EP0850019A1 - Verfahren und vorrichtung zur strukturanalyse und/oder zur lageerkennung von schichtförmigen objekten - Google Patents
Verfahren und vorrichtung zur strukturanalyse und/oder zur lageerkennung von schichtförmigen objektenInfo
- Publication number
- EP0850019A1 EP0850019A1 EP96931776A EP96931776A EP0850019A1 EP 0850019 A1 EP0850019 A1 EP 0850019A1 EP 96931776 A EP96931776 A EP 96931776A EP 96931776 A EP96931776 A EP 96931776A EP 0850019 A1 EP0850019 A1 EP 0850019A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- plate
- waves
- channels
- receiver
- channel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/24—Probes
- G01N29/2487—Directing probes, e.g. angle probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/04—Analysing solids
- G01N29/041—Analysing solids on the surface of the material, e.g. using Lamb, Rayleigh or shear waves
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/24—Probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/04—Wave modes and trajectories
- G01N2291/042—Wave modes
- G01N2291/0422—Shear waves, transverse waves, horizontally polarised waves
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/04—Wave modes and trajectories
- G01N2291/042—Wave modes
- G01N2291/0423—Surface waves, e.g. Rayleigh waves, Love waves
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/04—Wave modes and trajectories
- G01N2291/042—Wave modes
- G01N2291/0426—Bulk waves, e.g. quartz crystal microbalance, torsional waves
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/04—Wave modes and trajectories
- G01N2291/044—Internal reflections (echoes), e.g. on walls or defects
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/26—Scanned objects
- G01N2291/263—Surfaces
- G01N2291/2632—Surfaces flat
Definitions
- the invention relates to a device for structure analysis and / or for the position detection of layered objects by means of ultrasonic waves with one or more ultrasonic transmitters and ultrasonic receivers and a support surface for the object.
- Object located on a support plate is irradiated by a transmitter arranged opposite in a closed, liquid-filled housing.
- Either a plurality of transmitters and a plurality of receivers are arranged on the wall of the housing opposite the support surface, or the transmitter and also the receiver are movable on a carrier on a trajectory. In this way, the fingertip or any other object is detected at any point on the support plate.
- the waves reflected and backscattered by the object are received by one of the receivers, who inputs the information about the intensity and / or phase of the backscattering and the reflection, possibly via an amplifier, a time control, and possibly also a detector, to a computer for analysis and recording.
- the ultrasound waves that sound at the finger or other objects are volume waves emanating from the transmitter (s) and, in the same way, also the backscattered and reflected sound waves, which move in the range of 2 MHz and above.
- Devices which, inter alia, can also recognize the position of the object, such as the position of a finger, on a surface by means of sound waves, e.g. a display (see EP 0557 -4 * 46 and 0523 200).
- these devices are not able to determine the structure of the object, e.g. of the finger, to analyze, since they have a resolution that is far too low and the task was not set either.
- the object on which the invention is based is to propose a method and a device for analyzing structures of the surfaces and the areas near the surface and / or the position of objects which permit a more compact wave pattern and a flat and possibly also a compact and small one Execution enabled.
- the device requires less design effort and provides equally good analysis results.
- a plate is used which guides the waves reflected and / or backscattered by the layer to be examined and / or the waves affecting them along their boundaries, so that they are used for analysis by the transducers attached to the side and / or below be fed.
- transmitter or receiver can also be provided below the plate. Glass, metal or crystals with low damping are proposed as the material of the plate.
- transducers can also be provided on the plate sides, which are transmitters and receivers at the same time, since even with ultrasonic waves generated and / or received laterally from the support plate, which move along the surface of the plate, a repeatable and strong reflection and / or Scattering occurs on the structure of the layer adjacent to the plate. This is very special and efficient when using horizontally polarized shear waves (SH waves).
- SH waves horizontally polarized shear waves
- At least one surface of the plate forms the boundary that guides the wave in two dimensions. It is irrelevant whether a guided or normal wave is sent, but the wave reflected and / or backscattered by the object is guided two-dimensionally through the plate boundary or boundaries.
