EP0976969B1 - Vorrichtung und Verfahren zur Versorgung von Helium zu mehreren Produktionslinien - Google Patents

Vorrichtung und Verfahren zur Versorgung von Helium zu mehreren Produktionslinien Download PDF

Info

Publication number
EP0976969B1
EP0976969B1 EP99401928A EP99401928A EP0976969B1 EP 0976969 B1 EP0976969 B1 EP 0976969B1 EP 99401928 A EP99401928 A EP 99401928A EP 99401928 A EP99401928 A EP 99401928A EP 0976969 B1 EP0976969 B1 EP 0976969B1
Authority
EP
European Patent Office
Prior art keywords
helium
source
lines
gas
main duct
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP99401928A
Other languages
English (en)
French (fr)
Other versions
EP0976969B2 (de
EP0976969A1 (de
Inventor
Frédéric Castellanet
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Original Assignee
Air Liquide SA
LAir Liquide SA a Directoire et Conseil de Surveillance pour lEtude et lExploitation des Procedes Georges Claude
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=9529142&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=EP0976969(B1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Air Liquide SA, LAir Liquide SA a Directoire et Conseil de Surveillance pour lEtude et lExploitation des Procedes Georges Claude filed Critical Air Liquide SA
Priority to DE69934277.5T priority Critical patent/DE69934277T3/de
Publication of EP0976969A1 publication Critical patent/EP0976969A1/de
Application granted granted Critical
Publication of EP0976969B1 publication Critical patent/EP0976969B1/de
Publication of EP0976969B2 publication Critical patent/EP0976969B2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C5/00—Methods or apparatus for filling containers with liquefied, solidified, or compressed gases under pressures
    • F17C5/06—Methods or apparatus for filling containers with liquefied, solidified, or compressed gases under pressures for filling with compressed gases
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17B—GAS-HOLDERS OF VARIABLE CAPACITY
    • F17B1/00—Gas-holders of variable capacity
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C9/00—Methods or apparatus for discharging liquefied or solidified gases from vessels not under pressure
    • F17C9/02—Methods or apparatus for discharging liquefied or solidified gases from vessels not under pressure with change of state, e.g. vaporisation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2201/00—Vessel construction, in particular geometry, arrangement or size
    • F17C2201/05—Size
    • F17C2201/054—Size medium (>1 m3)
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/01—Mounting arrangements
    • F17C2205/0123—Mounting arrangements characterised by number of vessels
    • F17C2205/013—Two or more vessels
    • F17C2205/0134—Two or more vessels characterised by the presence of fluid connection between vessels
    • F17C2205/0142—Two or more vessels characterised by the presence of fluid connection between vessels bundled in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2221/00—Handled fluid, in particular type of fluid
    • F17C2221/01—Pure fluids
    • F17C2221/016—Noble gases (Ar, Kr, Xe)
    • F17C2221/017—Helium
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
    • F17C2223/01—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the phase
    • F17C2223/0107—Single phase
    • F17C2223/0115—Single phase dense or supercritical, i.e. at high pressure and high density
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
    • F17C2223/01—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the phase
    • F17C2223/0146—Two-phase
    • F17C2223/0153—Liquefied gas, e.g. LPG, GPL
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2225/00—Handled fluid after transfer, i.e. state of fluid after transfer from the vessel
    • F17C2225/01—Handled fluid after transfer, i.e. state of fluid after transfer from the vessel characterised by the phase
    • F17C2225/0107—Single phase
    • F17C2225/0115—Single phase dense or supercritical, i.e. at high pressure and high density
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2225/00—Handled fluid after transfer, i.e. state of fluid after transfer from the vessel
    • F17C2225/01—Handled fluid after transfer, i.e. state of fluid after transfer from the vessel characterised by the phase
    • F17C2225/0146—Two-phase
    • F17C2225/0153—Liquefied gas, e.g. LPG, GPL
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
    • F17C2250/01—Intermediate tanks
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2265/00—Effects achieved by gas storage or gas handling
    • F17C2265/01—Purifying the fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2270/00—Applications
    • F17C2270/01—Applications for fluid transport or storage
    • F17C2270/0165—Applications for fluid transport or storage on the road
    • F17C2270/0168—Applications for fluid transport or storage on the road by vehicles
    • F17C2270/0171—Trucks
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2270/00—Applications
    • F17C2270/01—Applications for fluid transport or storage
    • F17C2270/0165—Applications for fluid transport or storage on the road
    • F17C2270/0168—Applications for fluid transport or storage on the road by vehicles
    • F17C2270/0173—Railways
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2270/00—Applications
    • F17C2270/05—Applications for industrial use

