EP0976969B2 - Apparatus and process for the supply of helium to a plurality of production lines - Google Patents

Apparatus and process for the supply of helium to a plurality of production lines Download PDF

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Publication number
EP0976969B2
EP0976969B2 EP99401928.9A EP99401928A EP0976969B2 EP 0976969 B2 EP0976969 B2 EP 0976969B2 EP 99401928 A EP99401928 A EP 99401928A EP 0976969 B2 EP0976969 B2 EP 0976969B2
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EP
European Patent Office
Prior art keywords
helium
lines
source
main pipe
gaseous
Prior art date
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EP99401928.9A
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German (de)
French (fr)
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EP0976969A1 (en
EP0976969B1 (en
Inventor
Frédéric Castellanet
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LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
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LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17B—GAS-HOLDERS OF VARIABLE CAPACITY
    • F17B1/00—Gas-holders of variable capacity
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C5/00—Methods or apparatus for filling containers with liquefied, solidified, or compressed gases under pressures
    • F17C5/06—Methods or apparatus for filling containers with liquefied, solidified, or compressed gases under pressures for filling with compressed gases
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C9/00—Methods or apparatus for discharging liquefied or solidified gases from vessels not under pressure
    • F17C9/02—Methods or apparatus for discharging liquefied or solidified gases from vessels not under pressure with change of state, e.g. vaporisation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2201/00—Vessel construction, in particular geometry, arrangement or size
    • F17C2201/05—Size
    • F17C2201/054—Size medium (>1 m3)
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/01—Mounting arrangements
    • F17C2205/0123—Mounting arrangements characterised by number of vessels
    • F17C2205/013—Two or more vessels
    • F17C2205/0134—Two or more vessels characterised by the presence of fluid connection between vessels
    • F17C2205/0142—Two or more vessels characterised by the presence of fluid connection between vessels bundled in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2221/00—Handled fluid, in particular type of fluid
    • F17C2221/01—Pure fluids
    • F17C2221/016—Noble gases (Ar, Kr, Xe)
    • F17C2221/017—Helium
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
    • F17C2223/01—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the phase
    • F17C2223/0107—Single phase
    • F17C2223/0115—Single phase dense or supercritical, i.e. at high pressure and high density
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
    • F17C2223/01—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the phase
    • F17C2223/0146—Two-phase
    • F17C2223/0153—Liquefied gas, e.g. LPG, GPL
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2225/00—Handled fluid after transfer, i.e. state of fluid after transfer from the vessel
    • F17C2225/01—Handled fluid after transfer, i.e. state of fluid after transfer from the vessel characterised by the phase
    • F17C2225/0107—Single phase
    • F17C2225/0115—Single phase dense or supercritical, i.e. at high pressure and high density
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2225/00—Handled fluid after transfer, i.e. state of fluid after transfer from the vessel
    • F17C2225/01—Handled fluid after transfer, i.e. state of fluid after transfer from the vessel characterised by the phase
    • F17C2225/0146—Two-phase
    • F17C2225/0153—Liquefied gas, e.g. LPG, GPL
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
    • F17C2250/01—Intermediate tanks
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2265/00—Effects achieved by gas storage or gas handling
    • F17C2265/01—Purifying the fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2270/00—Applications
    • F17C2270/01—Applications for fluid transport or storage
    • F17C2270/0165—Applications for fluid transport or storage on the road
    • F17C2270/0168—Applications for fluid transport or storage on the road by vehicles
    • F17C2270/0171—Trucks
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2270/00—Applications
    • F17C2270/01—Applications for fluid transport or storage
    • F17C2270/0165—Applications for fluid transport or storage on the road
    • F17C2270/0168—Applications for fluid transport or storage on the road by vehicles
    • F17C2270/0173—Railways
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2270/00—Applications
    • F17C2270/05—Applications for industrial use