- the plate can also be equipped with one or more channels, as a result of which a one-dimensional wave is obtained and is passed to a receiver at the end of the channel.
- the channels are changed by changing the plate structure, e.g. the density, doable. They can also be formed by using two different adjoining materials, in a similar way to what happens with optical waveguides, the core of the line and the sheath of the core being able to consist of different materials.
- the thickness of the plate is 1/3 to 3 mm and depends on the wavelength. It has been shown that the most favorable dimensions of the plate thickness are in a range which is 5 - 10 times larger than the wavelength of the transmitted ultrasound wave. If channels are provided in the plate, their diameter must also be kept 5-10 times larger than the wavelength of the ultrasonic wave used.
- the one-dimensional guide also has the advantage that the signals arrive one after the other and can also be detected one after the other. It is also possible to use thicker plates.
- the device according to the invention offers the advantage of a flat design with repeatable and precise analysis data.
- the construction is greatly simplified, since a housing filled with liquid can be omitted.
- the propagation of the ultrasonic waves is guaranteed within the platen, so that additional measures are unnecessary.
- This fact enables small devices such. B. those that are the size of a button.
- FIG. 1 is a side view of the device in a schematic representation
- FIG. 2 shows a plan view of the embodiment shown in FIG. 1,
- Fig. 5 shows the arrangement of two channels in a spiral shape in a plate.
- FIG. 1 shows in the example shown a round plate 1 with transducers 3 arranged at the edge and a transducer 2 arranged below the plate.
- the transducers k and 5 are round are arranged around the plate.
- the transducers can be used both as transmitters and receivers.
- the optional lower converter 2 is not shown in Fig. 2.
- the ural sound waves are used which propagate in the plate (the solid body) along one or both of the boundaries.
- the electrical signals from the receiving transducers are transmitted to a computer via an amplifier and possibly a detector with the aid of a digital-analog converter supplied, which provides information about the nature and / or location of the analyzed layer from them.
- the analysis method which is used when using two-dimensional waves corresponds to that which is used in the initially mentioned volume devices, e.g. the radon transformation.
- the version with the channels also offers a simpler option, since only a composition of the signal or signals is necessary that corresponds to the channel profile.
- the flat solution according to the invention also offers a simple possibility of structural and the associated position analysis of the layers of the object lying against the plate, since the plate also allows one-dimensional wave guidance.
- the advantage of an analysis with one-dimensional wave guidance is that it enables line-by-line scanning.
- the plate As shown in FIG. 3, consists of parallel channels 6 running side by side, the side walls of which are connected to adjacent channels.
- the channels 6 have transducers at their ends, which transmit one after the other and transform the received ultrasound waves into electrical signals.
- a channel 8 is shown which covers the entire surface of a plate 9 and which forwards the information of the sonicated object to the transducer 10.
- course shapes of the channels are only given by way of example, because each course shape is suitable, which transmits the backscattered waves to a converter in one mode.
