mentioned to be able to manufacture more cheaply than before.
  • the main advantage associated with the invention is that the rotor sections are different Materials and / or with different accuracies can be manufactured to match physical Necessities in the affected area (Heat conduction, thermal expansion, corrosion resistance, Weight, mass distribution, etc.) adjust to can.
  • the suction side, thermally less stressed section of the rotor made of aluminum, the pressure side, more thermally stressed Section be made of steel.
  • the accuracy requirements of the screw profile of the two sections the required sealing effects be adjusted. There are backflows in the suction area only little influence on the effective pumping speed the pump.
  • the one in this area Screw profile can therefore be made with much larger Tolerances, that is, cheaper, can be produced. Higher accuracy requirements are only required in the pressure area required.
  • Rotor sections with different Profiles can be put together in such a way that the different screw profiles immediately merge. Are harmful dead spaces not available anymore. A shorter overall length or -height can be realized.
  • the invention enables one Screw vacuum pump to apply the modular principle, in order to be able to adapt them to the application. about the volume, the slope and / or the length of the profiles on the suction side, the pumping speed or influence on the final pressure. With a small gradation can have a higher fluid compatibility, with a larger gradation a lower power consumption or a higher pumping speed at relative low power consumption can be achieved.
  • FIG. 1 shows a cut by a screw vacuum pump 1 according to the invention, namely at the level of that of the two rotating ones Systems equipped with the drive motor 2.
  • the two rotating systems are synchronized with the help of gears 3.
  • the rotating systems housed in housing 4 are each comprised of the rotor 5 and the shaft 6. Each Rotor 5 is flying, that is, supported on one side.
  • the shaft 6 is supported via the bearings 7 and 8 as well as the bearing brackets 11 and 12 in the housing 4. face side housing covers 13, 14 are provided, of which the rotor-side cover 13 with an inlet connector 15 is equipped. Part of the transmission side Cover 14 is the bearing bracket 12.
  • the rotor 5 consists of two form-fitting with each other connected rotor sections 17, 18 with different Profiles 19, 20.
  • the suction-side rotor section 17 has a large-volume profile 19 to achieve high Volume flows in the helical scoop.
  • the pressure-side section 18 of the rotor 5 has both a reduced profile volume as well as a lower one Diameter. This takes the cross section of the helical Scooping rooms. An inner compression will achieved, the compaction work reduced.
  • the inner wall of the housing 4 is the rotor gradation adjusted (gradation 21).
  • Gradation 21 The inner wall of the housing 4 is the rotor gradation adjusted (gradation 21).
  • dash-dotted line Line 22 indicates that the housing is at the height of the Gradation 21 can be formed divisible. This is it is possible to the suction-side rotor section 17 and suction-side part 4 'of the housing 4 by rotor sections with other profiles, lengths and / or diameters as well as adapted housing sections 4 ' replace the pump to different applications to be able to adapt.
  • the one following the pressure-side end of the threads Outlet of the pump 1 is designated 24. It is led out to the side. Flows into the outlet also a housing bore 25 which the scoop in the height at which its cross-section - be it by grading and / or by changing the thread profile - decreases, connects to the outlet. In the housing bore 25 there is a check valve 26, which is at overpressures in the scoop and the thread on the suction side opens of rotor section 17 with outlet 24 shorts. For sealing the helical scoops shaft seals 27 are provided from the bearing, which is between the bearing 7 and the rotor section 18 are located.
  • the cooling system of the illustrated embodiment includes an internal rotor cooling and a casing jacket cooling.
  • the rotor is for realizing the rotor internal cooling 5 with a cavity open to its bearing side 31 equipped, which extends almost through the entire rotor 5 can extend.
  • the pressure side Section 18 is hollow.
  • the suction side Section 17 closes the suction end of the cavity 31.
  • the shaft 6, which is expedient with the rotor 5 or with the pressure-side section 18 of the rotor 5 is integrally formed, is also hollow (Cavity 32). Is in the cavities 31, 32 a central cooling tube 33, the bearing side of the Shaft 6 is brought out and on the rotor side just before suction-side end of the cavity 31 opens.
  • the cooling pipe 33 and that formed by the cooling pipe 33 and the hollow shaft 6 Annulus stand for the supply and discharge of a Coolant available.
  • the sump 37 and the line system 38 are designed such that the pump 1 shown in any position can be operated between vertical and horizontal. Coolant levels that are at horizontal and at Set the vertical position of pump 1 are shown.
