EP0817174A1 - Magnetisches aufzeichnungsmedium und verfahren zu seiner herstellung - Google Patents

Magnetisches aufzeichnungsmedium und verfahren zu seiner herstellung Download PDF

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Publication number
EP0817174A1
EP0817174A1 EP95910770A EP95910770A EP0817174A1 EP 0817174 A1 EP0817174 A1 EP 0817174A1 EP 95910770 A EP95910770 A EP 95910770A EP 95910770 A EP95910770 A EP 95910770A EP 0817174 A1 EP0817174 A1 EP 0817174A1
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European Patent Office
Prior art keywords
substrate body
ferromagnetic metal
metal layer
recording medium
magnetic recording
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EP95910770A
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English (en)
French (fr)
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EP0817174A4 (de
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Migaku Takahashi
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    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/62—Record carriers characterised by the selection of the material
    • G11B5/64—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent
    • G11B5/65—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent characterised by its composition
    • G11B5/656—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent characterised by its composition containing Co
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/62—Record carriers characterised by the selection of the material
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/62—Record carriers characterised by the selection of the material
    • G11B5/73—Base layers, i.e. all non-magnetic layers lying under a lowermost magnetic recording layer, e.g. including any non-magnetic layer in between a first magnetic recording layer and either an underlying substrate or a soft magnetic underlayer
    • G11B5/7368—Non-polymeric layer under the lowermost magnetic recording layer
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/62—Record carriers characterised by the selection of the material
    • G11B5/73—Base layers, i.e. all non-magnetic layers lying under a lowermost magnetic recording layer, e.g. including any non-magnetic layer in between a first magnetic recording layer and either an underlying substrate or a soft magnetic underlayer
    • G11B5/7368—Non-polymeric layer under the lowermost magnetic recording layer
    • G11B5/7373—Non-magnetic single underlayer comprising chromium
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
    • G11B5/8404—Processes or apparatus specially adapted for manufacturing record carriers manufacturing base layers
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
    • G11B5/851—Coating a support with a magnetic layer by sputtering
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S428/00—Stock material or miscellaneous articles
    • Y10S428/90—Magnetic feature
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
    • Y10T428/264—Up to 3 mils
    • Y10T428/265—1 mil or less

Definitions

  • the present invention relates to a magnetic recording medium and a method of manufacturing the magnetic recording medium. More particularly, the present invention relates to a high density magnetic recording medium which has a high coercive force and a high normalized coercive force and which is excellent in an S/N ratio and a method of manufacturing the high density magnetic recording medium.
  • the magnetic recording medium of the present invention is preferably used in a hard disk, a floppy disk, a magnetic tape or the like.
  • the following technology has been known in respect of a conventional magnetic recording medium and a method of manufacturing thereof.
  • Fig. 10 is an outline views for explaining a hard disk as an example of a magnetic recording medium.
  • Fig. 10(a) is a perspective view showing a total of a magnetic recording medium
  • Fig. 10(b) is a sectional view taken from a line A-A' of Fig. 10(a).
  • the substrate body 1 is constructed in which the nonmagnetic (Ni-P) layer 3 is formed on the surface of the Al substrate 2 in a disk shape having a diameter of 89 mm (3.5 inch) and a thickness of 1.27 mm (50 mil) by a plating process or a sputtering process. Further, inscriptions (hereinafter, referred to as texture) in concentric shapes are provided on the surface of the nonmagnetic (Ni-P) layer 3 by mechanical polishing. Generally, the surface roughness, that is, the mean center line roughness Ra which is measured in the radial direction is 5 nm through 15 nm.
  • the Cr base layer 4 and the ferromagnetic metal layer 5 are formed on the surface of the substrate body 1 by a sputtering process and finally, the protective layer 6 comprising carbon or the like is provided by a sputtering process to protect the surface of the ferromagnetic metal layer 5.
  • Typical thicknesses of the respective layers are, 5 ⁇ m through 15 ⁇ m for the nonmagnetic (Ni-P) layer 3, 50 nm through 150 nm for the Cr base metal layer 4, 30 nm through 100 nm for the ferromagnetic metal layer 5 and 20 nm through 50 nm for the protective layer 6.
  • the conventional magnetic recording medium having the above-described layer structure is fabricated under conditions of a back pressure at the order of 10 -7 Torr of a film forming chamber before film formation by sputtering and an impurity concentration of 1 ppm or more of Ar(argon) gas used in the film formation.
  • the above-described grain boundaries have not been confirmed.
  • the normalized coercive force (designated as Hc/Hk grain ) is provided with a value as large as 0.3 or more whereas it has a value smaller than 0.3 when the ferromagnetic metal layer does not include Ta element.
  • the coercive force is further increased by removing the surface of the substrate body by 0.2 nm through 1 nm by carrying out a cleaning treatment on the surface of the substrate body through a high frequency sputtering process by using Ar gas having an impurity concentration of 10 ppb or below before forming the metallic base layer. According to the report, it has been described that there is a correlation between a normalized coercive force and medium noise in a magnetic recording medium and the normalized coercive force should be 0.3 or more and lower than 0.5 to provide a low noise medium.