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- General Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Immunology (AREA)
- Biochemistry (AREA)
- Health & Medical Sciences (AREA)
- Pathology (AREA)
- Analytical Chemistry (AREA)
- Acoustics & Sound (AREA)
- Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Measurement Of Velocity Or Position Using Acoustic Or Ultrasonic Waves (AREA)
Description
Claims
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19533007 | 1995-09-07 | ||
DE19533007 | 1995-09-07 | ||
DE19636124 | 1996-09-06 | ||
PCT/EP1996/003916 WO1997008990A1 (de) | 1995-09-07 | 1996-09-06 | Verfahren und vorrichtung zur strukturanalyse und/oder zur lageerkennung von schichtförmigen objekten |
DE19636124A DE19636124A1 (de) | 1995-09-07 | 1996-09-06 | Verfahren und Vorrichtung zur Strukturanalyse und/oder zur Lageerkennung von schichtförmigen Objekten |
Publications (2)
Publication Number | Publication Date |
---|---|
EP0850019A1 true EP0850019A1 (de) | 1998-07-01 |
EP0850019B1 EP0850019B1 (de) | 1999-07-28 |
Family
ID=26018364
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP96931776A Expired - Lifetime EP0850019B1 (de) | 1995-09-07 | 1996-09-06 | Verfahren und vorrichtung zur strukturanalyse und/oder zur lageerkennung von schichtförmigen objekten |
Country Status (10)
Country | Link |
---|---|
EP (1) | EP0850019B1 (de) |
JP (1) | JPH11512182A (de) |
KR (1) | KR100558140B1 (de) |
AT (1) | ATE182450T1 (de) |
CA (1) | CA2231248A1 (de) |
DE (2) | DE19636124A1 (de) |
DK (1) | DK0850019T3 (de) |
ES (1) | ES2138834T3 (de) |
PL (1) | PL184551B1 (de) |
WO (1) | WO1997008990A1 (de) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10112034A1 (de) * | 2001-03-14 | 2002-10-02 | Sonem Gmbh | Anordnung zur Bildwiedergabe für Computertomographen mit Ultraschall |
DE10352774A1 (de) * | 2003-11-12 | 2005-06-23 | Infineon Technologies Ag | Ortungsanordnung, insbesondere Losboxen-Lokalisierungssystem, Kennzeicheneinheit und Verfahren zur Ortsbestimmung |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0179327B1 (de) * | 1984-10-17 | 1988-12-28 | Siemens Aktiengesellschaft | Sensorsystem zur Untersuchung der Lage und/oder der Kontur eines Objekts mittels Ultraschall |
JPH02195289A (ja) * | 1989-01-25 | 1990-08-01 | Matsushita Electric Ind Co Ltd | 超音波接触センサーと、これを具備する自律型移動ロボット |
US5162618A (en) * | 1990-11-16 | 1992-11-10 | Exzec, Inc. | Acoustic touch position sensor with first order lamb wave reflective arrays |
-
1996
- 1996-09-06 DE DE19636124A patent/DE19636124A1/de not_active Withdrawn
- 1996-09-06 JP JP9510872A patent/JPH11512182A/ja active Pending
- 1996-09-06 AT AT96931776T patent/ATE182450T1/de not_active IP Right Cessation
- 1996-09-06 PL PL96325340A patent/PL184551B1/pl not_active IP Right Cessation
- 1996-09-06 EP EP96931776A patent/EP0850019B1/de not_active Expired - Lifetime
- 1996-09-06 CA CA002231248A patent/CA2231248A1/en not_active Abandoned
- 1996-09-06 ES ES96931776T patent/ES2138834T3/es not_active Expired - Lifetime
- 1996-09-06 DE DE59602565T patent/DE59602565D1/de not_active Expired - Fee Related
- 1996-09-06 KR KR1019980701715A patent/KR100558140B1/ko not_active IP Right Cessation
- 1996-09-06 WO PCT/EP1996/003916 patent/WO1997008990A1/de active IP Right Grant
- 1996-09-06 DK DK96931776T patent/DK0850019T3/da active
Non-Patent Citations (1)
Title |
---|
See references of WO9708990A1 * |
Also Published As
Publication number | Publication date |
---|---|
DK0850019T3 (da) | 2000-03-06 |
PL184551B1 (pl) | 2002-11-29 |
ES2138834T3 (es) | 2000-01-16 |
DE19636124A1 (de) | 1997-03-13 |
PL325340A1 (en) | 1998-07-20 |
KR100558140B1 (ko) | 2006-09-22 |
EP0850019B1 (de) | 1999-07-28 |
KR19990044467A (ko) | 1999-06-25 |
CA2231248A1 (en) | 1997-03-13 |
ATE182450T1 (de) | 1999-08-15 |
DE59602565D1 (de) | 1999-09-02 |
JPH11512182A (ja) | 1999-10-19 |
WO1997008990A1 (de) | 1997-03-13 |
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