  • the coolant pump 36 outside (as shown) or inside (e.g. on the second, invisible shaft of the pump 1 in height of the drive motor 2) of the housing 4 is located the opening 34 of the cooling tube 33 outside or inside the housing 4.
  • Coolant is used to operate the internal cooling of the rotor 5 from the coolant pump 36 from the coolant sump 37 via the cooling tube 33 into the cavity 31 in the rotor 5 promoted. From there it flows over the annulus between cooling pipe 33 and shaft 6 back into the swamp 37.
  • the cavity 31 is at the level of the pressure side Range of threads of pump 1 so that this area is effectively cooled.
  • the outside of the cooling pipe 33 coolant flowing back et al the hollow shaft 6, the bearings 7 and 8, the Drive motor 2 (anchor side) and the gears 3, see above that thermal expansion problems are reduced.
  • the cross section of the annular space is expediently reduced between cooling pipe 33 and shaft 6 in the area of his pressure side end e.g. in that the cooling pipe 33 has a larger outer diameter in this area. This creates a narrow passage 39. This constriction ensures a complete filling of the coolant leading spaces.
  • cooling tube 3 It can be useful as a material for the cooling tube 3 a poorly heat-conducting material (e.g. plastic / stainless steel or the like.) This will a more effective cooling of the rotor 5 and a uniform Temperature control of the pump components close to the shaft 1 reached.
  • a poorly heat-conducting material e.g. plastic / stainless steel or the like.
  • the housing jacket cooling shown comprises cavities or channels in the housing 4. Provided in the area of the rotor 5 Cooling channels are at 41, in the area of the engine 2 located cooling channels designated 42.
  • the cooling channels 41 located in the area of the rotor 5 have the task, in particular, in the print side Area of the rotor 5 to dissipate heat generated. On the other hand, they should the housing 4 in height temper the entire rotor as evenly as possible. After all, they are supposed to replenish the absorbed heat hand in outside.
  • the cavities through which the coolant flows 41 therefore extend over the full length of the rotor 5.
  • the housing cover 13 serves as a suction side Completion of the cavities 41. Also on the outlet side the housing 4 effectively cooled.
  • the cooling channels located at the level of the drive motor 2 42 also have the tasks described. They bring about a temperature control of the drive motor (winding side) and the bearing bracket 7. Finally they significantly increase the heat emission outer surfaces of the pump 1. This is useful at least at the level of the cooling channels 41 and 42 with ribs 44 equipped.
  • the cooling channels 41, 42 are supplied with coolant also with the help of the coolant pump 36, and via lines 45 and 46 if they are parallel should be flowed through. Depending on the thermal requirements there is also the possibility to use them one by one to supply with coolant. One of the lines 45 or 46 could then be omitted. About not shown in detail The coolant comes out of the holes Cavities 41, 42 back into the sump 37.
  • FIG. 1 In the illustrated embodiment according to FIG. 1 are - as already mentioned - the housing 4 and the rotor 5 divisible at the level of line 22. Thereby there is the possibility of the suction-side sections of rotor 5 (section 17) and housing 4 (section 4 ') to be replaced by other components.
  • Pump 1 can be on Different applications can be customized by using rotor sections 17 with different profiles 19, different Length, different slope and / or different diameters, each together with an adapted housing section become. Different sized profiles can be placed on the Suction side to achieve high pumping speeds, various long profiles on the suction side to achieve this lower final pressures and / or different volume gradations to achieve e.g.
  • the coolant flowing through the screw vacuum pump 1 can be water, oil (mineral oil, PTFE oil or the like) or some other liquid. Is expedient the use of oil to make bearings 7, 8 and to be able to lubricate the gears 3. A separate tour of coolant and lubricant as well as corresponding This eliminates the need for seals. It must only for a metered supply of oil to the bearings 7, 8 are taken care of.
  • the solutions described allow an advantageous one Material selection.
  • the rotors 5 and the housing 4 made of relatively inexpensive aluminum materials consist.
  • the proposed cooling and above all cause uniform temperature control of pump 1, that it is even at different operating temperatures and relatively small columns not too local Game consumption comes up, which is a tarnishing rotor to rotor and / or rotor on housing result.
  • a further reduction of the column is possible if for the inner, more thermally stressed components (Rotors, bearings, bearing supports, gears) of the pump 1 Materials are used that have a smaller coefficient of thermal expansion have as the material for the less thermally stressed housing 4.
  • An example of one Material selection is steel (e.g. CrNi steel) for the internal components and aluminum for the housing.
  • Materials for the inner components can also be bronze, Brass or nickel silver are used.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Description

