EP0922163A1 - Vacuum piston pump with an inlet and an outlet - Google Patents

Vacuum piston pump with an inlet and an outlet

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Publication number
EP0922163A1
EP0922163A1 EP97936688A EP97936688A EP0922163A1 EP 0922163 A1 EP0922163 A1 EP 0922163A1 EP 97936688 A EP97936688 A EP 97936688A EP 97936688 A EP97936688 A EP 97936688A EP 0922163 A1 EP0922163 A1 EP 0922163A1
Authority
EP
European Patent Office
Prior art keywords
inlet
piston
outlet
pump
compression chambers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP97936688A
Other languages
German (de)
French (fr)
Other versions
EP0922163B1 (en
Inventor
Jürgen Meyer
Rudolf Bahnen
Hans-Josef Burghard
Wolfgang Giebmanns
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold Vakuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum GmbH filed Critical Leybold Vakuum GmbH
Publication of EP0922163A1 publication Critical patent/EP0922163A1/en
Application granted granted Critical
Publication of EP0922163B1 publication Critical patent/EP0922163B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B25/00—Multi-stage pumps
    • F04B25/02—Multi-stage pumps of stepped piston type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B25/00—Multi-stage pumps

Definitions

  • the invention relates to a piston vacuum pump with the features of the preamble of claim 1.
  • a piston vacuum pump of this type is known from US-A-48 54 825.
  • two cylindrical compression chambers of two of the four stepped cylinders are connected in parallel on the inlet side and form a first pump stage.
  • the cylindrical compression chamber of a third cylinder forms the second stage of the pump.
  • the annular compression chambers of the three cylinders, the cylindrical compression chambers of which form the first and second pump stages, are not equipped with inlets; they have no pump function.
  • the cylindrical compression chamber of the fourth cylinder forms a third stage of the vacuum pump. Its outlet is directly connected to the outlet of the pump.
  • the annular compression chamber of this stepped cylinder also has a pumping function; however, together with its inlet and outlet, it merely forms a bypass to the gases flowing directly from the third pump stage, ie that only a part of the gases emerging from the outlet of the third pump stage reaches the outlet of the pump via this annular compression chamber.
  • This ring-shaped compression chamber does not form a real fourth pump stage.
  • the present invention has for its object to provide a piston vacuum pump with the features of the preamble of claim 1 with improved pumping speed and with improved compression.
  • the outlets of the four compression chambers, which form the first pump stage, are directly connected to the outlet of the pump via a check valve. Overpressures occurring in the first pumping phase open this check valve and deliver the gases directly to the outlet of the pump.
  • the drive motor of the vacuum pump is regulated in such a way that it only reaches its full speed when there is no longer any risk of overpressures in the pump.
  • a differential pressure controlled valve is located upstream of the pump inlet.
  • valves of this type are simple and robust.
  • FIGS. 1 and 2 Further advantages and details of the invention will be explained with reference to exemplary embodiments schematically shown in FIGS. 1 and 2.
  • Figure 1 shows an exemplary embodiment of a piston vacuum pump according to the invention
  • the piston vacuum pump 1 shown in Figure 1 comprises the housing 2, the inlet 3 and the outlet 4. Inside the housing are four cylinder-piston systems 11, 21, 31 and 41, which are essentially identical. They are arranged in pairs opposite one another - preferably in one plane - in such a way that their pistons can be driven via a common crankshaft 5.
  • the drive motor is designated 6.
  • the cylinder-piston system 11 has the cylinder 12 and the piston 13. Both are stepped so that they form a cylindrical compression chamber 14 and an annular compression chamber 15 in a manner known per se.
  • the cylindrical compression chamber 14 has the inlet 16 and the outlet 17, the annular compression chamber 15 has the inlet 18 and the outlet 19.
