EP0976969B2 - Apparatus and process for the supply of helium to a plurality of production lines - Google Patents
Apparatus and process for the supply of helium to a plurality of production lines Download PDFInfo
- Publication number
- EP0976969B2 EP0976969B2 EP99401928.9A EP99401928A EP0976969B2 EP 0976969 B2 EP0976969 B2 EP 0976969B2 EP 99401928 A EP99401928 A EP 99401928A EP 0976969 B2 EP0976969 B2 EP 0976969B2
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- Prior art keywords
- helium
- lines
- source
- main pipe
- gaseous
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17B—GAS-HOLDERS OF VARIABLE CAPACITY
- F17B1/00—Gas-holders of variable capacity
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C5/00—Methods or apparatus for filling containers with liquefied, solidified, or compressed gases under pressures
- F17C5/06—Methods or apparatus for filling containers with liquefied, solidified, or compressed gases under pressures for filling with compressed gases
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C9/00—Methods or apparatus for discharging liquefied or solidified gases from vessels not under pressure
- F17C9/02—Methods or apparatus for discharging liquefied or solidified gases from vessels not under pressure with change of state, e.g. vaporisation
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2201/00—Vessel construction, in particular geometry, arrangement or size
- F17C2201/05—Size
- F17C2201/054—Size medium (>1 m3)
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
- F17C2205/01—Mounting arrangements
- F17C2205/0123—Mounting arrangements characterised by number of vessels
- F17C2205/013—Two or more vessels
- F17C2205/0134—Two or more vessels characterised by the presence of fluid connection between vessels
- F17C2205/0142—Two or more vessels characterised by the presence of fluid connection between vessels bundled in parallel
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2221/00—Handled fluid, in particular type of fluid
- F17C2221/01—Pure fluids
- F17C2221/016—Noble gases (Ar, Kr, Xe)
- F17C2221/017—Helium
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
- F17C2223/01—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the phase
- F17C2223/0107—Single phase
- F17C2223/0115—Single phase dense or supercritical, i.e. at high pressure and high density
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
- F17C2223/01—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the phase
- F17C2223/0146—Two-phase
- F17C2223/0153—Liquefied gas, e.g. LPG, GPL
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2225/00—Handled fluid after transfer, i.e. state of fluid after transfer from the vessel
- F17C2225/01—Handled fluid after transfer, i.e. state of fluid after transfer from the vessel characterised by the phase
- F17C2225/0107—Single phase
- F17C2225/0115—Single phase dense or supercritical, i.e. at high pressure and high density
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2225/00—Handled fluid after transfer, i.e. state of fluid after transfer from the vessel
- F17C2225/01—Handled fluid after transfer, i.e. state of fluid after transfer from the vessel characterised by the phase
- F17C2225/0146—Two-phase
- F17C2225/0153—Liquefied gas, e.g. LPG, GPL
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
- F17C2250/01—Intermediate tanks
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2265/00—Effects achieved by gas storage or gas handling
- F17C2265/01—Purifying the fluid
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2270/00—Applications
- F17C2270/01—Applications for fluid transport or storage
- F17C2270/0165—Applications for fluid transport or storage on the road
- F17C2270/0168—Applications for fluid transport or storage on the road by vehicles
- F17C2270/0171—Trucks
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2270/00—Applications
- F17C2270/01—Applications for fluid transport or storage
- F17C2270/0165—Applications for fluid transport or storage on the road
- F17C2270/0168—Applications for fluid transport or storage on the road by vehicles
- F17C2270/0173—Railways
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2270/00—Applications
- F17C2270/05—Applications for industrial use
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Filling Or Discharging Of Gas Storage Vessels (AREA)
- Separation By Low-Temperature Treatments (AREA)
- Micromachines (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
Description
La présente invention concerne une installation et un procédé de fourniture d'hélium, de préférence sous forme liquide ou supercritique, à plusieurs lignes de production sur un site Industriel.The present invention relates to an installation and a method for supplying helium, preferably in liquid or supercritical form, to a plurality of production lines at an industrial site.
Actuellement, l'hélium sous forme gazeuse est utilisé dans de nombreux secteurs différents de l'industrie, notamment dans l'industrie électronique, pour refroidir des tranches ou galettes de silicium, communément appelées "wafers", ou inerter les circuits imprimés, par exemple, ou dans l'industrie du verre, par exemple pour refroidir des fibres optiques durant leur procédé de fabrication.Currently, gaseous helium is used in many different sectors of the industry, especially in the electronics industry, to cool silicon slices or wafers, commonly known as "wafers", or to inert the printed circuits, for example , or in the glass industry, for example to cool optical fibers during their manufacturing process.