  • the normalized coercive force (Hc/Hk grain ) of a ferromagnetic metal layer is a value of a coercive force Hc divided by an anisotropic magnetic field Hk grain of crystal grains, which represents a degree of enhancing magnetic isolation of crystal grains. That is, a high normalized coercive force of a ferromagnetic metal layer signifies that magnetic interaction of individual crystal grains constituting the ferromagnetic metal layer is lowered and a high coercive force can be realized.
  • a transitional region of magnetic inversion constitutes a noise source in respect of recording signals when a further high frequency recording is carried out in order to achieve high recording density. That is to say, when disturbance of the transitional region is large or when disturbance is caused in a wide range, there is a strong tendency of increasing noise whereby a magnetic recording medium having poor recording and reproducing property is formed.
  • a low noise medium is apt to be provided when the ferromagnetic metal layer is constituted by a CoCrTa alloy magnetic film and noise is apt to be enhanced when it is constituted by a CoNiCr or CoCrPt alloy magnetic film.
  • a CoNiCr or CoCrPt alloy magnetic film has an advantage that the coercive force in mass production is obtained comparatively stably.
  • a magnetic recording medium having the ferromagnetic metal layer comprising a CoNiCr or CoCrPt alloy magnetic film whereby the coercive force in mass production can be obtained comparatively stably a magnetic recording medium having a property of a high S/N ratio (recording signal S, medium noise N) in the electromagnetic conversion property and a method of fabricating thereof have been desired to realize.
  • a magnetic recording medium is characterized in that in a magnetic recording medium where a ferromagnetic metal layer comprising at least CoNiCr is formed on a surface of a substrate body via a metallic base layer and an oxygen concentration of the ferromagnetic metal layer is 100 wtppm or lower and which utilizes magnetic inversion, crystal grains forming the ferromagnetic metal layer are provided with grain boundaries comprising an amorphous structure at least among the crystal grains.
  • a magnetic recording medium is characterized in that in a magnetic recording medium where a ferromagnetic metal layer comprising at least CoCrPt is formed on a surface of a substrate body via a metallic base layer and an oxygen concentration of the ferromagnetic metal layer is 100 wtppm or lower and which utilizes magnetic inversion, crystal grains forming the ferromagnetic metal layer are provided with grain boundaries comprising an amorphous structure at least among the crystal grains.
  • the magnetic recording medium according to the present invention is characterized in that the grain boundaries are nonmagnetic and the ferromagnetic metal layer includes Ta(tantalum) as a fourth element.
  • the magnetic recording medium according to the present invention is characterized in that the metallic base layer is made of Cr(chromium) and a film thickness of the metallic base layer is 5 nm through 30 nm.
  • the magnetic recording medium according to the present invention is characterized in that the ferromagnetic metal layer is formed on the surface of the substrate body without interposing the metallic base layer.
  • a method of manufacturing a magnetic recording medium according to the present invention is characterized in that in a method of manufacturing a magnetic recording medium where a method of forming the metallic base layer and/or the ferromagnetic metal layer is a sputtering film forming process, a temperature on the surface of the substrate body in forming the metallic base layer and/or the ferromagnetic metal layer is 60 °C through 150 °C.
  • the method of manufacturing a magnetic recording medium according to the present invention is also characterized in that in forming the metallic base layer and/or the ferromagnetic metal layer, an electric bias is not applied to the substrate body other than a self bias caused by a plasma.
  • the grain boundaries comprising an amorphous structure are present among the crystal grains forming the ferromagnetic metal layer in the longitudinal magnetic recording medium having the ferromagnetic metal layer comprising CoNiCr, and accordingly, a high coercive force, a high normalized coercive force and an excellent S/N characteristic can be realized.
  • the grain boundaries comprising an amorphous structure are present among the crystal grains forming the ferromagnetic metal layer in the longitudinal magnetic recording medium having the ferromagnetic metal layer comprising CoCrPt, and accordingly, a high coercive force, a high normalized coercive force and an excellent S/N characteristic can be realized.
  • regions among the respective crystal grains each constituting a small magnet can be prevented from being brought into a magnetically disturbed state since the boundary grains are nonmagnetic.
  • transitional regions which are to constitute a noise source can be reduced in carrying out magnetic recording by magnetic inversion.
  • the ferromagnetic metal layer includes Ta as the fourth element and accordingly, further larger grain boundary regions can be formed.
  • the crystal grains of the ferromagnetic metal layer can be made small by making the film thickness of the metallic base layer set to 5 nm through 30 nm. As a result, the medium noise in recording and reproducing can be made small.
  • the magnetic recording medium corresponding to perpendicular magnetic recording and having an excellent S/N characteristic can be obtained.
  • the film formation of the magnetic recording medium can be carried out at a low temperature and accordingly, a gas emission amount in a film forming chamber can be reduced and plastics or the like vulnerable to heating at high temperatures can be used as a material of the substrate body.
  • the electric bias is not applied on the substrate body other than the self bias caused by a plasma and accordingly, a gas emission amount in the atmosphere of the substrate body in the film forming operation can be reduced. Further, film exfoliation from a jig or the like for holding the substrate body can be reduced.