  • the inlets 16 and 18 are formed as annular grooves in the wall of the cylinder 12 so that the movement of the piston 13 causes the inlets to open and close.
  • the outlets 17 and 19 are equipped with valves, not shown in detail.
  • the cylinder-piston system 21, 31 and 41 are designed accordingly and provided with corresponding reference numerals.
  • the inlet 3 via the line 51 - for example with the valve 52 - with the inlets 16, 18, 26, 28 of the compression chambers 14, 15, 24 and 25, which are components of the piston-cylinder systems 11 and 21 , connected.
  • the lines adjoining the outlets 17, 19, 27 and 29 of the compression chambers of the first stage all open into the line 55, which are connected to the inlets 36, 38 of the compression chambers 34, 35. These are components of the piston-cylinder system 31.
  • the compression chambers 34, 35 which are also connected in parallel, form the second pump stage of the piston vacuum pump 1, indicated by the dash-dotted line 57.
  • the lines connected to the outlets 37, 39 of the compression chambers 34, 35 mouth into line 59, which is connected to the inlet 46 of the cylindrical compression chamber 44, which is part of the cylinder-piston system 41.
  • This compression chamber 44 forms the third pumping stage of the piston vacuum pump 1 (see dash-dotted line 61).
  • the outlet 47 of the compression chamber 44 is connected via line 62 to the inlet 48 of the annular compression chamber 45, which is also part of the piston-cylinder system 41.
  • the outlet 49 of the annular compression chamber 45 communicates with the outlet 4 of the piston vacuum pump 1.
  • the compression chamber 45 forms the fourth pumping stage of the piston vacuum pump 1 (dashed line 63).
  • a nozzle 64 is also indicated in FIG. 1, via which the compression space 45 is connected to the interior of the housing 2 of the pump 1.
  • the size of the nozzle 64 is selected so that a vacuum of a few hundred milibars is established in the housing 2. The requirements for the sealing quality of the gap between the pistons and the cylinders in their areas adjacent to the interior of the housing can thereby be further reduced.
  • FIG. 2 again shows the piston-cylinder system 11 with its compression chambers 14 and 15.
  • the inlets 16 and 18 of these chambers are (together with the inlets 26, 28 of the second piston-cylinder system 21) via the valve 52 with the inlet 3 of the vacuum pump in connection.
  • the valve 52 fulfills the function of retaining the relatively large amounts of gas occurring in a first pumping phase to such an extent that overpressures do not occur in the pump 1.
  • the valve 52 has a chamber 65 with an inlet opening 66 and an outlet opening 67. On the outlet side, the chamber is conical.
  • a closure body 68 with a central bore 69.
  • the closure body 68 With the aid of two axially arranged springs, preferably compression springs 70 and 71, the closure body 68, which is spherical on the outlet side, is guided against rotation. Without gas flow, the compression springs keep the breech in suspension.
  • the closure body 68 bears against the conical section of the chamber 65 (upper illustration of the valve 52). Only gas passing through the bore 69 enters the pump 1. The size and length of the bore 69 are selected so that overpressures do not occur in the pump 1.
  • the closure body 68 lifts off its seat, so that gases can flow around it.
  • the flow cross section in the area of the valve 52 increases drastically, so that the pumping speed of the pump 1 is no longer limited by the valve 52.
  • the differential pressure at which the closure body 68 is lifted from its seat can be adjusted.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

A vacuum piston pump (1) has an inlet (3), an outlet (4), and four stepped cylinders (12, 22, 32, 42) which form cylindrical compression chambers (14, 24, 34, 44) and ring-shaped compression chambers (15, 25, 35, 45) together with respective stepped pistons (13, 23, 33, 43). In order to achieve a high displacement capacity and a high compression, the pump (1) has four successively switched pump stages (54, 57, 61, 63) during its normal operation. Eight compression chambers switched in parallel form the first pump stage.