Habituellement, l'hélium est d'abord livré sous forme liquide en grande quantité à une station de transfert et de reconditionnement, dans laquelle l'hélium est vaporisé puis comprimé, avant d'être réacheminé sur son site d'utilisation en étant conditionné soit dans des bouteilles de gaz ou récipients analogues de tailles variables, mais dont la contenance n'excède jamais quelques centaines de litres. Cela est d'ailleurs rappelé dans le document
En outre, dans certains cas, l'hélium liquide est directement acheminé jusque sur son site d'utilisation dans un réservoir de stockage de faible contenance, généralement dans un réservoir ayant un volume inférieur à 3000 litres, où il peut être stocké avant d'être envoyé sous forme gazeuse vers un site d'utilisation.In addition, in some cases, the liquid helium is directly routed to its site of use in a small storage tank, usually in a tank having a volume of less than 3000 liters, where it can be stored before be sent in gaseous form to a site of use.
Dans ce cas, lorsque le site d'utilisation comporte plusieurs lignes de production utilisant chacune de grandes quantités d'hélium gazeux, les quantités utilisées étant variables d'une ligne à l'autre, il est indispensable de prévoir autant de réservoirs d'hélium gazeux que de lignes de production, c'est-à-dire que chaque ligne de production doit être reliée, par l'intermédiaire d'une canalisation individuelle à un réservoir d'hélium qui lui est propre, par exemple des bouteilles d'hélium, de manière à ce que chacune desdites lignes de production puisse être alimentée indépendamment des autres en fonction des besoins en hélium de la ligne considérée.In this case, when the site of use comprises several production lines each using large quantities of helium gas, the quantities used being variable from one line to another, it is essential to provide as many helium reservoirs gaseous than production lines, that is to say that each production line must be connected, via an individual pipeline to a helium reservoir of its own, for example helium cylinders , so that each of said production lines can be supplied independently of the others depending on the helium requirements of the line in question.
De tels dispositifs sont notamment décrits dans les documents
Or, ces types d'installations connues présentent plusieurs inconvénients, à savoir:
- le fait de devoir procéder à un reconditionnement de l'hélium liquide sous forme d'hélium gazeux dans une station de transfert engendre une augmentation considérable des coûts de transport et de conditionnement du fluide;
- lorsque l'hélium liquide est livré sous forme de récipients pressurisés sur le site d'utilisation, il est nécessaire de procéder à un remplacement d'autant plus fréquent desdits récipients que la quantité d'hélium qu'ils contiennent est faible;
- lorsque l'on relie chaque ligne de production à son propre réservoir d'hélium, on augmente considérablement la complexité de l'installation de par une multiplication du nombre d'équipement et donc, là encore, du coût global du procédé de fabrication subséquent.
- the fact of having to repackage liquid helium in the form of helium gas in a transfer station generates a considerable increase in the cost of transporting and conditioning the fluid;
- when the liquid helium is delivered in the form of pressurized containers at the site of use, it is necessary to carry out a more frequent replacement of said containers that the amount of helium they contain is low;
- when each production line is connected to its own helium reservoir, the complexity of the installation is considerably increased by a multiplication of the number of equipment and thus, again, by the overall cost of the subsequent manufacturing process.
Le but de la présente invention est donc de pallier les inconvénients précités en proposant un procédé et une installation de fourniture d'hélium pouvant être mise en oeuvre directement sur un site de production comprenant plusieurs lignes ou unités de fabrication, fonctionnant indépendamment les unes des autres.The object of the present invention is therefore to overcome the aforementioned drawbacks by proposing a method and a helium supply installation that can be implemented directly on a production site comprising several lines or manufacturing units, operating independently of one another .
Un autre but de la présente invention est aussi de permettre d'alimenter en hélium gazeux plusieurs lignes de production consommant des quantités variables d'hélium gazeux, d'une ligne à l'autre, de manière souple, c'est-à-dire en fonction des besoins propres de chacunes desdites lignes et donc indépendamment des variations de consommations desdites lignes, les unes par rapport aux autres.Another object of the present invention is also to enable gaseous helium to be fed to several production lines consuming variable amounts of gaseous helium, from one line to another, in a flexible manner, that is to say according to the specific needs of each of said lines and therefore independently of variations in consumption of said lines, relative to each other.
