EP0918938B1 - Friction vacuum pump - Google Patents

Friction vacuum pump Download PDF

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Publication number
EP0918938B1
EP0918938B1 EP97931744A EP97931744A EP0918938B1 EP 0918938 B1 EP0918938 B1 EP 0918938B1 EP 97931744 A EP97931744 A EP 97931744A EP 97931744 A EP97931744 A EP 97931744A EP 0918938 B1 EP0918938 B1 EP 0918938B1
Authority
EP
European Patent Office
Prior art keywords
stage
pump
thread
blades
pump stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP97931744A
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German (de)
French (fr)
Other versions
EP0918938A1 (en
Inventor
Robert Stolle
Heinz-Dieter Odendahl
Christian Beyer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold Vakuum GmbH
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Filing date
Publication date
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Publication of EP0918938A1 publication Critical patent/EP0918938A1/en
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Anticipated expiration legal-status Critical
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps

Definitions

  • the invention relates to a friction vacuum pump with at least one turbomolecular pump stage and one adjoining the pressure pump stage on the pressure side.
  • turbomolecular vacuum pumps can be improved that their turbomolecular pump stages are a threaded pump stage is subordinated.
  • the problem of an effective one Use of the thread pump stage is that a Effective pumping speed dependent on pressure as possible on Entry of the thread (suction-side end of the thread) cannot be guaranteed.
  • the reason is in that the flow behavior of the funded Gases in the transition area between turbomolecular pump stages and thread pump stages from molecular (at Drükken ⁇ 10-3 mbar) on laminar (from about 10-2 mbar upwards) changes.
  • Known designs of the transition area between turbomolecular pump stages and thread pump stages have the disadvantage that it can be demolished Current is coming. These have a significant impact the pumping speed of the pump.
  • DE-A-36 27 642 (claim 4) is a friction vacuum pump of the species affected here.
  • a thread pump stage closes on.
  • the entry of the thread pump stage has one special design not on.
  • the thread depth changes not over the length of the thread pump stage.
  • the state of the art also includes the content of Documents FR-A-26 629 877 and WO-A-93/23672.
  • the subject of the first-mentioned script takes length the wing of the filling stage in the direction of flow.
  • at the turbomolecular vacuum pump according to the second document is the suction or pressure side length of the wing Filling level of the corresponding length of the blades upstream and downstream Turbomolecular pump stage adjusted.
  • the present invention is based on the object the pumping speed of a friction vacuum pump at the beginning mentioned type by an improvement in the entrance area to increase the thread pump stage.
  • the measures according to the invention have the effect that the transition area between the turbomolecular pump stage and the thread pump stage one of the flow form has adapted geometry.
  • the in this transition area from molecular to laminar flow is only slightly disturbed.
  • the properties of the fill level are the mass flow, the realized compression and adapted to the absolute pressure.
  • Figures 1 and 2 show that the invention Pump 1 a turbomolecular pump stage 2, a filling stage 3 and a thread pump stage 4 comprises. Gas production takes place between a rotor 5 (rotor sections 5a and 5b) and a stator 6 instead.
  • the axis of rotation of the rotor is denoted by 7.
  • Wear rotor 5 and / or stator 6 the structures that produce gas.
  • Components of the turbomolecular pump stage 2 are rows of stator blades 11 and rows of rotor blades 12.
  • the Filling stage 3 comprises several vanes 13.
  • the thread pump stage 4 is characterized by a thread 14.
  • a wing 13 does not have to be assigned to each web of the thread 14 his. Depending on the application, less or more wings 13 than thread webs 14 may be present.
  • the gap is between the rotor 5 and the stator 6 15, which should be as small as possible and usually is less than a millimeter.
  • FIG. 3 shows how the Wing 13 are designed. It is this Execution around wing-shaped end sections of the Thread 14, practically by a sharp increase in Thread depth t are marked. This increase begins at the dashed line 16 and extends over a relatively short length, denoted by h of the rotor 5.
  • the thread depth t increases towards the suction side Amount that is about the active length of the blades of the Stator blade row 11 or rotor blade row located on the suction side 12 corresponds to the turbomolecular pump stage 2.
  • This strong increase in the thread depth t takes place expediently over a length h of the rotor 5, which is smaller than the length of the suction side Blading the turbomolecular pump stage 2, preferably even less than half the length 1 of these blades.
  • the thread depth t increases by Factor 4 to 8, preferably about 6 to.
  • the angle of attack the wing 13 lies between the angle of attack the neighboring blades of the turbomolecular pump stage 2 and the inclination of the adjacent thread webs 14 (Web angle ⁇ ).
  • Figures 4 to 6 show that the thread pump stage 4 has several thread webs 14, e.g. between four and sixteen, preferably eight.
  • the bridge angle ⁇ (to the horizontal) is between about 10 ° and 20 °.
  • blades 12 are the last ones on the pressure side blade row of the turbomolecular pump stage 2 shown, which - as described in Figures 1 to 3 - Still on the rotor section 5b of the filling stage 3 and Thread stage 4 are attached.
  • the number of blades 12 exceeds the number of wings 13 by about a factor 1.5 to 5, preferably 4.
  • the Number of wings 13 greater than the number of Threaded webs 14. Between each suction side according to Art a wing-shaped end portion 13 of the Threaded webs 14 have another wing 13.

