EP0793019A2 - Pompes à vide - Google Patents

Pompes à vide Download PDF

Info

Publication number
EP0793019A2
EP0793019A2 EP97301303A EP97301303A EP0793019A2 EP 0793019 A2 EP0793019 A2 EP 0793019A2 EP 97301303 A EP97301303 A EP 97301303A EP 97301303 A EP97301303 A EP 97301303A EP 0793019 A2 EP0793019 A2 EP 0793019A2
Authority
EP
European Patent Office
Prior art keywords
pump
piston
stages
drive means
pump according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP97301303A
Other languages
German (de)
English (en)
Other versions
EP0793019A3 (fr
Inventor
Ian Stones
Nigel Paul Schofield
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BOC Group Ltd
Original Assignee
BOC Group Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BOC Group Ltd filed Critical BOC Group Ltd
Publication of EP0793019A2 publication Critical patent/EP0793019A2/fr
Publication of EP0793019A3 publication Critical patent/EP0793019A3/fr
Withdrawn legal-status Critical Current

Links

Images

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B25/00Multi-stage pumps
    • F04B25/02Multi-stage pumps of stepped piston type
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B35/00Piston pumps specially adapted for elastic fluids and characterised by the driving means to their working members, or by combination with, or adaptation to, specific driving engines or motors, not otherwise provided for
    • F04B35/04Piston pumps specially adapted for elastic fluids and characterised by the driving means to their working members, or by combination with, or adaptation to, specific driving engines or motors, not otherwise provided for the means being electric
    • F04B35/045Piston pumps specially adapted for elastic fluids and characterised by the driving means to their working members, or by combination with, or adaptation to, specific driving engines or motors, not otherwise provided for the means being electric using solenoids
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum

