EP0851720B1 - Plasmatron à arc non transféré - Google Patents

Plasmatron à arc non transféré Download PDF

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Publication number
EP0851720B1
EP0851720B1 EP97810823A EP97810823A EP0851720B1 EP 0851720 B1 EP0851720 B1 EP 0851720B1 EP 97810823 A EP97810823 A EP 97810823A EP 97810823 A EP97810823 A EP 97810823A EP 0851720 B1 EP0851720 B1 EP 0851720B1
Authority
EP
European Patent Office
Prior art keywords
plasma
neutrodes
channel
gas
neutrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP97810823A
Other languages
German (de)
English (en)
Other versions
EP0851720A1 (fr
Inventor
Klaus Dr. Landes
Jochen Dipl.-Ing. Zierhut
Ralf Dipl.-Phys. Hartmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oerlikon Metco AG
Original Assignee
Sulzer Metco AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sulzer Metco AG filed Critical Sulzer Metco AG
Publication of EP0851720A1 publication Critical patent/EP0851720A1/fr
Application granted granted Critical
Publication of EP0851720B1 publication Critical patent/EP0851720B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/34—Details, e.g. electrodes, nozzles
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/34—Details, e.g. electrodes, nozzles
    • H05H1/3431—Coaxial cylindrical electrodes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/34—Details, e.g. electrodes, nozzles
    • H05H1/3463—Oblique nozzles