  • substrate bodies in the present invention there are, for example, substrate bodies, made of aluminum, titanium and alloys of these, silicon, glass, carbon, ceramic, plastic, resin and composites of these and the above-mentioned materials where a surface coating treatment is carried out with nonmagnetic films of different materials on surfaces thereof by a sputtering process, a vapor deposition process, a plating process or the like. It is preferable that the nonmagnetic films provided on the surfaces of the substrate bodies are not magnetized at high temperatures, provided with conductivity and easy to be subjected to machining and on the other hand, provided with pertinent surface hardnesses. As a nonmagnetic film satisfying these conditions, a (Ni-P) film fabricated by a sputtering process is especially preferable.
  • a donut disk shape is used as the shape of the substrate body when it is used for a disk.
  • a substrate body provided with a magnetic layer or the like, mentioned later, that is, a magnetic recording medium is used by being rotated at a speed of, for example, 3600 rpm with the center of a disk as an axis in magnetic recording and reproducing.
  • a magnetic head flies at a height of substantially 0.1 ⁇ m above the magnetic recording medium. Therefore, it is necessary for the substrate body to pertinently control the flatness of the surface, the parallelism between the surface and the rear face, the waviness in the circumferential direction of the substrate body and the roughness of the surface.
  • the substrate body when the substrate body is rotated or stopped, the surfaces of the magnetic recording medium and the magnetic head are bought into contact with each other and abrasively moved (Contact Start Stop, referred to as CSS).
  • Contact Start Stop referred to as CSS
  • concentric slight inscriptions may be provided on the surface of the substrate body.
  • metallic base layers in the present invention there are layers made of, for example, Cr, Ti, W(tungsten) and alloys of these.
  • the layer is made of an alloy, combinations of the above-described metals with V(vanadium), Nb(niobium), Ta or the like have been proposed.
  • Cr is especially preferable since it causes segregation in respect of a ferromagnetic metal layer, mentioned later.
  • These metals are frequently used in mass production and a sputtering process, a vapor deposition process or the like is used as a film forming method.
  • the role of the metallic base layer is to expedite crystal growth of a ferromagnetic metal layer such that the direction of easy magnetization of the ferromagnetic metal layer is in an in-plane direction of the face of the substrate, that is, the coercive force in the in-plane direction of the substrate is enhanced when a ferromagnetic metal layer comprising Co base is provided thereon.
  • a metallic base layer comprising Cr is fabricated by a sputtering process
  • factors of film formation for controlling the crystalline performance there are surface shape, surface condition or surface temperature of a substrate body, gas pressure in film formation, a bias applied on a substrate, a thickness of a formed film and the like.
  • the coercive force of a ferromagnetic metal layer has a tendency where it is increased in proportion to the film thickness of Cr and accordingly, in the conventional technology, the film thickness of Cr uses in a range of, for example, 50 nm through 150 nm.
  • conventional film forming conditions signify that the back pressure of a film forming chamber is in the order of 10 -7 (10 -9 ) Torr and an impurity concentration of Ar gas used in the film formation is in a range of 1 ppm or higher (100 ppt or lower, preferably 10 ppb or lower).
  • the impurity concentration of a target used in forming a metallic base layer preferably falls in a range of 150 ppm or below.
  • the fly height of the magnetic head from a surface of a medium is to be decreased.
  • the thickness of a Cr film is large, the surface roughness of a medium is liable to increase. Therefore, it has been desired to realize a high coercive force with a thin thickness of a Cr film.
  • CoNiCr, CoCrTa, CoCrPt, CoNiPt, CoNiCrTa, CoCrPtTa and the like as the first kind of these which adapt to the case where they are provided on the surface of a substrate body via a metallic base layer (that is, the case of a magnetic film for in-plane recording).
  • CoNiCr and CoCrPt which are material systems having no grain boundaries comprising an amorphous structure among crystal grains under conventional film forming conditions, are preferably used in the present invention.
  • grain boundaries can further be controlled even with other material systems (for example, CoCrTa group or CoNiPt group) having somewhat grain boundaries even under conventional film forming conditions.
  • conventional film forming conditions signify that the back pressure of a film forming chamber is in the order of 10 -7 (10 -9 ) Torr and an impurity concentration of Ar gas used in film formation is in a range of 1 ppm or more (100 ppt or lower, preferably 10 ppb or lower). Further, an impurity concentration of a target used in forming a ferromagnetic metal layer is preferably in a range of 30 ppm or lower.
  • CoNiCr is preferably used since it is inexpensive and difficult to receive influence of atmosphere in film formation
  • CoCrTa is preferably used since medium noise is low
  • CoPt(platinum) group is preferably used to realize a coercive force of 1800 Oe or more that is difficult to achieve by CoNiCr or CoCrTa.
  • the problem in the first kind is to develop a material and a method of fabrication in which material cost is inexpensive, medium noise is low and a high coercive force can be realized in order to promote record density and reduce fabrication cost.
  • CoCr, CoPt, CoCrTa and the like which are adaptable to the case where they are directly provided on the surface of a substrate without interposing a metallic base layer (that is, the case of a magnetic film for perpendicular recording).
  • a soft magnetic metal layer may be provided under these ferromagnetic metal layers as a backing layer.
  • the problem in the second kind is to develop a material and a fabrication method capable of maintaining a high coercive force in a direction perpendicular to a film face even if the film thickness of a ferromagnetic metal layer is thinned.