La présente invention concerne alors une installation de fourniture d'hélium à plusieurs lignes de production comprenant :
- une source d'hélium ayant un volume interne d'au moins 7000 litres,
- un réseau de plusieurs canalisations secondaires alimentant chacune au moins une ligne de production utilisant de l'hélium gazeux,
- une canalisation principale d'acheminement d'hélium relié, en amont, à ladite source d'hélium et, en aval, audit réseau de canalisations secondaires alimentant lesdites lignes de production, chaque ligne de production étant alimentée avec de l'hélium issu de la source d'hélium ayant un volume interne, c'est-à-dire une contenance supérieure à 7000 litres.
- a helium source having an internal volume of at least 7000 liters,
- a network of several secondary lines each supplying at least one production line using helium gas,
- a helium supply main line connected upstream to said source of helium and downstream to said network of secondary lines supplying said production lines, each production line being fed with helium from the helium source having an internal volume, that is to say a capacity greater than 7000 liters.
Une telle installation, conforme au préambule de la revendication principale est décrite dans le document
De préférence, l'installation selon l'invention comprend l'une ou plusieurs des caractéristiques suivantes:
- la source d'hélium a un volume interne d'au moins 8 000 litres, de préférence d'au moins 15000 litres, de préférence encore d'au moins 20000 litres, préférentiellement encore d'au moins 40000 à 50000 litres;
- la source d'hélium est mobile, tel un camion citerne ou un wagon citerne, ou fixe, telle une cuve de stockage ou une capacité tampon;
- la canalisation principale est reliée, en outre, à au moins un dispositif choisi dans le groupe formé par une capacité tampon, et/ou des moyens de compression.
- elle comporte, en outre, des moyens de contrôle du débit et/ou de la pression d'hélium gazeux dans canalisation principale et/ou dans chacune des canalisations secondaires du réseau;
- lesdites lignes de production sont choisies dans le groupe formé par :
- des lignes de remplissage de bouteilles de gaz de plongée,
- des lignes d'alimentation des poches à gaz ou enveloppes de gaz présentes dans un ballon dirigeable, lesdites lignes d'alimentation étant alors des ramifications de la canalisation principale de gaz parcourant le ballon dirigeable. En d'autres termes, la canalisation principale et les lignes d'alimentation sont alors directement amenagées à l'intérieur du ballon dirigeable,
- des lignes de remplissage de récipients de gonflage de coussins de sécurité (AIRBAGS),
- des lignes de fabrication de produits électroniques comprenant au moins un site de refroidissement de "wafers" ou de circuits imprimés, le refroidissement étant réalisé à l'aide d'hélium gazeux,
- des lignes de fabrication de fibres optiques, ou
- des lignes de trempe à l'hélium de pièces métalliques.
- lesdites lignes de production sont reliées, indépendamment les unes des autres, à ladite canalisation principale par l'intermédiaire dudit réseau,
- l'hélium soutiré de ladite source d'hélium est sous forme gazeuse, liquide ou supercritique, de préférence sous forme liquide ou supercritique.
- the helium source has an internal volume of at least 8000 liters, preferably at least 15000 liters, more preferably at least 20000 liters, more preferably at least 40000 to 50000 liters;
- the helium source is mobile, such as a tank truck or tank car, or stationary, such as a storage tank or a buffer tank;
- the main pipeline is connected, moreover, to least one device selected from the group consisting of a buffer capacity, and / or compression means.
- it further comprises means for controlling the flow and / or the helium gas pressure in the main pipe and / or in each of the secondary pipes of the network;
- said production lines are chosen from the group formed by:
- filling lines for diving gas cylinders,
- supply lines of the gas pockets or gas envelopes present in an airship, said supply lines then being branches of the main pipeline of gas flowing through the airship. In other words, the main pipeline and the supply lines are then directly arranged inside the airship,
- filling lines of airbag inflating containers (AIRBAGS),
- electronic product manufacturing lines comprising at least one cooling site for "wafers" or printed circuits, the cooling being carried out using helium gas,
- optical fiber manufacturing lines, or
- helium quenching lines of metal parts.