Definitions

  • This invention relates to improvements in vacuum pumps and, more particularly, to such pumps incorporating a reciprocating piston.
  • Vacuum pumps incorporating a reciprocating piston mode of operation which have an electromagnetic actuator comprising a wound coil and an iron core arrangement and a piston with a magnetic member at one end positioned within the electromagnet.
  • Repeated magnetisation and de-magnetisation of the electromagnet by passing half wave rectified pulses of alternating current or pulsed direct current through the coil causes the magnetic member fixed to the piston arrangement to move within the cylindrical coil and causes fluid to be sucked in to a cylinder and then be exhausted therefrom at each piston cycle aided by the use of one-way valves in a manner known per se .
  • the present invention is concerned with the provision of an electromagnetically actuated piston based vacuum pump which generally affords the possibility of such greater efficiencies and improved vacuum performance.
  • a vacuum pump which comprises a multi-stage reciprocating piston mode of operation in which piston reciprocation is effected by electromagnetic drive means and a counter-acting spring means and in which the pump stages are connected in series between a pump inlet and a pump outlet such that, in use, gas being transferred through the pump passes through the stages in turn.
  • multi-stage used herein means a minimum of two stages.
  • pumps of the invention possess three or four or more stages in series.
  • the pump possesses one or more double acting piston heads with each such piston head defining two pump stages, ie one on either side of the piston head, within the cylinder with which it is associated.
  • a pump with four stages comprising two double acting pistons is most preferred.
  • the pump possesses one or two or more of such double acting piston heads contained within the same cylinder block.
  • all such piston are present on the same piston shaft.
  • the preferred form of electromagnetic drive means is a solenoid actuator operating on half wave rectified AC current or pulsed direct current which during the magnetisation period with current flowing through the coils of the solenoid drives a magnetic plunger to which the piston is attached to bridge an air gap in an iron core surrounding the coils.
  • the above advantageous features allow for the possibility of a bearing to be mounted on the plunger arrangement utilising the internal surfaces of the iron core pole pieces of the solenoid as bearing surfaces during reciprocation of the plunger and an attached piston shaft, thereby ensuring concentricity between the plunger and the iron core pole pieces.
  • Such advantageous features also afford the possibility of cooling the solenoid from the outside, ie from outside the vacuum envelope of the pump, leading to a potential longer life for the solenoid and the pump as a whole.
  • Each stage of the pumps of the invention require in general one way valves to allow, at relevant positions of the piston head within its cylinder, gas to enter the stage from the pump inlet or previous stage and also to allow gas to be exhausted from that stage and to pass in to the subsequent stage or the pump outlet.
  • valve plate is positioned intermediate the cylinder block and a manifold in which are defined a pump inlet, outlet, and the various passageways and parts required to link each pump stage in series via the valves of the valve plate.
  • An important feature of the invention is the spring means used in the pump to counter-act the drive means in those parts of the electromagnetic cycle when the coils are not magnetised.
  • the use of such a spring means is essential for obvious reasons.
  • a plurality of seals of known design can usefully be employed along the length of the shaft/head, for example contained in grooves around the peripheries of the shaft/head component(s).
  • a piston pump 1 of the invention having as an integral part thereof a solenoid drive means 2.
  • a substantially square cross-section body member 3 has defined therein two circular diameter bores 4,5 linked by a further circular bore 6.
  • the bore 5 of the body member 3 is sealed by the circular end plate 7 by means in particular of circumferential seal 8.
  • a further iron core pole piece 11 of the same generally circular cross sectional size as the piece 9 is present which define an air gap 12 therebetween.
  • a wound coil 13, supported and electrically insulated by a plastic bobbin 14, is enveloped by the iron core, comprising the aforementioned iron core pole pieces 9,11 and laminated iron cage 15, thereby completing, with a plunger described below, the solenoid drive means 2.
  • the pump being sealed from atmosphere at the solenoid end by means of circumferential sealing 'N' between the plastic bobbin 14 and core pole pieces 9,11, providing an overall hermetically sealed unit from inlet to exhaust, suitable for handling toxic process gases.
  • the solenoid plunger 16 is of hollow cylindrical shape and is sized externally to fit closely the internal cylindrical surface of the core pole pieces 9,11 and therefore is adapted to reciprocate axially therein.
  • a solenoid bearing 'X' mounted on the same means as the plunger 16 provides concentricity between the plunger and pole pieces 9,11.
  • the surfaces of the core pole pieces 9,11 and plunger 16 are advantageously coated with a suitable coating, for example Hard Chrome.
  • the plunger 16 is attached to a plunger carrier 17 which is itself securely fitted by means of a bolt 18 to a piston shaft 19.
  • the piston shaft 19 extends through a circular bore 20 in the pole piece 9 and is sealingly adapted for axial reciprocation therein by means of a series of shaft seals 21 contained in a plurality of circumferential grooves in the external surface of the shaft 19.
  • the piston shaft 19 further extends through the circular bore 6 in the body member 3 and is again sealingly adapted for axial reciprocation therein by means of a further series of shaft seals 22 contained in a plurality of circumferential grooves in the external surface of the shaft 19.
  • the piston shaft 19 has integrally formed therewith a double acting piston head 23 having a cylindrical outer portion which is sealingly adapted for reciprocation within the bore 4 of the body member 3.
  • a central bearing 24(b) and an outer seal arrangement 24(a) is contained in a plurality of circumferential grooves in the external surface of this cylindrical outer portion of the piston head 23.
  • the piston shaft also has attached thereto by means of a bolt 25 a further piston head 26 which also has a cylindrical outer portion which is sealingly adapted for reciprocation within the bore 5 of the body member 3.
  • a series of seals 26(b) are contained in three circumferential grooves in the external surface of this cylindrical outer portion of the piston head 26.
  • the piston head 23 therefore defines the first two stages of the pump, one being to the left (as shown) of the piston head 23 and the second being to the right (as shown) of the piston head 23.
  • the piston head 26 defines the third and fourth stages of the pump, the third being to the left (as shown) of the piston head 26 and the fourth being to the right (as shown) of the piston head 26.
  • the body member 3 can therefore be regarded as a single cylinder block of the pump sealed at one end by the end plate 7 and at the outer end by the pole piece 9.
  • the inlet 27 and outlet 28 are formed in to a manifold 29 which also provides the necessary passageways for transmission of the gas through the four stages of the pump in conjunction with a single valve plate 30 sandwiched between the body portion 3 and the manifold 29 in which one way valves are present to allow entry in to and exhaust from each chamber is allowed at relevant times during the piston cycle.
  • a manifold and valve plate allows for a more simple construction of the pump and more ready maintenance thereafter.
  • the spring 31 is required to exert a force on the plunger carrier 17, and hence on the piston arrangement 19 as a whole, to urge it back to the position shown in Figure 1 where no current is passing through the coil 13, ie when the electromagnetic actuator is inactive. At lower pressures, this force is complemented by pressure differential forces acting on the piston-faces in the same direction. In that part of the cycle when the actuator is active, the movement of the plunger to bridge the gap 12 in the pole pieces 9,11 exerts a compressive force on the spring 31.
  • the spring 32 acts in a direction to complement the electromagnetic force of the solenoid drive 2.
  • Optimisation of the balancing of the dynamic forces exerted by this spring on the plunger carrier 17, coupled with the magnetic force acting on the plunger 16, relative to that exerted in the opposite direction by the spring 31 and pressure differential forces results in the provision of a drive mechanism system which is resonant and provides preferably stroke characteristics.
  • a resonant system is aided by use of the features, particularly the preferred embodiments, of the invention.
  • the application to the electromagnetic drive means, preferably the solenoid actuator, of a half wave rectified AC pulsed current during a half cycle of the piston and aided in particular by the force exerted by the spring 32 and utilising the force exerted by the spring 31 in the opposite direction during the other half cycle of the piston affords the opportunity of the setting up of a resonant action for the piston and for the pump as a whole which leads to enhanced pump efficiency.
  • Spring adjustment means for either or both of the springs 31, 32 although not shown in the drawings may be incorporated to enable the force(s) extended by the springs to be adjusted in situ.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Electromagnetic Pumps, Or The Like (AREA)
EP97301303A 1996-03-01 1997-02-27 Pompes à vide Withdrawn EP0793019A3 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB9604645.3A GB9604645D0 (en) 1996-03-01 1996-03-01 Improvements in vacuum pumps
GB9604645 1996-03-01

