EP0976969B2 - Vorrichtung und Verfahren zur Versorgung von Helium zu mehreren Produktionslinien - Google Patents

Vorrichtung und Verfahren zur Versorgung von Helium zu mehreren Produktionslinien Download PDF

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Publication number
EP0976969B2
EP0976969B2 EP99401928.9A EP99401928A EP0976969B2 EP 0976969 B2 EP0976969 B2 EP 0976969B2 EP 99401928 A EP99401928 A EP 99401928A EP 0976969 B2 EP0976969 B2 EP 0976969B2
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EP
European Patent Office
Prior art keywords
helium
lines
source
main pipe
gaseous
Prior art date
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Expired - Lifetime
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EP99401928.9A
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English (en)
French (fr)
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EP0976969A1 (de
EP0976969B1 (de
Inventor
Frédéric Castellanet
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LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
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LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
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Priority to DE69934277.5T priority Critical patent/DE69934277T3/de
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17B—GAS-HOLDERS OF VARIABLE CAPACITY
    • F17B1/00—Gas-holders of variable capacity
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C5/00—Methods or apparatus for filling containers with liquefied, solidified, or compressed gases under pressures
    • F17C5/06—Methods or apparatus for filling containers with liquefied, solidified, or compressed gases under pressures for filling with compressed gases
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C9/00—Methods or apparatus for discharging liquefied or solidified gases from vessels not under pressure
    • F17C9/02—Methods or apparatus for discharging liquefied or solidified gases from vessels not under pressure with change of state, e.g. vaporisation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2201/00—Vessel construction, in particular geometry, arrangement or size
    • F17C2201/05—Size
    • F17C2201/054—Size medium (>1 m3)
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/01—Mounting arrangements
    • F17C2205/0123—Mounting arrangements characterised by number of vessels
    • F17C2205/013—Two or more vessels
    • F17C2205/0134—Two or more vessels characterised by the presence of fluid connection between vessels
    • F17C2205/0142—Two or more vessels characterised by the presence of fluid connection between vessels bundled in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2221/00—Handled fluid, in particular type of fluid
    • F17C2221/01—Pure fluids
    • F17C2221/016—Noble gases (Ar, Kr, Xe)
    • F17C2221/017—Helium
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
    • F17C2223/01—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the phase
    • F17C2223/0107—Single phase
    • F17C2223/0115—Single phase dense or supercritical, i.e. at high pressure and high density
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
    • F17C2223/01—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the phase
    • F17C2223/0146—Two-phase
    • F17C2223/0153—Liquefied gas, e.g. LPG, GPL
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2225/00—Handled fluid after transfer, i.e. state of fluid after transfer from the vessel
    • F17C2225/01—Handled fluid after transfer, i.e. state of fluid after transfer from the vessel characterised by the phase
    • F17C2225/0107—Single phase
    • F17C2225/0115—Single phase dense or supercritical, i.e. at high pressure and high density
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2225/00—Handled fluid after transfer, i.e. state of fluid after transfer from the vessel
    • F17C2225/01—Handled fluid after transfer, i.e. state of fluid after transfer from the vessel characterised by the phase
    • F17C2225/0146—Two-phase
    • F17C2225/0153—Liquefied gas, e.g. LPG, GPL
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
    • F17C2250/01—Intermediate tanks
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2265/00—Effects achieved by gas storage or gas handling
    • F17C2265/01—Purifying the fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2270/00—Applications
    • F17C2270/01—Applications for fluid transport or storage
    • F17C2270/0165—Applications for fluid transport or storage on the road
    • F17C2270/0168—Applications for fluid transport or storage on the road by vehicles
    • F17C2270/0171—Trucks
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2270/00—Applications
    • F17C2270/01—Applications for fluid transport or storage
    • F17C2270/0165—Applications for fluid transport or storage on the road
    • F17C2270/0168—Applications for fluid transport or storage on the road by vehicles
    • F17C2270/0173—Railways
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2270/00—Applications
    • F17C2270/05—Applications for industrial use