Description

Kolbenvakuumpumpe mit Eintritt und AustrittPiston vacuum pump with inlet and outlet
Die Erfindung bezieht sich auf eine Kolbenvakuumpumpe mit den Merkmalen des Oberbegriffs des Patentanspruchs 1.The invention relates to a piston vacuum pump with the features of the preamble of claim 1.
Eine Kolbenvakuumpumpe dieser Art ist aus der US-A-48 54 825 bekannt. Bei dieser Pumpe nach dem Stand der Technik sind eintrittsseitig zwei zylindrische Kompressionskammern von zwei der vier gestuften Zylinder parallel geschaltet und bilden eine erste Pumpstufe. Die zylindrische Kompressionskammer eines dritten Zylinders bildet die zweite Stufe der Pumpe. Die ringförmigen Kompressionskammern der drei Zylinder, deren zylindrische Kompressionskammern die erste und die zweite Pumpstufe bilden, sind nicht mit Einlassen ausgerüstet; sie haben keine Pumpfunktion. Die zylindrische Kompressionskammer des vierten Zylinders bildet eine dritte Stufe der Vakuumpumpe. Ihr Auslaß steht unmittelbar mit dem Austritt der Pumpe in Verbindung. Die ringförmige Kompressionskammer dieses Stufen-Zylinders hat zwar ebenfalls Pumpfunktion; sie bildet jedoch zusammen mit ihrem Einlaß und ihrem Auslaß lediglich einen Bypass zu den aus der dritten Pumpstufe dem Austritt unmittelbar zuströmenden Gase, d.h., daß nur ein Teil der aus dem Auslaß der dritten Pumpstufe austretenden Gase über diese ringförmige Kompressionskammer zum Austritt der Pumpe gelangt. Eine echte vierte Pumpstufe bildet diese ringförmige Kompressionskammer nicht.A piston vacuum pump of this type is known from US-A-48 54 825. In this pump according to the prior art, two cylindrical compression chambers of two of the four stepped cylinders are connected in parallel on the inlet side and form a first pump stage. The cylindrical compression chamber of a third cylinder forms the second stage of the pump. The annular compression chambers of the three cylinders, the cylindrical compression chambers of which form the first and second pump stages, are not equipped with inlets; they have no pump function. The cylindrical compression chamber of the fourth cylinder forms a third stage of the vacuum pump. Its outlet is directly connected to the outlet of the pump. The annular compression chamber of this stepped cylinder also has a pumping function; however, together with its inlet and outlet, it merely forms a bypass to the gases flowing directly from the third pump stage, ie that only a part of the gases emerging from the outlet of the third pump stage reaches the outlet of the pump via this annular compression chamber. This ring-shaped compression chamber does not form a real fourth pump stage.
Der vorliegenden Erfindung liegt die Aufgabe zugrunde, eine Kolbenvakuumpumpe mit den Merkmalen des Oberbegriffs des Patentanspruchs 1 mit verbessertem Saugvermögen und mit verbesserter Kompression zu schaffen.The present invention has for its object to provide a piston vacuum pump with the features of the preamble of claim 1 with improved pumping speed and with improved compression.
Erfindungsgemäß wird diese Aufgabe durch die kennzeichnenden Merkmale der Patentansprüche gelöst.According to the invention, this object is achieved by the characterizing features of the claims.