Publications (2)

Publication Number Publication Date
EP0793019A2 true EP0793019A2 (fr) 1997-09-03
EP0793019A3 EP0793019A3 (fr) 1999-06-02

Family

ID=10789859

Family Applications (1)

Application Number Title Priority Date Filing Date
EP97301303A Withdrawn EP0793019A3 (fr) 1996-03-01 1997-02-27 Pompes à vide

Country Status (3)

Country Link
EP (1) EP0793019A3 (fr)
JP (1) JPH102281A (fr)
GB (1) GB9604645D0 (fr)

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1143146A2 (fr) 2000-04-04 2001-10-10 The BOC Group plc Régulation de la course de piston pour une pompe à vide
EP1840375A1 (fr) * 2006-03-24 2007-10-03 Ingersoll-Rand Company Assemblage d'un compresseur linéaire
US9084845B2 (en) 2011-11-02 2015-07-21 Smith & Nephew Plc Reduced pressure therapy apparatuses and methods of using same
US9427505B2 (en) 2012-05-15 2016-08-30 Smith & Nephew Plc Negative pressure wound therapy apparatus
US9446178B2 (en) 2003-10-28 2016-09-20 Smith & Nephew Plc Wound cleansing apparatus in-situ
US9642955B2 (en) 2006-09-28 2017-05-09 Smith & Nephew, Inc. Portable wound therapy system
US9801761B2 (en) 2010-07-02 2017-10-31 Smith & Nephew Plc Provision of wound filler
US9844473B2 (en) 2002-10-28 2017-12-19 Smith & Nephew Plc Apparatus for aspirating, irrigating and cleansing wounds
US9901664B2 (en) 2012-03-20 2018-02-27 Smith & Nephew Plc Controlling operation of a reduced pressure therapy system based on dynamic duty cycle threshold determination
US9956121B2 (en) 2007-11-21 2018-05-01 Smith & Nephew Plc Wound dressing
US10307517B2 (en) 2010-09-20 2019-06-04 Smith & Nephew Plc Systems and methods for controlling operation of a reduced pressure therapy system
US10537657B2 (en) 2010-11-25 2020-01-21 Smith & Nephew Plc Composition I-II and products and uses thereof
US10682446B2 (en) 2014-12-22 2020-06-16 Smith & Nephew Plc Dressing status detection for negative pressure wound therapy
US11638666B2 (en) 2011-11-25 2023-05-02 Smith & Nephew Plc Composition, apparatus, kit and method and uses thereof
US11931226B2 (en) 2013-03-15 2024-03-19 Smith & Nephew Plc Wound dressing sealant and use thereof
US11938231B2 (en) 2010-11-25 2024-03-26 Smith & Nephew Plc Compositions I-I and products and uses thereof