Definitions

  • the present invention relates to an installation and a method for supplying helium, preferably in liquid or supercritical form, to a plurality of production lines at an industrial site.
  • gaseous helium is used in many different sectors of the industry, especially in the electronics industry, to cool silicon slices or wafers, commonly known as “wafers", or to inert the printed circuits, for example , or in the glass industry, for example to cool optical fibers during their manufacturing process.
  • helium is first delivered in liquid form in large quantities to a transfer station and repackaging, in which the helium is vaporized and compressed, before being rerouted on its site of use being conditioned either in gas cylinders or similar containers of varying sizes, but never exceeding a few hundred liters. This is recalled in the document US Patent 5,386,707 (Col. 1, 1. 30-35).
  • the liquid helium is directly routed to its site of use in a small storage tank, usually in a tank having a volume of less than 3000 liters, where it can be stored before be sent in gaseous form to a site of use.
  • the site of use comprises several production lines each using large quantities of helium gas, the quantities used being variable from one line to another, it is essential to provide as many helium reservoirs gaseous than production lines, that is to say that each production line must be connected, via an individual pipeline to a helium reservoir of its own, for example helium cylinders , so that each of said production lines can be supplied independently of the others depending on the helium requirements of the line in question.
  • the object of the present invention is therefore to overcome the aforementioned drawbacks by proposing a method and a helium supply installation that can be implemented directly on a production site comprising several lines or manufacturing units, operating independently of one another .
  • Another object of the present invention is also to enable gaseous helium to be fed to several production lines consuming variable amounts of gaseous helium, from one line to another, in a flexible manner, that is to say according to the specific needs of each of said lines and therefore independently of variations in consumption of said lines, relative to each other.
  • the invention also relates to a method for supplying helium to several production lines according to claim 9.
  • the figure 1 represents a general diagram of a helium supply installation 1 according to the present invention.
  • the helium supply installation 1 comprises a source 2 of helium, for example a storage tank, having an internal volume of at least 7000 liters, for example about 10,000 liters, which source 2 of helium is connected, via a main pipeline 3, 3a, 3b of helium transport, to a network 4 of several secondary lines 4a, 4b, 4c, each supplying a production line 5a, 5b, 5c, helium gas.
  • a source 2 of helium for example a storage tank, having an internal volume of at least 7000 liters, for example about 10,000 liters
  • source 2 of helium is connected, via a main pipeline 3, 3a, 3b of helium transport, to a network 4 of several secondary lines 4a, 4b, 4c, each supplying a production line 5a, 5b, 5c, helium gas.
  • the helium can be withdrawn from the storage tank 2 in liquid form, via the withdrawal means 3, then subsequently vaporized in the heat exchanger 7, or withdrawn directly in gaseous form via the withdrawal means 3b .
  • the helium is withdrawn in liquid or supercritical form.
  • compression means 10 such as a piston compressor or membranes.
  • helium purification means 9 for example a filter or an adsorbent.
  • the source 2 of helium may be a fixed source of helium, such as a storage tank, as shown in FIG. figure 1 a mobile source, for example a helium supply truck, as well as a diagram of the figure 2 , which figure 2 is, moreover, substantially identical to the figure 1 .
  • figure 3 schematizes the application of the helium supply installation 1 described above to the filling of cylinders 13 of diving gas.