Description

Die Erfindung bezieht sich auf eine Reibungsvakuumpumpe mit mindestens einer Turbomolekularpumpenstufe und einer sich daran druckseitig anschließenden Gewindepumpenstufe.The invention relates to a friction vacuum pump with at least one turbomolecular pump stage and one adjoining the pressure pump stage on the pressure side.

Es ist bekannt, daß die Vorvakuumbeständigkeit von Turbomolekularvakuumpumpen dadurch verbessert werden kann, daß ihren Turbomolekularpumpenstufen eine Gewindepumpenstufe nachgeordnet wird. Das Problem einer effektiven Nutzung der Gewindepumpenstufe besteht darin, daß ein möglichst druckungabhängiges effektives Saugvermögen am Eintritt des Gewindes (saugseitiges Ende des Gewindes) nicht sichergestellt werden kann. Der Grund dafür liegt darin, daß sich das Strömungsverhalten der geförderten Gase im Übergangsbereich zwischen Turbomolekularpumpenstufen und Gewindepumpenstufen von molekular (bei Drükken < 10-3 mbar) auf laminar (von etwa 10-2 mbar aufwärts) ändert. Bekannte Gestaltungen des Übergangsbereichs zwischen Turbomolekularpumpenstufen und Gewindepumpenstufen haben den Nachteil, daß es zu Abrissen der Strömung kommt. Diese beeinträchtigen in erheblichem Maße das Saugvermögen der Pumpe.It is known that the backing resistance of turbomolecular vacuum pumps can be improved that their turbomolecular pump stages are a threaded pump stage is subordinated. The problem of an effective one Use of the thread pump stage is that a Effective pumping speed dependent on pressure as possible on Entry of the thread (suction-side end of the thread) cannot be guaranteed. The reason is in that the flow behavior of the funded Gases in the transition area between turbomolecular pump stages and thread pump stages from molecular (at Drükken <10-3 mbar) on laminar (from about 10-2 mbar upwards) changes. Known designs of the transition area between turbomolecular pump stages and thread pump stages have the disadvantage that it can be demolished Current is coming. These have a significant impact the pumping speed of the pump.

Aus der DE-A-36 27 642 (Anspruch 4) ist eine Reibungsvakuumpumpe der hier betroffenen Art bekannt. An die Turbomolekularpumpenstufe schließt sich eine Gewindepumpenstufe an. Der Eintritt der Gewindepumpenstufe weist eine besondere Gestaltung nicht auf. Die Gewindetiefe ändert sich über die Länge der Gewindepumpenstufe nicht.DE-A-36 27 642 (claim 4) is a friction vacuum pump of the species affected here. To the turbomolecular pump stage a thread pump stage closes on. The entry of the thread pump stage has one special design not on. The thread depth changes not over the length of the thread pump stage.