Definitions

  • the present invention relates to an installation and a method for supplying helium, preferably in liquid or supercritical form, to a plurality of production lines at an industrial site.
  • gaseous helium is used in many different sectors of the industry, especially in the electronics industry, to cool silicon slices or wafers, commonly known as “wafers", or to inert the printed circuits, for example , or in the glass industry, for example to cool optical fibers during their manufacturing process.
  • helium is first delivered in liquid form in large quantities to a transfer station and repackaging, in which the helium is vaporized and compressed, before being rerouted on its site of use being conditioned either in gas cylinders or similar containers of varying sizes, but never exceeding a few hundred liters. This is recalled in the document US Patent 5,386,707 (Col. 1, 1. 30-35).
  • the liquid helium is directly routed to its site of use in a small storage tank, usually in a tank having a volume of less than 3000 liters, where it can be stored before be sent in gaseous form to a site of use.
  • the site of use comprises several production lines each using large quantities of helium gas, the quantities used being variable from one line to another, it is essential to provide as many helium reservoirs gaseous than production lines, that is to say that each production line must be connected, via an individual pipeline to a helium reservoir of its own, for example helium cylinders , so that each of said production lines can be supplied independently of the others depending on the helium requirements of the line in question.
  • the object of the present invention is therefore to overcome the aforementioned drawbacks by proposing a method and a helium supply installation that can be implemented directly on a production site comprising several lines or manufacturing units, operating independently of one another .
  • Another object of the present invention is also to enable gaseous helium to be fed to several production lines consuming variable amounts of gaseous helium, from one line to another, in a flexible manner, that is to say according to the specific needs of each of said lines and therefore independently of variations in consumption of said lines, relative to each other.
  • the invention also relates to a method for supplying helium to several production lines according to claim 9.
  • the figure 1 represents a general diagram of a helium supply installation 1 according to the present invention.
  • the helium supply installation 1 comprises a source 2 of helium, for example a storage tank, having an internal volume of at least 7000 liters, for example about 10,000 liters, which source 2 of helium is connected, via a main pipeline 3, 3a, 3b of helium transport, to a network 4 of several secondary lines 4a, 4b, 4c, each supplying a production line 5a, 5b, 5c, helium gas.
  • a source 2 of helium for example a storage tank, having an internal volume of at least 7000 liters, for example about 10,000 liters
  • source 2 of helium is connected, via a main pipeline 3, 3a, 3b of helium transport, to a network 4 of several secondary lines 4a, 4b, 4c, each supplying a production line 5a, 5b, 5c, helium gas.
  • the helium can be withdrawn from the storage tank 2 in liquid form, via the withdrawal means 3, then subsequently vaporized in the heat exchanger 7, or withdrawn directly in gaseous form via the withdrawal means 3b .
  • the helium is withdrawn in liquid or supercritical form.
  • compression means 10 such as a piston compressor or membranes.
  • helium purification means 9 for example a filter or an adsorbent.
  • the source 2 of helium may be a fixed source of helium, such as a storage tank, as shown in FIG. figure 1 a mobile source, for example a helium supply truck, as well as a diagram of the figure 2 , which figure 2 is, moreover, substantially identical to the figure 1 .
  • figure 3 schematizes the application of the helium supply installation 1 described above to the filling of cylinders 13 of diving gas.
  • the figure 3 uses the same architecture as that of Figures 1 and 2 , but includes, in addition, a mixing and homogenizing device 12 arranged on the main pipe 3, intended to obtain a homogeneous mixture of helium gas and one or more other gases from a secondary source 11 of gas, to obtain a respiratory gas mixture that can be used as a breathing gas for a bottle of gas diving 13.
  • a mixing and homogenizing device 12 arranged on the main pipe 3, intended to obtain a homogeneous mixture of helium gas and one or more other gases from a secondary source 11 of gas, to obtain a respiratory gas mixture that can be used as a breathing gas for a bottle of gas diving 13.
  • the gaseous dive mixture containing helium is then conveyed to a network 4 of several secondary lines 4a to 4c feeding each of lines 5a to 5c for filling the bottle 13 with diving gas.
  • the figure 4 schematically, meanwhile, the implementation of an installation according to the invention on an electronic material manufacturing site.
  • the helium is conveyed via a pipe 3 to a network 4 comprising several production lines 5a and 5b, such as cooling lines of "wafers" or printed circuits.
  • the device also comprises means for recovering and recycling 14 the helium gas used, which helium is recovered and then optionally purified within a unit 9 'prepurification of recycled gas before being returned to the main pipe 3, upstream of the purification means 9 where the prepurified helium thus recycled undergoes purification sufficient to allow it to be returned to the production lines 5a and 5b.
  • the helium used and recovered by the recycling means 14 contains an impurity content below a predetermined threshold, it is not necessarily necessary to undergo this pre-purification and can then be returned to the line 3 via the 9 "bypass.
  • the figure 5 represents, for its part, a diagram of an installation applied to the supply of helium to manufacturing lines 5a to 5c of optical fibers 17, where helium is used for cooling said fibers 17 during their passages in the enclosures 16 cooling.
  • the helium gas can, again, be recovered at the outlet of said cooling chambers 16, discharged via pipes 21 to cooling means 15, and then sent directly to the main pipe 3 via the bypass 19 , or undergo a prepurification within the prepurification means 18 installed on the pipe 20.
  • the figure 6 represents the application of the helium supply facility to a safety pad inflation container manufacturing unit or AIRBAG TM.
  • a tanker truck 2 with a capacity of at least 20000 liters supplies directly, in liquid helium, the production site of said containers 25 for safety cushions.
  • the helium in liquid form, withdrawn from the source 2, is vaporized in the heater 7, then undergoes, if necessary and optionally, a dilution 12 with one or more other gases emanating from a source of secondary gas 11, a compression 10, before being sent to the network 4 of secondary lines 4a, 4b, and finally to be introduced into the containers 25 for safety cushions.
  • the installation and the method according to the invention have several advantages, namely in particular that they allow a helium flow directly on the site of use of said helium, said helium being conveyed in liquid form in very large containers generally of more than 7000 liters, without necessarily having to undergo transfer, that is to say repackaging, between their initial liquefaction or production sites and their sites of use.
  • the vaporization of the liquid helium in the form of helium gas can be carried out directly on the site of use and the helium can then optionally undergo a purification beforehand. to be sent to the production lines where it will be used.
  • helium gas may be optionally recovered and recycled, whether or not subjected to prepurification or subsequent reuse.
  • each of the secondary lines 4a to 4c of the secondary pipe network is connected to a single source 2 of helium, while being independent of one another.
  • the method and the installation according to the present invention make it possible to obtain a very great flexibility of the various production lines of the process using said helium, that is to say that although each line is powered by the same helium source 2, each of said production lines can obtain, at any time, the amount of helium gas necessary for its proper operation.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
  • Separation By Low-Temperature Treatments (AREA)
  • Micromachines (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)

Description

La présente invention concerne une installation et un procédé de fourniture d'hélium, de préférence sous forme liquide ou supercritique, à plusieurs lignes de production sur un site Industriel.The present invention relates to an installation and a method for supplying helium, preferably in liquid or supercritical form, to a plurality of production lines at an industrial site.

Actuellement, l'hélium sous forme gazeuse est utilisé dans de nombreux secteurs différents de l'industrie, notamment dans l'industrie électronique, pour refroidir des tranches ou galettes de silicium, communément appelées "wafers", ou inerter les circuits imprimés, par exemple, ou dans l'industrie du verre, par exemple pour refroidir des fibres optiques durant leur procédé de fabrication.Currently, gaseous helium is used in many different sectors of the industry, especially in the electronics industry, to cool silicon slices or wafers, commonly known as "wafers", or to inert the printed circuits, for example , or in the glass industry, for example to cool optical fibers during their manufacturing process.