  • the figure 3 uses the same architecture as that of Figures 1 and 2 , but includes, in addition, a mixing and homogenizing device 12 arranged on the main pipe 3, intended to obtain a homogeneous mixture of helium gas and one or more other gases from a secondary source 11 of gas, to obtain a respiratory gas mixture that can be used as a breathing gas for a bottle of gas diving 13.
  • a mixing and homogenizing device 12 arranged on the main pipe 3, intended to obtain a homogeneous mixture of helium gas and one or more other gases from a secondary source 11 of gas, to obtain a respiratory gas mixture that can be used as a breathing gas for a bottle of gas diving 13.
  • the gaseous dive mixture containing helium is then conveyed to a network 4 of several secondary lines 4a to 4c feeding each of lines 5a to 5c for filling the bottle 13 with diving gas.
  • the figure 4 schematically, meanwhile, the implementation of an installation according to the invention on an electronic material manufacturing site.
  • the helium is conveyed via a pipe 3 to a network 4 comprising several production lines 5a and 5b, such as cooling lines of "wafers" or printed circuits.
  • the device also comprises means for recovering and recycling 14 the helium gas used, which helium is recovered and then optionally purified within a unit 9 'prepurification of recycled gas before being returned to the main pipe 3, upstream of the purification means 9 where the prepurified helium thus recycled undergoes purification sufficient to allow it to be returned to the production lines 5a and 5b.
  • the helium used and recovered by the recycling means 14 contains an impurity content below a predetermined threshold, it is not necessarily necessary to undergo this pre-purification and can then be returned to the line 3 via the 9 "bypass.
  • the figure 5 represents, for its part, a diagram of an installation applied to the supply of helium to manufacturing lines 5a to 5c of optical fibers 17, where helium is used for cooling said fibers 17 during their passages in the enclosures 16 cooling.
  • the helium gas can, again, be recovered at the outlet of said cooling chambers 16, discharged via pipes 21 to cooling means 15, and then sent directly to the main pipe 3 via the bypass 19 , or undergo a prepurification within the prepurification means 18 installed on the pipe 20.
  • the figure 6 represents the application of the helium supply facility to a safety pad inflation container manufacturing unit or AIRBAG TM.
  • a tanker truck 2 with a capacity of at least 20000 liters supplies directly, in liquid helium, the production site of said containers 25 for safety cushions.
  • the helium in liquid form, withdrawn from the source 2, is vaporized in the heater 7, then undergoes, if necessary and optionally, a dilution 12 with one or more other gases emanating from a source of secondary gas 11, a compression 10, before being sent to the network 4 of secondary lines 4a, 4b, and finally to be introduced into the containers 25 for safety cushions.
  • the installation and the method according to the invention have several advantages, namely in particular that they allow a helium flow directly on the site of use of said helium, said helium being conveyed in liquid form in very large containers generally of more than 7000 liters, without necessarily having to undergo transfer, that is to say repackaging, between their initial liquefaction or production sites and their sites of use.
  • the vaporization of the liquid helium in the form of helium gas can be carried out directly on the site of use and the helium can then optionally undergo a purification beforehand. to be sent to the production lines where it will be used.
  • helium gas may be optionally recovered and recycled, whether or not subjected to prepurification or subsequent reuse.
  • each of the secondary lines 4a to 4c of the secondary pipe network is connected to a single source 2 of helium, while being independent of one another.
  • the method and the installation according to the present invention make it possible to obtain a very great flexibility of the various production lines of the process using said helium, that is to say that although each line is powered by the same helium source 2, each of said production lines can obtain, at any time, the amount of helium gas necessary for its proper operation.