Die Erfindung bezieht sich auf eine Schraubenvakuumpumpe mit den Merkmalen des Oberbegriffs des Patentanspruchs 1.The invention relates to a screw vacuum pump with the features of the preamble of the claim 1.

Die Herstellung von Schraubenvakuumpumpen ist zum einen wegen der besonderen Form der Rotoren und auch des Gehäuses relativ teuer; zum anderen müssen Gehäuse und Rotoren relativ genau hergestellt werden, um unerwünscht große Abstände zwischen den Rotoren selbst und zwischen den Rotoren und dem Gehäuse zu vermeiden. Zu große Spalte verschlechtern wegen der in den Spalten auftretenden Rückströmungen die Pumpeigenschaften.The production of screw vacuum pumps is on the one hand because of the special shape of the rotors and also the housing relative expensive; on the other hand, housing and Rotors are made relatively accurately to be undesirable large distances between the rotors themselves and between the rotors and the housing. To large columns deteriorate because of those in the columns backflow occurring the pump properties.

Bei einer bereits vorgeschlagenen Schraubenvakuumpumpe (DE 196 29 428.2) ist jeder der Rotoren einstückig ausgebildet und weist zwei Abschnitte mit unterschiedlichen Rotorprofilen auf. Bei der üblichen spanabhebenden Herstellung von Schraubenrotoren dieser Art ist es notwendig, zwischen den Abschnitten mit unterschiedllichen Profilen jeweils einen relativ großvolumigen Werkzeugauslauf vorzusehen. Toträume dieser Art beeinträchtigen nicht nur die Eigenschaften der Pumpe; sie stehen auch dem Ziel entgegen, möglichst kompakte Pumpen zu bauen. Bei bestimmten Applikationen kann es zwar zweckmäßig sein, in Höhe eines Wechsels des Gewindeprofils eine umlaufende Nut zum Zwecke einer Druckentlastung vorzusehen; diese Nut muss aber in aller Regel nicht die Größe eines großvolumigen Werkzeugauslaufs haben.In a screw vacuum pump already proposed (DE 196 29 428.2) each of the rotors is in one piece trained and has two sections with different Rotor profiles. With the usual cutting It is manufacture of screw rotors of this type necessary between sections with different Profiles each have a relatively large-volume tool outlet provided. Impair dead spaces of this type not just the characteristics of the pump; They stand also goes against the goal of pumping pumps as compact as possible to build. In certain applications it may be useful be in the amount of a change in the thread profile a circumferential groove for the purpose of pressure relief provide; as a rule, however, this groove does not have to be are the size of a large-volume tool outlet.

Aus der FR-A-1 290 239 ist eine Schraubenpumpe der hier betroffenen Art bekannt. Die jeweils saugseitigen Abschnitte der Rotoren haben ein größeres Gewindeprofil als die jeweils druckseitig angeordneten Abschnitte. Zum Stand der Technik gehört auch der Inhalt der US-A-3 807 911. Offenbart ist ein Kompressor, dessen Rotoren ebenfalls Rotorabschnitte mit unterschiedlichen Gewindeprofilen aufweisen.From FR-A-1 290 239 a screw pump is the one here affected species known. The sections on the suction side the rotors have a larger thread profile than the sections arranged on the pressure side. The content of US-A-3 also belongs to the prior art 807 911. Disclosed is a compressor whose rotors also rotor sections with different thread profiles exhibit.

Der vorliegenden Erfindung liegt die Aufgabe zugrunde, eine Schraubenvakuumpumpe der eingangs erwähnten Art kostengünstiger als bisher herstellen zu können.The present invention is based on the object a screw vacuum pump of the type mentioned to be able to manufacture more cheaply than before.

Zur Lösung dieser Aufgabe werden die kennzeichnenden Merkmale der Patentansprüche vorgeschlagen.To solve this task, the distinctive Features of the claims proposed.

Der wesentliche mit der Erfindung verbundene Vorteil liegt darin, dass die Rotorabschnitte aus unterschiedlichen Werkstoffen und/oder mit unterschiedlichen Genauigkeiten hergestellt werden können, um sie an physikalische Notwendigkeiten im betroffenen Schöpfraumbereich (Wärmeleitung, Wärmeausdehnung, Korrosionsbeständigkeit, Gewicht, Massenverteilung usw.) anpassen zu können. Beispielsweise kann der saugseitige, thermisch weniger beanspruchte Abschnitt des Rotors aus Aluminium, der druckseitige, thermisch höher beanspruchte Abschnitt aus Stahl hergestellt sein. Insbesondere können die Genauigkeitsanforderungen des Schraubenprofils der beiden Abschnitte den erforderlichen Dichtwirkungen angepasst werden. Im saugseitigen Bereich haben Rückströmungen nur wenig Einfluss auf das effektive Saugvermögen der Pumpe. Das in diesem Bereich befindliche Schraubenprofil kann deshalb mit wesentlich größeren Toleranzen, das heisst preiswerter, hergestellt werden. Nur im druckseitigen Bereich sind höhere Genauigkeitsanforderungen erforderlich. Rotorabschnitte mit unterschiedlichen Profilen können derart zusammengefügt werden, dass die unterschiedlichen Schraubenprofile unmittelbar ineinander übergehen. Schädliche Toträume sind nicht mehr vorhanden. Eine geringere Baulänge bzw. -höhe kann realisiert werden. The main advantage associated with the invention is that the rotor sections are different Materials and / or with different accuracies can be manufactured to match physical Necessities in the affected area (Heat conduction, thermal expansion, corrosion resistance, Weight, mass distribution, etc.) adjust to can. For example, the suction side, thermally less stressed section of the rotor made of aluminum, the pressure side, more thermally stressed Section be made of steel. In particular can the accuracy requirements of the screw profile of the two sections the required sealing effects be adjusted. There are backflows in the suction area only little influence on the effective pumping speed the pump. The one in this area Screw profile can therefore be made with much larger Tolerances, that is, cheaper, can be produced. Higher accuracy requirements are only required in the pressure area required. Rotor sections with different Profiles can be put together in such a way that the different screw profiles immediately merge. Are harmful dead spaces not available anymore. A shorter overall length or -height can be realized.

Eine Auswahl preiswerterer Werkstoffe für die Bauteile der Pumpe ist auch dann möglich, wenn die Pumpe mit einer Kühlung ausgerüstet ist, die gleichzeitig eine gleichmäßige Temperierung bewirkt. Wärmedehnungsprobleme können dadurch einfacher beherrscht werden. Schließlich ermöglicht es die Erfindung, bei einer Schraubenvakuumpumpe das Baukastenprinzip anzuwenden, um sie applikationsspezifisch anpassen zu können. Über das Volumen, die Steigung und/oder die Länge der Profile auf der Saugseite kann auf das Saugvermögen bzw. auf den Enddruck Einfluss genommen werden. Mit einer kleinen Abstufung kann eine höhere Fluidverträglichkeit, mit einer größeren Stufung eine geringere Leistungsaufnahme bzw. ein höheres Saugvermögen bei relativ geringer Leistungsaufnahme erreicht werden.A selection of cheaper materials for the components the pump is also possible if the pump is equipped with a Cooling is equipped, which is also a uniform tempering causes. Thermal expansion problems can be mastered more easily. Finally, the invention enables one Screw vacuum pump to apply the modular principle, in order to be able to adapt them to the application. about the volume, the slope and / or the length of the profiles on the suction side, the pumping speed or influence on the final pressure. With a small gradation can have a higher fluid compatibility, with a larger gradation a lower power consumption or a higher pumping speed at relative low power consumption can be achieved.