Dadurch, daß eintrittsseitig vier Kompressionskammern parallel geschaltet sind, ergibt sich ein besonders hohes Ansaugvermögen. Außerdem wird durch insgesamt vier Pumpstufen mit insgesamt acht Kompressionskammern eine hohe Kompression erreicht. Mit Pumpen der erfindungsgemäßen Art lassen sich Enddrücke von 10-'-* mbar bei relativ hohem Saugvermögen erzeugen, so daß sie bei Applikationen, bei denen Arbeitskammern immer wieder relativ schnell auf niedrige Drücke evakuiert werden müssen, wie zum Beispiel die Schleusen von Halbleiter-Beschichtungs- anlagen, besonders geeignet sind. Bei der Herstellung der Zylinder-Kolben-Systeme müssen besonders hohe Toleranzen nicht eingehalten werden. Der Grund dafür liegt in der besonderen Zuordnung der Kompressionskammern. Während des Betriebs der drei Zylinder-Kolben-Systeme, welche die ersten beiden Pumpstufen bilden, herrschen jeweils in den vom Kolben getrennten Kompressionskammern etwa gleiche Drücke, so daß an die Abdichtung zwischen Zylinder und Kolben keine hohen Anforderungen gestellt werden müssen. Beim vierten Zylinder-Kolben-System treten zwar unterschiedliche Drücke in den beiden Kompressionskammern auf; da dieses Zylinder-Kolben-System jedoch austrittsseitig gelegen ist, sind die auftretenden Druckverhältnisse nicht mehr hoch. Bei den erwähnten Applikationen muß die erfmdungsgemaße Hochvakuumpumpe in der ersten Pumpphase relativ große Gasmengen fordern. Zur Vermeidung von Überdrucken in der Pumpe gibt es drei Möglichkeiten:The fact that four compression chambers are connected in parallel on the inlet side results in a particularly high suction capacity. In addition, a high level of compression is achieved through a total of four pump stages with a total of eight compression chambers. With pumps of the type according to the invention, final pressures of 10 −'- * mbar can be generated at a relatively high pumping speed, so that they have to be evacuated to low pressures again and again in applications in which working chambers have to be evacuated relatively quickly, for example the locks of semiconductor coating - systems that are particularly suitable. Particularly high tolerances do not have to be observed when manufacturing the cylinder-piston systems. The reason for this is the special assignment of the compression chambers. During the operation of the three cylinder-piston systems, which form the first two pump stages, approximately the same pressures prevail in the compression chambers separated from the piston, so that no high demands have to be made on the seal between cylinder and piston. With the fourth cylinder-piston system, different pressures occur in the two compression chambers; however, since this cylinder-piston system is located on the outlet side, the pressure conditions that occur are no longer high. In the applications mentioned, the high-vacuum pump according to the invention must require relatively large amounts of gas in the first pumping phase. There are three ways to avoid overpressure in the pump:
Die Auslasse der vier Kompressionskammern, welche die erste Pumpstufe bilden, stehen über ein Ruckschlagventil unmittelbar mit dem Austritt der Pumpe m Verbindung. In der ersten Pumpphase auftretende Überdrucke öffnen dieses Rückschlagventil und fördern die Gase unmittelbar zum Austritt der Pumpe.The outlets of the four compression chambers, which form the first pump stage, are directly connected to the outlet of the pump via a check valve. Overpressures occurring in the first pumping phase open this check valve and deliver the gases directly to the outlet of the pump.
Der Antriebsmotor der Vakuumpumpe wird derart geregelt, daß er seine volle Drehzahl erst dann erreicht, wenn die Gefahr der Entstehung von Überdrucken in der Pumpe nicht mehr besteht.The drive motor of the vacuum pump is regulated in such a way that it only reaches its full speed when there is no longer any risk of overpressures in the pump.
