EP0990886B1 - Kompakter Leckagendetektor - Google Patents

Kompakter Leckagendetektor Download PDF

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Publication number
EP0990886B1
EP0990886B1 EP99402286A EP99402286A EP0990886B1 EP 0990886 B1 EP0990886 B1 EP 0990886B1 EP 99402286 A EP99402286 A EP 99402286A EP 99402286 A EP99402286 A EP 99402286A EP 0990886 B1 EP0990886 B1 EP 0990886B1
Authority
EP
European Patent Office
Prior art keywords
block
pumping unit
leak detector
module
gas analyzer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP99402286A
Other languages
English (en)
French (fr)
Other versions
EP0990886A1 (de
Inventor
Jean Marc Paquet
Gilles Baret
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel Lucent SAS
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Alcatel Lucent SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel Lucent SAS filed Critical Alcatel Lucent SAS
Publication of EP0990886A1 publication Critical patent/EP0990886A1/de
Application granted granted Critical
Publication of EP0990886B1 publication Critical patent/EP0990886B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
    • G01M3/205—Accessories or associated equipment; Pump constructions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/207—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material calibration arrangements

Definitions

  • a leak detector is a complex machine comprising a multitude of elements connected to each other.
  • the main components of a leak detector are: a primary pumping unit, a secondary pumping unit, a gas analyzer, and a set of valves and pressure gauges.
  • connection sections are connected by connection sections.
  • connection sections currently used are corrugated tubes or equivalent having a very good intrinsic seal and mechanical connection devices between said tubes and the components of the leak detector, also having a good seal. Nevertheless, it is necessary to scrupulously test the tightness of the link sections once mounted. These tests are long and significantly increase the manufacturing time of the leak detectors.
  • One of the aims of the present invention is to provide a leak detector whose number of reported connection sections is substantially reduced, thus allowing an increase in the reliability of the sealing of the device, at the same time as decrease of the losses of loads and thus an increase of the performances of the apparatus.
  • Another object of the present invention is to provide a leak detector whose size is substantially reduced.
  • the primary pumping unit comprises a turbomolecular pump in series with a primary pump, said turbomolecular pump having a stator housing constituted by a bore in said main block.
  • the main block advantageously has a non-magnetic tapered portion in which has been arranged the space for the magnetic mass spectrometer type gas analyzer, the magnet of the magnetic mass spectrometer to integrate straddling said tapered portion.
  • Monoblocks can be made by any known means, including machining or molding.
  • a first advantage of the present invention results from the integration in the monoblock block (s) of a certain number or even all of the connection sections.
  • Another advantage of the present invention results from the integration of the main components of the leak detector into bores or spaces designed for this purpose in the one-piece blocks, considerably reducing the spaces between said elements, and therefore increasing the compactness and performance of the leak detector.
  • the object of the present invention is a compact leak detector. More particularly, the present invention relates to a compact leak detector gas analyzer. The operating principle of such a detector is widely known.
  • a schematic diagram of a leak detector according to the invention is shown on the figure 1 .
  • At least a number of the constituent elements of the leak detector is integrated in a main unit block 1 comprising integration arrangements 20, ..., 30.
  • the secondary pumping unit 5 comprises at least one pump 6, for example of turbomolecular type, the suction of which is connected on the one hand to the gas analyzer and on the other hand, via a valve of test V 1 , to the test module 8.
  • the discharge of the pump 6 is connected to the suction of the primary pumping unit 10 via an isolation valve V 2 .
  • the primary pump unit comprises a pump 7, for example of the turbomolecular type, the suction of which is connected to the valve V2, and, in parallel, to a pre-emptying valve V3.
  • the valve V3 is connected on the one hand to the test valve V2, and on the other hand to the test module 8.
  • the discharge of the pump 7 is connected to a primary pump 11 (oil-vane type pump, or membrane, or multi-stage roots, or scroll, or screw, etc.).
  • a primary pump 11 oil-vane type pump, or membrane, or multi-stage roots, or scroll, or screw, etc.
  • the calibration module is of the calibrated leak type. It comprises an enclosure 15 having a calibrated leak connected to the ambient air by an air inlet valve V4, to the suction of the pre-emptying pump 7 by a pre-emptying valve V5 and to the gas analyzer through a V6 detection valve.
  • the test module 8 comprises a test input 16 intended to be connected to the test piece (not shown).
  • the gas analyzer is of mass spectrometry type.
  • the main unit block 1 comprises a tapered portion 19 in which has been arranged the space 21 for a gas analyzer type magnetic mass spectrometer. Since the monobloc main unit 1 is advantageously made of non-magnetic material, the magnet 40, necessary for the proper functioning of the magnetic mass spectrometer 4, integrates with the tapered portion 19.
  • the one-piece blocks according to the invention can be manufactured according to all existing methods, in particular by machining or molding, or a combination of the two.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Examining Or Testing Airtightness (AREA)