Claims (10)

  1. Anlage (1) zum Zuführen von gasförmigem Helium zu mehreren Produktionslinien (5a, 5b, 5c), umfassend:
    - eine Heliumquelle (2) mit einem Innenvolumen von mindestens 7000 Litern,
    - ein Netz (4) von mehreren, jeweils mindestens eine Produktionslinie (5a, 5b, 5c) versorgenden Nebenleitungen (4a, 4b, 4c),
    - eine Heliumzuführhauptleitung (3, 3a, 3b), die stromaufwärts an der Heliumquelle (2) und stromabwärts an dem Netz (4) von die Produktionslinien (5a, 5b, 5c) versorgenden Nebenleitungen (4a, 4b, 4c) angeschlossen ist, wobei jede Produktionslinie (5a, 5b, 5c) mit Helium aus der Heliumquelle (2) mit einem Innenvolumen von mindestens 7000 Litern versorgt wird,
    dadurch gekennzeichnet, dass:
    - ein Wärmetauscher (7), geeignet für das Verdampfen von aus der Quelle (2) entnommenem flüssigem Helium zum Erhalten von gasförmigem Helium; und
    - Mittel (9) zum Reinigen von gasförmigem Helium aus dem Wärmetauscher (7)
    an der Hauptleitung (3, 3a, 3b) angeordnet sind.
  2. Anlage nach Anspruch 1, dadurch gekennzeichnet, dass die Heliumquelle (2) ein Innenvolumen von mindestens 8000 Litern, bevorzugt mindestens 20000 Litern, weiter bevorzugt mindestens 40000 Litern, aufweist.
  3. Anlage nach einem der Ansprüche 1 oder 2, dadurch gekennzeichnet, dass die Heliumquelle (2) beweglich oder fest ist.
  4. Anlage nach einem der Ansprüche 1 bis 3, dadurch gekennzeichnet, dass die Hauptleitung (3, 3a, 3b) ferner mit mindestens einer Einrichtung verbunden ist, die aus der Gruppe ausgewählt ist, die aus:
    - einer Pufferkapazität (8) und
    - Kompressionsmitteln (10)
    besteht.
  5. Anlage nach einem der Ansprüche 1 bis 4, dadurch gekennzeichnet, dass sie ferner Mittel zum Steuern des Durchflusses und/oder Drucks von gasförmigem Helium in der Hauptleitung (3, 3a, 3b) und/oder in jeder der Nebenleitungen (4a, 4b, 4c) des Netzes (4) umfasst.
  6. Anlage nach einem der Ansprüche 1 bis 5, dadurch gekennzeichnet, dass die Produktionslinien (5a, 5b, 5c) aus der Gruppe ausgewählt sind, bestehend aus:
    - Fülllinien für Tauchgasflaschen (13),
    - Fülllinien für Gasumhüllungen für Luftschiffe,
    - Fülllinien für Behälter (25) zum Aufblasen von Sicherheitskissen (Airbags),
    - Heliumhärtungslinien für Metallstücke;
    - Herstellungslinien für elektronische Produkte, die mindestens eine Kühlstelle für Wafer oder gedruckte Schaltungen umfassen, und
    - Herstellungslinien für Glasfasern (17).
  7. Anlage nach einem der Ansprüche 1 bis 6, dadurch gekennzeichnet, dass die Produktionslinien (5a, 5b, 5c) unabhängig voneinander mit der Hauptleitung (3, 3a, 3b) durch das Netz (4) verbunden sind.
  8. Anlage nach einem der Ansprüche 1 bis 7, dadurch gekennzeichnet, dass das aus der Heliumquelle (2) entnommene Helium am Ausgang der Quelle (2) in flüssiger oder überkritischer Form vorliegt.
  9. Verfahren zum Zuführen von gasförmigem Helium zu mehreren Produktionslinien (5a, 5b, 5c), wobei:
    - eine Hauptleitung (3, 3a, 3b) mit aus einer Heliumquelle (2) mit einer Kapazität von mehr als 7000 Litern entnommenem Helium versorgt wird, wobei das Helium in flüssiger oder überkritischer Form entnommen wird,
    - das Helium in der Hauptleitung (3, 3a, 3b) zu einem Netz mehrerer Nebenleitungen (4a, 4b, 4c) zugeführt wird, die jeweils mindestens eine gasförmiges Helium verwendende Produktionslinie (5a, 5b, 5c) versorgen,
    - das aus der Quelle (2) entnommene Helium einem Verdampfungsschritt in einem an der Hauptleitung (3, 3a, 3b) angeordneten Wärmetauscher (7) zum Erhalten von gasförmigem Helium unterzogen wird;
    - das Helium aus dem Wärmetauscher (7) einem Reinigungsschritt in an der Hauptleitung (3, 3a, 3b) angeordneten Reinigungsmitteln (9) unterzogen wird;
    - jede der Produktionslinien (5a, 5b, 5c) mit so produziertem gasförmigem Helium versorgt wird.
  10. Verfahren nach Anspruch 9, dadurch gekennzeichnet, dass der Helium-Druck und/oder der Helium-Durchfluss in der Hauptleitung (3) in Abhängigkeit von der Summe der Drücke und/oder der Durchflüsse von gasförmigem Helium in jeder der Nebenleitungen (4a, 4b, 4c) eingestellt wird.
EP99401928.9A 1998-07-29 1999-07-28 Vorrichtung und Verfahren zur Versorgung von Helium zu mehreren Produktionslinien Expired - Lifetime EP0976969B2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE69934277.5T DE69934277T3 (de) 1998-07-29 1999-07-28 Vorrichtung und Verfahren zur Versorgung von Helium zu mehreren Produktionslinien

