EP0856598A1 - Dispositif pour le dépÔt électrolytique - Google Patents

Dispositif pour le dépÔt électrolytique Download PDF

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Publication number
EP0856598A1
EP0856598A1 EP97111359A EP97111359A EP0856598A1 EP 0856598 A1 EP0856598 A1 EP 0856598A1 EP 97111359 A EP97111359 A EP 97111359A EP 97111359 A EP97111359 A EP 97111359A EP 0856598 A1 EP0856598 A1 EP 0856598A1
Authority
EP
European Patent Office
Prior art keywords
flow passages
cathode
anode
separation device
tool blank
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP97111359A
Other languages
German (de)
English (en)
Other versions
EP0856598B1 (fr
Inventor
Andreas Gubig
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
T E C H N O TRANS AG
Original Assignee
T E C H N O TRANS AG
Technotrans SE
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by T E C H N O TRANS AG, Technotrans SE filed Critical T E C H N O TRANS AG
Publication of EP0856598A1 publication Critical patent/EP0856598A1/fr
Application granted granted Critical
Publication of EP0856598B1 publication Critical patent/EP0856598B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D1/00—Electroforming
    • C25D1/10—Moulds; Masks; Masterforms

Definitions

  • the invention relates to a galvanic Separation device and in particular one for the Manufacture of CD / LD data carrier tools according to the Preamble of claim 1.
  • a The measure according to the invention therefore consists in the known nozzle device from the space between cathode and Take out the anode assembly and put it in one place to shift outside of the cathode arrangement, so that the distance between the cathode and anode arrangement around the Space required for the previously housed therein Nozzle device can be reduced.
  • a further measure is therefore provided that a ring part of the Cathode arrangement of a plurality of circumferentially distributed Flow passages is interspersed.
  • the housing is one provided electrolytic deposition chamber.
  • the housing 1 is on an unspecified machine frame, such as interpreted at 5, articulated and can therefore between one in Fig. 1 shown operating position and after rotation in Counter-clockwise operating position (not shown) can be pivoted.
  • an anode assembly is held stationary, which one Anode basket 2 includes a flat surface.
  • Parallel in Distance to the anode basket 2 is a cathode arrangement with a Cathode plate 3 rotatably held on the housing 1 about an axis.
  • the axis stands with a drive device 4 in Connection to the cathode plate 3 with a desired one To set the speed of rotation in rotation.
  • the anode basket 2 can e.g. can be equipped with Ni balls if the Coating of a attachable to the cathode plate 3 Tool blanks (shown cross-hatched in Fig. 2) with Ni should be done.
  • the cathode plate 3 is not one with the negative pole shown DC voltage source connected, the positive pole on Anode basket 2 abuts so that between the anode basket 2 and the cathode plate 3 a direct current with an adjustable Current can flow.
  • a container 6 for the Stock a suitable amount of electrolyte fluid intended.
  • the electrolyte fluid can be act as a Ni electrolyte in a Ni coating.
  • the Electrolyte liquid leaves the deposition chamber a bottom floor area and is from there led back into the reservoir 6.
  • Suitable devices e.g. in Shape of one immersed in the electrolyte liquid electric heating device 8 and a cooling device 9 intended.
  • the reference numeral 10 is a temperature sensor indicated, the to a control device, not shown for the temperature of the electrolyte liquid in the Reservoir 6 characteristic signal delivers to the To control the heating device 8 or the cooling device 9 in such a way that the temperature of the electrolyte liquid in the Storage container 6 at a suitable specific value is held.
  • FIG. 1 is longitudinal the outer periphery of a tubular part 12 of the Cathode plate 3 at the same angular distance from each other Large number of inlet openings of flow passages 11 are provided, the tubular part 12 radially push through.
  • the tubular part 12 In an aligned relationship with the Inlet openings of the flow passages 11, on the outside at a distance from the tubular part 12 is one Nozzle device 13 held stationary on the housing 1, the is supplied with electrolyte liquid by the pump 7.
  • the emerging stream of electrolyte fluid can due to the selected orientation of the nozzle device 13 in essentially completely from the flow passages 11 be recorded if their inlet openings when rotating of the cathode plate 3 in succession on the nozzle device 13 be moved past.
  • the electrolyte fluid then flows through the flow passages 11 and leaves them at the internal outlet openings, whereby the Electrolyte fluid in the narrow space between the Tool blank and the anode basket 2 arrives and thus as Conducting medium for between by the electrical potential Cathode plate 3 and anode basket 2 induced migration of Ni ions can act.
  • a feature of the invention is therefore that Electrolyte liquid through the flow passages 11 in tubular part 12 of the cathode plate 3 in the room between cathode plate 3 and anode basket 2, so that of so far for housing a nozzle device distance between cathode plate required in this space 3 and anode basket 2 can be significantly reduced.
  • the distance is only practical by maintaining one free rotation of the cathode plate 2 with mounted Tool blank limited compared to the anode basket 2.
  • Each flow passage 11 preferably has a radial or approximately radial alignment with respect to the axis of rotation of the Cathode plate 3 with one from the outer entrance inner outlet opening tapering Cross-sectional configuration so that the individual Flow passages 11 act like nozzles and the Electrolyte liquid at their inner outlet openings can radiate radially.
  • the flow passages 11 can however, if desired, another suitable one Alignment and cross-sectional configuration.
  • the flow passages 11 are, as mentioned, in one tubular part 12 is provided, which is an axial extension of the cathode plate 3 and can represent Recording surface of the cathode plate 3 for the tool blank protrudes by a suitable amount so that the tool blank is surrounded by the tubular part 12 on the outside.
  • the coupling ring 22 is used for Fixing the tool blank on the cathode plate 3 by the Tool blank between the coupling ring 22 and the Support surface of the cathode plate 3 can be clamped.
  • the coupling ring 22 can be a one-piece component, a two-part design is preferred in that the coupling ring 22 is divided into an inner and an outer ring section 23 or 24 in a radial plane which passes through the flow passages 21, which can be connected in a suitable manner, for example by screws.
  • radial grooves or recesses 21 23 and 21 24 are provided, of which 3, only the grooves or recesses are seen 21 23 in the end face of the inner ring portion 23 in Fig..
  • the grooves or recesses 21 23 and 21 24 together form the flow passages 21, as shown in FIG. 2.
  • the mounting or collar ring 22 or the ring sections 23, 24 preferably consist of a suitable chemical-resistant plastic material, wherein the groove-shaped recesses 21 23 , 21 24 can be formed by machining or during the molding of the plastic parts.
  • the invention was previously based on a Nozzle device in the form of a single pump described nozzle supplied from a reservoir. It it goes without saying that the nozzle device also a variety may comprise of nozzles running along the annular part can be arranged and with the pump Electrolyte are supplied so that always several flow passages at the same time Electrolyte liquid are applied.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Glass Compositions (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Manufacturing Optical Record Carriers (AREA)
EP97111359A 1997-01-23 1997-07-04 Dispositif pour le dépôt électrolytique Expired - Lifetime EP0856598B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE29701092U 1997-01-23
DE29701092U DE29701092U1 (de) 1997-01-23 1997-01-23 Galvanische Abscheidungsvorrichtung