  • magnetic recording media comprising magnetic inversion
  • a medium longitudinal magnetic recording medium
  • a medium perpendicular magnetic recording medium
  • the "oxygen concentration of a ferromagnetic metal layer" according to the present invention is in a range of 250 wtppm or higher in the case of a CoNiCr film fabricated by a conventional sputtering process. It has been desired to investigate on an influence of the oxygen concentration of a ferromagnetic metal layer, that is, an influence effected on a coercive force of a medium or medium noise.
  • film formation is conducted under conditions of an ultimate vacuum degree in a film forming chamber for forming a ferromagnetic metal layer in the order of 10 -7 Torr and an impurity concentration of Ar gas used in forming the ferromagnetic metal layer in a range of 1 ppm or higher.
  • the "oxygen concentration of a metallic base layer" according to the present invention is in a range of 250 wtppm or higher in the case of a Cr film fabricated, for example, by the conventional sputtering process. It has been desired to investigate on an influence of the oxygen concentration of a metallic base layer, that is, an influence on a crystal growth procedure depending on a film thickness of the metallic base layer, an influence on a ferromagnetic metal layer formed on the metallic base layer and the like.
  • the "normalized coercive force of a ferromagnetic metal layer" is a value of a coercive force Hc divided by an anisotropic magnetic field Hk grain of crystal grain and signifies a degree of promoting magnetic isolation of crystal grains by "Magnetization Reversal Mechanism Evaluated by Rotational Hysteresis Loss Analysis for the Thin Film Media” Migaku Takahashi, T. Shimatsu, M. Suekane, M. Miyamura, K. Yamaguchi and H. Yamasaki: IEEE Transactions on MAGNETICS, vol. 28, 1992, pp. 3285.
  • a normalized coercive force of a ferromagnetic metal layer fabricated by a conventional sputtering process has a value smaller than 0.3 so far as the ferromagnetic metal layer comprises Co base.
  • the normalized coercive force takes a value of 0.5 and the value is an upper limit value of the normalized coercive force.
  • the coercive force Hc signifies a resistant magnetic force of a medium provided from a magnetization curve that is measured by using a vibrated sample type magnetic force meter (Variable Sample Magnetometer, referred to as VSM).
  • VSM vibrated Sample Magnetometer
  • the anisotropic magnetic field Hk grain of crystal grains signifies an applied magnetic field whereby the rotational hysteresis loss measured by a high sensitivity torque magnetic force meter is completely nullified.
  • Both coercive force and anisotropic magnetic field are values measured in the face of a thin film in the case of a magnetic recording medium where a ferromagnetic metal layer is formed on the surface of a substrate body via a metallic base layer and are values measured in a direction perpendicular to the face of the thin film in the case of a magnetic recording medium where a ferromagnetic metal layer is formed on the surface of a substrate body.
  • an alloy comprising, for example, aluminum and magnesium as an aluminum alloy according to the present invention.
  • a substrate body made of an aluminum alloy is mostly used for the use of a HD (hard disk). It is preferable that the content of metal oxides is as small as possible since the object of use is for magnetic recording.
  • a (Ni-P) film which is nonmagnetic is frequently provided on the surface of an aluminum alloy by a plating process or a sputtering process.
  • the object of provision is promotion of corrosion resistance and increase of surface hardness of a substrate body.
  • Concentric slight inscriptions (texture) are provided on the surface of the (Ni-P) film to reduce a frictional force when a magnetic head abrasively moves on the surface of a medium.
  • the problem in the case where a substrate body is made of an aluminum alloy is to thin the substrate body and to reduce the surface roughness of the substrate body.
  • the former has a limit of 0.5 mm and the latter has a limit of substantially 0.5 nm.
  • glass strengthened by conducting ion doping with respect to the surface of the glass glass comprising a structure where the glass per se is finely crystallized and the like as glass according to the present invention. Both kinds of glass are devised to resolve the drawback of glass, that is, "easy to crack”.
  • Glass is excellent in that the (Ni-P) film or the like is not necessary to provide since the surface hardness is higher than that of an aluminum alloy. It also is advantageous in view of thinning of a substrate body, smoothness of the surface of a substrate body, high temperature resistance property of a substrate body.
  • a nonmagnetic layer may be provided on the surface of glass since it is preferable to conduct film formation by elevating the surface temperature of a substrate body in film formation and while applying a bias on the substrate body in order to fabricate a magnetic film having a high coercive force.
  • a nonmagnetic layer may be arranged in order to prevent harmful elements from invading from glass to a magnetic film.
  • a nonmagnetic layer having fine irregularities may be arranged on the surface of glass to reduce a frictional force that is caused when a magnetic head abrasively moves on a surface of the medium.
  • the problem in the case where a substrate body is constructed of glass is to achieve a compatibility of thinning the substrate body and a technology of preventing the substrate body from cracking.
  • silicon is more excellent than an aluminum alloy in view of the facts that the surface hardness is high, the substrate body can be thinned, the smoothness of the surface of the substrate body is high and high temperature resistance property of the substrate body is superior.
  • the control ability of crystal growth of a magnetic film formed on the surface of the substrate body is promoted since the crystal orientation or the lattice constant of the surface of the substrate body can be selected.
  • bias application is feasible on the substrate body similar to an aluminum alloy since the substrate body is conductive and further cleaning of a film forming space can be achieved because emission of gasses such as H 2 O or the like is small from the inside of the substrate body.