Weitere Vorteile und Einzelheiten der Erfindung sollen an Hand eines in der Figur dargestellten Ausführungsbeispieles erläutert werden. Sie zeigt einen Schnitt durch eine Schraubenvakuumpumpe 1 nach der Erfindung, und zwar in Höhe desjenigen der beiden rotierenden Systeme, das mit dem Antriebsmotor 2 ausgerüstet ist. Die Synchronisation der beiden rotierenden Systeme erfolgt mit Hilfe von Zahnrädern 3.Further advantages and details of the invention are intended based on an embodiment shown in the figure are explained. It shows a cut by a screw vacuum pump 1 according to the invention, namely at the level of that of the two rotating ones Systems equipped with the drive motor 2. The two rotating systems are synchronized with the help of gears 3.

Die rotierenden Systeme, die im Gehäuse 4 untergebracht sind, umfassen jeweils den Rotor 5 und die Welle 6. Jeder Rotor 5 ist fliegend, das heisst, einseitig gelagert. Die Welle 6 stützt sich über die Lager 7 und 8 sowie die Lagerträger 11 und 12 im Gehäuse 4 ab. Stirnseitig sind Gehäusedeckel 13, 14 vorgesehen, von denen der rotorseitige Deckel 13 mit einem Einlassstutzen 15 ausgerüstet ist. Bestandteil des getriebeseitigen Deckels 14 ist der Lagerträger 12.The rotating systems housed in housing 4 are each comprised of the rotor 5 and the shaft 6. Each Rotor 5 is flying, that is, supported on one side. The shaft 6 is supported via the bearings 7 and 8 as well as the bearing brackets 11 and 12 in the housing 4. face side housing covers 13, 14 are provided, of which the rotor-side cover 13 with an inlet connector 15 is equipped. Part of the transmission side Cover 14 is the bearing bracket 12.

Der Rotor 5 besteht aus zwei formschlüssig miteinander verbundenen Rotorabschnitten 17, 18 mit unterschiedlichen Profilen 19, 20. Der saugseitige Rotorabschnitt 17 weist ein großvolumiges Profil 19 zur Erzielung hoher Volumenströme im wendelförmigen Schöpfraum auf. Der druckseitige Abschnitt 18 des Rotors 5 hat sowohl ein reduziertes Profilvolumen als auch einen geringeren Durchmesser. Dadurch nimmt der Querschnitt der wendelförmigen Schöpfräume ab. Eine innere Kompression wird erreicht, die Verdichtungsarbeit reduziert.The rotor 5 consists of two form-fitting with each other connected rotor sections 17, 18 with different Profiles 19, 20. The suction-side rotor section 17 has a large-volume profile 19 to achieve high Volume flows in the helical scoop. The pressure-side section 18 of the rotor 5 has both a reduced profile volume as well as a lower one Diameter. This takes the cross section of the helical Scooping rooms. An inner compression will achieved, the compaction work reduced.

Die Innenwandung des Gehäuses 4 ist der Rotorabstufung angepasst (Abstufung 21). Durch eine strichpunktierte Linie 22 ist angedeutet, dass das Gehäuse in Höhe der Abstufung 21 teilbar ausgebildet sein kann. Dadurch ist es möglich, den saugseitigen Rotorabschnitt 17 und den saugseitigen Teil 4' des Gehäuses 4 durch Rotorabschnitte mit anderen Profilen, Längen und/oder Durchmessern sowie daran angepasste Gehäuseabschnitte 4' zu ersetzen, um die Pumpe an unterschiedliche Applikationen anpassen zu können.The inner wall of the housing 4 is the rotor gradation adjusted (gradation 21). Through a dash-dotted line Line 22 indicates that the housing is at the height of the Gradation 21 can be formed divisible. This is it is possible to the suction-side rotor section 17 and suction-side part 4 'of the housing 4 by rotor sections with other profiles, lengths and / or diameters as well as adapted housing sections 4 ' replace the pump to different applications to be able to adapt.