Definitions

  • the present invention relates to an installation and a method for supplying helium, preferably in liquid or supercritical form, to a plurality of production lines at an industrial site.
  • gaseous helium is used in many different sectors of the industry, especially in the electronics industry, to cool silicon slices or wafers, commonly known as “wafers", or to inert the printed circuits, for example , or in the glass industry, for example to cool optical fibers during their manufacturing process.
  • helium is first delivered in liquid form in large quantities to a transfer station and repackaging, in which the helium is vaporized and compressed, before being rerouted on its site of use being conditioned either in gas cylinders or similar containers of varying sizes, but never exceeding a few hundred liters. This is also recalled in US-A-5,386,707 (Col. 1, 1, 30-35).
  • the liquid helium is directly routed to its site of use in a small storage tank, usually in a tank having a volume of less than 3000 liters, where it can be stored before be sent in gaseous form to a site of use.
  • the site of use comprises several production lines each using large quantities of helium gas, the quantities used being variable from one line to another, it is essential to provide as many helium reservoirs gaseous than production lines, that is to say that each production line must be connected, via an individual pipeline to a helium reservoir of its own, for example helium cylinders , so that each of said production lines can be supplied independently of the others depending on the helium requirements of the line in question.
  • the object of the present invention is therefore to overcome the aforementioned drawbacks by proposing a method and a helium supply installation that can be implemented directly on a production site comprising several lines or manufacturing units, operating independently of one another .
  • Another object of the present invention is also to enable gaseous helium to be fed to several production lines consuming variable amounts of gaseous helium, from one line to another, in a flexible manner, that is to say according to the specific needs of each of said lines and therefore independently of variations in consumption of said lines, relative to each other.
  • the main pipeline is connected to a vaporization heat exchanger of liquid helium from the source and means for purifying helium gas.
  • FIG. 1 represents a general diagram of a helium supply installation 1 according to the present invention.
  • the helium supply installation 1 comprises a source 2 of helium, for example a storage tank, having an internal volume of at least 7,000 liters, for example approximately 10,000. liters, which source 2 of helium is connected via a main pipeline 3, 3a, 3b of helium transport, to a network 4 of several secondary lines 4a, 4b, 4c, each supplying a production line 5a, 5b, 5c, helium gas.
  • a source 2 of helium for example a storage tank, having an internal volume of at least 7,000 liters, for example approximately 10,000. liters, which source 2 of helium is connected via a main pipeline 3, 3a, 3b of helium transport, to a network 4 of several secondary lines 4a, 4b, 4c, each supplying a production line 5a, 5b, 5c, helium gas.
  • the helium can be withdrawn from the storage tank 2 in liquid form, by means of the withdrawal means 3, then subsequently vaporized in the heat exchanger 7, or withdrawn directly in gaseous form via the withdrawal means 3b .
  • the helium is withdrawn in liquid or supercritical form.
  • compression means 10 such as a piston compressor or membranes.
  • helium purification means 9 for example a filter or an adsorbent.
  • the source 2 of helium may be a fixed source of helium, such as a storage tank as shown in FIG. 1, ie a mobile source, for example a helium supply truck, as well as diagrammatically in FIG. 2, which FIG. 2 is, moreover, substantially identical to FIG.
  • Figures 3 to 6 represent, for their part, several possible applications of the helium supply installation according to the present invention.
  • FIG. 3 schematizes the application of the helium supply installation 1 described above to the filling of cylinders 13 of diving gas.
  • FIG. 3 shows the same architecture as that of FIGS. 1 and 2, but comprises, in addition, a mixing and homogenizing device 12 arranged on the main pipe 3, intended to obtain a homogeneous mixture of helium gas and of one or more other gases from a secondary source 11 of gas, to obtain a breathing gas mixture that can be used as a breathing gas for diving bottle 13.