Definitions

  • the invention relates to an indirect plasmatron for treatment of surfaces according to claim 1.
  • plasma generators are made with one a nozzle flowing, electrically non-current-carrying plasma jet referred to, the arc, as opposed to direct Plasmatrons, is not transferred to the workpiece.
  • Plasmatrons are used to generate very high temperature plasmas, which are in the range of up to several 10,000 Kelvin can.
  • the device has an elongated plasma chamber, which is limited by a one-piece body. on the one The front of the plasma chamber is the anode and on the other arranged the cathode.
  • the device outlet nozzle or the plasma chamber is slit-shaped and runs parallel to the longitudinal axis of the plasma chamber.
  • each electrode from a chamber is surrounded, via which an inert gas can be supplied, the thermal stress on the electrodes can be reduced by the latter is flushed with an inert gas, for example argon become.
  • an inert gas for example argon
  • the shape and position of the arc to be influenced.
  • This is for a plasmatron in which the Plasma jet outlet opening parallel to the longitudinal axis of the plasma channel runs, very important because the arc through the gas flow running transversely to the burner axis into a curved Form is forced. Without the effect of a magnetic field the arc is deflected and curved to the extent that it is subject to strong fluctuations and even tears off.
  • Through the Magnetic arrangements can prevent this by using the magnetic fields exert a force on the arc, which the by the flow of the plasma gas exerted on the arc Counteracts force.
  • placement and field strength of the magnets used can depend on operating parameters such as for example, gas volume and gas velocity are taken into account and the arc in a predetermined position being held.
  • the plasmatron consists essentially of a central neutrode arrangement 1, on each side of which there is an electrode body 2, 3, an insulation body 4, 5 and a connecting element 6, 7 connect.
  • the connection elements 6, 7 are used for receiving of electrodes 9, 10, in the present example the left one Electrode 9 the cathode and the right electrode 10 the anode represents.
  • the neutrode arrangement 1 has a plurality of plate-shaped trained neutrodes la to li, which have a plasma channel 8 limit.
  • the two electrodes 9, 10 are coaxial with Longitudinal axis L of the plasma channel 8 is arranged.
  • To the electrical To increase the longitudinal resistance of the neutrode arrangement 1 are individual neutrodes 1a to 1i electrically isolated from each other. Isolation between the neutrodes 1a to 1i inserted insulating washers, which favor a clear Representation are not shown.
  • the neutrode arrangement 1 is on both sides of the electrode body 2, 3 delimited, on the outside of which the insulation body 4, 5 and the connecting element 6, 7.
  • Both electrode bodies 2, 3 are made of an insulating material.
  • Both the neutrodes 1a to 1i are used to cool the plasmatron as well as the two electrode bodies 2, 3 with cooling water channels 16, 21, 31 provided.
  • the two electrodes 9, 10 are also over cooling water channels 38, 39 attached to one inside externally provided cooling water circuit connected.
  • the two electrode bodies 2, 3 each have a central one bore 11, 12 narrowing towards plasma channel 8, into which the respective electrode 9, 10 protrudes in such a way that between the electrode 9, 10 and the bore wall a cavity in Form of an annular channel 19, 20 is formed.
  • These two ring channels 19, 20 are arranged in the insulation bodies 4, 5 Bores 23, 24 each connected to a connection channel 14, 15, through which a gas G can be supplied.
  • 1a shows a front view of the indirect plasmatron. Out this representation it can be seen that the plasma jet outlet opening 40 across the width of five neutrodes 1c to 1g extends.
  • FIG. 2 shows a cross section through the plasmatron or Neutrode 1a along the line A-A in Fig. 1.
  • the neutrode la with a central Cross bore 26 is provided, which is a part of the plasma channel forms and serves to guide the arc.
  • the last neutrodes 1a, 1i of the neutrode stack also the two neutrodes 1b adjoining the inside, 1h each with a hole that part of the plasma channel 8 (Fig. 1) form and stabilization of the arc to serve. All neutrodes are for cooling with cooling channels 16 provided, which is connected to a cooling water circuit become.
  • the neutrode 1c shown in FIG. 3 is instead of one central transverse bore with a slot-shaped recess 33 provided, which also part of the plasma channel 8th (Fig. 1) forms.
  • the recess 33 leading to the outside forms at the same time, part of the plasma jet outlet opening, which in the present example extend over the width of five neutrodes 1c to 1g provided with such recesses 33 (Fig. 1a) extends.
  • the inside of the recess 33 will by a, seen in cross section, semicircular Wall 34 limited. In the center of this semicircular training Wall 34 opens the plasma gas channel 18 into the recess 33.
  • FIG. 3a shows a front view of the section shown in FIG. 3 Neutrode 1c. From this illustration, both the Recess 33 as well as the mouth of the plasma gas channel 18 can be seen.
  • the neutrode 1d shown in FIG. 4 largely corresponds that of Figure 3, with two additional permanent magnets 36, 37 are provided, of which one magnet below and the other are arranged above the recess 33.
  • the North-south axes A of the respective magnets 36 and 37 coincide and run at least approximately under a right one Angle to the longitudinal axis L of the plasma channel 8, the magnets 36, 37, seen in the flow direction of the plasma jet, after the longitudinal axis L of the plasma channel 8 are arranged.
  • This placement will cause the magnetic fields to hit the Arc opposite to the flow of the plasma gas Apply force, causing the arc to be in a predetermined Situation is stabilized.
  • each is unequal Poles of the individual magnets 36, 37 lie opposite one another; thus N-S or S-N.
  • the number of those neutrodes that have a permanent magnet pair can be provided by different operating parameters, such as. Arc current, amount of plasma gas, plasma gas velocity, as well as the geometrical dimensions of the neutrode arrangement etc. are made dependent. As another variation option can use magnets with different field strengths be used. In practice, it has proven useful, about two or three neutrodes with magnets, this number should not be restrictive in any way. Important is also that the neutrodes, in the proposed arrangement the magnet, made of a non-magnetizable material, preferably made of copper or a copper alloy are. The advantage of permanent over electromagnets is u. a. in that no external energy supply is necessary is that the structure can be made more compact and simpler can and that a more targeted influencing of the arc is possible.
  • connection channels 14, 15 become coaxial to the longitudinal axis of the plasma channel 8 an inert gas is supplied, which via the ring channel 19, 20 of the respective electrode body 2, 3 from two sides in flows the plasma channel 8.
  • This gas flows around the two electrodes 9, 10, which has a positive effect on their cooling.
  • this gas shields the electrodes 9, 10 from the actual one Plasma beam, which is particularly important then can if a reactive via the central plasma gas channels 18 Gas is supplied.
  • the base point of the arc which is applied to the electrodes 9, 10, especially that at the anode 10 varies, namely are enlarged, which decreased in a selective manner thermal stress on the electrodes 9, 10 precipitates.
  • the provision of a plurality of central plasma gas channels 18 provided neutrodes 1c to 1g enables the shape of the emerging plasma jet by changing the amount of gas and the gas velocity from plasma gas channel to plasma gas channel 18 is varied.
  • the arc can be stabilized within the plasma channel 8 become. Among other things, this in a constant operating voltage and therefore a constant burner output, a very quiet operation and increased electrode life noticeable.
  • the geometric dimension of the plasmatron in the simplest way can be changed by, for example, the number and / or the Training of neutrodes is changed. For example instead of five with a slot-shaped recess. Neutrodes whose seven are used, increasing the width of the emerging plasma jet would be changed accordingly. It is also conceivable, for example, that neutrodes are used, whose slot-shaped recess is designed differently, or that neutrodes are used, their for arc stabilization provided holes designed differently are.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)
  • Transition And Organic Metals Composition Catalysts For Addition Polymerization (AREA)

Claims (11)