Der sich an das druckseitige Ende der Gewindegänge anschließende Auslass der Pumpe 1 ist mit 24 bezeichnet. Er ist seitlich herausgeführt. In den Auslass mündet außerdem eine Gehäusebohrung 25, die den Schöpfraum in der Höhe, in der sein Querschnitt - sei es durch Stufung und/oder durch Wechsel des Gewindeprofiles - abnimmt, mit dem Auslass verbindet. In der Gehäusebohrung 25 befindet sich ein Rückschlagventil 26, das bei Überdrücken im Schöpfraum öffnet und den saugseitigen Gewindegang des Rotorabschnittes 17 mit dem Auslass 24 kurzschließt. Zur Abdichtung der wendelförmigen Schöpfräume von der Lagerung sind Wellendichtungen 27 vorgesehen, die sich zwischen dem Lager 7 und dem Rotorabschnitt 18 befinden. The one following the pressure-side end of the threads Outlet of the pump 1 is designated 24. It is led out to the side. Flows into the outlet also a housing bore 25 which the scoop in the height at which its cross-section - be it by grading and / or by changing the thread profile - decreases, connects to the outlet. In the housing bore 25 there is a check valve 26, which is at overpressures in the scoop and the thread on the suction side opens of rotor section 17 with outlet 24 shorts. For sealing the helical scoops shaft seals 27 are provided from the bearing, which is between the bearing 7 and the rotor section 18 are located.

Das Kühlsystem der dargestellten Ausführungsform umfasst eine Rotorinnenkühlung und eine Gehäusemantelkühlung.The cooling system of the illustrated embodiment includes an internal rotor cooling and a casing jacket cooling.

Zur Verwirklichung der Rotorinnenkühlung ist der Rotor 5 mit einem zu seiner Lagerseite hin offenen Hohlraum 31 ausgerüstet, der sich nahezu durch den gesamten Rotor 5 erstrecken kann. Bei einem aus zwei Abschnitten 17 und 18 bestehenden Rotor 5 ist zweckmäßig der druckseitige Abschnitt 18 hohl ausgebildet. Der saugseitige Abschnitt 17 verschließt das saugseitige Ende des Hohlraumes 31. Die Welle 6, die zweckmäßig mit dem Rotor 5 bzw. mit dem druckseitigen Abschnitt 18 des Rotors 5 einstückig ausgebildet ist, ist ebenfalls hohl (Hohlraum 32). In den Hohlräumen 31, 32 befindet sich ein zentrales Kühlrohr 33, das lagerseitig aus der Welle 6 herausgeführt ist und rotorseitig kurz vor dem saugseitigen Ende des Hohlraumes 31 mündet. Das Kühlrohr 33 und der vom Kühlrohr 33 und der Hohlwelle 6 gebildete Ringraum stehen für die Zu- bzw. Abführung eines Kühlmittels zur Verfügung.The rotor is for realizing the rotor internal cooling 5 with a cavity open to its bearing side 31 equipped, which extends almost through the entire rotor 5 can extend. In one of two sections 17 and 18 existing rotor 5 is expediently the pressure side Section 18 is hollow. The suction side Section 17 closes the suction end of the cavity 31. The shaft 6, which is expedient with the rotor 5 or with the pressure-side section 18 of the rotor 5 is integrally formed, is also hollow (Cavity 32). Is in the cavities 31, 32 a central cooling tube 33, the bearing side of the Shaft 6 is brought out and on the rotor side just before suction-side end of the cavity 31 opens. The cooling pipe 33 and that formed by the cooling pipe 33 and the hollow shaft 6 Annulus stand for the supply and discharge of a Coolant available.

Beim dargestellten Ausführungsbeispiel steht die lagerseitige Öffnung 34 des Kühlrohres 3 über die Leitung 35 mit dem Auslass einer Kühlmittelpumpe 36 in Verbindung. Außerdem befindet sich im Bereich des Gehäusedeckels 14 ein Kühlmittelsumpf 37, der über das Leitungssystem 38 mit dem Einlass der Kühlmittelpumpe 36 verbunden ist. Der Sumpf 37 und das Leitungssystem 38 sind derart ausgebildet, dass die dargestellte Pumpe 1 in jeder Lage zwischen vertikal und horizontal betrieben werden kann. Kühlmittelstände, die sich bei horizontaler und bei vertikaler Lage der Pumpe 1 einstellen, sind dargestellt. Je nach dem, ob sich die Kühlmittelpumpe 36 außerhalb (wie dargestellt) oder innerhalb (z.B. auf der zweiten, nicht sichtbaren Welle der Pumpe 1 in Höhe des Antriebsmotors 2) des Gehäuses 4 befindet, liegt die Öffnung 34 des Kühlrohres 33 außerhalb oder innerhalb des Gehäuses 4.In the illustrated embodiment, the bearing side Opening 34 of cooling tube 3 via line 35 connected to the outlet of a coolant pump 36. It is also located in the area of the housing cover 14 a coolant sump 37, which via the line system 38 is connected to the inlet of the coolant pump 36. The sump 37 and the line system 38 are designed such that the pump 1 shown in any position can be operated between vertical and horizontal. Coolant levels that are at horizontal and at Set the vertical position of pump 1 are shown. Depending on whether the coolant pump 36 outside (as shown) or inside (e.g. on the second, invisible shaft of the pump 1 in height of the drive motor 2) of the housing 4 is located the opening 34 of the cooling tube 33 outside or inside the housing 4.