- said production lines are connected, independently of one another, to said main line via said network,
- the helium withdrawn from said helium source is in gaseous, liquid or supercritical form, preferably in liquid or supercritical form.
L'invention concerne également un procédé de fourniture d'hélium à plusieurs lignes de production selon la revendication 9.The invention also relates to a method for supplying helium to several production lines according to
De préférence le procédé de l'invention comprend l'une ou plusieurs des caractéristiques suivantes:
- l'hélium est soutiré de la source d'hélium sous forme liquide ou supercritique et est soumis, après soutirage, à au moins une étape de vaporisation, de manière à obtenir de l'hélium gazeux,
- on ajuste la pression et/ou le débit d'hélium dans la canalisation principale en fonction de la somme des pressions et/ou des débits d'hélium gazeux dans chacune desdites canalisations secondaires.
- the helium is withdrawn from the source of helium in liquid or supercritical form and is subjected, after withdrawal, to at least one vaporization step, so as to obtain helium gas,
- adjusting the pressure and / or the flow rate of helium in the main pipe according to the sum of the pressures and / or the flow rates of helium gas in each of said secondary pipes.
La présente invention va maintenant être décrite plus en détail à l'aide des figures ci-annexées données à titre illustratif mais non limitatif.The present invention will now be described in more detail with the aid of the appended figures given for illustrative but not limiting.
La
Ainsi que représenté sur la
Selon le cas, l'hélium peut être soutiré du réservoir 2 de stockage sous forme liquide, par le biais des moyens de soutirage 3, puis subséquemment vaporisé dans l'échangeur thermique 7, soit soutiré directement sous forme gazeuse via les moyens de soutirage 3b. De préférence, l'hélium est soutiré sous forme liquide ou supercritique.Depending on the case, the helium can be withdrawn from the
Afin d'obtenir une pression suffisante en hélium dans la canalisation 3, on peut agencer sur celle-ci des moyens de compression 10, tel un compresseur à piston ou membranes.In order to obtain a sufficient helium pressure in the
En outre, lorsque l'hélium distribué aux différentes lignes de production 5a à 5c doit avoir une teneur en impuretés inférieure à un certain seuil, il est également possible d'agencer sur la canalisation 3 des moyens de purification 9 d'hélium, par exemple un filtre ou un adsorbant.In addition, when the helium distributed to the
Par ailleurs, il est aussi possible d'installer une capacité tampon 8 sur la canalisation principale 3.Moreover, it is also possible to install a
Selon le cas, la source 2 d'hélium peut être une source fixe d'hélium, tel un réservoir de stockage ainsi que représenté sur la
Les
Plus précisément, la
Ainsi, la
Le mélange gazeux de plongée contenant de l'hélium est ensuite acheminé vers un réseau 4 de plusieurs canalisation secondaire 4a à 4c alimentant chacune des lignes 5a à 5c de remplissage de bouteille 13 de gaz de plongée.The gaseous dive mixture containing helium is then conveyed to a network 4 of several
La
Dans ce cas, le dispositif comprend également des moyens de récupération et de recyclage 14 de l'hélium gazeux utilisé, lequel hélium est récupéré puis éventuellement purifié au sein d'une unité 9' de prépurification de gaz recyclé avant d'être renvoyé vers la canalisation principale 3, en amont des moyens de purification 9 où l'hélium prépurifié ainsi recyclé subit une purification suffisante pour lui permettre d'être à nouveau renvoyé vers les lignes de production 5a et 5b.In this case, the device also comprises means for recovering and
Cependant, lorsque l'hélium utilisé et récupéré par les moyens de recyclage 14 contient une teneur en impuretés inférieure à un seuil prédéterminé, il n'est pas forcément nécessaire de lui faire subir cette pré purification et il peut alors être renvoyé vers la ligne 3 par l'intermédiaire du bipasse 9".However, when the helium used and recovered by the recycling means 14 contains an impurity content below a predetermined threshold, it is not necessarily necessary to undergo this pre-purification and can then be returned to the
La
L'hélium gazeux peut, là encore, être récupéré à la sortie desdites enceintes 16 de refroidissement, évacué via des canalisations 21 jusqu'à des moyens de refroidissement 15, puis envoyé soit directement vers la canalisation principale 3 par l'intermédiaire du bipasse 19, soit subir une prépurification au sein des moyens de prépurification 18 installés sur la canalisation 20.The helium gas can, again, be recovered at the outlet of said
La