Habituellement, l'hélium est d'abord livré sous forme liquide en grande quantité à une station de transfert et de reconditionnement, dans laquelle l'hélium est vaporisé puis comprimé, avant d'être réacheminé sur son site d'utilisation en étant conditionné soit dans des bouteilles de gaz ou récipients analogues de tailles variables, mais dont la contenance n'excède jamais quelques centaines de litres. Cela est d'ailleurs rappelé dans le document US-A-5,386,707 (Col. 1, 1. 30-35).Usually, helium is first delivered in liquid form in large quantities to a transfer station and repackaging, in which the helium is vaporized and compressed, before being rerouted on its site of use being conditioned either in gas cylinders or similar containers of varying sizes, but never exceeding a few hundred liters. This is recalled in the document US Patent 5,386,707 (Col. 1, 1. 30-35).

En outre, dans certains cas, l'hélium liquide est directement acheminé jusque sur son site d'utilisation dans un réservoir de stockage de faible contenance, généralement dans un réservoir ayant un volume inférieur à 3000 litres, où il peut être stocké avant d'être envoyé sous forme gazeuse vers un site d'utilisation.In addition, in some cases, the liquid helium is directly routed to its site of use in a small storage tank, usually in a tank having a volume of less than 3000 liters, where it can be stored before be sent in gaseous form to a site of use.

Dans ce cas, lorsque le site d'utilisation comporte plusieurs lignes de production utilisant chacune de grandes quantités d'hélium gazeux, les quantités utilisées étant variables d'une ligne à l'autre, il est indispensable de prévoir autant de réservoirs d'hélium gazeux que de lignes de production, c'est-à-dire que chaque ligne de production doit être reliée, par l'intermédiaire d'une canalisation individuelle à un réservoir d'hélium qui lui est propre, par exemple des bouteilles d'hélium, de manière à ce que chacune desdites lignes de production puisse être alimentée indépendamment des autres en fonction des besoins en hélium de la ligne considérée.In this case, when the site of use comprises several production lines each using large quantities of helium gas, the quantities used being variable from one line to another, it is essential to provide as many helium reservoirs gaseous than production lines, that is to say that each production line must be connected, via an individual pipeline to a helium reservoir of its own, for example helium cylinders , so that each of said production lines can be supplied independently of the others depending on the helium requirements of the line in question.

De tels dispositifs sont notamment décrits dans les documents US-A-5386707 , US-A-4607490 , US-A-4766731 , US-A-3415069 , US-A-4972677 , US-A-4444572 et JP-A-6241654 .Such devices are described in particular in the documents US Patent 5386707 , US Patent 4607490 , US Patent 4766731 , US Patent 3415069 , US Patent 4972677 , US Patent 4444572 and JP-A-6241654 .

Or, ces types d'installations connues présentent plusieurs inconvénients, à savoir:

  • le fait de devoir procéder à un reconditionnement de l'hélium liquide sous forme d'hélium gazeux dans une station de transfert engendre une augmentation considérable des coûts de transport et de conditionnement du fluide;
  • lorsque l'hélium liquide est livré sous forme de récipients pressurisés sur le site d'utilisation, il est nécessaire de procéder à un remplacement d'autant plus fréquent desdits récipients que la quantité d'hélium qu'ils contiennent est faible;
  • lorsque l'on relie chaque ligne de production à son propre réservoir d'hélium, on augmente considérablement la complexité de l'installation de par une multiplication du nombre d'équipement et donc, là encore, du coût global du procédé de fabrication subséquent.
However, these types of known installations have several disadvantages, namely:
  • the fact of having to repackage liquid helium in the form of helium gas in a transfer station generates a considerable increase in the cost of transporting and conditioning the fluid;
  • when the liquid helium is delivered in the form of pressurized containers at the site of use, it is necessary to carry out a more frequent replacement of said containers that the amount of helium they contain is low;
  • when each production line is connected to its own helium reservoir, the complexity of the installation is considerably increased by a multiplication of the number of equipment and thus, again, by the overall cost of the subsequent manufacturing process.

Le but de la présente invention est donc de pallier les inconvénients précités en proposant un procédé et une installation de fourniture d'hélium pouvant être mise en oeuvre directement sur un site de production comprenant plusieurs lignes ou unités de fabrication, fonctionnant indépendamment les unes des autres.The object of the present invention is therefore to overcome the aforementioned drawbacks by proposing a method and a helium supply installation that can be implemented directly on a production site comprising several lines or manufacturing units, operating independently of one another .

Un autre but de la présente invention est aussi de permettre d'alimenter en hélium gazeux plusieurs lignes de production consommant des quantités variables d'hélium gazeux, d'une ligne à l'autre, de manière souple, c'est-à-dire en fonction des besoins propres de chacunes desdites lignes et donc indépendamment des variations de consommations desdites lignes, les unes par rapport aux autres.Another object of the present invention is also to enable gaseous helium to be fed to several production lines consuming variable amounts of gaseous helium, from one line to another, in a flexible manner, that is to say according to the specific needs of each of said lines and therefore independently of variations in consumption of said lines, relative to each other.