  • a mixing and homogenizing device 12 arranged on the main pipe 3, intended to obtain a homogeneous mixture of helium gas and of one or more other gases from a secondary source 11 of gas, to obtain a breathing gas mixture that can be used as a breathing gas for diving bottle 13.
  • the gaseous dive mixture containing helium is then conveyed to a network 4 of several secondary lines 4a to 4c feeding each of lines 5a to 5c for filling the bottle 13 with diving gas.
  • Figure 4 schematically, for its part, the implementation of an installation according to the invention on an electronic material manufacturing site.
  • the helium is conveyed via a pipe 3 to a network 4 comprising several production lines 5a and 5b, such as cooling lines of "wafers" or printed circuits.
  • the device also comprises means for recovering and recycling 14 the helium gas used, which helium is recovered and then optionally purified within a unit 9 'prepurification of recycled gas before being returned to the main pipe 3, upstream of the purification means 9 where the prepurified helium thus recycled undergoes purification sufficient to allow it to be returned to the production lines 5a and 5b.
  • the helium used and recovered by the recycling means 14 contains an impurity content below a predetermined threshold, it is not necessarily necessary to subject it to this pre purification and it can then be returned to line 3 via the bypass 9 ".
  • FIG. 5 represents, for its part, a diagram of an installation according to the invention applied to the supply of helium to manufacturing lines 5a to 5c of optical fibers 17, where helium is used for cooling said fibers. during their passage through the cooling chambers 16.
  • the helium gas can, again, be recovered at the outlet of said cooling chambers 16, discharged via pipes 21 to cooling means 15, and then sent directly to the main pipe 3 via the bypass 19 , or undergo a prepurification within the prepurification means 18 installed on the pipe 20.
  • Figure 6 illustrates the application of the helium supply facility of the invention to a safety pad inflator container manufacturing unit or AIRBAG TM.
  • a tanker truck 2 with a capacity of at least 20000 liters supplies directly, in liquid helium, the production site of said containers 25 for safety cushions.
  • the helium in liquid form, withdrawn from the source 2, is vaporized in the heater 7, then undergoes, if necessary and optionally, a dilution 12 with one or more other gases emanating from a source of secondary gas 11, a compression 10, before being sent to the network 4 of secondary lines 4a, 4b, and finally to be introduced into the containers 25 for safety cushions.
  • the installation and the method according to the invention have several advantages, namely in particular that they allow a helium flow directly on the site of use of said helium, said helium being transported in liquid form in very large containers, generally of more than 7000 liters, without necessarily having to undergo transfer, that is to say reconditioning, between their initial liquefaction or production sites and their sites use.
  • the vaporization of the liquid helium in the form of helium gas can be carried out directly on the site of use and the helium can then optionally undergo a purification beforehand. to be sent to the production lines where it will be used.
  • a minimum flow rate of at least 2 m 3 / h and / or a pressure of 10 5 Pa at 4.10 7 Pa must be respected inside the main pipe 3.
  • helium gas may be optionally recovered and recycled, whether or not subjected to prepurification or subsequent reuse.
  • each of the secondary lines 4a to 4c of the secondary pipe network is connected to a single source 2 of helium, while being independent of one another.
  • the method and the installation according to the present invention make it possible to obtain a very great flexibility of the various production lines of the process using said helium, that is to say that although each line is powered by the same helium source 2, each of said production lines can obtain, at any time, the amount of helium gas necessary for its proper operation.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
  • Separation By Low-Temperature Treatments (AREA)
  • Micromachines (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)

Claims (11)