Dem Eintritt der Pumpe ist ein differenzdruckge- steuertes Ventil vorgelagert.A differential pressure controlled valve is located upstream of the pump inlet.
Die zuletzt genannte Alternative hat sich als besonders zweckmäßig erwiesen, weil Ventile dieser Art einfach und robust sind.The latter alternative has proven particularly useful because valves of this type are simple and robust.
Weitere Vorteile und Einzelheiten der Erfindung sollen anhand von in den Figuren 1 und 2 schematisch dargestellten Ausfuhrungsbeispielen erläutert werden.Further advantages and details of the invention will be explained with reference to exemplary embodiments schematically shown in FIGS. 1 and 2.
Es zeigenShow it
Figur 1 ein Ausfuhrungsbeispiel für eine Kolbenvakuumpumpe nach der Erfindung undFigure 1 shows an exemplary embodiment of a piston vacuum pump according to the invention and
Figur 2 eines der eintrittsseitig gelegenen Zylinder-Kolben-Systeme mit einem differenzdruckgesteu- erten Eintrittsventil. Die in Figur 1 dargestellte Kolbenvakuumpumpe 1 umfaßt das Gehäuse 2, den Eintritt 3 und den Austritt 4. Innerhalb des Gehäuses befinden sich vier Zylinder-Kolben-Systeme 11, 21, 31 und 41, die im wesentlichen identisch ausgebildet sind. Sie sind derart paarweise einander gegenüberliegend - vorzugsweise in einer Ebene - angeordnet, daß ihre Kolben über eine gemeinsame Kurbelwelle 5 angetrieben werden können. Der Antriebsmotor ist mit 6 bezeichnet .2 shows one of the cylinder-piston systems located on the inlet side with an inlet valve controlled by differential pressure. The piston vacuum pump 1 shown in Figure 1 comprises the housing 2, the inlet 3 and the outlet 4. Inside the housing are four cylinder-piston systems 11, 21, 31 and 41, which are essentially identical. They are arranged in pairs opposite one another - preferably in one plane - in such a way that their pistons can be driven via a common crankshaft 5. The drive motor is designated 6.
Das Zylinder-Kolben-System 11 weist den Zylinder 12 und den Kolben 13 auf. Beide sind gestuft, so daß sie in an sich bekannter Weise eine zylindrische Kompressionskammer 14 und eine ringförmige Kompressionskammer 15 bilden. Die zylindrische Kompressionskammer 14 weist den Einlaß 16 und den Auslaß 17, die ringförmige Kompressionskammer 15 den Einlaß 18 und den Auslaß 19 auf. Die Einlasse 16 und 18 sind als Ringnuten in der Wandung des Zylinders 12 ausgebildet, so daß die Bewegung des Kolbens 13 das Öffnen und Schließen der Einl sse bewirkt. Die Auslässe 17 und 19 sind mit im einzelnen nicht dargestellten Ventilen ausgerüstet.The cylinder-piston system 11 has the cylinder 12 and the piston 13. Both are stepped so that they form a cylindrical compression chamber 14 and an annular compression chamber 15 in a manner known per se. The cylindrical compression chamber 14 has the inlet 16 and the outlet 17, the annular compression chamber 15 has the inlet 18 and the outlet 19. The inlets 16 and 18 are formed as annular grooves in the wall of the cylinder 12 so that the movement of the piston 13 causes the inlets to open and close. The outlets 17 and 19 are equipped with valves, not shown in detail.
Die Zylinder-Kolben-System 21, 31 und 41 sind entsprechend ausgebildet und mit korrespondierenden Bezugszeichen versehen.The cylinder-piston system 21, 31 and 41 are designed accordingly and provided with corresponding reference numerals.
