EP0943807B1 - Turbomolekularpumpe - Google Patents

Turbomolekularpumpe Download PDF

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Publication number
EP0943807B1
EP0943807B1 EP99400484A EP99400484A EP0943807B1 EP 0943807 B1 EP0943807 B1 EP 0943807B1 EP 99400484 A EP99400484 A EP 99400484A EP 99400484 A EP99400484 A EP 99400484A EP 0943807 B1 EP0943807 B1 EP 0943807B1
Authority
EP
European Patent Office
Prior art keywords
valve
pump
casing
assembly
turbomolecular pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP99400484A
Other languages
English (en)
French (fr)
Other versions
EP0943807A1 (de
Inventor
André Bouille
Jean-François Guilbert
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel CIT SA
Alcatel Lucent SAS
Original Assignee
Alcatel CIT SA
Alcatel SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel CIT SA, Alcatel SA filed Critical Alcatel CIT SA
Publication of EP0943807A1 publication Critical patent/EP0943807A1/de
Application granted granted Critical
Publication of EP0943807B1 publication Critical patent/EP0943807B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0292—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves

Definitions

  • the present invention relates to a turbomolecular pump, see EP-A 0 397 051.
  • Turbomolecular pump means any secondary vacuum pump of a mechanical type with a rotating rotor, whether with blades or with a drum, or mixed.
  • the pumping unit comprises in particular a turbomolecular pump connected to the enclosure to be emptied via a valve.
  • the present invention aims to reduce the bulk of such a assembly, and reduce the number of seals.
  • the subject of the invention is thus a turbomolecular pump comprising a rotor housed inside a housing having an inlet for suction and a outlet for delivery, said pump being associated with its inlet to a valve having a valve mechanism inside an envelope, characterized in that that said casing of the valve is monobloc with said casing of the pump.
  • FIG. 1 shows a turbomolecular pump according to the invention connected to an enclosure to empty.
  • Figure 2 is an enlarged view of the valve.
  • turbomolecular pump 1 comprising a rotor 2 housed inside a housing 3.
  • the rotor 2 comprises a plurality of stages 4 of movable vanes and the casing 3 supports a plurality of stator vane stages 5.
  • the casing 3 of the pump comprises an outlet 8 of discharge comprising a connecting flange 9 for its assembly with a pump primary.
  • the pump 1 is associated, at its suction inlet 10, with a valve 11 having a valve mechanism 12 located inside an envelope 13.
  • the casing 13 of the valve 11 is in one piece with the casing 3 of the pump 1.
  • the casing 13 and the casing 3 therefore constitute a single and same piece without assembly.
  • the assembly is connected to a chamber to be emptied 14 by means of flanges assembly 15A-15B with a seal 16 between the two flanges 15A and 15B.
  • the arrangement according to the invention makes it possible to avoid assembly by flanges between the pump 1 and the valve 11, and thus reduce the bulk and remove a seal between the pump and the valve. Deleting a joint is beneficial because it reduces the pollution of the enclosure 14.
  • Reduced congestion resulting from the removal of a assembly also allows to slightly increase the conductance.
  • the valve shown is a slide valve whose mechanism includes two movable valves 17 and 18 subjected to an effort of approximation one towards the other by a return spring 19. Between the two flaps, is located a carriage 20 linked to a control shaft 21.
  • the carriage comprises balls 22 which, in position valve open ( Figure 2), are partially housed in grooves 22 fitted to the flaps and allowing the mutual by the force of the return spring 19.
  • valve In FIG. 1, the valve is in the closed position, the valves are in abutment against the bottom of the casing 13 allowing, by pushing the axis 21, out the balls of the grooves 12, and thus to separate the valves 17 and 18.
  • This slide valve is an all-or-nothing valve.
  • the invention applies to any type of valve, and in particular in the case of a flow control valve, the invention consisting in the fact that the casing of the valve and the housing of the pump are in one and the same piece without assembly.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Sliding Valves (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Claims (1)

  1. Einhelt einer Turbomolekularpumpe (1) eines Ventils (11) mit einem Rotor (2), der innerhalb eines Gehäuses (3) angeordnet ist, das einen Eingang (10) zum Ansaugen und einen Ausgang (8) für den Ausstoß umfasst, welche Pumpe an ihrem Eingang an ein Ventil (11) angeschlossen ist, das einen Ventilmechanismus (12) in einem Gehäuse (13) umfasst, dadurch gekennzeichnet, dass das Gehäuse (13) des Ventils einstückig verbunden ist mit dem Gehäuse (3) der Pumpe.
EP99400484A 1998-03-16 1999-03-01 Turbomolekularpumpe Expired - Lifetime EP0943807B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9803191A FR2776029B1 (fr) 1998-03-16 1998-03-16 Pompe turbomoleculaire
FR9803191 1998-03-16

Publications (2)

Publication Number Publication Date
EP0943807A1 EP0943807A1 (de) 1999-09-22
EP0943807B1 true EP0943807B1 (de) 2003-08-20

Family

ID=9524085

Family Applications (1)

Application Number Title Priority Date Filing Date
EP99400484A Expired - Lifetime EP0943807B1 (de) 1998-03-16 1999-03-01 Turbomolekularpumpe

Country Status (5)

Country Link
US (1) US6186749B1 (de)
EP (1) EP0943807B1 (de)
JP (1) JPH11303791A (de)
DE (1) DE69910475T2 (de)
FR (1) FR2776029B1 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19951954A1 (de) * 1999-10-28 2001-05-03 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
JP4672204B2 (ja) * 2001-08-03 2011-04-20 エドワーズ株式会社 真空ポンプの接続構造及び真空ポンプ
DE102004047930A1 (de) * 2004-10-01 2006-04-06 Leybold Vacuum Gmbh Reibungsvakuumpumpe
DE102012112492A1 (de) * 2012-12-18 2014-06-18 Pfeiffer Vacuum Gmbh Vakuumsystem
DE102016114983A1 (de) * 2016-08-12 2018-02-15 Pfeiffer Vacuum Gmbh Vakuumsystem
US10704715B2 (en) * 2017-05-29 2020-07-07 Shimadzu Corporation Vacuum pumping device, vacuum pump, and vacuum valve
JP6951640B2 (ja) * 2017-05-29 2021-10-20 株式会社島津製作所 真空排気装置、真空ポンプおよび真空バルブ
GB2575450B (en) * 2018-07-09 2022-01-26 Edwards Ltd A variable inlet conductance vacuum pump, vacuum pump arrangement and method
GB2591814A (en) * 2020-02-10 2021-08-11 Edwards Vacuum Llc Housing for a vacuum pump

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4926648A (en) * 1988-03-07 1990-05-22 Toshiba Corp. Turbomolecular pump and method of operating the same
JP2538796B2 (ja) * 1989-05-09 1996-10-02 株式会社東芝 真空排気装置および真空排気方法
JP3309229B2 (ja) * 1992-07-16 2002-07-29 アルバック・クライオ株式会社 ターボ分子ポンプ付クライオポンプ装置

Also Published As

Publication number Publication date
DE69910475T2 (de) 2004-06-17
FR2776029B1 (fr) 2000-06-23
EP0943807A1 (de) 1999-09-22
US6186749B1 (en) 2001-02-13
FR2776029A1 (fr) 1999-09-17
DE69910475D1 (de) 2003-09-25
JPH11303791A (ja) 1999-11-02

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