Zum Betrieb der Innenkühlung des Rotors 5 wird Kühlmittel von der Kühlmittelpumpe 36 aus dem Kühlmittelsumpf 37 über das Kühlrohr 33 in den Hohlraum 31 im Rotor 5 gefördert. Von dort aus strömt es über den Ringraum zwischen Kühlrohr 33 und Welle 6 zurück in den Sumpf 37. Der Hohlraum 31 befindet sich in Höhe des druckseitigen Bereichs der Gewindegänge der Pumpe 1, so dass gerade dieser Bereich wirksam gekühlt wird. Das außerhalb des Kühlrohres 33 zurückströmende Kühlmittel temperiert u.a. die Hohlwelle 6, die Lager 7 und 8, den Antriebsmotor 2 (ankerseitig) und die Zahnräder 3, so dass Wärmedehnungsprobleme reduziert sind.Coolant is used to operate the internal cooling of the rotor 5 from the coolant pump 36 from the coolant sump 37 via the cooling tube 33 into the cavity 31 in the rotor 5 promoted. From there it flows over the annulus between cooling pipe 33 and shaft 6 back into the swamp 37. The cavity 31 is at the level of the pressure side Range of threads of pump 1 so that this area is effectively cooled. The outside of the cooling pipe 33 coolant flowing back et al the hollow shaft 6, the bearings 7 and 8, the Drive motor 2 (anchor side) and the gears 3, see above that thermal expansion problems are reduced.

Zweckmäßig verringert sich der Querschnitt des Ringraumes zwischen Kühlrohr 33 und Welle 6 im Bereich seines druckseitigen Endes z.B. dadurch, dass das Kühlrohr 33 in diesem Bereich einen größeren Außendurchmesser hat. Dadurch entsteht ein verengter Durchlass 39. Diese Engstelle sichert eine vollständige Füllung der das Kühlmittel führenden Räume.The cross section of the annular space is expediently reduced between cooling pipe 33 and shaft 6 in the area of his pressure side end e.g. in that the cooling pipe 33 has a larger outer diameter in this area. This creates a narrow passage 39. This constriction ensures a complete filling of the coolant leading spaces.

Es kann zweckmäßig sein, als Werkstoff für das Kühlrohr 3 ein schlecht wärmeleitendes Material (z.B. Kunststoff/Edelstahl o. dgl.) auszuwählen. Dadurch werden eine wirksamere Kühlung des Rotors 5 und eine gleichmäßige Temperierung der wellennahen Bauteile der Pumpe 1 erreicht.It can be useful as a material for the cooling tube 3 a poorly heat-conducting material (e.g. plastic / stainless steel or the like.) This will a more effective cooling of the rotor 5 and a uniform Temperature control of the pump components close to the shaft 1 reached.

Die dargestellte Gehäusemantelkühlung umfasst Hohlräume bzw. Kanäle im Gehäuse 4. Im Bereich des Rotors 5 vorgesehene Kühlkanäle sind mit 41, im Bereich des Motors 2 befindliche Kühlkanäle mit 42 bezeichnet. The housing jacket cooling shown comprises cavities or channels in the housing 4. Provided in the area of the rotor 5 Cooling channels are at 41, in the area of the engine 2 located cooling channels designated 42.

Die im Bereich des Rotors 5 befindlichen Kühlkanäle 41 haben zum einen die Aufgabe, die insbesondere im druckseitigen Bereich des Rotors 5 entstehende Wärme abzuführen. Zum anderen sollen sie das Gehäuse 4 in Höhe des gesamten Rotors möglichst gleichmäßig temperieren. Schließlich sollen sie die aufgenommene Wärme nach außen abgeben. Die vom Kühlmittel durchströmten Hohlräume 41 erstrecken sich deshalb über die volle Länge des Rotors 5. Der Gehäusedeckel 13 dient als saugseitiger Abschluss der Hohlräume 41. Auch auslassseitig ist das Gehäuse 4 wirksam gekühlt.The cooling channels 41 located in the area of the rotor 5 have the task, in particular, in the print side Area of the rotor 5 to dissipate heat generated. On the other hand, they should the housing 4 in height temper the entire rotor as evenly as possible. After all, they are supposed to replenish the absorbed heat hand in outside. The cavities through which the coolant flows 41 therefore extend over the full length of the rotor 5. The housing cover 13 serves as a suction side Completion of the cavities 41. Also on the outlet side the housing 4 effectively cooled.

Die in Höhe des Antriebsmotors 2 befindlichen Kühlkanäle 42 haben ebenfalls die geschilderten Aufgaben. Sie bewirken eine Temperierung des Antriebsmotors (wicklungsseitig) sowie des Lagerträgers 7. Schließlich vergrößern sie im erheblichen Maße die Wärmeabgabe über äußere Oberflächen der Pumpe 1. Zweckmäßig ist diese zumindest in Höhe der Kühlkanäle 41 und 42 mit Rippen 44 ausgerüstet.The cooling channels located at the level of the drive motor 2 42 also have the tasks described. They bring about a temperature control of the drive motor (winding side) and the bearing bracket 7. Finally they significantly increase the heat emission outer surfaces of the pump 1. This is useful at least at the level of the cooling channels 41 and 42 with ribs 44 equipped.

Die Versorgung der Kühlkanäle 41, 42 mit Kühlmittel erfolgt ebenfalls mit Hilfe der Kühlmittelpumpe 36, und zwar über die Leitungen 45 und 46, wenn sie parallel durchströmt sein sollen. Je nach den thermischen Anforderungen besteht auch die Möglichkeit, sie nacheinander mit Kühlmittel zu versorgen. Eine der Leitungen 45 oder 46 könnte dann entfallen. Über im einzelnen nicht dargestellte Bohrungen gelangt das Kühlmittel aus den Hohlräumen 41, 42 in den Sumpf 37 zurück.The cooling channels 41, 42 are supplied with coolant also with the help of the coolant pump 36, and via lines 45 and 46 if they are parallel should be flowed through. Depending on the thermal requirements there is also the possibility to use them one by one to supply with coolant. One of the lines 45 or 46 could then be omitted. About not shown in detail The coolant comes out of the holes Cavities 41, 42 back into the sump 37.