Entsprechend dem Erfindungsvorschlag ist der Eintritt 3 über die Leitung 51 - z.B. mit dem Ventil 52 - mit den Einlassen 16, 18, 26, 28 der Kompressionskammern 14, 15, 24 und 25, welche Bestandteile der Kolben-Zylinder-Systeme 11 und 21 sind, verbunden. Die genannten, parallel geschalteten Kompressionskammern bilden eine erste Pumpstufe der Kolbenvakuumpumpe 1, angedeutet durch die strichpunktierte Linie 54. Die sich an die Auslässe 17, 19, 27 und 29 der Kompressionskammern der ersten Stufe anschließenden Leitungen münden sämtlich in die Leitung 55, die mit den Einlassen 36, 38 der Kompressionskammern 34, 35 verbunden sind. Diese sind Bestandteile des Kolben-Zylinder-Systems 31. Die ebenfalls parallel geschalteten Kompressions ammern 34, 35 bilden die zweite Pumpstufe der Kolbenvakuumpumpe 1, angedeutet durch die strichpunktierte Linie 57. Die sich an die Auslasse 37, 39 der Kompressionskammern 34, 35 anschließenden Leitungen munden in die Leitung 59, die mit dem Einlaß 46 der zylindrischen Kompressionskammer 44 verbunden ist, welche Bestandteil des Zylinder-Kolben-Systems 41 ist. Diese Kompressionskammer 44 bildet die dritte Pumpstufe der Kolbenvakuumpumpe 1 (siehe strichpunktierte Linie 61) . Der Auslaß 47 der Kompressionskammer 44 steht über die Leitung 62 mit dem Einlaß 48 der ringförmigen Kompressionskammer 45 in Verbindung, welche ebenfalls Bestandteil des Kolben-Zylinder-Systems 41 ist. Der Auslaß 49 der ringförmigen Kompressionskammer 45 steht mit dem Austritt 4 der Kolbenvakuumpumpe 1 in Verbindung. Die Kompressionskammer 45 bildet die vierte Pumpstufe der Kolbenvakuumpumpe 1 (gestrichelte Linie 63) .According to the proposal of the invention, the inlet 3 via the line 51 - for example with the valve 52 - with the inlets 16, 18, 26, 28 of the compression chambers 14, 15, 24 and 25, which are components of the piston-cylinder systems 11 and 21 , connected. The compression chambers mentioned, connected in parallel, form a first pump stage of the piston vacuum pump 1, indicated by the dash-dotted line 54. The lines adjoining the outlets 17, 19, 27 and 29 of the compression chambers of the first stage all open into the line 55, which are connected to the inlets 36, 38 of the compression chambers 34, 35. These are components of the piston-cylinder system 31. The compression chambers 34, 35, which are also connected in parallel, form the second pump stage of the piston vacuum pump 1, indicated by the dash-dotted line 57. The lines connected to the outlets 37, 39 of the compression chambers 34, 35 mouth into line 59, which is connected to the inlet 46 of the cylindrical compression chamber 44, which is part of the cylinder-piston system 41. This compression chamber 44 forms the third pumping stage of the piston vacuum pump 1 (see dash-dotted line 61). The outlet 47 of the compression chamber 44 is connected via line 62 to the inlet 48 of the annular compression chamber 45, which is also part of the piston-cylinder system 41. The outlet 49 of the annular compression chamber 45 communicates with the outlet 4 of the piston vacuum pump 1. The compression chamber 45 forms the fourth pumping stage of the piston vacuum pump 1 (dashed line 63).
Angedeutet ist in Figur 1 noch eine Düse 64, über die der Kompressionsraum 45 mit dem Inneren des Gehäuses 2 der Pumpe 1 in Verbindung steht. Die Größe der Düse 64 ist so gewählt, daß sich im Gehäuse 2 ein Unterdruck von wenigen hundert Milibar einstellt. Die Anforderungen an die Dichtqualitat des Spaltes zwischen den Kolben und den Zylindern in ihren dem Gehauseinnern benachbarten Bereichen können dadurch weiter reduziert werden.A nozzle 64 is also indicated in FIG. 1, via which the compression space 45 is connected to the interior of the housing 2 of the pump 1. The size of the nozzle 64 is selected so that a vacuum of a few hundred milibars is established in the housing 2. The requirements for the sealing quality of the gap between the pistons and the cylinders in their areas adjacent to the interior of the housing can thereby be further reduced.