La présente invention concerne alors une installation de fourniture d'hélium à plusieurs lignes de production comprenant :

  • une source d'hélium ayant un volume interne d'au moins 7000 litres,
  • un réseau de plusieurs canalisations secondaires alimentant chacune au moins une ligne de production utilisant de l'hélium gazeux,
  • une canalisation principale d'acheminement d'hélium relié, en amont, à ladite source d'hélium et, en aval, audit réseau de canalisations secondaires alimentant lesdites lignes de production, chaque ligne de production étant alimentée avec de l'hélium issu de la source d'hélium ayant un volume interne, c'est-à-dire une contenance supérieure à 7000 litres.
The present invention thus relates to a multi-production helium supply installation comprising:
  • a helium source having an internal volume of at least 7000 liters,
  • a network of several secondary lines each supplying at least one production line using helium gas,
  • a helium supply main line connected upstream to said source of helium and downstream to said network of secondary lines supplying said production lines, each production line being fed with helium from the helium source having an internal volume, that is to say a capacity greater than 7000 liters.

Une telle installation, conforme au préambule de la revendication principale est décrite dans le document EP-A-0 802 160 considéré comme représentant l'art antérieur le plus proche. Selon l'invention, sur la canalisation principale sont agencés des éléments tels que définis par la partie caractérisant de la revendication 1.Such an installation, in accordance with the preamble of the main claim, is described in the document EP-A-0 802 160 considered to represent the closest prior art. According to the invention, on the main pipe are arranged elements as defined by the characterizing part of claim 1.

De préférence, l'installation selon l'invention comprend l'une ou plusieurs des caractéristiques suivantes:

  • la source d'hélium a un volume interne d'au moins 8 000 litres, de préférence d'au moins 15000 litres, de préférence encore d'au moins 20000 litres, préférentiellement encore d'au moins 40000 à 50000 litres;
  • la source d'hélium est mobile, tel un camion citerne ou un wagon citerne, ou fixe, telle une cuve de stockage ou une capacité tampon;
  • la canalisation principale est reliée, en outre, à au moins un dispositif choisi dans le groupe formé par une capacité tampon, et/ou des moyens de compression.
  • elle comporte, en outre, des moyens de contrôle du débit et/ou de la pression d'hélium gazeux dans canalisation principale et/ou dans chacune des canalisations secondaires du réseau;
  • lesdites lignes de production sont choisies dans le groupe formé par :
    • des lignes de remplissage de bouteilles de gaz de plongée,
    • des lignes d'alimentation des poches à gaz ou enveloppes de gaz présentes dans un ballon dirigeable, lesdites lignes d'alimentation étant alors des ramifications de la canalisation principale de gaz parcourant le ballon dirigeable. En d'autres termes, la canalisation principale et les lignes d'alimentation sont alors directement amenagées à l'intérieur du ballon dirigeable,
    • des lignes de remplissage de récipients de gonflage de coussins de sécurité (AIRBAGS),
    • des lignes de fabrication de produits électroniques comprenant au moins un site de refroidissement de "wafers" ou de circuits imprimés, le refroidissement étant réalisé à l'aide d'hélium gazeux,
    • des lignes de fabrication de fibres optiques, ou
    • des lignes de trempe à l'hélium de pièces métalliques.
  • lesdites lignes de production sont reliées, indépendamment les unes des autres, à ladite canalisation principale par l'intermédiaire dudit réseau,
  • l'hélium soutiré de ladite source d'hélium est sous forme gazeuse, liquide ou supercritique, de préférence sous forme liquide ou supercritique.
Preferably, the installation according to the invention comprises one or more of the following characteristics:
  • the helium source has an internal volume of at least 8000 liters, preferably at least 15000 liters, more preferably at least 20000 liters, more preferably at least 40000 to 50000 liters;
  • the helium source is mobile, such as a tank truck or tank car, or stationary, such as a storage tank or a buffer tank;
  • the main pipeline is connected, moreover, to least one device selected from the group consisting of a buffer capacity, and / or compression means.
  • it further comprises means for controlling the flow and / or the helium gas pressure in the main pipe and / or in each of the secondary pipes of the network;
  • said production lines are chosen from the group formed by:
    • filling lines for diving gas cylinders,
    • supply lines of the gas pockets or gas envelopes present in an airship, said supply lines then being branches of the main pipeline of gas flowing through the airship. In other words, the main pipeline and the supply lines are then directly arranged inside the airship,
    • filling lines of airbag inflating containers (AIRBAGS),
    • electronic product manufacturing lines comprising at least one cooling site for "wafers" or printed circuits, the cooling being carried out using helium gas,
    • optical fiber manufacturing lines, or
    • helium quenching lines of metal parts.
  • said production lines are connected, independently of one another, to said main line via said network,
  • the helium withdrawn from said helium source is in gaseous, liquid or supercritical form, preferably in liquid or supercritical form.

L'invention concerne également un procédé de fourniture d'hélium à plusieurs lignes de production selon la revendication 9.The invention also relates to a method for supplying helium to several production lines according to claim 9.

De préférence le procédé de l'invention comprend l'une ou plusieurs des caractéristiques suivantes:

  • l'hélium est soutiré de la source d'hélium sous forme liquide ou supercritique et est soumis, après soutirage, à au moins une étape de vaporisation, de manière à obtenir de l'hélium gazeux,
  • on ajuste la pression et/ou le débit d'hélium dans la canalisation principale en fonction de la somme des pressions et/ou des débits d'hélium gazeux dans chacune desdites canalisations secondaires.
Preferably the method of the invention comprises one or more of the following characteristics:
  • the helium is withdrawn from the source of helium in liquid or supercritical form and is subjected, after withdrawal, to at least one vaporization step, so as to obtain helium gas,
  • adjusting the pressure and / or the flow rate of helium in the main pipe according to the sum of the pressures and / or the flow rates of helium gas in each of said secondary pipes.

La présente invention va maintenant être décrite plus en détail à l'aide des figures ci-annexées données à titre illustratif mais non limitatif.The present invention will now be described in more detail with the aid of the appended figures given for illustrative but not limiting.

La figure 1 représente un schéma général d'une installation 1 de fourniture d'hélium selon la présente invention.The figure 1 represents a general diagram of a helium supply installation 1 according to the present invention.