  1. Anlage (1) zur Lieferung von Helium an mehrere Produktionslinien (5a, 5b, 5c), umfassend:
    - eine Heliumquelle (2) mit einem Innenvolumen von mindestens 7 000 Litern,
    - ein Netz (4) von mehreren Nebenkanälen (4a, 4b, 4c), die jeweils mindestens eine Produktionslinie (5a, 5b, 5c), die gasförmiges Helium verwendet, versorgen,
    - einen Hauptkanal (3, 3a, 3b) zur Beförderung von Helium, der stromaufwärts mit der Heliumquelle (2) und stromabwärts mit dem Netz (4) von Nebenkanälen (4a, 4b, 4c), die die Produktionslinien (5a, 5b, 5c) versorgen, verbunden ist, wobei jede Produktionslinie (5a, 5b, 5c) mit Helium versorgt wird, das von der Heliumquelle (2) mit einem Innenvolumen von mindestens 7000 Litern kommt,
    dadurch gekennzeichnet, dass der Hauptkanal (3, 3a, 3b) mit einem Wärmetauscher (7) zur Verdampfung des flüssigen Heliums aus der Quelle (2) und mit Mitteln zur Reinigung des gasförmigen Heliums (9) verbunden ist.
  2. Anlage nach Anspruch 1, dadurch gekennzeichnet, dass die Heliumquelle (2) ein Innenvolumen von mindestens 8000 Litern, vorzugsweise von mindestens 20000 Litern, auf noch bevorzugtere Weise von mindestens 40000 Litern aufweist.
  3. Anlage nach einem der Ansprüche 1 oder 2, dadurch gekennzeichnet, dass die Heliumquelle (2) beweglich oder fest ist.
  4. Anlage nach einem der Ansprüche 1 bis 3, dadurch gekennzeichnet, dass der Hauptkanal (3, 3a, 3b) ferner mit mindestens einer Vorrichtung verbunden ist, die aus folgender Gruppe ausgewählt wird:
    - Pufferkapazität (8),
    - Kompressionsmittel (10).
  5. Anlage nach einem der Ansprüche 1 bis 4, dadurch gekennzeichnet, dass sie ferner Mittel zur Kontrolle der Menge und/oder des Drucks des gasförmigen Heliums im Hauptkanal (3, 3a, 3b) und/oder in jedem der Nebenkanäle (4a, 4b, 4c) des Netzes (4) umfasst.
  6. Anlage nach einem der Ansprüche 1 bis 5, dadurch gekennzeichnet, dass die Produktionslinien (5a, 5b, 5c) aus folgender Gruppe ausgewählt werden:
    - Linien zur Befüllung von Tauchgasflaschen (13),
    - Linien zur Befüllung von Gashüllen für Lenkballons,
    - Linien zur Befüllung von Behältern (25) zum Aufblasen von Sicherheitskissen (Airbags),
    - Linien zum Härten von Metallteilen mit Helium,
    - Linien zur Herstellung von elektronischen Produkten, umfassend mindestens eine Kühlstelle für "Wafers" oder gedruckte Schaltungen, und
    - Linien zur Herstellung von optischen Fasern (17).
  7. Anlage nach einem der Ansprüche 1 bis 6, dadurch gekennzeichnet, dass die Produktionslinien (5a, 5b, 5c) unabhängig voneinander mit dem Hauptkanal (3, 3a, 3b) über das Netz (4) verbunden sind.
  8. Anlage nach einem der Ansprüche 1 bis 7, dadurch gekennzeichnet, dass das der Heliumquelle (2) entnommene Helium am Ausgang aus der Quelle (2) in flüssiger oder superkritischer Form vorhanden ist.
  9. Verfahren zur Bereitstellung von Helium für mehrere Produktionslinien (5a, 5b, 5c), bei dem:
    - ein Hauptkanal (3, 3a, 3b) mit aus einer Heliumquelle (2) mit einem Fassungsvermögen von über 7000 Litern entnommenem Helium gespeist wird,
    - das Helium in den Hauptkanal (3, 3a, 3b) bis zu einem Netz von mehreren Nebenkanälen (4a, 4b, 4c) befördert wird, die jeweils mindestens eine Produktionslinie (5a, 5b, 5c) versorgen, die gasförmiges Helium verwendet,
    - jede der Produktionslinien (5a, 5b, 5c) mit Helium in gasförmiger Form versorgt wird, das von der Heliumquelle (2) kommt.
  10. Verfahren nach Anspruch 9, dadurch gekennzeichnet, dass das Helium der Heliumquelle (2) in flüssiger oder superkritischer Form entnommen und nach der Entnahme mindestens einem Verdampfungsschritt unterzogen wird, um gasförmiges Helium zu erhalten.
  11. Verfahren nach einem der Ansprüche 9 oder 10, dadurch gekennzeichnet, dass der Druck und/oder die Menge des Heliums in dem Hauptkanal (3) in Abhängigkeit von der Summe der Druck- und/oder Mengenwerte des gasförmigen Heliums in jedem der Nebenkanäle (4a, 4b, 4c) angepasst wird.
EP99401928.9A 1998-07-29 1999-07-28 Vorrichtung und Verfahren zur Versorgung von Helium zu mehreren Produktionslinien Expired - Lifetime EP0976969B2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE69934277.5T DE69934277T3 (de) 1998-07-29 1999-07-28 Vorrichtung und Verfahren zur Versorgung von Helium zu mehreren Produktionslinien