  • the problem in the case where a substrate body is made of silicon is to achieve a compatibility of thinning a substrate body and a technology of preventing the substrate body from cracking similar to those in glass.
  • a transfer type where a thin film is formed by moving a substrate body in front of a target
  • a stationary type where a thin film is formed by fixing a substrate body in front of a target as sputtering processes according to the present invention.
  • the former is advantageous in fabrication of a medium having a low cost since mass production performance is superior and the latter can fabricate a medium excellent in recording and reproducing characteristics since an incident angle of sputtering particles in respect of a substrate body is stable.
  • the "successive formation of a metallic base layer and a ferromagnetic metal layer" signifies that "in a time period from when a metallic base layer is formed on the surface of a substrate body to when a ferromagnetic metal layer is formed on the surface thereof, the material is not exposed in an atmosphere having a pressure higher than a gas pressure in film formation.” It is publicly-known that when the surface of a metallic base layer is exposed in the atmosphere and thereafter, a ferromagnetic metal layer is formed thereon, the coercive force of a medium is significantly lowered (for example, with no exposure: 1500 Oe ⁇ with exposure: 500 Oe or lower).
  • H 2 O, O 2 , CO 2 , H 2 , N 2 , C x H y , H, C, O, CO and the like are, for example, H 2 O, O 2 , CO 2 , H 2 , N 2 , C x H y , H, C, O, CO and the like as the impurities of Ar gas used in film formation, according to the present invention.
  • the impurities particularly influencing on the oxygen amount included in a film are H 2 O, O 2 , CO 2 , O, CO.
  • the impurity concentration according to the present invention is represented by a sum of H 2 O, O 2 , CO 2 , O and CO included in Ar gas used in film formation.
  • impurities of a Cr target used in forming a metallic base layer there are, for example, Fe, Si, Al, C, O, N, H and the like as "impurities of a Cr target used in forming a metallic base layer". It is estimated that an impurity particularly influencing on an oxygen amount included in a film is O. Accordingly, the impurity concentration according to the present invention signifies that of oxygen included in a Cr target used in forming a metallic base layer.
  • the impurities of a Co base target used in forming a ferromagnetic metal layer there are, for example, Fe, Si, Al, C, O, N and the like as the "impurities of a Co base target used in forming a ferromagnetic metal layer" according to the present invention. It is estimated that an impurity particularly influencing on an oxygen amount included in a film is O. Accordingly, the impurity concentration according to the present invention indicates that of oxygen included in the target used in forming a ferromagnetic metal layer.
  • “Negative bias application on a substrate body” signifies that a direct current bias voltage is applied on a substrate body when a Cr base film or a magnetic film is formed for a magnetic recording medium. It is known that when pertinent bias voltage is applied, the coercive force of a medium is increased. It is publicly-known that the effect of the above-described bias application is larger in the case where it is applied on both of the layers than in the case where it is applied when either one of the films is fabricated.
  • bias application on a substrate body involves the following problems.
  • the ultimate vacuum degree of a film forming chamber for forming a metallic base layer and/or a ferromagnetic metal layer is one of factors in film forming controlling the value of the coercive force depending on the material of a ferromagnetic metal layer. Especially, it has been conventionally considered that with respect to a martial of Co base including Ta in a ferromagnetic metal layer, the influence is significant in the case where the ultimate vacuum degree is low (for example, 5 ⁇ 10 -6 Torr or more).
  • the ultimate vacuum degree of a film forming chamber is effective in view of whether grain boundaries comprising an amorphous structure can be formed among crystal grains even with CoNiCr or CoCrPt that is a material of Co base that does not include Ta.
  • the "surface temperature of a substrate body in forming a metallic base layer and/or a ferromagnetic metal layer" according to the present invention is one of factors in film formation controlling the value of the coercive force without depending on the material of a ferromagnetic metal layer.
  • a high coercive force can be realized when film formation is conducted at a high surface temperature so far as it is in a range where a substrate body is not damaged.
  • the damage of a substrate body signifies an external change such as warping, bulging, cracking or the like or an internal change such as magnetization, an increase in gas emission amount or the like.
  • heating treatment involves an inconvenient aspect where gas or dust is generated in a space at the vicinity of a substrate body and these are included in a thin film in film formation whereby various film characteristics become unstable.
  • the mean center line roughness Ra in the case where the surface of a substrate body having a disk-like shape is measured in a radial direction as a surface roughness of a substrate body according to the present invention.
  • TALYSTEP made by RANKTAYLORHOBSON Co., Ltd. was used as a measuring instrument.
  • Ra is large to prevent adhesion of the magnetic head or an increase in a frictional coefficient. Meanwhile, it is preferable that Ra is small since a distance between a magnetic recording medium and a magnetic head, that is, a fly height of a magnetic head must be secured when rotation of a substrate body reaches the maximum rotational number.
  • the fly height of the magnetic head (a distance of a magnetic head apart from the surface of a magnetic recording medium in carrying out recording and reproducing operation) must further be decreased. To meet the request, it is important to further flatten the surface of a magnetic recording medium. It is preferable from this reason that the surface roughness of a substrate body is further decreased.
  • a method by mechanical polishing a method by chemical etching, a method by providing a physically irregular film and the like as texturing according to the present invention.