Claims (8)

  1. Leckagendetektor, welcher die folgenden Elemente umfasst:
    - Ein Gasanalsegerät (4),
    - einen ersten Pumpensatz (10),
    - ein Testmodul (8), welches einen Eingang (16) umfasst, der für den Anschluss an ein zu testendes Teil bestimmt ist, wobei das Testmodul über einen Verbindungsabschnitt (32, 34), der ein Ventil (V3) umfasst, mit der Saugvorrichtung des ersten Pumpensatzes (10) verbunden ist,
    - einen einteiligen Block (1) mit Hohlräumen (20 ... 24), welche das Integrieren von mindestens einem Element des Leckagendetektors ermöglichen,
    dadurch gekennzeichnet, dass er weiterhin umfasst:
    - einen zweiten Pumpensatz, welcher ein Sekundär-Pumpensatz (5) ist und mindestens eine Turbomolekularpumpe (6) mit einem durch eine Bohrung (20) in dem besagten einteiligen Block (1) gebildeten Statorgehäuse umfasst, dessen Saugvorrichtung einerseits über einen Verbindungsabschnitt (30) an das Gasanalysegerät (4) und andererseits übe einen Verbindungsabschnitt (32, 33), welcher ein Ventil (V1) umfasst, mit dem Testmodul (8) verbunden ist,
    - ein Druckmodul (12), welches an den Ausgang (38) des sekundären Pumpensatzes (5) angeschlossen ist, wobei der Ausgang (38) des zweiten Pumpensatzes (5) über einen Verbindungsabschnitt (14), welcher ein Ventil (V2) umfasst, mit der Saugvorrichtung des ersten Pumpensatzes (10) verbunden ist,
    - ein Kalibrierungsmodul (9), welches über einen Verbindungsabschnitt, welcher ein Ventil (V6) umfasst, mit dem Gasanalysegerät (4) und über einen Verbindungsabschnitt (35), welcher ein Ventil (V5) umfasst, mit der Saugvorrichtung des ersten Pumpensatz (10) verbunden ist.
  2. Leckagendetektor nach Anspruch 1, in welchem der einteilige Hauptblock (1) umfasst:
    - Eine Bohrung (20), welche das Gehäuse für den Stator der Pumpe des sekundären Pumpensatzes (5) bildet,
    - einen Hohlraum (21), welcher das Gehäuse für das Gasanalysegerät (4) bildet,
    - einen ausgebohrien Kanal (30), welcher den Verbindungsabschnitt zwischen dem Gasanalysegerät (4) und der Saugvorrichtung des sekundären Pumpensatzes (5) bildet,
    - ausgebohrte Kanäle (31 ... 35) im einteiligen Hauptblock (1), welche einen Teil der besagten Verbindungsabschnitte (14) und einen Teil der Gehäuse der besagten Ventile (V1, V2) bilden, und
    - Blockeingänge und -ausgänge (36, 37, 38), welche es ermoglichen, die im Hauptblock (1) integrierten Elemente mil den Testmodulen (8) und den Kalibrierungsmodulen (9) sowie mit dem Druckmodul (12) zu verbinden.
  3. Leckagendetektor nach einem der Ansprüche 1 und 2, in welchem der primäre Pumpensatz (10) eine mit einer Primärpumpe (11) in Reihe geschaltete Turbomolekularpumpe (7) umfasst, wobei die Turbomolekularpumpe (7) ein Statorgehäuse aufweist, welches aus einer Bohrung (24) im besagten Hauptblock (1) besteht.