Ainsi que représenté sur la figure 1, l'installation 1 de fourniture d'hélium comprend une source 2 d'hélium, par exemple un réservoir de stockage, ayant un volume interne d'au moins 7 000 litres, par exemple d'environ 10000 litres, laquelle source 2 d'hélium est reliée, via une canalisation principale 3, 3a, 3b d'acheminement d'hélium, à un réseau 4 de plusieurs canalisations secondaires 4a, 4b, 4c, alimentant chacune une ligne de production 5a, 5b, 5c, en hélium gazeux.As shown on the figure 1 , the helium supply installation 1 comprises a source 2 of helium, for example a storage tank, having an internal volume of at least 7000 liters, for example about 10,000 liters, which source 2 of helium is connected, via a main pipeline 3, 3a, 3b of helium transport, to a network 4 of several secondary lines 4a, 4b, 4c, each supplying a production line 5a, 5b, 5c, helium gas.

Selon le cas, l'hélium peut être soutiré du réservoir 2 de stockage sous forme liquide, par le biais des moyens de soutirage 3, puis subséquemment vaporisé dans l'échangeur thermique 7, soit soutiré directement sous forme gazeuse via les moyens de soutirage 3b. De préférence, l'hélium est soutiré sous forme liquide ou supercritique.Depending on the case, the helium can be withdrawn from the storage tank 2 in liquid form, via the withdrawal means 3, then subsequently vaporized in the heat exchanger 7, or withdrawn directly in gaseous form via the withdrawal means 3b . Preferably, the helium is withdrawn in liquid or supercritical form.

Afin d'obtenir une pression suffisante en hélium dans la canalisation 3, on peut agencer sur celle-ci des moyens de compression 10, tel un compresseur à piston ou membranes.In order to obtain a sufficient helium pressure in the pipe 3, there can be arranged thereon compression means 10, such as a piston compressor or membranes.

En outre, lorsque l'hélium distribué aux différentes lignes de production 5a à 5c doit avoir une teneur en impuretés inférieure à un certain seuil, il est également possible d'agencer sur la canalisation 3 des moyens de purification 9 d'hélium, par exemple un filtre ou un adsorbant.In addition, when the helium distributed to the various production lines 5a to 5c must have an impurity content below a certain threshold, it is also possible to arrange on line 3 helium purification means 9, for example a filter or an adsorbent.

Par ailleurs, il est aussi possible d'installer une capacité tampon 8 sur la canalisation principale 3.Moreover, it is also possible to install a buffer capacity 8 on the main pipe 3.

Selon le cas, la source 2 d'hélium peut être une source fixe d'hélium, tel un réservoir de stockage ainsi que représenté sur la figure 1, soit une source mobile, par exemple un camion d'approvisionnement en hélium, ainsi que schématisé sur la figure 2, laquelle figure 2 est, par ailleurs, sensiblement identique à la figure 1.Depending on the case, the source 2 of helium may be a fixed source of helium, such as a storage tank, as shown in FIG. figure 1 a mobile source, for example a helium supply truck, as well as a diagram of the figure 2 , which figure 2 is, moreover, substantially identical to the figure 1 .

Les figures 3 à 4 représentent, quant à elles, plusieurs applications possibles de l'installation de fourniture d'hélium selon la présente invention.The Figures 3 to 4 represent, for their part, several possible applications of the helium supply installation according to the present invention.

Plus précisément, la figure 3 schématise l'application de l'installation 1 de fourniture d'hélium décrite ci-dessus au remplissage de bouteilles 13 de gaz de plongée.More specifically, the figure 3 schematizes the application of the helium supply installation 1 described above to the filling of cylinders 13 of diving gas.

Ainsi, la figure 3 reprend la même architecture que celle des figures 1 et 2, mais comprend, en plus, un dispositif de mélange et homogénéisation 12 agencé sur la canalisation principale 3, destiné à obtenir un mélange homogène d'hélium gazeux et d'un ou plusieurs autres gaz issus d'une source secondaire 11 de gaz, pour obtenir un mélange gazeux respiratoire pouvant être utilisé en tant que gaz respiratoire pour bouteille de plongée 13.So, the figure 3 uses the same architecture as that of Figures 1 and 2 , but includes, in addition, a mixing and homogenizing device 12 arranged on the main pipe 3, intended to obtain a homogeneous mixture of helium gas and one or more other gases from a secondary source 11 of gas, to obtain a respiratory gas mixture that can be used as a breathing gas for a bottle of gas diving 13.

Le mélange gazeux de plongée contenant de l'hélium est ensuite acheminé vers un réseau 4 de plusieurs canalisation secondaire 4a à 4c alimentant chacune des lignes 5a à 5c de remplissage de bouteille 13 de gaz de plongée.The gaseous dive mixture containing helium is then conveyed to a network 4 of several secondary lines 4a to 4c feeding each of lines 5a to 5c for filling the bottle 13 with diving gas.

La figure 4 schématise, quant à elle, la mise en oeuvre d'une installation selon l'invention sur un site de fabrication de matériaux électronique. Comme dans les cas précédent, l'hélium est acheminé via une canalisation 3 jusqu'à un réseau 4 comprenant plusieurs lignes de production 5a et 5b, telles des lignes de refroidissement de "wafers" ou de circuits imprimés.The figure 4 schematically, meanwhile, the implementation of an installation according to the invention on an electronic material manufacturing site. As in the previous cases, the helium is conveyed via a pipe 3 to a network 4 comprising several production lines 5a and 5b, such as cooling lines of "wafers" or printed circuits.