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2715102A1 (de) * 1977-04-04 1978-10-12 Syndicat Des Coproprietaires D Kompressor mit freiflugkolben und hohem verdichtungsgrad
GB2040361A (en) * 1978-12-22 1980-08-28 Pierburg Gmbh & Co Kg Double-acting vacuum pump
US4699572A (en) * 1981-08-13 1987-10-13 Commonwealth Scientific And Industrial Research Organization Reciprocatory piston and cylinder machine
JPS6419189A (en) * 1987-07-14 1989-01-23 Nagano Keiki Seisakusho Kk Vacuum pump
US4832578A (en) * 1986-11-14 1989-05-23 The B.F. Goodrich Company Multi-stage compressor
US4954047A (en) * 1988-10-08 1990-09-04 Toyo Engineering Corporation Evacuation apparatus
FR2666853A1 (fr) * 1990-09-19 1992-03-20 Toyo Engineering Corp Pompe a vide et systeme de pompage comprenant au moins une telle pompe.
WO1993001411A1 (fr) * 1991-07-10 1993-01-21 Chen, Chongyuan Pompe comportant un piston a manchon

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2715102A1 (de) * 1977-04-04 1978-10-12 Syndicat Des Coproprietaires D Kompressor mit freiflugkolben und hohem verdichtungsgrad
GB2040361A (en) * 1978-12-22 1980-08-28 Pierburg Gmbh & Co Kg Double-acting vacuum pump
US4699572A (en) * 1981-08-13 1987-10-13 Commonwealth Scientific And Industrial Research Organization Reciprocatory piston and cylinder machine
US4832578A (en) * 1986-11-14 1989-05-23 The B.F. Goodrich Company Multi-stage compressor
JPS6419189A (en) * 1987-07-14 1989-01-23 Nagano Keiki Seisakusho Kk Vacuum pump
US4954047A (en) * 1988-10-08 1990-09-04 Toyo Engineering Corporation Evacuation apparatus
FR2666853A1 (fr) * 1990-09-19 1992-03-20 Toyo Engineering Corp Pompe a vide et systeme de pompage comprenant au moins une telle pompe.
WO1993001411A1 (fr) * 1991-07-10 1993-01-21 Chen, Chongyuan Pompe comportant un piston a manchon

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 013, no. 194 (M-823), 10 May 1989 & JP 01 019189 A (NAGANO KEIKI SEISAKUSHO:KK), 23 January 1989 *