Zum Stand der Technik gehört auch noch der Inhalt der Dokumente FR-A-26 629 877 und WO-A-93/23672. Beim Gegenstand der zuerst genannten Schrift nimmt die Länge der Flügel der Füllstufe in Strömungsrichtung ab. Bei der Turbomolekularvakuumpumpe nach dem zweiten Dokument ist die saug- bzw. druckseitige Länge der Flügel der Füllstufe der entsprechenden Länge der Schaufeln einer vor- und einer nachgeschalteten Turbomolekularpumpenstufe angepasst.The state of the art also includes the content of Documents FR-A-26 629 877 and WO-A-93/23672. At the The subject of the first-mentioned script takes length the wing of the filling stage in the direction of flow. at the turbomolecular vacuum pump according to the second document is the suction or pressure side length of the wing Filling level of the corresponding length of the blades upstream and downstream Turbomolecular pump stage adjusted.

Der vorliegenden Erfindung liegt die Aufgabe zugrunde, das Saugvermögen einer Reibungsvakuumpumpe der eingangs genannten Art durch eine Verbesserung im Eintrittsbereich der Gewindepumpenstufe zu erhöhen.The present invention is based on the object the pumping speed of a friction vacuum pump at the beginning mentioned type by an improvement in the entrance area to increase the thread pump stage.

Erfindungsgemäß wird diese Aufgabe durch die kennzeichnenden Merkmale der Patentansprüche gelöst.According to the invention, this object is achieved by the characterizing Features of the claims solved.

Die Maßnahmen nach der Erfindung haben die Wirkung, daß der Übergangsbereich zwischen der Turbomolekularpumpenstufe und der Gewindepumpenstufe eine der Strömungsform angepasste Geometrie hat. Die in diesem Übergangsbereich von molekular auf laminar übergehende Stömung wird nur unwesentlich gestört. Zu einem Abriss der Strömung kommt es nicht. Die Eigenschaften der Füllstufe sind dem Massenfluß, der realisierten Verdichtung und dem Absolutdruck angepaßt.The measures according to the invention have the effect that the transition area between the turbomolecular pump stage and the thread pump stage one of the flow form has adapted geometry. The in this transition area from molecular to laminar flow is only slightly disturbed. To a demolition of the There is no current. The properties of the fill level are the mass flow, the realized compression and adapted to the absolute pressure.

Bei einer vorteilhaften Ausführungsform sind mehrere oder alle Flügel der Füllstufe flügelartig gestaltete Endabschnitte der Stege der Gewindestufe. Die Herstellung von Füllstufe und Gewindestufe ist dadurch vereinfacht. In an advantageous embodiment, there are several or designed all wings of the filling level wing-like End sections of the webs of the threaded step. The production filling level and thread level is simplified.

Weitere Vorteile und Einzelheiten der Erfindung sollen anhand von in den Figuren 1 bis 6 dargestellten Ausführungsbeispielen erläutert werden. Es zeigen:

  • Figuren 1 und 2 Teilschnitte durch eine Pumpe nach der Erfindung mit insgesamt vier Gestaltungsvarianten von Gewindepumpenstufe und Füllstufe.
  • Figur 3 vergrößert die Variante nach Figur 1, rechts, bei der ein Gewindesteg der Gewindepumpenstufe in einen Flügel der Füllstufe übergeht.
  • Figuren 4 bis 6 Teilansichten des Übergangsbereichs zwischen Turbomolekularpumpenstufe und Gewindepumpenstufe von erfindungsgemäß gestalteten Rotoren.
Further advantages and details of the invention will be explained on the basis of the exemplary embodiments illustrated in FIGS. 1 to 6. Show it:
  • Figures 1 and 2 partial sections through a pump according to the invention with a total of four design variants of thread pump stage and filling stage.
  • FIG. 3 enlarges the variant according to FIG. 1, right, in which a thread bridge of the thread pump stage merges into a wing of the filling stage.
  • FIGS. 4 to 6 partial views of the transition area between the turbomolecular pump stage and the threaded pump stage of rotors designed according to the invention.