Dans ce cas, le dispositif comprend également des moyens de récupération et de recyclage 14 de l'hélium gazeux utilisé, lequel hélium est récupéré puis éventuellement purifié au sein d'une unité 9' de prépurification de gaz recyclé avant d'être renvoyé vers la canalisation principale 3, en amont des moyens de purification 9 où l'hélium prépurifié ainsi recyclé subit une purification suffisante pour lui permettre d'être à nouveau renvoyé vers les lignes de production 5a et 5b.In this case, the device also comprises means for recovering and recycling 14 the helium gas used, which helium is recovered and then optionally purified within a unit 9 'prepurification of recycled gas before being returned to the main pipe 3, upstream of the purification means 9 where the prepurified helium thus recycled undergoes purification sufficient to allow it to be returned to the production lines 5a and 5b.

Cependant, lorsque l'hélium utilisé et récupéré par les moyens de recyclage 14 contient une teneur en impuretés inférieure à un seuil prédéterminé, il n'est pas forcément nécessaire de lui faire subir cette pré purification et il peut alors être renvoyé vers la ligne 3 par l'intermédiaire du bipasse 9".However, when the helium used and recovered by the recycling means 14 contains an impurity content below a predetermined threshold, it is not necessarily necessary to undergo this pre-purification and can then be returned to the line 3 via the 9 "bypass.

La figure 5 représente, quant à elle, un schéma d'une installation appliquée à la fourniture d'hélium à des lignes de fabrication 5a à 5c de fibres optiques 17, où l'hélium est utilisé pour refroidir lesdites fibres 17 lors de leurs passages dans les enceintes 16 de refroidissement.The figure 5 represents, for its part, a diagram of an installation applied to the supply of helium to manufacturing lines 5a to 5c of optical fibers 17, where helium is used for cooling said fibers 17 during their passages in the enclosures 16 cooling.

L'hélium gazeux peut, là encore, être récupéré à la sortie desdites enceintes 16 de refroidissement, évacué via des canalisations 21 jusqu'à des moyens de refroidissement 15, puis envoyé soit directement vers la canalisation principale 3 par l'intermédiaire du bipasse 19, soit subir une prépurification au sein des moyens de prépurification 18 installés sur la canalisation 20.The helium gas can, again, be recovered at the outlet of said cooling chambers 16, discharged via pipes 21 to cooling means 15, and then sent directly to the main pipe 3 via the bypass 19 , or undergo a prepurification within the prepurification means 18 installed on the pipe 20.

La figure 6 représente l'application de l'installation de fourniture d'hélium à une unité de fabrication de récipients 25 de gonflage de coussins de sécurité ou AIRBAG™.The figure 6 represents the application of the helium supply facility to a safety pad inflation container manufacturing unit or AIRBAG ™.

Dans ce cas, un camion citerne 2 d'une contenance d'au moins 20000 litres approvisionne directement, en hélium liquide, le site de production desdits récipients 25 pour coussins de sécurité. L'hélium sous forme liquide, soutiré de la source 2, est vaporisé dans le réchauffeur 7, subit ensuite, si nécessaire et de manière optionnelle, une dilution 12 avec un ou plusieurs autres gaz émanant d'une source de gaz secondaire 11, une compression 10, avant d'être envoyé vers le réseau 4 de canalisations secondaires 4a, 4b, puis d'être finalement introduit dans les récipients 25 pour coussins de sécurité.In this case, a tanker truck 2 with a capacity of at least 20000 liters supplies directly, in liquid helium, the production site of said containers 25 for safety cushions. The helium in liquid form, withdrawn from the source 2, is vaporized in the heater 7, then undergoes, if necessary and optionally, a dilution 12 with one or more other gases emanating from a source of secondary gas 11, a compression 10, before being sent to the network 4 of secondary lines 4a, 4b, and finally to be introduced into the containers 25 for safety cushions.

L'installation et le procédé selon l'invention présentent plusieurs avantages, à savoir notamment qu'ils permettent un acheminement d'hélium directement sur le site d'utilisation dudit hélium, ledit hélium étant acheminé sous forme liquide dans des containers de très grandes dimensions, en général de plus de 7000 litres, sans avoir à subir obligatoirement de transfert, c'est-à-dire de reconditionnement, entre leurs sites de liquéfaction initiales ou de production et leurs sites d'utilisation.The installation and the method according to the invention have several advantages, namely in particular that they allow a helium flow directly on the site of use of said helium, said helium being conveyed in liquid form in very large containers generally of more than 7000 liters, without necessarily having to undergo transfer, that is to say repackaging, between their initial liquefaction or production sites and their sites of use.

En outre, comme on peut le voir sur les figures précédentes, la vaporisation de l'hélium liquide sous forme d'hélium gazeux peut être réalisée directement sur le site d'utilisation et l'hélium peut, ensuite, subir éventuellement une purification avant d'être envoyé vers les lignes de production où il sera utilisé.In addition, as can be seen in the preceding figures, the vaporization of the liquid helium in the form of helium gas can be carried out directly on the site of use and the helium can then optionally undergo a purification beforehand. to be sent to the production lines where it will be used.

En général, il convient de respecter à l'intérieur de la canalisation principale 3, un débit minimum d'au moins 2 m3/h et/ou une pression de 105 Pa à 4.107 Pa.In general, to be observed inside of the main pipe 3, a minimum flow of at least 2 m 3 / h and / or a pressure of 10 5 Pa to 4.10 7 Pa.

Après utilisation, l'hélium gazeux peut être éventuellement récupéré et recyclé, en subissant ou non une prépurification se réutilisation subséquente.After use, helium gas may be optionally recovered and recycled, whether or not subjected to prepurification or subsequent reuse.

En outre, chacune des lignes secondaires 4a à 4c du réseau secondaire de canalisation n'est reliée qu'à une source unique 2 d'hélium, toute en étant indépendante l'une de l'autre.In addition, each of the secondary lines 4a to 4c of the secondary pipe network is connected to a single source 2 of helium, while being independent of one another.