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9809694A FR2781868B1 (fr) 1998-07-29 1998-07-29 Installation et procede de fourniture d'helium a plusieurs lignes de production
FR9809694 1998-07-29

Publications (3)

Publication Number Publication Date
EP0976969A1 EP0976969A1 (de) 2000-02-02
EP0976969B1 true EP0976969B1 (de) 2006-12-06
EP0976969B2 EP0976969B2 (de) 2017-12-20

Family

ID=9529142

Family Applications (1)

Application Number Title Priority Date Filing Date
EP99401928.9A Expired - Lifetime EP0976969B2 (de) 1998-07-29 1999-07-28 Vorrichtung und Verfahren zur Versorgung von Helium zu mehreren Produktionslinien

Country Status (15)

Country Link
US (1) US6178755B1 (de)
EP (1) EP0976969B2 (de)
JP (1) JP2000055299A (de)
KR (1) KR20000012019A (de)
CN (1) CN1092314C (de)
AR (1) AR024506A1 (de)
AT (1) ATE347668T1 (de)
BR (1) BR9902937A (de)
CA (1) CA2279108A1 (de)
DE (1) DE69934277T3 (de)
ES (1) ES2278432T3 (de)
FR (1) FR2781868B1 (de)
SG (1) SG74156A1 (de)
TW (1) TW410257B (de)
ZA (1) ZA994643B (de)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20020032173A (ko) * 2000-10-26 2002-05-03 윤종용 웨이퍼 냉각을 위한 냉각 가스 공급장치
WO2003043012A1 (en) 2001-11-13 2003-05-22 Seagate Technology Llc Disc drive gas supply system
US20050076652A1 (en) * 2003-10-10 2005-04-14 Berghoff Rudolf Erwin Method and apparatus for removing boiling liquid from a tank
RU2267023C2 (ru) * 2004-02-11 2005-12-27 Федеральное государственное унитарное предприятие "Конструкторское бюро общего машиностроения им. В.П. Бармина" Способ заправки гелием бортовых баллонов ракет-носителей и космических аппаратов и система заправки гелием бортовых баллонов ракет-носителей и космических аппаратов
GB2416390B (en) * 2004-07-16 2006-07-26 Statoil Asa LCD Offshore Transport System
FR2888120B1 (fr) * 2005-07-07 2008-07-04 Cryo Diffusion S A Sa Dispositif de stockage et de fourniture de fluide cryogenique destine en particulier a la respiration et a l'oxygenotherapie
DE102005032556B4 (de) * 2005-07-11 2007-04-12 Atlas Copco Energas Gmbh Anlage und Verfahren zur Nutzung eines Gases
US7984838B2 (en) * 2006-05-04 2011-07-26 Medtronic Ps Medical, Inc. Recycled helium gas surgical instrument
JP5190315B2 (ja) * 2008-07-25 2013-04-24 東京電力株式会社 低温液の気化ガス供給設備
US20110023501A1 (en) * 2009-07-30 2011-02-03 Thomas Robert Schulte Methods and systems for bulk ultra-high purity helium supply and usage
RU2440505C1 (ru) * 2010-10-08 2012-01-20 Федеральное государственное унитарное предприятие "Центр эксплуатации объектов наземной космической инфраструктуры" (ФГУП "ЦЭНКИ") Способ и устройство для заправки гелием бортовых баллонов ракетоносителей
CN102563337A (zh) * 2010-12-22 2012-07-11 北京博鹏北科科技有限公司 煤气转存系统和方法
FR2993343B1 (fr) * 2012-07-13 2015-06-05 Air Liquide Procede et appareil de vaporisation de liquide riche en dioxyde de carbone
US9234472B2 (en) 2012-08-08 2016-01-12 Caterpillar Inc. Dual fuel engine and evaporated natural gas system
CN103470946B (zh) * 2013-08-29 2015-05-27 北京宇航系统工程研究所 一种高压超临界氦贮罐
CN103672396A (zh) * 2013-11-15 2014-03-26 苏州金宏气体股份有限公司 一种高纯气体液体储罐泻压放空回收利用的方法
CN103672395A (zh) * 2013-11-15 2014-03-26 苏州金宏气体股份有限公司 一种高纯气体运输储罐放空余气回收利用的方法
CN104676248B (zh) * 2014-12-26 2017-03-22 西南石油大学 一种氦气循环系统
CN105546333A (zh) * 2016-01-22 2016-05-04 池州森大轻工制品有限公司 一种高纯气体充装系统
CN109931501B (zh) * 2017-12-18 2021-04-06 上海弗川自动化技术有限公司 一种分段式加热气体输送系统
US11231144B2 (en) 2018-04-26 2022-01-25 Messer Industries Usa, Inc. Methods for helium storage and supply
JP6574321B1 (ja) * 2019-02-15 2019-09-11 石油資源開発株式会社 浮体式低温液化ガス充填設備及びこれを用いた低温液化ガス配送方法
CN112628601B (zh) * 2020-12-03 2022-12-13 蓝箭航天技术有限公司 用于高压气体制备装置的温度控制系统及其控制方法
CN114484267B (zh) * 2022-01-29 2024-03-22 山东简森能源科技有限公司 一种氦气分装回收纯化工艺