Bei vertikaler Anordnung der Welle 6 übernimmt das im Sumpf befindliche Kühlmittel die Temperierung des in den Sumpf 37 hineinragenden Lagerträgers 12. Bei horizontaler Anordnung ist es zweckmäßig, das zurückströmende Kühlmittel über die Innenseite des Deckels 14 strömen zu lassen, um sowohl den Lagersitz 12 zu temperieren als auch die Wärmeabgabe nach außen zu verbessern.With a vertical arrangement of the shaft 6 in the Coolant located in the sump tempering the the sump 37 protruding bearing bracket 12. With horizontal Arrangement is expedient, the backflow Coolant through the inside of the cover 14 to flow to both temper the bearing seat 12 as well as to improve the heat emission to the outside.

Beim dargestellten Ausführungsbeispiel nach Figur 1 sind - wie bereits erwähnt - das Gehäuse 4 und der Rotor 5 in Höhe der Linie 22 teilbar ausgebildet. Dadurch besteht die Möglichkeit, die saugseitigen Abschnitte von Rotor 5 (Abschnitt 17) und Gehäuse 4 (Abschnitt 4') durch andere Bauteile zu ersetzen. Die Pumpe 1 kann an verschiedene Applikationen angepasst werden, indem Rotorabschnitte 17 mit unterschiedlichen Profilen 19, unterschiedlicher Länge, unterschiedlicher Steigung und/oder unterschiedllichem Durchmesser, jeweils zusammen mit einem angepassten Gehäuseabschnitt, montiert werden. Es können verschieden große Profile auf der Saugseite zur Erreichung hoher Saugvermögen, verschieden lange Profile auf der Saugseite zur Erreichung niedriger Enddrücke und/oder verschiedene Volumenabstufungen zur Erreichung z.B. bei geringerer Abstufung eine höhere Fluidverträglichkeit oder bei höherer Stufung ein hohes Saugvermögen bei relativ kleiner Leistungsaufnahme ausgewählt werden. Schließlich besteht die Möglichkeit, in Höhe einer Reduzierung des Durchmessers des Rotors 5 eine Umfangsnut vorzusehen, um bei bestimmten Applikationen in diesem Bereich eine Druckentlastung zu erzielen.In the illustrated embodiment according to FIG. 1 are - as already mentioned - the housing 4 and the rotor 5 divisible at the level of line 22. Thereby there is the possibility of the suction-side sections of rotor 5 (section 17) and housing 4 (section 4 ') to be replaced by other components. Pump 1 can be on Different applications can be customized by using rotor sections 17 with different profiles 19, different Length, different slope and / or different diameters, each together with an adapted housing section become. Different sized profiles can be placed on the Suction side to achieve high pumping speeds, various long profiles on the suction side to achieve this lower final pressures and / or different volume gradations to achieve e.g. with lower gradation one higher fluid compatibility or higher grading high pumping speed with relatively low power consumption to be selected. Finally, there is Possibility of reducing the diameter the rotor 5 to provide a circumferential groove to certain Applications in this area relieve pressure to achieve.

Das die Schraubenvakuumpumpe 1 durchströmende Kühlmittel kann Wasser, Öl (Mineralöl, PTFE-Öl oder dergleichen) oder eine andere Flüssigkeit sein. Zweckmäßig ist die Verwendung von Öl, um damit auch die Lager 7, 8 und die Zahnräder 3 schmieren zu können. Eine separate Führung von Kühlmittel und Schmiermittel sowie entsprechende Abdichtungen können dadurch entfallen. Es muss lediglich für eine dosierte Zuführung von Öl zu den Lagern 7, 8 gesorgt werden. The coolant flowing through the screw vacuum pump 1 can be water, oil (mineral oil, PTFE oil or the like) or some other liquid. Is expedient the use of oil to make bearings 7, 8 and to be able to lubricate the gears 3. A separate tour of coolant and lubricant as well as corresponding This eliminates the need for seals. It must only for a metered supply of oil to the bearings 7, 8 are taken care of.