En d'autres termes, le procédé et l'installation selon la présente invention permettent d'obtenir une très grande flexibilité des différentes lignes de production du procédé utilisant ledit hélium, c'est-à-dire que bien que chaque ligne soit alimentée par la même source 2 d'hélium, chacune desdites lignes de production peut obtenir, à tout moment la quantité d'hélium gazeux nécessaire à son bon fonctionnement.In other words, the method and the installation according to the present invention make it possible to obtain a very great flexibility of the various production lines of the process using said helium, that is to say that although each line is powered by the same helium source 2, each of said production lines can obtain, at any time, the amount of helium gas necessary for its proper operation.

Claims (10)

  1. Installation (1) for the supply of gaseous helium with several production lines (5a, 5b, 5c) comprising:
    - a helium source (2) having an internal volume of at least 7,000 liters,
    - a network (4) of several secondary pipes (4a, 4b, 4c) each supplying at least one production line (5a, 5b, 5c) using gaseous helium,
    - a main pipe (3, 3a, 3b) for conveying the helium connected, upstream, to said helium source (2) and, downstream, to said network (4) of secondary pipes (4a, 4b, 4c) supplying said production lines (5a, 5b, 5c), each production line (5a, 5b, 5c) being supplied with helium from the helium source (2) having an internal volume of at least 7,000 liters,
    characterized in that on the main pipe (3, 3a, 3b) are arranged:
    - a heat exchanger (7), capable of vaporizing the liquid helium drawn from said source (2), so as to obtain gaseous helium; and means (9) purifying the gaseous helium coming from said heat exchanger (7).
  2. Installation according to claim 1, characterized in that the helium source (2) has an internal volume of at least 8,000 liters, preferably at least 20,000 liters, yet more preferably at least 40,000 liters.
  3. Installation according to one of claims 1 or 2, characterized in that the helium source (2) is mobile or fixed.
  4. Installation according to one of claims 1 to 3, characterized in that the main pipe (3, 3a, 3b) is also connected to at least one device selected from the group formed by:
    - a buffer capacity (8), and
    - compression means (10).
  5. Installation according to one of claims 1 to 4, characterized in that it also comprises means to control the flow and/or pressure of the gaseous helium in the main pipe (3, 3a, 3b) and/or in each of the secondary pipes (4a, 4b, 4c) of the network (4).
  6. Installation according to one of claims 1 to 5, characterized in that said production lines (5a, 5b, 5c) are selected from the group formed by:
    - lines for filling bottles (13) of diving gas,
    - lines for filling gas envelopes for hot-air balloons,
    - lines for filling containers (25) for the inflation of airbags,
    - lines for quenching metal parts with helium,
    - lines for the manufacture of electronic products comprising at least one cooling site for wafers or printed circuit boards, and
    - lines for the manufacture of optical fibers (17).
  7. Installation according to one of claims 1 to 6, characterized in that said production lines (5a, 5b, 5c) are connected, independently of one another, to said main pipe (3, 3a, 3b) by means of said network (4).
  8. Installation according to one of claims 1 to 7, characterized in that the helium drawn from said helium source (2) is, at the output of said source (2), in liquid or supercritical form.
  9. Method of supplying gaseous helium to several production lines (5a, 5b, 5c), wherein:
    - a main pipe (3, 3a, 3b) is supplied with helium drawn from a helium source (2) having a capacity of more than 7,000 liters, the helium being drawn off in liquid or supercritical form,
    - said helium is conveyed in said main pipe (3, 3a, 3b) to a network of several secondary pipes (4a, 4b, 4c) each supplying at least one production line (5a, 5b, 5c) using gaseous helium,
    - the helium drawn from the source (2) is subjected to a vaporization step in a heat exchanger (7) arranged on the main pipe (3, 3a, 3b), so as to obtain gaseous helium;
    - the gaseous helium coming from said heat exchanger (7) is subjected to a purification step in purification means (9) arranged on the main pipe (3, 3a, 3b);
    - each of said production lines (5a, 5b, 5c) is supplied with helium in gaseous form thus produced.
  10. Method according to claim 9, characterized in that the pressure and/or flow of helium in the main pipe (3) is adjusted depending on the sum of the pressures and/or flows of gaseous helium in each of said secondary pipes (4a, 4b, 4c).
EP99401928.9A 1998-07-29 1999-07-28 Apparatus and process for the supply of helium to a plurality of production lines Expired - Lifetime EP0976969B2 (en)