Die Figuren 1 und 2 zeigen, daß die erfindungsgemäße Pumpe 1 eine Turbomolekularpumpenstufe 2, eine Füllstufe 3 und eine Gewindepumpenstufe 4 umfaßt. Die Gasförderung findet zwischen einem Rotor 5 (Rotorabschnitte 5a und 5b) und einem Stator 6 statt. Die Drehachse des Rotors ist mit 7 bezeichnet. Rotor 5 und /oder Stator 6 tragen die die Gasförderung bewirkenden Strukturen.Figures 1 and 2 show that the invention Pump 1 a turbomolecular pump stage 2, a filling stage 3 and a thread pump stage 4 comprises. Gas production takes place between a rotor 5 (rotor sections 5a and 5b) and a stator 6 instead. The axis of rotation of the rotor is denoted by 7. Wear rotor 5 and / or stator 6 the structures that produce gas.

Bestandteile der Turbomolekularpumpenstufe 2 sind Statorschaufelreihen 11 und Rotorschaufelreihen 12. Die Füllsstufe 3 umfaßt mehrere Flügel 13. Die Gewindepumpenstufe 4 ist durch ein Gewinde 14 gekennzeichnet.Components of the turbomolecular pump stage 2 are rows of stator blades 11 and rows of rotor blades 12. The Filling stage 3 comprises several vanes 13. The thread pump stage 4 is characterized by a thread 14.

Die Figuren 1 und 2 lassen insgesamt vier Varianten in Bezug auf die Gestaltung von Füllstufe 3 und Gewindepumpenstufe 4 erkennen:

Fig. 1, links:
Flügel 13 und Gewinde 14
Bestandteil des Stators 6.
Fig. 1, rechts:
Flügel 13 und Gewinde 14
Bestandteil des Rotors 5.
Fig. 2, links:
Flügel 13 Bestandteil des Stators 6,
Gewinde 14 Bestandteil des Rotors 5.
Fig. 2, rechts:
Flügel 13 Bestandteil des Rotors 5,
Gewinde 14 Bestandteil des Stators 6.
Figures 1 and 2 show a total of four variants with regard to the design of filling level 3 and thread pump level 4:
Fig. 1, left:
Wing 13 and thread 14
Part of the stator 6.
Fig. 1, right:
Wing 13 and thread 14
Part of the rotor 5.
Fig. 2, left:
Wing 13 part of the stator 6,
Thread 14 part of the rotor 5.
Fig. 2, right:
Wing 13 part of the rotor 5,
Thread 14 part of the stator 6.

Nicht jedem Steg des Gewindes 14 muß ein Flügel 13 zugeordnet sein. Je nach Anwendungsfall können weniger oder mehr Flügel 13 als Gewindestege 14 vorhanden sein. Zwischen Rotor 5 und Stator 6 befindet sich der Spalt 15, der möglichst klein sein soll und üblicherweise kleiner als ein Milimeter ist.A wing 13 does not have to be assigned to each web of the thread 14 his. Depending on the application, less or more wings 13 than thread webs 14 may be present. The gap is between the rotor 5 and the stator 6 15, which should be as small as possible and usually is less than a millimeter.

Insbesondere Figur 3 (vergrößerte Darstellung der Ausführungsform nach Fig. 1, rechts) läßt erkennen, wie die Flügel 13 gestaltet sind. Es handelt sich bei dieser Ausführung um flügelartig gestaltete Endabschnitte des Gewindes 14, die praktisch durch eine starke Zunahme der Gewindetiefe t gekennzeichnet sind. Diese Zunahme beginnt in Höhe der gestrichelten Linie 16 und erstreckt sich über einen relativ kurzen, mit h bezeichneten Längenabschnitt des Rotors 5.In particular Figure 3 (enlarged view of the embodiment 1, right) shows how the Wing 13 are designed. It is this Execution around wing-shaped end sections of the Thread 14, practically by a sharp increase in Thread depth t are marked. This increase begins at the dashed line 16 and extends over a relatively short length, denoted by h of the rotor 5.

