EP0864181A1 - Etage plat de balayage destine a la microscopie a sonde balayee - Google Patents

Etage plat de balayage destine a la microscopie a sonde balayee

Info

Publication number
EP0864181A1
EP0864181A1 EP96940813A EP96940813A EP0864181A1 EP 0864181 A1 EP0864181 A1 EP 0864181A1 EP 96940813 A EP96940813 A EP 96940813A EP 96940813 A EP96940813 A EP 96940813A EP 0864181 A1 EP0864181 A1 EP 0864181A1
Authority
EP
European Patent Office
Prior art keywords
scanning
sample
piezo
scanner
stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP96940813A
Other languages
German (de)
English (en)
Other versions
EP0864181A4 (fr
EP0864181B1 (fr
Inventor
Klony Lieberman
Aaron Lewis
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lewis Aaron
LIEBERMAN, KLONY
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of EP0864181A1 publication Critical patent/EP0864181A1/fr
Publication of EP0864181A4 publication Critical patent/EP0864181A4/fr
Application granted granted Critical
Publication of EP0864181B1 publication Critical patent/EP0864181B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/028—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors along multiple or arbitrary translation directions, e.g. XYZ stages
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/872—Positioner

Definitions

  • a novel piezo-electric scanner design incorporates X, Y and Z scanning into a flat stage less than 7 mm high. Scan ranges of greater than 30 microns along with axial positioning capabilities of 30 microns can be obtained with this device.
  • the scanning stage also provides for inertial translation of a sample over many millimeters.
  • the flat design is particularly well suited for near-field scanning optical microscopy and for working in conjunction with other optical microscopy techniques such as confocal optical microscopy.
  • the scanning stage lies at the heart of all scanned probe microscopes (SPM) (D. Sarid, Scanning Force Microscopy, Oxford University
  • the first scanning tunneling microscope relied on three separate orthogonal piezo- electric positioners for the X, Y and Z translation (D. Sarid, Scanning Force Microscopy, Oxford University Press, New York) . This was rapidly succeeded by the single tube scanner developed by Binning and Smith (D. Sarid, Scanning Force Microscopy, Oxford University Press, New York) which provided X-Y scanning and Z positioning with a single element .
  • This element consists of a single piezo-electric tube in which the outer electrode is segmented into four equal quadrants as is shown in Fig. 1.
  • a positive voltage applied to one quadrant results in an expansion of the tube length on one side while a negative voltage of equal magnitude applied to the opposite quadrant causes a contraction of the corresponding quadrant, with the net result being a bending of the tube. This bending is significantly greater than the axial expansion of the tube.
  • This tube scanner has remained, in one form or another, in all scanned probe microscopes. Short tubes can scan over several microns while larger tubes can provide scan ranges of up to 75-100 microns.
  • the translation can be in either the X or Y direction and is limited only by the extent of the sample itself.
  • the actual bending of the tubes is accomplished simply by using a sawtooth voltage on the piezos.
  • coarse axial positioning is also achievable by placing the sample on an appropriate mount and using inertial rotation.
  • the greatest drawback of these single and triple tube designs is the large axial extension of the scanner.
  • the long range scanning tubes used in today' s commercial STM and AFM systems can extend for several inches (D. Sarid, Scanning Force Microscopy, Oxford University Press, New York) . This restriction has meant that all the inspection optics is placed on one side of the sample, with the region on the other side being the sole domain of the scan mechanism.
  • the device described herein provides an ideal solution to the foregoing problems by providing scanning in three orthogonal directions in a thin, flat package that can be as small as a few millimeters high.
  • the present device is also ideally suited for stage scanning confocal optical microscopy. Its inherent axial positioning capability provides a mechanism for optically slicing a sample in the Z direction while scanning it through the confocal spot.
  • the present invention is a method and a device for three-dimensional, long-range scanning in a flat structure that can be as small as several millimeters high.
  • Fig. 1 discloses a single tube piezo- electric scanner
  • Fig. 2 is a diagrammatic top plan view of a flat stage piezo-electric scanner in accordance with the invention
  • Fig. 3 is an enlarged view of a sample positioning agent used in the scanner of Fig. 2;
  • Fig. 4 is an enlarged diagrammatic perspective view of a flexible joint connector used in the scanner of Fig. 2 between a piezo- electric tube and a sample frame.
  • the solution to the problems of conventional piezo-electric scanners outlined above is to use the capabilities of the piezo tube scanners 10, shown in Fig. 1, in a flat geometry.
  • the flat scanner of the invention is depicted schematically at 12 in Fig. 2.
  • Four identical quadrant scanners 14, 15, 16 and 17 are used to support a sample at a central stage, or sample mount 20 and provide the scanning.
  • Each of the tubes 14-17 is fixed at one end by a corresponding rigid connector 22-25, respectively, to a chassis 28 and is attached at the other end to a scanning frame 30 via four thin, flat, flexible, connectors 32-35, respectively.
  • These connectors are rigid when forces are applied in the two directions (X,Y) that make up the plane of the connector but flex readily in the direction (Z) normal to their top surfaces.
  • Three small spheres 38-40 are embedded in the top surface of scanning frame 30 and provide a base for the sample mount 20 that is placed on top of the small spheres .
  • An optional addition is three small magnets 42 that are placed on the scanning frame in order to hold the sample mount in place.
  • Fig. 4 An important component in the above scanner are the flexible connectors 32-35 that attach the piezo-electric tube scanners 14-17 to the scanning frame 30.
  • One of these connectors is enlarged in Fig. 4 with the same part numbers as was described in Fig. 2.
  • Lateral (X-Y) scanning of frame 30 is performed by using the piezo tubes in pairs while axial positioning in a direction (Z) perpendicular to the X,Y plane is provided by using all four tubes simultaneously.
  • tubes 15 and 17 are bent to the left by applying appropriate voltages to the left and right outer electrodes of the tubes (see Fig. 1) .
  • Connectors 32 and 34 are perpendicular to the direction of the applied force and simply flex, allowing the sample frame to move to the left.
  • Translation to the right (+X) is obtained by reversing the voltages on the tubes.
  • Translation in the Y direction can be accomplished independently by applying voltages to tubes 14 and 16 and flexing connectors 33 and 35.
  • Axial (Z direction) translation of the sample frame 30 is accomplished by applying voltages to the upper and lower electrodes of all four tubes simultaneously.
  • the axial translation range is equal to the lateral range and fully independent of it.
  • the actual scan range of the device depends on the intrinsic properties of the piezo- electric tubes, the dimensions of the tubes and the voltages applied. There are eight electrical connections to the device consisting of: +X, -X, +Y, -Y, +Z, -Z, piezo ground (center of the piezo tube) and the chassis ground. With typical scan voltages of +/- 125 volts and commercially available 0.125" diameter tubes 1.25" long, XYZ scanning with ranges of 35 ⁇ can be achieved.
  • Inertial translation of the sample is performed exactly as in the tripod scanner described above.
  • the sample 20 rests on three spheres 38, 39 and 40 embedded in the central frame.
  • Small magnets 42 can be included if desired to increase the coupling between the sample and the frame and to allow inverted operation.
  • the scanning frame 30 is moved in the desired direction and then jerked back to the neutral position fast enough so that the sample's inertia keeps it in position, resulting in a net displacement of the sample.
  • the principle advantage of the present scanner over previous geometries is that the three-dimensional scanning is accomplished in a flat thin plate which can be readily placed close to a high power microscope objective. Since the scanner does not extend below the plane of the plate, the objective is completely free to be exchanged by the simple rotation mechanisms found in all optical microscopes.
  • the axial motion is fully equal to the lateral motion. This greatly simplifies approach mechanisms, since the tip can easily be placed with conventional optics, close enough to a surface so that the axial, or Z scan, mechanism can readily bring the tip into contact with the surface.