  • the method by mechanical polishing is adopted when a substrate body of a magnetic recording medium is an aluminum alloy substrate body that is most widely used.
  • a method for attaching concentric slight inscriptions where a tape adhered with polishing grits on its surface is pushed onto a rotating substrate body in respect of a (Ni-P) film provided on the surface of an aluminum alloy substrate body.
  • the polishing grits may be used by separating them from the tape.
  • a treatment of providing a passivated oxide film comprising chromium oxides to an inner wall of a vacuum chamber used in forming a magnetic film or the like as composite electrolytic polishing according to the present invention for example, SUS 316L or the like is preferable as a material constituting the inner wall of the vacuum chamber.
  • SUS 316L or the like is preferable as a material constituting the inner wall of the vacuum chamber.
  • the emission amounts of O 2 and H 2 O from the inner wall of the vacuum chamber can be reduced by this treatment and accordingly, an amount of oxygen included in a fabricated thin film can further be reduced.
  • the ultimate vacuum degree of a film forming chamber for forming a metallic base layer was changed.
  • the ultimate vacuum degree of a film forming chamber for forming a metallic base layer were provided with two values in the order of 10 -9 Torr and in the order of 10 -7 Torr.
  • a concentration of an impurity included in Ar gas in forming a ferromagnetic metal layer and a metallic base layer was fixed to 10 ppb and the ultimate vacuum degree of a film forming chamber for forming the ferromagnetic metal layer was fixed to the order of 10 -9 Torr.
  • a sputtering apparatus used in fabricating a medium in this example was a magnetron sputtering apparatus (type number ILC3013: load lock type stationary opposed type) made by Anelba Co., Ltd. and inner walls of all the vacuum chambers (loading/unloading chambers (which also served as cleaning chambers), a film forming chamber 1 (for forming the metallic base layer), a film forming chamber 2 (for forming the ferromagnetic metal layer) and a film forming chamber 3 (for forming a protective layer)) were subjected to a composite electrolytic polishing.
  • Table 1 shows film forming conditions in fabricating a magnetic recording medium according to the example.
  • Item Set value (1) Material of substrate body Al-Mg alloy (with (Ni-P) plating film having a thickness of 10 ⁇ m ) (2) Diameter and shape of substrate body 89 mm, disk shape With texture, Ra ⁇ 1 nm (3) Surface shape of substrate body (4) Ultimate vacuum degree (Torr) 10 -7 or 10 -9 (film forming chamber 1) 5 ⁇ 10 -9 (other than film forming chamber 1) (5) Concentration of impurity in Ar gas 10 ppb (all the chambers) (6) Ar gas pressure (mTorr) 2 (all the chambers) (7) Hold temperature of surface of substrate body ( C) 230 (all the chambers) (8) Material of target (at%) Cr, Co 62.5 Ni 30 Cr 7.5 , C (9) Diameter of target (inch) 6 (10) Concentration of impurity in target (ppm) 120 (Cr), 20 (CoNiCr) (11) Interval between target and substrate body (mm) 35 (Cr, CoNiCr, C) (12) Power inputted to target (W) Direct
  • Impurities of the target for forming Cr were Fe:88, Si:34, Al:10, C:60, O:120, N:60, H:1.1 (wtppm).
  • a composition of the target for forming a ferromagnetic metal layer was Ni:29.2 at%, Cr:7.3 at%, Co: bal. and impurities were Fe:27, Si ⁇ 10, Al ⁇ 10, C:30, O:20, N>10 (wtppm).
  • Fig. 1 and Fig. 2 are TEM (Transmitting electron microscope) photographs of the ferromagnetic metal layer of the fabricated medium.
  • Fig. 1 and Fig. 2 show cases where the ultimate vacuum degrees for film formation in the film forming chamber 2 differ where Fig. 1 shows a case of 3 ⁇ 10 -9 Torr (Sample 1) and Fig. 2 shows a case of 1 ⁇ 10 -7 Torr (Sample 2).
  • Fig. 3 shows a result of composition analysis by using an Energy Dispersive X-ray Spectroscopy (EDS) with respect to an intermediary between two crystal grains in Sample 1 (Fig. 1).
  • EDS Energy Dispersive X-ray Spectroscopy
  • the electromagnetic conversion characteristics were measured under measurement conditions of Table 4 by using a read and write integrated type thin film head (where writing was conducted by an Inductive Head and reading was conducted by an MR head (Magnetic Resistance Head)) shown by Fig. 4.
  • Table 5 shows a result of measuring the magnetic properties and the electromagnetic conversion characteristics of the magnetic recording media formed under conditions whereby the structures of Fig. 1 and Fig. 2 were provided.
  • Sample 1 Sample 2 Ultimate vacuum degree in forming base layer (Torr) In the order of 10 -9 In the order of 10 -7 Presence or absence of grain boundaries comprising an amorphous structure present absent Coercive force (Oe) 2450 1050 Hc/Hk 0.35 0.18 S/N (dB) 23.6 14.0
  • the embodiment is different from Embodiment 1 in that CoCrPt was used for the ferromagnetic metal layer in place of CoNiCr.
  • the target composition for forming CoCrPt was Co 75 -Cr 13 -Pt 12 (at%).