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4559786A (en) * 1982-02-22 1985-12-24 Air Products And Chemicals, Inc. High pressure helium pump for liquid or supercritical gas
DE3417055C2 (de) * 1984-05-09 1986-05-07 Messerschmitt-Bölkow-Blohm GmbH, 8012 Ottobrunn Helium-II-Phasentrenner
US4766731A (en) * 1987-09-01 1988-08-30 Union Carbide Corporation Method to deliver ultra high purity helium gas to a use point
JPH0622224B2 (ja) * 1988-03-05 1994-03-23 大阪酸素工業株式会社 パーティクルが少ないか又は含まない液化二酸化炭素の供給
US4961325A (en) * 1989-09-07 1990-10-09 Union Carbide Corporation High pressure gas supply system
US5243821A (en) * 1991-06-24 1993-09-14 Air Products And Chemicals, Inc. Method and apparatus for delivering a continuous quantity of gas over a wide range of flow rates
DE4201952A1 (de) † 1992-01-24 1993-07-29 Linde Ag Kaltgasversorgung
US5377491A (en) † 1992-12-11 1995-01-03 Praxair Technology, Inc. Coolant recovery process
US5386707A (en) * 1992-12-31 1995-02-07 Praxair Technology, Inc. Withdrawal of cryogenic helium with low impurity from a vessel
JP2959947B2 (ja) * 1994-02-28 1999-10-06 信越石英株式会社 原料ガス供給方法及び装置
FR2747595B1 (fr) * 1996-04-19 1998-08-21 Air Liquide Procede et installation de fourniture d'helium ultra-pur
US5934081A (en) * 1998-02-03 1999-08-10 Praxair Technology, Inc. Cryogenic fluid cylinder filling system