Cited By (46)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1143146A2 (fr) 2000-04-04 2001-10-10 The BOC Group plc Régulation de la course de piston pour une pompe à vide
EP1143146A3 (fr) * 2000-04-04 2003-06-18 The BOC Group plc Régulation de la course de piston pour une pompe à vide
US6857857B2 (en) 2000-04-04 2005-02-22 The Boc Group Plc Reciprocating machines
US10842678B2 (en) 2002-10-28 2020-11-24 Smith & Nephew Plc Apparatus for aspirating, irrigating and cleansing wounds
US10278869B2 (en) 2002-10-28 2019-05-07 Smith & Nephew Plc Apparatus for aspirating, irrigating and cleansing wounds
US9844473B2 (en) 2002-10-28 2017-12-19 Smith & Nephew Plc Apparatus for aspirating, irrigating and cleansing wounds
US9446178B2 (en) 2003-10-28 2016-09-20 Smith & Nephew Plc Wound cleansing apparatus in-situ
EP1840375A1 (fr) * 2006-03-24 2007-10-03 Ingersoll-Rand Company Assemblage d'un compresseur linéaire
US11141325B2 (en) 2006-09-28 2021-10-12 Smith & Nephew, Inc. Portable wound therapy system
US9642955B2 (en) 2006-09-28 2017-05-09 Smith & Nephew, Inc. Portable wound therapy system
US10130526B2 (en) 2006-09-28 2018-11-20 Smith & Nephew, Inc. Portable wound therapy system
US10231875B2 (en) 2007-11-21 2019-03-19 Smith & Nephew Plc Wound dressing
US11351064B2 (en) 2007-11-21 2022-06-07 Smith & Nephew Plc Wound dressing
US10016309B2 (en) 2007-11-21 2018-07-10 Smith & Nephew Plc Wound dressing
US11364151B2 (en) 2007-11-21 2022-06-21 Smith & Nephew Plc Wound dressing
US11129751B2 (en) 2007-11-21 2021-09-28 Smith & Nephew Plc Wound dressing
US11179276B2 (en) 2007-11-21 2021-11-23 Smith & Nephew Plc Wound dressing
US10555839B2 (en) 2007-11-21 2020-02-11 Smith & Nephew Plc Wound dressing
US10744041B2 (en) 2007-11-21 2020-08-18 Smith & Nephew Plc Wound dressing
US9956121B2 (en) 2007-11-21 2018-05-01 Smith & Nephew Plc Wound dressing
US9801761B2 (en) 2010-07-02 2017-10-31 Smith & Nephew Plc Provision of wound filler
US10307517B2 (en) 2010-09-20 2019-06-04 Smith & Nephew Plc Systems and methods for controlling operation of a reduced pressure therapy system
US11027051B2 (en) 2010-09-20 2021-06-08 Smith & Nephew Plc Pressure control apparatus
US11623039B2 (en) 2010-09-20 2023-04-11 Smith & Nephew Plc Systems and methods for controlling operation of a reduced pressure therapy system
US11534540B2 (en) 2010-09-20 2022-12-27 Smith & Nephew Plc Pressure control apparatus
US11938231B2 (en) 2010-11-25 2024-03-26 Smith & Nephew Plc Compositions I-I and products and uses thereof
US10537657B2 (en) 2010-11-25 2020-01-21 Smith & Nephew Plc Composition I-II and products and uses thereof
US11730876B2 (en) 2010-11-25 2023-08-22 Smith & Nephew Plc Composition I-II and products and uses thereof
US11648342B2 (en) 2011-11-02 2023-05-16 Smith & Nephew Plc Reduced pressure therapy apparatuses and methods of using same
US11253639B2 (en) 2011-11-02 2022-02-22 Smith & Nephew Plc Reduced pressure therapy apparatuses and methods of using same
US10143783B2 (en) 2011-11-02 2018-12-04 Smith & Nephew Plc Reduced pressure therapy apparatuses and methods of using same
US9084845B2 (en) 2011-11-02 2015-07-21 Smith & Nephew Plc Reduced pressure therapy apparatuses and methods of using same
US11638666B2 (en) 2011-11-25 2023-05-02 Smith & Nephew Plc Composition, apparatus, kit and method and uses thereof
US9901664B2 (en) 2012-03-20 2018-02-27 Smith & Nephew Plc Controlling operation of a reduced pressure therapy system based on dynamic duty cycle threshold determination
US10881764B2 (en) 2012-03-20 2021-01-05 Smith & Nephew Plc Controlling operation of a reduced pressure therapy system based on dynamic duty cycle threshold determination
US11730877B2 (en) 2012-03-20 2023-08-22 Smith & Nephew Plc Controlling operation of a reduced pressure therapy system based on dynamic duty cycle threshold determination
US10702418B2 (en) 2012-05-15 2020-07-07 Smith & Nephew Plc Negative pressure wound therapy apparatus
US10299964B2 (en) 2012-05-15 2019-05-28 Smith & Nephew Plc Negative pressure wound therapy apparatus
US9545465B2 (en) 2012-05-15 2017-01-17 Smith & Newphew Plc Negative pressure wound therapy apparatus
US9427505B2 (en) 2012-05-15 2016-08-30 Smith & Nephew Plc Negative pressure wound therapy apparatus
US11931226B2 (en) 2013-03-15 2024-03-19 Smith & Nephew Plc Wound dressing sealant and use thereof
US10973965B2 (en) 2014-12-22 2021-04-13 Smith & Nephew Plc Systems and methods of calibrating operating parameters of negative pressure wound therapy apparatuses
US10780202B2 (en) 2014-12-22 2020-09-22 Smith & Nephew Plc Noise reduction for negative pressure wound therapy apparatuses
US10737002B2 (en) 2014-12-22 2020-08-11 Smith & Nephew Plc Pressure sampling systems and methods for negative pressure wound therapy
US10682446B2 (en) 2014-12-22 2020-06-16 Smith & Nephew Plc Dressing status detection for negative pressure wound therapy
US11654228B2 (en) 2014-12-22 2023-05-23 Smith & Nephew Plc Status indication for negative pressure wound therapy