Dans ce cas, un camion citerne 2 d'une contenance d'au moins 20000 litres approvisionne directement, en hélium liquide, le site de production desdits récipients 25 pour coussins de sécurité. L'hélium sous forme liquide, soutiré de la source 2, est vaporisé dans le réchauffeur 7, subit ensuite, si nécessaire et de manière optionnelle, une dilution 12 avec un ou plusieurs autres gaz émanant d'une source de gaz secondaire 11, une compression 10, avant d'être envoyé vers le réseau 4 de canalisations secondaires 4a, 4b, puis d'être finalement introduit dans les récipients 25 pour coussins de sécurité.In this case, a
L'installation et le procédé selon l'invention présentent plusieurs avantages, à savoir notamment qu'ils permettent un acheminement d'hélium directement sur le site d'utilisation dudit hélium, ledit hélium étant acheminé sous forme liquide dans des containers de très grandes dimensions, en général de plus de 7000 litres, sans avoir à subir obligatoirement de transfert, c'est-à-dire de reconditionnement, entre leurs sites de liquéfaction initiales ou de production et leurs sites d'utilisation.The installation and the method according to the invention have several advantages, namely in particular that they allow a helium flow directly on the site of use of said helium, said helium being conveyed in liquid form in very large containers generally of more than 7000 liters, without necessarily having to undergo transfer, that is to say repackaging, between their initial liquefaction or production sites and their sites of use.
En outre, comme on peut le voir sur les figures précédentes, la vaporisation de l'hélium liquide sous forme d'hélium gazeux peut être réalisée directement sur le site d'utilisation et l'hélium peut, ensuite, subir éventuellement une purification avant d'être envoyé vers les lignes de production où il sera utilisé.In addition, as can be seen in the preceding figures, the vaporization of the liquid helium in the form of helium gas can be carried out directly on the site of use and the helium can then optionally undergo a purification beforehand. to be sent to the production lines where it will be used.
En général, il convient de respecter à l'intérieur de la canalisation principale 3, un débit minimum d'au moins 2 m3/h et/ou une pression de 105 Pa à 4.107 Pa.In general, to be observed inside of the
Après utilisation, l'hélium gazeux peut être éventuellement récupéré et recyclé, en subissant ou non une prépurification se réutilisation subséquente.After use, helium gas may be optionally recovered and recycled, whether or not subjected to prepurification or subsequent reuse.
En outre, chacune des lignes secondaires 4a à 4c du réseau secondaire de canalisation n'est reliée qu'à une source unique 2 d'hélium, toute en étant indépendante l'une de l'autre.In addition, each of the
En d'autres termes, le procédé et l'installation selon la présente invention permettent d'obtenir une très grande flexibilité des différentes lignes de production du procédé utilisant ledit hélium, c'est-à-dire que bien que chaque ligne soit alimentée par la même source 2 d'hélium, chacune desdites lignes de production peut obtenir, à tout moment la quantité d'hélium gazeux nécessaire à son bon fonctionnement.In other words, the method and the installation according to the present invention make it possible to obtain a very great flexibility of the various production lines of the process using said helium, that is to say that although each line is powered by the
Claims (10)
- Installation (1) for the supply of gaseous helium with several production lines (5a, 5b, 5c) comprising:- a helium source (2) having an internal volume of at least 7,000 liters,- a network (4) of several secondary pipes (4a, 4b, 4c) each supplying at least one production line (5a, 5b, 5c) using gaseous helium,- a main pipe (3, 3a, 3b) for conveying the helium connected, upstream, to said helium source (2) and, downstream, to said network (4) of secondary pipes (4a, 4b, 4c) supplying said production lines (5a, 5b, 5c), each production line (5a, 5b, 5c) being supplied with helium from the helium source (2) having an internal volume of at least 7,000 liters,characterized in that on the main pipe (3, 3a, 3b) are arranged:- a heat exchanger (7), capable of vaporizing the liquid helium drawn from said source (2), so as to obtain gaseous helium; and means (9) purifying the gaseous helium coming from said heat exchanger (7).
- Installation according to claim 1, characterized in that the helium source (2) has an internal volume of at least 8,000 liters, preferably at least 20,000 liters, yet more preferably at least 40,000 liters.
- Installation according to one of claims 1 or 2, characterized in that the helium source (2) is mobile or fixed.