Die Gewindetiefe t nimmt in Richtung Saugseite auf einen Betrag zu, der etwa der aktiven Länge der Schaufeln der saugseitig gelegenen Statorschaufelreihe 11 bzw. Rotorschaufelreihe 12 der Turbomolekularpumpenstufe 2 entspricht. Diese starke Zunahme der Gewindetiefe t erfolgt zweckmäßig über einen Längenabschnitt h des Rotors 5, der kleiner ist als die Länge der saugseitig gelegenen Schaufeln der Turbomolekularpumpstufe 2, vorzugsweise sogar kleiner als die Hälfte der Länge 1 dieser Schaufeln. In diesem Bereich nimmt die Gewindetiefe t um den Faktor 4 bis 8, vorzugsweise etwa 6 zu. In Richtung Druckseite nimmt die Gewindetiefe t weiterhin ab, allerdings - wie bisher üblich - relativ langsam. Der Anstellwinkel der Flügel 13 liegt zwischen dem Anstellwinkel der benachbarten Schaufeln der Turbomolekularpumpenstufe 2 und der Neigung der benachbarten Gewindestege 14 (Stegwinkel α). The thread depth t increases towards the suction side Amount that is about the active length of the blades of the Stator blade row 11 or rotor blade row located on the suction side 12 corresponds to the turbomolecular pump stage 2. This strong increase in the thread depth t takes place expediently over a length h of the rotor 5, which is smaller than the length of the suction side Blading the turbomolecular pump stage 2, preferably even less than half the length 1 of these blades. In this area the thread depth t increases by Factor 4 to 8, preferably about 6 to. In the direction Pressure side the thread depth t continues to decrease, however - as usual - relatively slow. The angle of attack the wing 13 lies between the angle of attack the neighboring blades of the turbomolecular pump stage 2 and the inclination of the adjacent thread webs 14 (Web angle α).

Bei der Ausführungsform, bei der die Flügel 13 rotieren (Figuren 1 und 2, rechts), befindet sich im montierten Zustand unmittelbar oberhalb der Flügel 13 eine Statorschaufelreihe 11. Die darüber befindliche Rotorschaufelreihe 12 der Turbemolekularpumpenstufe 2 kann noch am Rotor 5b der Füll- und der Gewindepumpenstufe 3, 4 befestigt sein, was insbesondere aus den Figuren 4 bis 6 ersichtlich ist.In the embodiment in which the vanes 13 rotate (Figures 1 and 2, right), is in the assembled State immediately above the blades 13 a row of stator blades 11. The row of rotor blades above 12 of the turbomolecular pump stage 2 can still on Rotor 5b of the filling and thread pump stage 3, 4 attached be what in particular from FIGS. 4 to 6 can be seen.

Bei den Ausführungsformen, bei denen die Flügel 13 ruhen (Figuren 1 und 2, links), liegt eine Rotorschaufelreihe mit ihren Schaufeln 12 unmittelbar über den ruhenden Flügeln 13. Auch bei dieser Ausführung ist die Schaufelreihe 12 noch am Rotor 5b der Füll- und der Gewindepumpenstufe 3, 4 befestigt.In the embodiments in which the wings 13 rest (Figures 1 and 2, left), there is a row of rotor blades with their blades 12 immediately above the resting one Wings 13. Also in this version is the row of blades 12 still on the rotor 5b of the filling and the thread pump stage 3, 4 attached.

Die Figuren 4 bis 6 lassen erkennen, daß die Gewindepumpenstufe 4 mehrere Gewindestege 14 aufweist, z.B. zwischen vier und sechzehn, vorzugsweise acht. Der Stegwinkel α (zur Horizontalen) liegt zwischen etwa 10° und 20°. Außerdem sind Schaufeln 12 der letzten, druckseitig gelegenen Schaufelreihe der Turbomolekularpumpenstufe 2 dargestellt, die - wie zu den Figuren 1 bis 3 beschrieben - noch am Rotorabschnitt 5b der Füllstufe 3 und der Gewindestufe 4 befestigt sind. Die Anzahl der Schaufeln 12 übersteigt die Anzahl der Flügel 13 um etwa den Faktor 1,5 bis 5, vorzugsweise 4.Figures 4 to 6 show that the thread pump stage 4 has several thread webs 14, e.g. between four and sixteen, preferably eight. The bridge angle α (to the horizontal) is between about 10 ° and 20 °. In addition, blades 12 are the last ones on the pressure side blade row of the turbomolecular pump stage 2 shown, which - as described in Figures 1 to 3 - Still on the rotor section 5b of the filling stage 3 and Thread stage 4 are attached. The number of blades 12 exceeds the number of wings 13 by about a factor 1.5 to 5, preferably 4.

