EP0802028A3 - Dispositif pour la mise en éléments de stockage de tranches obtenues par sciage d'un bloc - Google Patents
Dispositif pour la mise en éléments de stockage de tranches obtenues par sciage d'un bloc Download PDFInfo
- Publication number
- EP0802028A3 EP0802028A3 EP97105331A EP97105331A EP0802028A3 EP 0802028 A3 EP0802028 A3 EP 0802028A3 EP 97105331 A EP97105331 A EP 97105331A EP 97105331 A EP97105331 A EP 97105331A EP 0802028 A3 EP0802028 A3 EP 0802028A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- wafers
- stocking
- storage element
- slices
- detaching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CH956/96 | 1996-04-16 | ||
CH95696A CH691169A5 (fr) | 1996-04-16 | 1996-04-16 | Dispositif pour la mise en élément de stockage de tranches obtenues par découpage d'un bloc. |
CH95696 | 1996-04-16 |
Publications (3)
Publication Number | Publication Date |
---|---|
EP0802028A2 EP0802028A2 (fr) | 1997-10-22 |
EP0802028A3 true EP0802028A3 (fr) | 1998-04-08 |
EP0802028B1 EP0802028B1 (fr) | 2003-05-21 |
Family
ID=4199092
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP19970105331 Expired - Lifetime EP0802028B1 (fr) | 1996-04-16 | 1997-03-29 | Dispositif pour la mise en éléments de stockage de tranches obtenues par sciage d'un bloc |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP0802028B1 (fr) |
JP (1) | JPH1070095A (fr) |
CH (1) | CH691169A5 (fr) |
DE (1) | DE69722071T2 (fr) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19900671C2 (de) * | 1999-01-11 | 2002-04-25 | Fraunhofer Ges Forschung | Verfahren und Vorrichtung zum Vereinzeln von scheibenförmigen Substraten, insbesondere zur Waferherstellung |
DE19950068B4 (de) * | 1999-10-16 | 2006-03-02 | Schmid Technology Systems Gmbh | Verfahren und Vorrichtung zum Vereinzeln und Ablösen von Substratscheiben |
DE102005016519B3 (de) * | 2005-04-08 | 2007-03-01 | Rena Sondermaschinen Gmbh | Vorrichtung zum Ablösen, Vereinzeln und Transportieren von in einer Halteeinrichtung sequenziell angeordneten Substraten |
DE102005016518B3 (de) * | 2005-04-08 | 2006-11-02 | Rena Sondermaschinen Gmbh | Vorrichtung zum Ablösen und Vereinzeln von Substraten, insbesondere Wafern hergestellt aus Substratblöcken |
DE102005023618B3 (de) * | 2005-05-21 | 2006-12-07 | Aci-Ecotec Gmbh & Co.Kg | Einrichtung zum Vereinzeln von Silizium-Wafern von einem Stapel |
DE102005053410B4 (de) * | 2005-11-09 | 2008-01-24 | Coenen, Wolfgang, Dipl.-Ing. | Verfahren zur Vereinzelung von scheibenförmigen Substraten unter Nutzung von Adhäsionskräften |
DE102006021647A1 (de) | 2005-11-09 | 2007-11-15 | Coenen, Wolfgang, Dipl.-Ing. | Verfahren zur Vereinzelung von scheibenförmigen Substraten unter Nutzung von Adhäsionskräften |
DE102006059809B4 (de) * | 2006-12-15 | 2008-08-21 | Rena Sondermaschinen Gmbh | Vorrichtung und Verfahren zum Vereinzeln und Transportieren von Substraten |
DE102009060575B9 (de) | 2009-12-23 | 2013-11-28 | Gebrüder Decker GmbH & Co. KG | Verfahren sowie Vorrichtung zum Vereinzeln von Wafern aus einem Ingot |
DE102010045098A1 (de) | 2010-09-13 | 2012-03-15 | Rena Gmbh | Vorrichtung und Verfahren zum Vereinzeln und Transportieren von Substraten |
DE102011090053A1 (de) * | 2011-12-28 | 2013-07-04 | Robert Bosch Gmbh | Vereinzelungsvorrichtung und Verfahren zum Vereinzeln eines metallischen oder keramischen Rohteiles |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR481627A (fr) * | 1915-05-12 | 1916-12-28 | Frans Henrik Aubert Wielgolask | Procédé et appareil pour le découpage des baguettes en bois utilisées comme trame dans les nattes et analogues |
JPS61125767A (ja) * | 1984-11-20 | 1986-06-13 | Sumitomo Metal Ind Ltd | ワイヤソ−のウエハ取出方法 |
JPH0639831A (ja) * | 1991-02-13 | 1994-02-15 | Nippon Spindle Mfg Co Ltd | スライシングマシンにおけるウエハーの収納装置 |
JPH07205140A (ja) * | 1994-01-10 | 1995-08-08 | Tokyo Seimitsu Co Ltd | ワイヤーソーのウェーハ取出方法 |
-
1996
- 1996-04-16 CH CH95696A patent/CH691169A5/fr not_active IP Right Cessation
-
1997
- 1997-03-29 DE DE69722071T patent/DE69722071T2/de not_active Expired - Lifetime
- 1997-03-29 EP EP19970105331 patent/EP0802028B1/fr not_active Expired - Lifetime
- 1997-04-16 JP JP11357397A patent/JPH1070095A/ja active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR481627A (fr) * | 1915-05-12 | 1916-12-28 | Frans Henrik Aubert Wielgolask | Procédé et appareil pour le découpage des baguettes en bois utilisées comme trame dans les nattes et analogues |
JPS61125767A (ja) * | 1984-11-20 | 1986-06-13 | Sumitomo Metal Ind Ltd | ワイヤソ−のウエハ取出方法 |
JPH0639831A (ja) * | 1991-02-13 | 1994-02-15 | Nippon Spindle Mfg Co Ltd | スライシングマシンにおけるウエハーの収納装置 |
JPH07205140A (ja) * | 1994-01-10 | 1995-08-08 | Tokyo Seimitsu Co Ltd | ワイヤーソーのウェーハ取出方法 |
Non-Patent Citations (2)
Title |
---|
PATENT ABSTRACTS OF JAPAN vol. 018, no. 258 (M - 1606) 17 May 1994 (1994-05-17) * |
PATENT ABSTRACTS OF JAPAN vol. 095, no. 011 26 December 1995 (1995-12-26) * |
Also Published As
Publication number | Publication date |
---|---|
EP0802028B1 (fr) | 2003-05-21 |
DE69722071T2 (de) | 2004-03-18 |
JPH1070095A (ja) | 1998-03-10 |
EP0802028A2 (fr) | 1997-10-22 |
DE69722071D1 (de) | 2003-06-26 |
CH691169A5 (fr) | 2001-05-15 |
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