- Installation according to one of claims 1 to 3, characterized in that the main pipe (3, 3a, 3b) is also connected to at least one device selected from the group formed by:- a buffer capacity (8), and- compression means (10).
- Installation according to one of claims 1 to 4, characterized in that it also comprises means to control the flow and/or pressure of the gaseous helium in the main pipe (3, 3a, 3b) and/or in each of the secondary pipes (4a, 4b, 4c) of the network (4).
- Installation according to one of claims 1 to 5, characterized in that said production lines (5a, 5b, 5c) are selected from the group formed by:- lines for filling bottles (13) of diving gas,- lines for filling gas envelopes for hot-air balloons,- lines for filling containers (25) for the inflation of airbags,- lines for quenching metal parts with helium,- lines for the manufacture of electronic products comprising at least one cooling site for wafers or printed circuit boards, and- lines for the manufacture of optical fibers (17).
- Installation according to one of claims 1 to 6, characterized in that said production lines (5a, 5b, 5c) are connected, independently of one another, to said main pipe (3, 3a, 3b) by means of said network (4).
- Installation according to one of claims 1 to 7, characterized in that the helium drawn from said helium source (2) is, at the output of said source (2), in liquid or supercritical form.
- Method of supplying gaseous helium to several production lines (5a, 5b, 5c), wherein:- a main pipe (3, 3a, 3b) is supplied with helium drawn from a helium source (2) having a capacity of more than 7,000 liters, the helium being drawn off in liquid or supercritical form,- said helium is conveyed in said main pipe (3, 3a, 3b) to a network of several secondary pipes (4a, 4b, 4c) each supplying at least one production line (5a, 5b, 5c) using gaseous helium,- the helium drawn from the source (2) is subjected to a vaporization step in a heat exchanger (7) arranged on the main pipe (3, 3a, 3b), so as to obtain gaseous helium;- the gaseous helium coming from said heat exchanger (7) is subjected to a purification step in purification means (9) arranged on the main pipe (3, 3a, 3b);- each of said production lines (5a, 5b, 5c) is supplied with helium in gaseous form thus produced.
- Method according to claim 9, characterized in that the pressure and/or flow of helium in the main pipe (3) is adjusted depending on the sum of the pressures and/or flows of gaseous helium in each of said secondary pipes (4a, 4b, 4c).
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE69934277.5T DE69934277T3 (en) | 1998-07-29 | 1999-07-28 | Apparatus and method for supplying helium to multiple production lines |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9809694A FR2781868B1 (en) | 1998-07-29 | 1998-07-29 | PLANT AND METHOD FOR PROVIDING HELIUM WITH MULTIPLE PRODUCTION LINES |
FR9809694 | 1998-07-29 |
Publications (3)
Publication Number | Publication Date |
---|---|
EP0976969A1 EP0976969A1 (en) | 2000-02-02 |
EP0976969B1 EP0976969B1 (en) | 2006-12-06 |
EP0976969B2 true EP0976969B2 (en) | 2017-12-20 |
Family
ID=9529142
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP99401928.9A Expired - Lifetime EP0976969B2 (en) | 1998-07-29 | 1999-07-28 | Apparatus and process for the supply of helium to a plurality of production lines |
Country Status (15)
Country | Link |
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US (1) | US6178755B1 (en) |
EP (1) | EP0976969B2 (en) |
JP (1) | JP2000055299A (en) |
KR (1) | KR20000012019A (en) |
CN (1) | CN1092314C (en) |
AR (1) | AR024506A1 (en) |
AT (1) | ATE347668T1 (en) |
BR (1) | BR9902937A (en) |
CA (1) | CA2279108A1 (en) |
DE (1) | DE69934277T3 (en) |
ES (1) | ES2278432T3 (en) |
FR (1) | FR2781868B1 (en) |
SG (1) | SG74156A1 (en) |
TW (1) | TW410257B (en) |
ZA (1) | ZA994643B (en) |