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Microscoopes, Condenser (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

Un scanner tridimensionnel (12) comprend un étage plat (20) destiné à recevoir des échantillons. L'étage est porté dans un cade de balayage (30) par quatre éléments identiques (14-17) de scanner piézoélectriques à tube quadrantal. Chaque élément est fixé par une extrémité à un châssis fixe et attaché par son extrémité opposée au cadre du scanner par l'intermédiaire d'un dispositif de connexion. Les éléments de scanner sont actionnés par paires pour déplacer l'étage dans un plan X-Y, et ensemble pour déplacer l'étage dans une direction Z perpendiculaire au plan X-Y.
EP96940813A 1995-11-29 1996-11-27 Etage plat de balayage destine a la microscopie a sonde balayee Expired - Lifetime EP0864181B1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US564018 1995-11-29
US08/564,018 US5705878A (en) 1995-11-29 1995-11-29 Flat scanning stage for scanned probe microscopy
PCT/US1996/018553 WO1997020354A1 (fr) 1995-11-29 1996-11-27 Etage plat de balayage destine a la microscopie a sonde balayee

Publications (3)

Publication Number Publication Date
EP0864181A1 true EP0864181A1 (fr) 1998-09-16
EP0864181A4 EP0864181A4 (fr) 2000-08-02
EP0864181B1 EP0864181B1 (fr) 2004-06-09

Family

ID=24252839

Family Applications (1)

Application Number Title Priority Date Filing Date
EP96940813A Expired - Lifetime EP0864181B1 (fr) 1995-11-29 1996-11-27 Etage plat de balayage destine a la microscopie a sonde balayee