  1. Plasmatron à arc non transféré destiné au traitement des surfaces, comprenant les caractéristiques suivantes :
    il est prévu un canal à plasma (8) de forme allongée qui est formé par un système de neutrodes (1) ;
    les électrodes (9, 10) nécessaires pour générer un arc électrique sont disposées dans le sens coaxial par rapport à l'axe longitudinal (L) du canal à plasma (8) ;
    le système de neutrodes (1) contient une pluralité de neutrodes (1a à 1i) en forme de plaquettes, isolées électriquement les unes par rapport aux autres ;
    caractérisé en ce que
    le système de neutrodes (1) est muni d'un orifice de sortie (40) du jet de plasma, en forme de fente, lequel orifice est parallèle à l'axe longitudinal (L) du canal à plasma (8);
    chaque électrode (9, 10) est entourée par un espace creux (19, 20) par lequel il est possible de transporter un gaz inerte ;
    et il est prévu au moins un système d'aimants permanents (36, 37), dont le champ magnétique exerce sur l'arc électrique une force à l'encontre du flux du gaz plasmagène.
  2. Plasmatron à arc non transféré selon la revendication 1, caractérisé en ce qu'au moins certaines neutrodes (1c-1g) sont munies d'un canal (18) destiné à l'admission d'un gaz dans le canal à plasma (8).
  3. Plasmatron à arc non transféré selon la revendication 2, caractérisé en ce que l'axe longitudinal du canal (18) destiné à l'admission d'un gaz s'étend au moins presque perpendiculairement à l'axe longitudinal (L) du canal à plasma (8).
  4. Plasmatron à arc non transféré selon l'une quelconque des revendications précédentes, caractérisé en ce que les neutrodes (1a-1i) sont réalisées dans un matériau non magnétisable, de préférence du cuivre ou un alliage de cuivre, et en ce qu'au moins une neutrode (1d) est munie d'une paire d'aimants permanents (36, 37).
  5. Plasmatron à arc non transféré selon la revendication 4, caractérisé en ce que les axes nord-sud de chaque aimant (36 ; 37) d'une neutrode coïncident et s'étendent au moins presque perpendiculairement à l'axe longitudinal (L) du canal à plasma (8), les aimants (36, 37) étant disposés en aval de l'axe longitudinal du canal à plasma (8), par référence au sens de circulation du jet de plasma.
  6. Plasmatron à arc non transféré selon l'une quelconque des revendications 2 à 5, caractérisé en ce qu'il est prévu au moins trois neutrodes (1a-1i) et en ce qu'au moins une neutrode (1c-1g) est munie d'un canal (18) destiné à l'admission d'un gaz dans le canal à plasma (8) .
  7. Plasmatron à arc non transféré selon l'une quelconque des revendications 2 à 6, caractérisé en ce que les canaux (18) réalisés dans certaines neutrodes (1c-1g) peuvent être branchés à une première source de gaz, alors que les espaces creux (19, 20) entourant les électrodes peuvent être branchés à une deuxième source de gaz.
  8. Plasmatron à arc non transféré selon l'une quelconque des revendications précédentes, caractérisé en ce qu'une pluralité de neutrodes (1c-1g), destinées à former le canal à plasma (8) et l'orifice de sortie (40) du jet de plasma, sont munies chacune d'un évidement (33) en forme de fente, les canaux (18), destinés à l'admission d'un gaz, débouchant au centre de chaque évidement (33).
  9. Plasmatron à arc non transféré selon l'une quelconque des revendications précédentes, caractérisé en ce que le système de neutrodes (1) contient les neutrodes (1a, 1b, 1h, 1i) qui délimitent latéralement l'orifice de sortie (40) du jet de plasma, lesquelles neutrodes sont munies d'une forure (26), qui forme une partie du canal à plasma (8) et stabilise l'arc électrique dans une position prédéterminée.
  10. Plasmatron à arc non transféré selon l'une quelconque des revendications précédentes, caractérisé en ce que l'anode (10) présente un bout sensiblement plat, contre lequel se forme l'arc électrique.
  11. Plasmatron à arc non transféré selon l'une quelconque des revendications précédentes, caractérisé en ce que la cathode (9) présente une pointe en forme de cône ou de cône tronqué, contre laquelle se forme l'arc électrique.
EP97810823A 1996-12-23 1997-11-03 Plasmatron à arc non transféré Expired - Lifetime EP0851720B1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
CH317196 1996-12-23
CH3171/96 1996-12-23
CH317196 1996-12-23

Publications (2)

Publication Number Publication Date
EP0851720A1 EP0851720A1 (fr) 1998-07-01
EP0851720B1 true EP0851720B1 (fr) 1999-10-06

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EP97810823A Expired - Lifetime EP0851720B1 (fr) 1996-12-23 1997-11-03 Plasmatron à arc non transféré

Country Status (6)

Country Link
US (1) US5944901A (fr)
EP (1) EP0851720B1 (fr)
JP (1) JPH10189289A (fr)
AT (1) ATE185465T1 (fr)
CA (1) CA2225211A1 (fr)
DE (1) DE59700524D1 (fr)