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FR9809694A FR2781868B1 (en) 1998-07-29 1998-07-29 PLANT AND METHOD FOR PROVIDING HELIUM WITH MULTIPLE PRODUCTION LINES
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Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20020032173A (en) * 2000-10-26 2002-05-03 윤종용 Cooling gas supply apparatus for wafer cooling
WO2003043012A1 (en) 2001-11-13 2003-05-22 Seagate Technology Llc Disc drive gas supply system
US20050076652A1 (en) * 2003-10-10 2005-04-14 Berghoff Rudolf Erwin Method and apparatus for removing boiling liquid from a tank
RU2267023C2 (en) * 2004-02-11 2005-12-27 Федеральное государственное унитарное предприятие "Конструкторское бюро общего машиностроения им. В.П. Бармина" Method of and system for charging on-road helium bottles of launch vehicles and spacecraft
GB2416390B (en) * 2004-07-16 2006-07-26 Statoil Asa LCD Offshore Transport System
FR2888120B1 (en) * 2005-07-07 2008-07-04 Cryo Diffusion S A Sa DEVICE FOR STORING AND SUPPLYING CRYOGENIC FLUID, PARTICULARLY FOR BREATHING AND OXYGEN THERAPY
DE102005032556B4 (en) * 2005-07-11 2007-04-12 Atlas Copco Energas Gmbh Plant and method for using a gas
US7984838B2 (en) * 2006-05-04 2011-07-26 Medtronic Ps Medical, Inc. Recycled helium gas surgical instrument
JP5190315B2 (en) * 2008-07-25 2013-04-24 東京電力株式会社 Low temperature liquid gas supply equipment
US20110023501A1 (en) * 2009-07-30 2011-02-03 Thomas Robert Schulte Methods and systems for bulk ultra-high purity helium supply and usage
RU2440505C1 (en) * 2010-10-08 2012-01-20 Федеральное государственное унитарное предприятие "Центр эксплуатации объектов наземной космической инфраструктуры" (ФГУП "ЦЭНКИ") Method and device for filling onboard cylinders of missile carriers with helium
CN102563337A (en) * 2010-12-22 2012-07-11 北京博鹏北科科技有限公司 Gas unloading system and gas unloading method
FR2993343B1 (en) * 2012-07-13 2015-06-05 Air Liquide METHOD AND APPARATUS FOR VAPORIZATION OF CARBON DIOXIDE-RICH LIQUID
US9234472B2 (en) 2012-08-08 2016-01-12 Caterpillar Inc. Dual fuel engine and evaporated natural gas system
CN103470946B (en) * 2013-08-29 2015-05-27 北京宇航系统工程研究所 High-pressure supercritical helium storage tank
CN103672396A (en) * 2013-11-15 2014-03-26 苏州金宏气体股份有限公司 Method for recycling released and emptying gas of high-purity gas liquid storage tank
CN103672395A (en) * 2013-11-15 2014-03-26 苏州金宏气体股份有限公司 Method for recycling emptying residual gas of high purity gas transportation and storage tank
CN104676248B (en) * 2014-12-26 2017-03-22 西南石油大学 Helium circulating system
CN105546333A (en) * 2016-01-22 2016-05-04 池州森大轻工制品有限公司 Filling system for high-purity gas
CN109931501B (en) * 2017-12-18 2021-04-06 上海弗川自动化技术有限公司 Sectional type heating gas conveying system
US11231144B2 (en) 2018-04-26 2022-01-25 Messer Industries Usa, Inc. Methods for helium storage and supply
JP6574321B1 (en) * 2019-02-15 2019-09-11 石油資源開発株式会社 Floating body type low temperature liquefied gas filling equipment and low temperature liquefied gas delivery method using the same
CN112628601B (en) * 2020-12-03 2022-12-13 蓝箭航天技术有限公司 Temperature control system and control method for high-pressure gas preparation device
CN114484267B (en) * 2022-01-29 2024-03-22 山东简森能源科技有限公司 Helium split charging recovery and purification process

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4201952A1 (en) † 1992-01-24 1993-07-29 Linde Ag Method of supplying cold gas - has gas, in fluid form, fed into thermically insulated storage unit from which required amounts are then taken
US5452583A (en) † 1992-12-11 1995-09-26 Praxair Technology, Inc. Coolant recovery system

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4559786A (en) * 1982-02-22 1985-12-24 Air Products And Chemicals, Inc. High pressure helium pump for liquid or supercritical gas
DE3417055C2 (en) * 1984-05-09 1986-05-07 Messerschmitt-Bölkow-Blohm GmbH, 8012 Ottobrunn Helium II phase separator
US4766731A (en) * 1987-09-01 1988-08-30 Union Carbide Corporation Method to deliver ultra high purity helium gas to a use point
JPH0622224B2 (en) * 1988-03-05 1994-03-23 大阪酸素工業株式会社 Supply of liquefied carbon dioxide with few or no particles
US4961325A (en) * 1989-09-07 1990-10-09 Union Carbide Corporation High pressure gas supply system
US5243821A (en) * 1991-06-24 1993-09-14 Air Products And Chemicals, Inc. Method and apparatus for delivering a continuous quantity of gas over a wide range of flow rates
US5386707A (en) * 1992-12-31 1995-02-07 Praxair Technology, Inc. Withdrawal of cryogenic helium with low impurity from a vessel
JP2959947B2 (en) * 1994-02-28 1999-10-06 信越石英株式会社 Source gas supply method and apparatus
FR2747595B1 (en) * 1996-04-19 1998-08-21 Air Liquide PROCESS AND INSTALLATION FOR PROVIDING ULTRA-PUR HELIUM
US5934081A (en) * 1998-02-03 1999-08-10 Praxair Technology, Inc. Cryogenic fluid cylinder filling system

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4201952A1 (en) † 1992-01-24 1993-07-29 Linde Ag Method of supplying cold gas - has gas, in fluid form, fed into thermically insulated storage unit from which required amounts are then taken
US5452583A (en) † 1992-12-11 1995-09-26 Praxair Technology, Inc. Coolant recovery system

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KR20000012019A (en) 2000-02-25
DE69934277T3 (en) 2018-08-02
EP0976969A1 (en) 2000-02-02
ZA994643B (en) 2000-01-12
BR9902937A (en) 2000-03-21
DE69934277T2 (en) 2007-07-05
CN1092314C (en) 2002-10-09
AR024506A1 (en) 2002-10-16
DE69934277D1 (en) 2007-01-18
TW410257B (en) 2000-11-01
ATE347668T1 (en) 2006-12-15
FR2781868A1 (en) 2000-02-04
FR2781868B1 (en) 2000-09-15
JP2000055299A (en) 2000-02-22
CA2279108A1 (en) 2000-01-29
EP0976969B1 (en) 2006-12-06
ES2278432T3 (en) 2007-08-01
CN1245876A (en) 2000-03-01
US6178755B1 (en) 2001-01-30

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