Die beschriebenen Lösungen erlauben eine vorteilhafte Werkstoffauswahl. Beispielsweise können die Rotoren 5 und das Gehäuse 4 aus relativ preiswerten Aluminiumwerkstoffen bestehen. Die vorgeschlagene Kühlung und vor allem gleichmäßige Temperierung der Pumpe 1 bewirken, dass es selbst bei unterschiedlichen Betriebstemperaturen und relativ kleinen Spalten nicht zu lokalen Spielaufzehrungen kommt, die ein Anlaufen Rotor an Rotor und/oder Rotor an Gehäuse zur Folge haben. Eine weitere Reduzierung der Spalte ist möglich, wenn für die inneren, thermisch höher belasteten Bauteile (Rotoren, Lager, Lagerträger, Zahnräder) der Pumpe 1 Werkstoffe eingesetzt werden, die einen kleineren Wärmeausdehnungskoeffizienten haben als der Werkstoff für das weniger thermisch belastete Gehäuse 4. Eine Vergleichsmäßigung der Dehnung aller Bauteile der Pumpe 1 wird dadurch erreicht. Ein Beispiel für eine solche Werkstoffauswahl ist Stahl (z.B. CrNi-Stahl) für die inneren Bauteile und Aluminium für das Gehäuse. Als Werkstoffe für die inneren Bauteile können auch Bronze, Messing oder Neusilber dienen.The solutions described allow an advantageous one Material selection. For example, the rotors 5 and the housing 4 made of relatively inexpensive aluminum materials consist. The proposed cooling and above all cause uniform temperature control of pump 1, that it is even at different operating temperatures and relatively small columns not too local Game consumption comes up, which is a tarnishing rotor to rotor and / or rotor on housing result. A further reduction of the column is possible if for the inner, more thermally stressed components (Rotors, bearings, bearing supports, gears) of the pump 1 Materials are used that have a smaller coefficient of thermal expansion have as the material for the less thermally stressed housing 4. A comparison the expansion of all components of the pump 1 is achieved. An example of one Material selection is steel (e.g. CrNi steel) for the internal components and aluminum for the housing. As Materials for the inner components can also be bronze, Brass or nickel silver are used.

Claims (16)

  1. Screw vacuum pump (1) having a housing (4), having pump chambers formed in the housing (4), and having rotors (5) situated in the pump chambers and each comprising separately manufactured, positively or non-positively joined rotor portions (17, 18), characterized in that the rotor portions (17, 18) are made of different materials, namely of such materials as allow an adaptation of the rotor portions (17, 18) to the physical requirements in the relevant pump chamber region.
  2. Pump according to claim 1, characterized in that each of the rotors (5) comprises at least two portions (17, 18) with differing rotor profiles (19, 20).
  3. Pump according to claim 1 or 2, characterized in that the suction-side portion (17) has a larger diameter than the discharge-side portion (18).
  4. Pump according to claim 1, 2 or 3, characterized in that the suction-side portion (17) of the rotor (5) is made of aluminium, the delivery-side portion (18) of steel.
  5. Pump according to one of claims 1 to 4, characterized in that the suction-side rotor portion (17) is manufactured with a greater tolerance than the delivery-side rotor portion (18).
  6. Pump according to one of claims 1 to 5, characterized in that the housing (4) is of a divisible design.
  7. Pump according to claim 6, characterized in that the separating plane between the two housing parts is identical with the separating plane (22) between the two rotor portions (17, 18).
  8. Pump according to one of the preceding claims, characterized in that a housing bore (25) is provided, which connects the helical pump chambers at the level, at which their cross section decreases - either through graduation and/or alteration of the screw thread profile, to an outlet (27), and that situated in the housing bore (25) is a check valve (26), which opens in the event of excess pressure.
  9. Pump according to one of the preceding claims, characterized in that it is equipped with a cooling/temperature-stabilizing device.
  10. Pump according to claim 9, characterized in that it is equipped with a rotor interior cooling device.
  11. Pump according to claim 10, characterized in that the rotor interior cooling device is situated in a cavity (31) in the rotor (5) that is open on the bearing side.
  12. Pump according to claim 11, characterized in that a fixed cooling pipe (33) penetrating the hollow shaft (6) opens out in the cavity (31).
  13. Pump according to one of claims 9, 10 or 11, characterized in that provided in the wall of the housing (4) of the pump (1), namely at the level of the rotor (5), are channels (41), through which a coolant flows.
  14. Pump according to claim 13, characterized in that channels (42), through which the coolant flows, are provided also in the bearing-side region of the housing (4).
  15. Pump according to one of claims 8 to 14, characterized in that the coolant flowing through the pump (1) is identical with the lubricant for the bearings (7, 8).
  16. Method of manufacturing a pump (1) having the features of one or more of the preceding claims, characterized in that the rotor portions (17) intended for suction-side arrangement in the respective pump chamber are manufactured with a greater tolerance than the rotor portions (18) intended for discharge-side arrangement.
EP98937515A 1997-10-10 1998-06-19 Screw vacuum pump provided with rotors Expired - Lifetime EP1021654B1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19745615 1997-10-10
DE19745615A DE19745615A1 (en) 1997-10-10 1997-10-10 Screw vacuum pump with rotors
PCT/EP1998/003757 WO1999019631A1 (en) 1997-10-10 1998-06-19 Screw vacuum pump provided with rotors

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EP1021654A1 EP1021654A1 (en) 2000-07-26
EP1021654B1 true EP1021654B1 (en) 2004-10-06

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EP98937515A Expired - Lifetime EP1021654B1 (en) 1997-10-10 1998-06-19 Screw vacuum pump provided with rotors

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US (1) US6382930B1 (en)
EP (1) EP1021654B1 (en)
JP (1) JP4146081B2 (en)
KR (1) KR20010030995A (en)
DE (2) DE19745615A1 (en)
TW (1) TW452631B (en)
WO (1) WO1999019631A1 (en)

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JP4146081B2 (en) 2008-09-03
KR20010030995A (en) 2001-04-16
WO1999019631A1 (en) 1999-04-22
DE59812093D1 (en) 2004-11-11
EP1021654A1 (en) 2000-07-26
US6382930B1 (en) 2002-05-07
TW452631B (en) 2001-09-01
JP2001520353A (en) 2001-10-30
DE19745615A1 (en) 1999-04-15

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