Country Status (5)

Country Link
US (1) US5705878A (fr)
EP (1) EP0864181B1 (fr)
JP (1) JP4014054B2 (fr)
DE (1) DE69632691T2 (fr)
WO (1) WO1997020354A1 (fr)

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AT410718B (de) * 1998-10-28 2003-07-25 Schindler Hansgeorg Dr Vorrichtung zur visualisierung von molekülen
EP1316055A4 (fr) * 2000-05-29 2006-10-04 Vkb Inc Dispositif de saisie de donnees virtuelles et procede de saisie de donnees alphanumeriques et analogues
US6787773B1 (en) 2000-06-07 2004-09-07 Kla-Tencor Corporation Film thickness measurement using electron-beam induced x-ray microanalysis
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US6801596B2 (en) * 2001-10-01 2004-10-05 Kla-Tencor Technologies Corporation Methods and apparatus for void characterization
DE50205472D1 (de) * 2001-10-22 2006-02-02 Miniswys Sa Biel Piezoelektrischer antrieb
US6798120B1 (en) * 2001-10-31 2004-09-28 The Regents Of The University Of California Apparatus and method for manipulation of an object
US6810105B2 (en) * 2002-01-25 2004-10-26 Kla-Tencor Technologies Corporation Methods and apparatus for dishing and erosion characterization
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US7180662B2 (en) * 2004-04-12 2007-02-20 Applied Scientific Instrumentation Inc. Stage assembly and method for optical microscope including Z-axis stage and piezoelectric actuator for rectilinear translation of Z stage
WO2006090386A2 (fr) * 2005-02-24 2006-08-31 Vkb Inc. Dispositif d'entree
ATE405953T1 (de) * 2005-05-12 2008-09-15 Physik Instr Pi Gmbh & Co Kg Miniaturisierte zweiachsen-piezo- betätigungseinrichtung
EP1886362A2 (fr) * 2005-05-31 2008-02-13 Unison Products Membrane diaphragme et structure de support sensible aux conditions environnementales
EP1941315A1 (fr) * 2005-10-17 2008-07-09 Koninklijke Philips Electronics N.V. Chariot transporteur dans le plan
JP2007158276A (ja) * 2005-12-08 2007-06-21 Ngk Insulators Ltd 圧電／電歪デバイス及び圧電／電歪デバイスの駆動方法
JP2007228782A (ja) * 2006-01-24 2007-09-06 Ngk Insulators Ltd 圧電／電歪デバイス
JP4448099B2 (ja) * 2006-02-01 2010-04-07 キヤノン株式会社 走査型プローブ装置
WO2008126236A1 (fr) * 2007-03-30 2008-10-23 Pioneer Corporation Roue menante
DE102007023217B4 (de) * 2007-05-18 2011-07-21 Continental Automotive GmbH, 30165 Elektromechanischer Motor, insbesondere piezoelektrischer Mikroschrittantrieb
US20100322455A1 (en) * 2007-11-21 2010-12-23 Emo Labs, Inc. Wireless loudspeaker
JP5197101B2 (ja) * 2008-03-31 2013-05-15 日本トムソン株式会社 可動テーブル装置
JP5722231B2 (ja) * 2008-12-18 2015-05-20 ディスカバリー テクノロジー インターナショナル，インク． 組み合わせた共振器を備えて音響定在波に基づく圧電疑似共振モータ
US8189851B2 (en) * 2009-03-06 2012-05-29 Emo Labs, Inc. Optically clear diaphragm for an acoustic transducer and method for making same
US20110044476A1 (en) * 2009-08-14 2011-02-24 Emo Labs, Inc. System to generate electrical signals for a loudspeaker
CN103293339A (zh) * 2012-02-28 2013-09-11 中国科学院合肥物质科学研究院 一种嵌套双压电扫描管共同扫描的复合压电扫描管
CN105228757A (zh) 2013-03-15 2016-01-06 埃莫实验室公司 具有弯曲限制部件的声换能器
USD741835S1 (en) 2013-12-27 2015-10-27 Emo Labs, Inc. Speaker
USD733678S1 (en) 2013-12-27 2015-07-07 Emo Labs, Inc. Audio speaker
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CN103990998B (zh) * 2014-05-20 2017-01-25 广东工业大学 基于应力刚化原理的刚度频率可调二维微动平台
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Also Published As

Publication number Publication date
EP0864181A4 (fr) 2000-08-02
JP2000501500A (ja) 2000-02-08
EP0864181B1 (fr) 2004-06-09
DE69632691D1 (de) 2004-07-15
US5705878A (en) 1998-01-06
WO1997020354A1 (fr) 1997-06-05
JP4014054B2 (ja) 2007-11-28
DE69632691T2 (de) 2005-06-09

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