  • This embodiment is different from Embodiment 1 in that CoNiCrTa and CoCrPtTa were used for ferromagnetic metal layers in place of CoNiCr.
  • the target compositions used for forming the respective ferromagnetic metal layers were Co 82.5 -Ni 26 -Cr 7.5 -Ta 4 and Co 75.5 -Cr 10.5 -Ta 4 -Pt 10 (at%).
  • grain boundaries were confirmed without depending on the ultimate vacuum degrees (in the order of 10 -7 Torr and in the order of 10 -9 Torr) at the film forming chamber 1 for forming the metallic base layer before film formation with respect to either of the materials for the ferromagnetic metal layers.
  • the sample having a lower value of ultimate vacuum degree was provided with a larger area of grain boundaries (Table 7).
  • sample Sample 5 Sample 6
  • Sample 7 Sample 8 Material of magnetic layer CoNiCrTa CoCrPtTa Back pressure in forming base layer Order of 10 -9 Torr Order of 10 -7 Torr Order of 10 -9 Torr Order of 10 -7 Torr Presence or absence of grain boundaries comprising amorphous structure Present Present Present Present Present Present Area of grain boundaries comprising amorphous structure Large Small Large Small Coercive force (Oe) 2640 1270 3350 1600 Hc/Hk 0.36 0.22 0.37 0.26 S/N (dB) 25.3 20.3 26.1 21.5
  • the sample having a larger area of grain boundaries comprising an amorphous structure among crystal grains for forming a ferromagnetic metal layer is the magnetic recording medium capable of corresponding to a higher recording density even in the case where Ta element was included in the alloy composition constituting the ferromagnetic metal layer.
  • the embodiment is different from Embodiment 1 in that the film formation was conducted by varying the film thickness of the metallic base layer in a range of 0 through 100 nm.
  • Fig. 5 shows a relationship between the film thickness of the metallic base layer comprising Cr and the coercive force of formed media.
  • the ordinate designates a value of a coercive force in a circumferential direction of a disk-like substrate body where the condition a was indicated by ⁇ marks and the condition b was indicated by ⁇ marks.
  • the coercive force of the media under the condition a is provided with a value larger than a maximum value of the media under the condition b when the film thickness of the Cr metallic base layer was equal to or larger than 2.5 nm. Also, it was further preferable that a high coercive force of 2000 Oe or more could be realized when the film thickness of the Cr metallic base layer was 5 nm or more.
  • Fig. 6 shows a relationship between the film thickness of the metallic base layer comprising Cr and a noise of formed media.
  • the condition a was indicated by ⁇ marks and a minimum value of the condition b was indicated by ⁇ mark.
  • the method of measuring a medium noise according to the embodiment was carried out under measurement conditions the same as those in Embodiment 1. Only the film thickness of the Cr layer was made variable from 1 nm to 100 nm and the other conditions were fixed.
  • the medium noise under the condition a was provided with a value lower than a minimum value of the media under the condition b when the film thickness of the Cr metallic base layer was 100 nm or less. Also, it was further preferable that a medium noise lower by 10 % or more could be realized when the film thickness of the Cr metallic base layer was 30 nm or less.
  • the coercive force is higher or a noise of the medium is lower than those under the condition b when the film thickness of a metallic base layer comprising Cr is limited to a range of 2.5 nm through 100 nm.
  • the film thickness of the metallic base layer comprising Cr is limited to a range of 5 nm through 30 nm, a sample superior to a sample under the condition b in respect of the coercive force and the noise of the medium can be obtained.
  • the embodiment is different from Embodiment 1 in that the film formation was carried out by varying the surface temperature of the substrate body in a range of 25 °C through 250 °C when the metallic base layer and the ferromagnetic metal layer were formed.
  • Fig. 7 shows a relationship between the surface temperature of the substrate body in forming a metallic base layer and a ferromagnetic metal layer and a coercive force of a formed medium.
  • the ordinate designates a value of the coercive force in the circumferential direction of the disk-like substrate body where the condition c is indicated by ⁇ marks and the condition d is indicated by ⁇ marks.
  • Fig. 8 shows a relationship between the surface temperature of the substrate body in forming the metallic base layer and the ferromagnetic metal layer and the surface roughness Ra of a formed medium.
  • the surface roughness Ra of the medium was rapidly increased at a temperature of 150 °C or higher.
  • a magnetic head flying test was conducted in respect of such an medium where the fly height of a magnetic head was set to 15 nm, a phenomenon where the magnetic head collided with the surface of the medium, that is, the head clash frequently occurred.
  • the surface temperature of the substrate body in forming the metallic base layer and/or the ferromagnetic metal layer needed to be set to 60 °C through 150 °C.
  • the medium fabrication was feasible at a low temperature where a high coercive force was not obtained conventionally and accordingly, media that could not be utilized for the reason where gases were emitted from a substrate body by heating or the like, for example, ceramics, plastics, resins and the like could be used.
  • Ni-P/Al substrate was used as the substrate body in the above-described embodiments, it was separately confirmed that the invention was effective also in the case where a nonmagnetic layer was provided on the surface of the substrate body, for example, in the case where a glass substrate or the like on the surface of which Ni-P, Ti, C or the like was formed, was used.