Also Published As

Publication number Publication date
BR9902937A (pt) 2000-03-21
EP0976969B2 (de) 2017-12-20
CA2279108A1 (en) 2000-01-29
JP2000055299A (ja) 2000-02-22
ATE347668T1 (de) 2006-12-15
DE69934277T3 (de) 2018-08-02
FR2781868A1 (fr) 2000-02-04
KR20000012019A (ko) 2000-02-25
DE69934277D1 (de) 2007-01-18
EP0976969A1 (de) 2000-02-02
SG74156A1 (en) 2000-07-18
FR2781868B1 (fr) 2000-09-15
CN1092314C (zh) 2002-10-09
DE69934277T2 (de) 2007-07-05
AR024506A1 (es) 2002-10-16
TW410257B (en) 2000-11-01
ZA994643B (en) 2000-01-12
CN1245876A (zh) 2000-03-01
ES2278432T3 (es) 2007-08-01
US6178755B1 (en) 2001-01-30

Similar Documents

Publication Publication Date Title
EP0976969B1 (de) Vorrichtung und Verfahren zur Versorgung von Helium zu mehreren Produktionslinien
KR20200054884A (ko) 액화 수소를 저장 및 분배하기 위한 방법 및 설비
US20050160910A1 (en) Method and system for supplying high purity fluid
US5894742A (en) Methods and systems for delivering an ultra-pure gas to a point of use
JP2002526369A (ja) 水素化物ガス流の精製方法および装置
JP2013529764A (ja) フッ素容器
US6260568B1 (en) Apparatus and method for supplying uninterrupted gas
WO2017010083A1 (ja) 液化水素移送方法
AU2015329208B2 (en) Liquefied hydrogen transferring system
CN114877249A (zh) 一种70MPa大流量加氢系统
US20070007879A1 (en) Low vapor pressure gas delivery system and apparatus
US6422610B1 (en) Deformable fluid supply line
US6557591B2 (en) Bulk gas built-in purifier with dual valve bulk container
WO2019004280A1 (ja) 液化ガスの排出システム及び排出方法
EP2871669A1 (de) Gasmisschung und Gastransportgefäß dafür
KR19980018341A (ko) 기체상 헬륨을 재액화하는 방법 및 장치
JP2004150503A (ja) 自動車燃料用ｌｐｇ充填方法及びそのシステム
US6805848B2 (en) Built-in purifier for horizontal liquefied gas cylinders
CN120096744B (zh) 一种化学品船惰性气体系统及化学品船
CN222503530U (zh) 一种新型的氢气卸气柱
US20260043520A1 (en) System and method for high flow rate liquid hydrogen tank filling
TW202104064A (zh) 灌充設備及其熱交換裝置與氣體回收方法及灌充方法
KR20250087707A (ko) 가스 치환 방법 및 액화 가스 설비
JP2000274595A (ja) Ｌｎｇローリーの液詰め替え方法
Webb Challenging Pneumatic Requirements for Acoustic Testing of the Second Stage for the New Delta 3 Rocket

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

AX Request for extension of the european patent

Free format text: AL;LT;LV;MK;RO;SI

17P Request for examination filed

Effective date: 20000802

AKX Designation fees paid

Free format text: AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

RAP1 Party data changed (applicant data changed or rights of an application transferred)

Owner name: L'AIR LIQUIDE, S.A. A DIRECTOIRE ET CONSEIL DE SUR

GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

GRAS Grant fee paid

Free format text: ORIGINAL CODE: EPIDOSNIGR3

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: NL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20061206

Ref country code: IE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20061206

Ref country code: FI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20061206

Ref country code: DK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20061206

REG Reference to a national code

Ref country code: GB

Ref legal event code: FG4D

Free format text: NOT ENGLISH

REG Reference to a national code

Ref country code: CH

Ref legal event code: EP

REG Reference to a national code

Ref country code: IE

Ref legal event code: FG4D

Free format text: LANGUAGE OF EP DOCUMENT: FRENCH

REF Corresponds to:

Ref document number: 69934277

Country of ref document: DE

Date of ref document: 20070118

Kind code of ref document: P

GBT Gb: translation of ep patent filed (gb section 77(6)(a)/1977)

Effective date: 20070227

REG Reference to a national code

Ref country code: SE

Ref legal event code: TRGR

RAP2 Party data changed (patent owner data changed or rights of a patent transferred)

Owner name: L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'E

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: PT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20070507

NLV1 Nl: lapsed or annulled due to failure to fulfill the requirements of art. 29p and 29m of the patents act
RAP2 Party data changed (patent owner data changed or rights of a patent transferred)

Owner name: L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'E

REG Reference to a national code

Ref country code: ES

Ref legal event code: FG2A

Ref document number: 2278432

Country of ref document: ES

Kind code of ref document: T3

PLBI Opposition filed

Free format text: ORIGINAL CODE: 0009260

PLAX Notice of opposition and request to file observation + time limit sent

Free format text: ORIGINAL CODE: EPIDOSNOBS2

26 Opposition filed

Opponent name: PRAXAIR, INC.