Figur 2 zeigt nochmals das Kolben-Zylinder-System 11 mit seinen Kompressionskammern 14 und 15. Die Einlasse 16 und 18 dieser Kammern stehen (zusammen mit den Einlassen 26, 28 des zweiten Kolben-Zylinder-Systems 21) über das Ventil 52 mit dem Eintritt 3 der Vakuumpumpe in Verbindung . Das Ventil 52 erfüllt die Funktion, die in einer ersten Pumpphase anfallenden, relativ großen Gasmengen in solchem Umfang zurückzuhalten, daß Überdrücke in der Pumpe 1 nicht auftreten. Dazu weist das Ventil 52 eine Kammer 65 mit einer Einlaßöffnung 66 und einer Auslaßöffnung 67 auf. Auslaßseitig ist die Kammer kegelförmig gestaltet. In der Kammer 65 befindet sich ein Verschlußkörper 68 mit einer zentralen Bohrung 69. Mit Hilfe von zwei axial angeordneten Federn, vorzugsweise Druckfedern 70 und 71 ist der austrittsseitig kugelförmig gestaltete Ver- schlußkorper 68 verdrehsicher geführt. Ohne Gasströmung halten die Druckfedern den Verschlußkorper in der Schwebe.FIG. 2 again shows the piston-cylinder system 11 with its compression chambers 14 and 15. The inlets 16 and 18 of these chambers are (together with the inlets 26, 28 of the second piston-cylinder system 21) via the valve 52 with the inlet 3 of the vacuum pump in connection. The valve 52 fulfills the function of retaining the relatively large amounts of gas occurring in a first pumping phase to such an extent that overpressures do not occur in the pump 1. For this purpose, the valve 52 has a chamber 65 with an inlet opening 66 and an outlet opening 67. On the outlet side, the chamber is conical. In the chamber 65 there is a closure body 68 with a central bore 69. With the aid of two axially arranged springs, preferably compression springs 70 and 71, the closure body 68, which is spherical on the outlet side, is guided against rotation. Without gas flow, the compression springs keep the breech in suspension.
Ist der Druck im zu evakuierenden Rezipienten, angeschlossen an den Eintritt 3, hoch, z.B. Atmosphärendruck, liegt der Verschlußkörper 68 dem kegelförmigen Abschnitt der Kammer 65 an (obere Darstellung des Ventils 52) . Nur durch die Bohrung 69 hindurchtretendes Gas gelangt in die Pumpe 1. Die Größe und Lange der Bohrung 69 sind so gewählt, daß Überdrücke in der Pumpe 1 nicht auftreten.If the pressure in the recipient to be evacuated, connected to inlet 3, is high, e.g. Atmospheric pressure, the closure body 68 bears against the conical section of the chamber 65 (upper illustration of the valve 52). Only gas passing through the bore 69 enters the pump 1. The size and length of the bore 69 are selected so that overpressures do not occur in the pump 1.
Nimmt der Druck eintrittsseitig ab, hebt sich der Verschlußkörper 68 von seinem Sitz ab, so daß er von Gasen umströmt werden kann. Der Strömungsquerschnitt im Bereich des Ventils 52 nimmt drastisch zu, so daß das Saugvermögen der Pumpe 1 durch das Ventil 52 nicht mehr begrenzt ist. Mit Hilfe der der Druckfedern 70 und 71 ist der Differenzdruck, bei dem das Abheben des Verschlußkörpers 68 von seinem Sitz erfolgt, einstellbar. If the pressure decreases on the inlet side, the closure body 68 lifts off its seat, so that gases can flow around it. The flow cross section in the area of the valve 52 increases drastically, so that the pumping speed of the pump 1 is no longer limited by the valve 52. With the aid of the compression springs 70 and 71, the differential pressure at which the closure body 68 is lifted from its seat can be adjusted.