  4. Leckagendetektor nach einem der vorstehenden Ansprüche, in welchem das Gasanalysegerät (4) vom Typ eines magnetischen Massenspektrometers ist, wobei der Hauptblock (1) einen verjüngten amagnetischen Teil (19) aufweist, in welchem ein Hohlraum (21) für das magnetische Massenspektrometer eingerichtet wurde, wobei ein Magnet (40) über dem besagten verjüngten Teil positioniert wird (19).
  5. Leckagendetektor nach einem der vorstehenden Ansprüche, welcher weiterhin einen einteiligen Druckblock (3) einschließt, welcher umfasst:
    - Im einteiligen Druckblock (3) ausgebohrte Kanale , welche einen Teil der besagten Verbindungsabschnitte (14) und einen Teil der Gehäuse der besagten Ventile (V2) des Druckmoduls (12) der sekundären Pumpensatzes (5) bilden, und
    - Block-Eingänge und -Ausgänge (37, 38), welche in Übereinstimmung mit den entsprechenden Aus- und Eingängen des Hauptblocks (1) positioniert sind, um die Druckvorrichtung des sekundären Pumpensatzes (5) über ein Absperrventil (V2) mit der Saugvorrichtung des ersten Pumpensatzes (10) zu verbinden.
  6. Leckagendetektor nach einem der vorstehenden Anspruche, welcher weiterhin einen einteiligen Test- und Kalibrierungsblock (2) einschheßt, welcher umfasst:
    - Ausgebohrte Kanäle (18), welche einen Teil der besagten Verbindungsabschnitte (14) und einen Teil der Gehäuse der besagten Ventile (V4, V6, V5) der Test- und Kalibrierungsmodule (8, 9) bilden, und
    - Block-Eingänge und -Ausgänge (36), welche in übereinstimmung mit den entsprechenden Aus- und Eingängen des Hauptblocks (1) positioniert sind, um das Test- und Kalibrierungsmodul (8, 9) einerseits mit der Saugvorrichtung des sekundären Pumpensatzes (5) und andererseits mit der Saugvorrichtung des ersten Pumpensatzes (10) zu verbinden.
  7. Leckagendetektor nach einem der vorstehenden Ansprüche, in welchem die einteiligen Blöcke geformte Blöcke sind.
  8. Leckagendetektor nach einem der Ansprüche 1 bis 6, in welchem die eintelligen Blöcke maschinell bearbeitete Blöcke sind.
EP99402286A 1998-10-01 1999-09-20 Kompakter Leckagendetektor Expired - Lifetime EP0990886B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9812290A FR2784184B1 (fr) 1998-10-01 1998-10-01 Detecteur de fuite compact
FR9812290 1998-10-01

Publications (2)

Publication Number Publication Date
EP0990886A1 EP0990886A1 (de) 2000-04-05
EP0990886B1 true EP0990886B1 (de) 2009-01-14

Family

ID=9531079

Family Applications (1)

Application Number Title Priority Date Filing Date
EP99402286A Expired - Lifetime EP0990886B1 (de) 1998-10-01 1999-09-20 Kompakter Leckagendetektor

Country Status (6)