Bei den Ausführungen nach den Figuren 5 und 6 ist die Anzahl der Flügel 13 größer als die Anzahl der Gewindestege 14. Zwischen jedem saugseitig nach Art eines Flügels gestaltetem Endabschnitt 13 der Gewindestege 14 befindet sich ein weiterer Flügel 13.In the embodiments according to FIGS. 5 and 6, the Number of wings 13 greater than the number of Threaded webs 14. Between each suction side according to Art a wing-shaped end portion 13 of the Threaded webs 14 have another wing 13.

Claims (11)

  1. Friction vacuum pump with at least one turbomolecular pump stage (2) and a threaded pump stage (4) adjoining the latter on the pressure side, characterised in that there is located, between the turbomolecular pump stage (2) and the threaded pump stage (4), a filling stage (3) with vanes (13) whose length corresponds, on the suction side, to the active length of those blades of the turbomolecular pump stage (2) which are located on the pressure side, and on the pressure side, to the depth of that region of the thread (14) of the threaded stage (4) which is on the suction side.
  2. Pump according to claim 1, characterised in that ends of the thread webs (14) which are on the suction side are vane-like in shape and form the vanes (13) of the filling stage (3).
  3. Pump according to claim 1 or 2, characterised in that the angle of incidence of the vanes (13) has a value which lies between the angle of incidence of those blades of the turbomolecular pump stage (2) which are located on the suction side and the web angle α of that thread (14) of the threaded pump stage (4) which is located on the pressure side.
  4. Pump according to claim 1, 2 or 3, characterised in that the threaded pump stage (4) has a number of thread webs (14) whose web angle (α) lies between 10° and 20°.
  5. Pump according to claim 4, characterised in that there are four to sixteen, and preferably eight, thread webs (14).
  6. Pump according to one of claims 1 to 5, characterised in that the number of vanes (13) in the filling stage (3) is greater than the number of thread webs (14) in the threaded pump stage (4).
  7. Pump according to one of claims 1 to 6, characterised in that the number of blades in the rows of blades (11, 12) adjacent to the vanes (13) is greater, by a factor of 1.5 to five, and preferably four, than the number of vanes (13).
  8. Pump according to one of the preceding claims, characterised in that the vanes (13), or the increase in the thread depth (t), extend(s) over a portion (h) of the length of the rotor (5) which is smaller than the length of the blades of the turbomolecular pump stage (2).
  9. Pump according to claim 8, characterised in that the portion (h) of the length is about half as great as the length of the blades.
  10. Pump according to one of the preceding claims, characterised in that the rotor (5b) of the threaded pump stage (2) and of the filling stage (3) is a separately manufactured component.
  11. Pump according to claim 10, characterised in that the rotor (5b) carries, on the suction side, a row of blades (12) belonging to the turbomolecular pump stage (2).
EP97931744A 1996-08-16 1997-07-02 Friction vacuum pump Expired - Lifetime EP0918938B1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19632874A DE19632874A1 (en) 1996-08-16 1996-08-16 Friction vacuum pump
DE19632874 1996-08-16
PCT/EP1997/003477 WO1998007989A1 (en) 1996-08-16 1997-07-02 Friction vacuum pump

Publications (2)

Publication Number Publication Date
EP0918938A1 EP0918938A1 (en) 1999-06-02
EP0918938B1 true EP0918938B1 (en) 2002-02-06

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Family Applications (1)

Application Number Title Priority Date Filing Date
EP97931744A Expired - Lifetime EP0918938B1 (en) 1996-08-16 1997-07-02 Friction vacuum pump

Country Status (5)

Country Link
US (1) US6168374B1 (en)
EP (1) EP0918938B1 (en)
JP (1) JP3957761B2 (en)
DE (2) DE19632874A1 (en)
WO (1) WO1998007989A1 (en)

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WO1998007989A1 (en) 1998-02-26
US6168374B1 (en) 2001-01-02
EP0918938A1 (en) 1999-06-02
DE19632874A1 (en) 1998-02-19
JP3957761B2 (en) 2007-08-15
JP2000516321A (en) 2000-12-05
DE59706325D1 (en) 2002-03-21

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