Claims

PATENTANSPRÜCHE PATENT CLAIMS
Kolbenvakuumpumpe (1) mit einem Eintritt (3), mit einem Austritt (4), mit vier gestuften ZylindernPiston vacuum pump (1) with an inlet (3), with an outlet (4), with four stepped cylinders
(12, 22, 32, 42), die zusammen mit jeweils einem gestuften Kolben (13, 23, 33, 43) jeweils eine zylindrische Kompressionskammer (14, 24, 34, 44) und eine ringförmige Kompressionskammer ( (15, 25, 35, 45) bilden, dadurch gekennzeichnet, daß die Pumpe(12, 22, 32, 42), which together with a stepped piston (13, 23, 33, 43) each have a cylindrical compression chamber (14, 24, 34, 44) and an annular compression chamber ((15, 25, 35 , 45), characterized in that the pump
(1) während ihres Normalbetriebs vier hintereinander geschaltete Pumpstufen (54, 57, 61, 63) aufweist und daß vier parallel geschaltete Kompressionskammern (14, 15, 24, 25) die erste Stufe bilden.(1) has four pump stages (54, 57, 61, 63) connected in series during their normal operation and that four compression chambers (14, 15, 24, 25) connected in parallel form the first stage.
Kolbenvakuumpumpe nach Anspruch 1, dadurch gekennzeichnet, daß jede der acht Kompressionskammern mit einem Einlaß und mit einem Auslaß ausgerüstet ist, daß der Eintritt (3) der Pumpe (1) mit den Einlassen (16, 18, 26, 28) der vier Kompressionskammern (14, 15, 24, 25) von zwei Zylindern (12, 22) in Verbindung steht, daß die Auslässe (17, 19, 27, 29) dieser vier Kompressionskammern mit den beiden Einlassen (36, 38) der beiden Kompressionskammern (34, 35) eines dritten Zylinders (32) verbunden sind, daß die Auslässe (37, 39) dieser beiden Kompressionskammern (34, 35) mit dem Einlaß der zylindrischen Kompressionskammer (44) des vierten Zylinders (41) verbunden sind und daß der Auslaß (47) dieser zylindrischen Kompressionskammer (44) mit dem Einlaß (48) der ringförmigen Kompressionskammer (45) des vierten Zylinders (42) verbunden ist.Piston vacuum pump according to claim 1, characterized in that each of the eight compression chambers is equipped with an inlet and with an outlet, that the inlet (3) of the pump (1) with the inlets (16, 18, 26, 28) of the four compression chambers ( 14, 15, 24, 25) of two cylinders (12, 22) is connected so that the outlets (17, 19, 27, 29) of these four compression chambers with the two inlets (36, 38) of the two compression chambers (34, 35) of a third cylinder (32) that the outlets (37, 39) of these two compression chambers (34, 35) are connected to the inlet of the cylindrical compression chamber (44) of the fourth cylinder (41) and that the outlet (47) of this cylindrical compression chamber (44) is connected to the inlet (48) of the annular compression chamber (45) of the fourth cylinder (42).
3. Kolbenvakuumpumpe nach Anspruch 1 oder 2, dadurch gekennzeichnet, daß die Zylinder-Kolben-Systeme3. Piston vacuum pump according to claim 1 or 2, characterized in that the cylinder-piston systems
(11, 21, 31, 41) derart paarweise einander gegenüberliegend angeordnet sind, daß ihre Kolben (13, 23, 33, 43) über eine gemeinsame Kurbelwelle (5) antreibbar sind.(11, 21, 31, 41) are arranged in pairs opposite one another in such a way that their pistons (13, 23, 33, 43) can be driven via a common crankshaft (5).
4. Kolbenvakuumpumpe nach Anspruch 1 2 oder 3, dadurch gekennzeichnet, daß die Pumpe (1) mit einem dichten Gehäuse (2) ausgerüstet ist, das über eine Düse4. Piston vacuum pump according to claim 1 2 or 3, characterized in that the pump (1) is equipped with a sealed housing (2) which via a nozzle
(64) mit einer der Kompressionskammern, vorzugsweise mit der austrittseitig gelegenen ringförmigen Kompressionskammer (45), verbunden ist.(64) with one of the compression chambers, preferably with the annular compression chamber (45) on the outlet side.
5. Kolbenvakuumpumpe nach Anspruch 1, 2, 3 oder 4, da- durch gekennzeichnet, daß ein druckabhängiges Eintrittsventil (52) vorgesehen ist.5. Piston vacuum pump according to claim 1, 2, 3 or 4, characterized in that a pressure-dependent inlet valve (52) is provided.
6. Kolbenvakuumpumpe nach Anspruch 5, dadurch gekennzeichnet, daß das Ventil (52) eine Kammer (65) mit einem Verschlußkörper (68) aufweist, der mit einer zentralen Bohrung (69) ausgerüstet ist und der unter der Wirkung von zwei Federn (70, 71) steht. 6. Piston vacuum pump according to claim 5, characterized in that the valve (52) has a chamber (65) with a closure body (68) which is equipped with a central bore (69) and which under the action of two springs (70, 71) stands.
EP97936688A 1996-08-27 1997-08-06 Vacuum piston pump with an inlet and an outlet Expired - Lifetime EP0922163B1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19634519A DE19634519A1 (en) 1996-08-27 1996-08-27 Piston vacuum pump with inlet and outlet
DE19634519 1996-08-27
PCT/EP1997/004282 WO1998009077A1 (en) 1996-08-27 1997-08-06 Vacuum piston pump with an inlet and an outlet

Publications (2)

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EP0922163A1 true EP0922163A1 (en) 1999-06-16
EP0922163B1 EP0922163B1 (en) 2001-11-28

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EP97944768A Expired - Lifetime EP0922165B1 (en) 1996-08-27 1997-08-19 Vacuum pump

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Also Published As

Publication number Publication date
EP0922163B1 (en) 2001-11-28
WO1998009077A1 (en) 1998-03-05
EP0922165A1 (en) 1999-06-16
WO1998009079A1 (en) 1998-03-05
DE19634519A1 (en) 1998-03-05
DE59712067D1 (en) 2004-12-09
DE59705578D1 (en) 2002-01-10
EP0922165B1 (en) 2004-11-03

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