Effective date: 20070905

PLBB Reply of patent proprietor to notice(s) of opposition received

Free format text: ORIGINAL CODE: EPIDOSNOBS3

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MC

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20070731

Ref country code: GR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20070307

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LU

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20070728

Ref country code: CY

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20061206

RDAF Communication despatched that patent is revoked

Free format text: ORIGINAL CODE: EPIDOSNREV1

APBM Appeal reference recorded

Free format text: ORIGINAL CODE: EPIDOSNREFNO

APBP Date of receipt of notice of appeal recorded

Free format text: ORIGINAL CODE: EPIDOSNNOA2O

APAH Appeal reference modified

Free format text: ORIGINAL CODE: EPIDOSCREFNO

APBQ Date of receipt of statement of grounds of appeal recorded

Free format text: ORIGINAL CODE: EPIDOSNNOA3O

APBU Appeal procedure closed

Free format text: ORIGINAL CODE: EPIDOSNNOA9O

REG Reference to a national code

Ref country code: FR

Ref legal event code: PLFP

Year of fee payment: 18

REG Reference to a national code

Ref country code: FR

Ref legal event code: PLFP

Year of fee payment: 19

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: ES

Payment date: 20170825

Year of fee payment: 19

PUAH Patent maintained in amended form

Free format text: ORIGINAL CODE: 0009272

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: PATENT MAINTAINED AS AMENDED

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: AT

Payment date: 20170720

Year of fee payment: 19

27A Patent maintained in amended form

Effective date: 20171220

AK Designated contracting states

Kind code of ref document: B2

Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

REG Reference to a national code

Ref country code: DE

Ref legal event code: R102

Ref document number: 69934277

Country of ref document: DE

REG Reference to a national code

Ref country code: CH

Ref legal event code: AELC

REG Reference to a national code

Ref country code: AT

Ref legal event code: MK05

Ref document number: 347668

Country of ref document: AT

Kind code of ref document: T

Effective date: 20061206

REG Reference to a national code

Ref country code: SE

Ref legal event code: NAV

REG Reference to a national code

Ref country code: FR

Ref legal event code: PLFP

Year of fee payment: 20

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: ES

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20171220

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: AT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20061206

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 20180723

Year of fee payment: 20

Ref country code: IT

Payment date: 20180719

Year of fee payment: 20

Ref country code: FR

Payment date: 20180725

Year of fee payment: 20

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: BE

Payment date: 20180718

Year of fee payment: 20

Ref country code: GB

Payment date: 20180719

Year of fee payment: 20

Ref country code: SE

Payment date: 20180719

Year of fee payment: 20

Ref country code: CH

Payment date: 20180719

Year of fee payment: 20

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: AT

Free format text: THE PATENT HAS BEEN ANNULLED BY A DECISION OF A NATIONAL AUTHORITY

Effective date: 20061206

RDAF Communication despatched that patent is revoked

Free format text: ORIGINAL CODE: EPIDOSNREV1

RDAE Information deleted related to despatch of communication that patent is revoked

Free format text: ORIGINAL CODE: EPIDOSDREV1

REG Reference to a national code

Ref country code: DE

Ref legal event code: R071

Ref document number: 69934277

Country of ref document: DE

REG Reference to a national code

Ref country code: CH

Ref legal event code: PL

REG Reference to a national code

Ref country code: GB

Ref legal event code: PE20

Expiry date: 20190727

REG Reference to a national code

Ref country code: BE

Ref legal event code: MK

Effective date: 20190728

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GB

Free format text: LAPSE BECAUSE OF EXPIRATION OF PROTECTION

Effective date: 20190727

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20180728