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DE102005032556B4 (en) * | 2005-07-11 | 2007-04-12 | Atlas Copco Energas Gmbh | Plant and method for using a gas |
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JP5190315B2 (en) * | 2008-07-25 | 2013-04-24 | 東京電力株式会社 | Low temperature liquid gas supply equipment |
US20110023501A1 (en) * | 2009-07-30 | 2011-02-03 | Thomas Robert Schulte | Methods and systems for bulk ultra-high purity helium supply and usage |
CN102563337A (en) * | 2010-12-22 | 2012-07-11 | 北京博鹏北科科技有限公司 | Gas unloading system and gas unloading method |
FR2993343B1 (en) * | 2012-07-13 | 2015-06-05 | Air Liquide | METHOD AND APPARATUS FOR VAPORIZATION OF CARBON DIOXIDE-RICH LIQUID |
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CN103470946B (en) * | 2013-08-29 | 2015-05-27 | 北京宇航系统工程研究所 | High-pressure supercritical helium storage tank |
CN103672395A (en) * | 2013-11-15 | 2014-03-26 | 苏州金宏气体股份有限公司 | Method for recycling emptying residual gas of high purity gas transportation and storage tank |
CN103672396A (en) * | 2013-11-15 | 2014-03-26 | 苏州金宏气体股份有限公司 | Method for recycling released and emptying gas of high-purity gas liquid storage tank |
CN104676248B (en) * | 2014-12-26 | 2017-03-22 | 西南石油大学 | Helium circulating system |
CN105546333A (en) * | 2016-01-22 | 2016-05-04 | 池州森大轻工制品有限公司 | Filling system for high-purity gas |
CN109931501B (en) * | 2017-12-18 | 2021-04-06 | 上海弗川自动化技术有限公司 | Sectional type heating gas conveying system |
US11231144B2 (en) | 2018-04-26 | 2022-01-25 | Messer Industries Usa, Inc. | Methods for helium storage and supply |
JP6574321B1 (en) * | 2019-02-15 | 2019-09-11 | 石油資源開発株式会社 | Floating body type low temperature liquefied gas filling equipment and low temperature liquefied gas delivery method using the same |
CN112628601B (en) * | 2020-12-03 | 2022-12-13 | 蓝箭航天技术有限公司 | Temperature control system for high-pressure gas preparation device and control method thereof |
CN114484267B (en) * | 2022-01-29 | 2024-03-22 | 山东简森能源科技有限公司 | Helium split charging recovery and purification process |
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- 1999-07-19 ZA ZA9904643A patent/ZA994643B/en unknown
- 1999-07-21 US US09/359,355 patent/US6178755B1/en not_active Expired - Lifetime
- 1999-07-23 BR BR9902937A patent/BR9902937A/en not_active Application Discontinuation
- 1999-07-23 SG SG1999003626A patent/SG74156A1/en unknown
- 1999-07-27 AR ARP990103694A patent/AR024506A1/en unknown
- 1999-07-28 AT AT99401928T patent/ATE347668T1/en active
- 1999-07-28 KR KR1019990030740A patent/KR20000012019A/en not_active Application Discontinuation
- 1999-07-28 EP EP99401928.9A patent/EP0976969B2/en not_active Expired - Lifetime
- 1999-07-28 JP JP11213752A patent/JP2000055299A/en active Pending
- 1999-07-28 CN CN99110699A patent/CN1092314C/en not_active Expired - Lifetime
- 1999-07-28 DE DE69934277.5T patent/DE69934277T3/en not_active Expired - Lifetime
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- 1999-07-28 CA CA002279108A patent/CA2279108A1/en not_active Abandoned
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Also Published As
Publication number | Publication date |
---|---|
US6178755B1 (en) | 2001-01-30 |
FR2781868B1 (en) | 2000-09-15 |
KR20000012019A (en) | 2000-02-25 |
CN1092314C (en) | 2002-10-09 |
ZA994643B (en) | 2000-01-12 |
CN1245876A (en) | 2000-03-01 |
ES2278432T3 (en) | 2007-08-01 |
DE69934277T3 (en) | 2018-08-02 |
ATE347668T1 (en) | 2006-12-15 |
TW410257B (en) | 2000-11-01 |
EP0976969B1 (en) | 2006-12-06 |
BR9902937A (en) | 2000-03-21 |
FR2781868A1 (en) | 2000-02-04 |
SG74156A1 (en) | 2000-07-18 |
EP0976969A1 (en) | 2000-02-02 |
DE69934277D1 (en) | 2007-01-18 |
JP2000055299A (en) | 2000-02-22 |
DE69934277T2 (en) | 2007-07-05 |
CA2279108A1 (en) | 2000-01-29 |
AR024506A1 (en) | 2002-10-16 |
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