Cited By (2)

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DE10239875B4 (de) * 2002-08-29 2008-11-06 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und Vorrichtung zur großflächigen Beschichtung von Substraten bei Atmosphärendruckbedingungen
DE102008018589A1 (de) 2008-04-08 2009-11-05 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und Vorrichtung zum Zünden eines Lichtbogens

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DE10011276A1 (de) * 2000-03-08 2001-09-13 Wolff Walsrode Ag Verwendung eines indirrekten atomosphärischen Plasmatrons zur Oberflächenbehandlung oder Beschichtung bahnförmiger Werkstoffe sowie ein Verfahren zur Behandlung oder Beschichtung bahnförmiger Werkstoffe
DE10011274A1 (de) * 2000-03-08 2001-09-13 Wolff Walsrode Ag Plasmabehandelte bahnförmige Werkstoffe
DE10011275A1 (de) 2000-03-08 2001-09-13 Wolff Walsrode Ag Verfahren zur Oberflächenaktivierung bahnförmiger Werkstoffe
ES2214444T5 (es) * 2000-10-04 2008-02-16 Dow Corning Ireland Limited Metodo y aparato para formar un recubrimiento.
DE10146295A1 (de) * 2001-09-19 2003-04-03 Wipak Walsrode Gmbh & Co Kg Verfahren zum Zusammenfügen von Materialien mittels atmosphärischen Plasma
TW200409669A (en) * 2002-04-10 2004-06-16 Dow Corning Ireland Ltd Protective coating composition
GB0208261D0 (en) * 2002-04-10 2002-05-22 Dow Corning An atmospheric pressure plasma assembly
TW200308187A (en) * 2002-04-10 2003-12-16 Dow Corning Ireland Ltd An atmospheric pressure plasma assembly
NL1021185C2 (nl) * 2002-07-30 2004-02-03 Fom Inst Voor Plasmafysica Inrichting voor het behandelen van een oppervlak van een substraat en een plasmabron.
GB0323295D0 (en) * 2003-10-04 2003-11-05 Dow Corning Deposition of thin films
DE102004015216B4 (de) * 2004-03-23 2006-07-13 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Modul und Verfahren für die Modifizierung von Substratoberflächen bei Atmosphärenbedingungen
WO2006048649A1 (fr) * 2004-11-05 2006-05-11 Dow Corning Ireland Limited Systeme a plasma
DE102004059549A1 (de) * 2004-12-10 2006-06-22 Mtu Aero Engines Gmbh Verfahren zur Beschichtung eines Werkstücks
GB0509648D0 (en) * 2005-05-12 2005-06-15 Dow Corning Ireland Ltd Plasma system to deposit adhesion primer layers
TWI498053B (zh) * 2008-12-23 2015-08-21 Ind Tech Res Inst 電漿激發模組
US10304665B2 (en) 2011-09-07 2019-05-28 Nano-Product Engineering, LLC Reactors for plasma-assisted processes and associated methods
US20130129937A1 (en) * 2011-11-23 2013-05-23 United Technologies Corporation Vapor Deposition of Ceramic Coatings
CH712835A1 (de) * 2016-08-26 2018-02-28 Amt Ag Plasmaspritzvorrichtung.
US11834204B1 (en) 2018-04-05 2023-12-05 Nano-Product Engineering, LLC Sources for plasma assisted electric propulsion
CN114189972A (zh) * 2021-12-02 2022-03-15 华中科技大学 一种稳定等离子体放电装置、控制方法和系统

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US4948485A (en) * 1988-11-23 1990-08-14 Plasmacarb Inc. Cascade arc plasma torch and a process for plasma polymerization
DE4105408C1 (fr) * 1991-02-21 1992-09-17 Plasma-Technik Ag, Wohlen, Ch
FR2674450B1 (fr) * 1991-03-26 1994-01-21 Agence Spatiale Europeenne Procede pour deposer un revetement sur un substrat par projection au plasma, et dispositif pour la mise en óoeuvre du procede.

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10239875B4 (de) * 2002-08-29 2008-11-06 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und Vorrichtung zur großflächigen Beschichtung von Substraten bei Atmosphärendruckbedingungen
DE102008018589A1 (de) 2008-04-08 2009-11-05 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und Vorrichtung zum Zünden eines Lichtbogens

Also Published As

Publication number Publication date
DE59700524D1 (de) 1999-11-11
CA2225211A1 (fr) 1998-06-23
EP0851720A1 (fr) 1998-07-01
ATE185465T1 (de) 1999-10-15
JPH10189289A (ja) 1998-07-21
US5944901A (en) 1999-08-31

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