Country Link
US (1) US6336356B1 (de)
EP (1) EP0990886B1 (de)
JP (1) JP4530451B2 (de)
AT (1) ATE421083T1 (de)
DE (1) DE69940289D1 (de)
FR (1) FR2784184B1 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10055057A1 (de) * 2000-11-07 2002-05-08 Pfeiffer Vacuum Gmbh Leckdetektorpumpe
DE10308420A1 (de) * 2003-02-27 2004-09-09 Leybold Vakuum Gmbh Testgaslecksuchgerät
DE10334455B4 (de) * 2003-07-29 2013-01-31 Pfeiffer Vacuum Gmbh Lecksuchverfahren und Lecksuchanordnung zur Durchführung des Verfahrens
DE102006020710A1 (de) * 2006-05-04 2007-11-08 Pfeiffer Vacuum Gmbh Vakuumpumpe mit Gehäuse
US7500381B2 (en) * 2006-08-31 2009-03-10 Varian, Inc. Systems and methods for trace gas leak detection of large leaks at relatively high test pressures
DE102007027354A1 (de) * 2007-06-11 2008-12-18 Oerlikon Leybold Vacuum Gmbh Turbomolekularpumpe
EP3564538B1 (de) * 2019-02-20 2021-04-07 Pfeiffer Vacuum Gmbh Vakuumsystem und verfahren zur herstellung eines solchen
CN114935368B (zh) * 2022-06-10 2024-05-28 陕西秦北检验检测有限公司 一种储罐附件压力流量检测装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06137986A (ja) * 1992-10-26 1994-05-20 Nippon Telegr & Teleph Corp <Ntt> 質量分析型ガス漏れ検知器

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FR1474137A (fr) 1966-02-08 1967-03-24 Alcatel Sa Détecteur de fuites à l'hélium aisément transportable
US3714421A (en) 1969-05-29 1973-01-30 Analog Tech Corp Gas detector and analyzer
US4399690A (en) * 1979-12-04 1983-08-23 Varian Associates, Inc. Vacuum leak detector having single valve assembly
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US4593530A (en) 1984-04-10 1986-06-10 Air Products And Chemicals, Inc. Method and apparatus for improving the sensitivity of a leak detector utilizing a cryopump
FR2653558B1 (fr) 1989-10-23 1994-06-10 Cit Alcatel Systeme de detection de fuites a gaz traceur.
FR2658292B1 (fr) 1990-02-09 1994-09-16 Cit Alcatel Detecteur de fuite a helium fonctionnant a contre-courant, portable pour tester une enceinte possedant son propre groupe de pompage.
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JPH0816634B2 (ja) * 1991-05-16 1996-02-21 日本真空技術株式会社 ガス洩れ検査装置
FR2681688B1 (fr) 1991-09-24 1993-11-19 Alcatel Cit Installation de detection de fuites de gaz utilisant la technique de reniflage.
FR2681689B1 (fr) 1991-09-25 1993-11-12 Alcatel Cit Detecteur de fuite a gaz traceur.
DE4140366A1 (de) 1991-12-07 1993-06-09 Leybold Ag, 6450 Hanau, De Lecksucher fuer vakuumanlagen sowie verfahren zur durchfuehrung der lecksuche an vakuumanlagen
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EP0718613B1 (de) 1994-12-23 2003-03-05 Unaxis Balzers Aktiengesellschaft Verfahren zur Gasanalyse und Gasanalysator
JP3059661B2 (ja) * 1995-03-15 2000-07-04 アンリツ株式会社 ガス濃度測定装置
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Also Published As

Publication number Publication date
JP2000111441A (ja) 2000-04-21
ATE421083T1 (de) 2009-01-15
FR2784184B1 (fr) 2000-12-15
DE69940289D1 (de) 2009-03-05
JP4530451B2 (ja) 2010-08-25
FR2784184A1 (fr) 2000-04-07
EP0990886A1 (de) 2000-04-05
US6336356B1 (en) 2002-01-08

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