Publications (2)

Publication Number Publication Date
EP0856598A1 true EP0856598A1 (fr) 1998-08-05
EP0856598B1 EP0856598B1 (fr) 2001-10-17

Family

ID=8034922

Family Applications (1)

Application Number Title Priority Date Filing Date
EP97111359A Expired - Lifetime EP0856598B1 (fr) 1997-01-23 1997-07-04 Dispositif pour le dépôt électrolytique

Country Status (4)

Country Link
US (1) US5932076A (fr)
EP (1) EP0856598B1 (fr)
AT (1) ATE207142T1 (fr)
DE (2) DE29701092U1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19938409C1 (de) * 1999-08-13 2001-03-22 Tyco Electronics Logistics Ag Anordnung zum gleichmäßigen Umströmen einer Oberfläche einer Probe mit Flüssigkeit und Verwendung der Anordnung

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6017437A (en) * 1997-08-22 2000-01-25 Cutek Research, Inc. Process chamber and method for depositing and/or removing material on a substrate
US20030055360A1 (en) 2001-09-05 2003-03-20 Zeleznik Matthew A. Minimally invasive sensing system for measuring rigidity of anatomical matter
US20040055873A1 (en) * 2002-09-24 2004-03-25 Digital Matrix Corporation Apparatus and method for improved electroforming

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0020008A1 (fr) * 1979-06-01 1980-12-10 EMI Limited Procédé de dépôt électrolytique à grande vitesse et plaque de moulage pour disques, électroformée selon un tel procédé

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3536594A (en) * 1968-07-05 1970-10-27 Western Electric Co Method and apparatus for rapid gold plating integrated circuit slices
SE8101046L (sv) * 1981-02-16 1982-08-17 Europafilm Anordning vid anleggningar, serskilt for matrisering av grammofonskivor och dylikt
US4359375A (en) * 1981-12-09 1982-11-16 Rca Corporation Anode assembly for electroforming record matrixes
US4415423A (en) * 1982-09-09 1983-11-15 Rca Corporation Electroforming apparatus for use in matrixing of record molding parts
JPS6017089A (ja) * 1983-07-06 1985-01-28 Daicel Chem Ind Ltd 高密度情報記録担体製造用スタンパ−の電鋳方法および装置
US5597460A (en) * 1995-11-13 1997-01-28 Reynolds Tech Fabricators, Inc. Plating cell having laminar flow sparger

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0020008A1 (fr) * 1979-06-01 1980-12-10 EMI Limited Procédé de dépôt électrolytique à grande vitesse et plaque de moulage pour disques, électroformée selon un tel procédé

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19938409C1 (de) * 1999-08-13 2001-03-22 Tyco Electronics Logistics Ag Anordnung zum gleichmäßigen Umströmen einer Oberfläche einer Probe mit Flüssigkeit und Verwendung der Anordnung
US6949172B1 (en) 1999-08-13 2005-09-27 Tyco Electronics Logistics Ag Arrangement enabling a liquid to flow evenly around a surface of a sample and use of said arrangement

Also Published As

Publication number Publication date
EP0856598B1 (fr) 2001-10-17
DE29701092U1 (de) 1997-03-20
ATE207142T1 (de) 2001-11-15
DE59704956D1 (de) 2001-11-22
US5932076A (en) 1999-08-03

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