Also Published As

Publication number Publication date
JPH102281A (ja) 1998-01-06
EP0793019A3 (fr) 1999-06-02
GB9604645D0 (en) 1996-05-01

Similar Documents

Publication Publication Date Title
EP0793019A2 (fr) Pompes à vide
US5537820A (en) Free piston end position limiter
CN1149335C (zh) 往复式压缩机的阀固定结构
KR100608681B1 (ko) 왕복동식 압축기
US3740171A (en) Electromagnetic pump or motor device
US3588291A (en) Resonant piston pumps
WO2016175375A1 (fr) Compresseur d'air électromagnétique ayant un circuit d'onduleur parallèle appliqué à ce dernier
KR940006861B1 (ko) 전자 왕복운동 펌프
US4781546A (en) Linear resonant reciprocating machines
KR20030086332A (ko) 선형 전기 모터
JP2002303264A (ja) 往復動式圧縮機のモータ構造
US6015273A (en) Electromagnetic reciprocating compressor with spring assembly mounted around piston
KR101384226B1 (ko) 전자기식 공기 압축기
US4465439A (en) Magnetically-coupled reciprocating pump
US3603706A (en) Electromagnetic micropump for processing aggressive liquid substances
US3829255A (en) Device for controlling the capacity of reciprocating compressor
JP3363931B2 (ja) 可動磁石式ポンプ
CN112600379A (zh) 一种无槽动磁式直线振荡电机直接驱动的一体化液压泵
CA2133094C (fr) Mecanisme alternatif electromagnetique pour l'entrainement d'un compresseur
CN113123940B (zh) 直线式无油压缩机
Chambers et al. A Reliable noncontaminating gas recirculation pump
US4750870A (en) Pressure actuated movable head for a resonant reciprocating compressor balance chamber
RU2792183C1 (ru) Компрессор на основе линейного двигателя
JPH10115473A (ja) リニアコンプレッサ
JPH03294669A (ja) リニア電動機駆動圧縮機

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AK Designated contracting states

Kind code of ref document: A2

Designated state(s): CH DE FR GB LI

PUAL Search report despatched

Free format text: ORIGINAL CODE: 0009013

AK Designated contracting states

Kind code of ref document: A3

Designated state(s): CH DE FR GB LI

17P Request for examination filed

Effective date: 19991008

17Q First examination report despatched

Effective date: 20020711

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 20030322