  • the embodiment is different from Embodiment 1 in that when the metallic base layer and the ferromagnetic metal layer were formed, the film formation was conducted by varying a negative bias value applied on the substrate body in a range of 0 through -500 V.
  • Fig. 9 shows a relationship between a negative bias value applied on the substrate body and a coercive force of a formed medium.
  • the ordinate signifies a value of the coercive force in the circumferential direction of a disk-like substrate body where the condition e is indicated by ⁇ marks and the condition f is indicated by ⁇ marks.
  • the embodiment is different from Embodiment 1 in that the ferromagnetic metal layer was formed on the surface of the substrate body without interposing the metallic base layer. Also, Co 85 Cr 15 (at%) was used as the ferromagnetic metal layer.
  • a coercive force in a direction perpendicular to the surface of a magnetic recording medium was investigated. As a result, it was confirmed that a high coercive force was provided in the case where the ultimate vacuum degree of a film forming chamber for forming the ferromagnetic metal layer was in the order to 10 -9 Torr compared with the case where it was in the order of 10 -7 Torr. Also, it was known that an area of grain boundaries having an amorphous structure among crystal grains for forming the ferromagnetic metal layer was wider where the ultimate vacuum degree was in the order of 10 -9 Torr than that in the case where it was in the order of 10 -7 Torr.
  • the present invention can provide a magnetic recording medium having a high coercive force and excellent in an S/N ratio (recording signal S, medium noise N) of the electromagnetic conversion characteristic in an longitudinal magnetic recording medium having a ferromagnetic metal layer comprising a CoNiCr alloy magnetic film or a CoCrPt alloy magnetic film that is excellent in mass production stability.
  • the present invention can provide a magnetic recording medium having a high coercive force even with a perpendicular magnetic recording medium having a ferromagnetic metal layer comprising a CoCr alloy magnetic film.
  • the present invention can provide a method of fabrication where a magnetic recording medium having both a high coercive force and an excellent S/N ratio can easily be formed even if a surface temperature of a substrate body in film formation is low or even if an electric bias is not applied on the substrate body.

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Magnetic Record Carriers (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
EP95910770A 1995-03-08 1995-03-08 Magnetisches aufzeichnungsmedium und verfahren zu seiner herstellung Withdrawn EP0817174A1 (de)

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Cited By (4)

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EP0869479A1 (de) * 1995-11-16 1998-10-07 TAKAHASHI, Migaku Magnetisches aufzeichnungsmedium und herstellungsverfahren dazu
EP0971341A1 (de) * 1997-03-28 2000-01-12 TAKAHASHI, Migaku Magnetisches aufzeichnungsmedium
EP1047548A1 (de) * 1998-01-15 2000-11-02 Flextor Inc. Aus einer mettalfolie bestehende platte zum aufzeichnen mit hoher dichte in einem umfeld mit hohen erschütterungen
EP1653451A1 (de) * 2004-10-27 2006-05-03 Hitachi Global Storage Technologies B. V. Senkrechtes magnetisches Aufzeichnungsmittel

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JP3549429B2 (ja) 1999-03-19 2004-08-04 富士通株式会社 磁気記録媒体及びその製造方法
JP2001043530A (ja) * 1999-07-28 2001-02-16 Anelva Corp 情報記録ディスク用保護膜作成方法及び情報記録ディスク用薄膜作成装置
US6821653B2 (en) * 2000-09-12 2004-11-23 Showa Denko Kabushiki Kaisha Magnetic recording medium, process for producing the same, and magnetic recording and reproducing apparatus
JP2002150553A (ja) * 2000-11-09 2002-05-24 Fuji Electric Co Ltd 磁気記録媒体およびその製造方法

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EP0869479A1 (de) * 1995-11-16 1998-10-07 TAKAHASHI, Migaku Magnetisches aufzeichnungsmedium und herstellungsverfahren dazu
EP0869479A4 (de) * 1995-11-16 1999-09-15 Migaku Takahashi Magnetisches aufzeichnungsmedium und herstellungsverfahren dazu
US6124020A (en) * 1995-11-16 2000-09-26 Takahashi; Migaku Magnetic recording medium and production method thereof
EP0971341A1 (de) * 1997-03-28 2000-01-12 TAKAHASHI, Migaku Magnetisches aufzeichnungsmedium
EP0971341A4 (de) * 1997-03-28 2000-03-22 Migaku Takahashi Magnetisches aufzeichnungsmedium
EP1047548A1 (de) * 1998-01-15 2000-11-02 Flextor Inc. Aus einer mettalfolie bestehende platte zum aufzeichnen mit hoher dichte in einem umfeld mit hohen erschütterungen
EP1047548A4 (de) * 1998-01-15 2002-10-29 Flextor Inc Aus einer mettalfolie bestehende platte zum aufzeichnen mit hoher dichte in einem umfeld mit hohen erschütterungen
EP1653451A1 (de) * 2004-10-27 2006-05-03 Hitachi Global Storage Technologies B. V. Senkrechtes magnetisches Aufzeichnungsmittel
US7799447B2 (en) 2004-10-27 2010-09-21 Hitachi Global Storage Technologies Netherlands B.V. Perpendicular magnetic recording medium having grain boundary layer containing ferromagnetic element

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KR19980702630A (ko) 1998-08-05
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US6153297A (en) 2000-11-28

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