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9809694 1998-07-29
FR9809694A FR2781868B1 (fr) 1998-07-29 1998-07-29 Installation et procede de fourniture d'helium a plusieurs lignes de production

Publications (3)

Publication Number Publication Date
EP0976969A1 EP0976969A1 (de) 2000-02-02
EP0976969B1 EP0976969B1 (de) 2006-12-06
EP0976969B2 true EP0976969B2 (de) 2017-12-20

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EP99401928.9A Expired - Lifetime EP0976969B2 (de) 1998-07-29 1999-07-28 Vorrichtung und Verfahren zur Versorgung von Helium zu mehreren Produktionslinien

Country Status (15)

Country Link
US (1) US6178755B1 (de)
EP (1) EP0976969B2 (de)
JP (1) JP2000055299A (de)
KR (1) KR20000012019A (de)
CN (1) CN1092314C (de)
AR (1) AR024506A1 (de)
AT (1) ATE347668T1 (de)
BR (1) BR9902937A (de)
CA (1) CA2279108A1 (de)
DE (1) DE69934277T3 (de)
ES (1) ES2278432T3 (de)
FR (1) FR2781868B1 (de)
SG (1) SG74156A1 (de)
TW (1) TW410257B (de)
ZA (1) ZA994643B (de)

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KR20020032173A (ko) * 2000-10-26 2002-05-03 윤종용 웨이퍼 냉각을 위한 냉각 가스 공급장치
WO2003043012A1 (en) 2001-11-13 2003-05-22 Seagate Technology Llc Disc drive gas supply system
US20050076652A1 (en) * 2003-10-10 2005-04-14 Berghoff Rudolf Erwin Method and apparatus for removing boiling liquid from a tank
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FR2888120B1 (fr) * 2005-07-07 2008-07-04 Cryo Diffusion S A Sa Dispositif de stockage et de fourniture de fluide cryogenique destine en particulier a la respiration et a l'oxygenotherapie
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EP0976969A1 (de) 2000-02-02
CA2279108A1 (en) 2000-01-29
ES2278432T3 (es) 2007-08-01
DE69934277T3 (de) 2018-08-02
US6178755B1 (en) 2001-01-30
BR9902937A (pt) 2000-03-21
EP0976969B1 (de) 2006-12-06
SG74156A1 (en) 2000-07-18
ZA994643B (en) 2000-01-12
AR024506A1 (es) 2002-10-16
FR2781868B1 (fr) 2000-09-15
TW410257B (en) 2000-11-01
FR2781868A1 (fr) 2000-02-04
CN1245876A (zh) 2000-03-01
ATE347668T1 (de) 2006-12-15
DE69934277D1 (de) 2007-01-18
CN1092314C (zh) 2002-10-09
DE69934277T2 (de) 2007-07-05
JP2000055299A (ja) 2000-02-22
KR20000012019A (ko) 2000-02-25

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