EP0781921A1 - Ionenquelle mit geschlossener Elektronendrift - Google Patents

Ionenquelle mit geschlossener Elektronendrift Download PDF

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Publication number
EP0781921A1
EP0781921A1 EP96402873A EP96402873A EP0781921A1 EP 0781921 A1 EP0781921 A1 EP 0781921A1 EP 96402873 A EP96402873 A EP 96402873A EP 96402873 A EP96402873 A EP 96402873A EP 0781921 A1 EP0781921 A1 EP 0781921A1
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EP
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Prior art keywords
annular channel
ion source
source according
channel
anode
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Granted
Application number
EP96402873A
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English (en)
French (fr)
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EP0781921B1 (de
Inventor
Dominique Valentian
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Safran Aircraft Engines SAS
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Societe Europeenne de Propulsion SEP SA
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/08—Ion sources; Ion guns using arc discharge
    • H01J27/14—Other arc discharge ion sources using an applied magnetic field
    • H01J27/143—Hall-effect ion sources with closed electron drift
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F03—MACHINES OR ENGINES FOR LIQUIDS; WIND, SPRING, OR WEIGHT MOTORS; PRODUCING MECHANICAL POWER OR A REACTIVE PROPULSIVE THRUST, NOT OTHERWISE PROVIDED FOR
    • F03H—PRODUCING A REACTIVE PROPULSIVE THRUST, NOT OTHERWISE PROVIDED FOR
    • F03H1/00—Using plasma to produce a reactive propulsive thrust
    • F03H1/0037—Electrostatic ion thrusters
    • F03H1/0062—Electrostatic ion thrusters grid-less with an applied magnetic field
    • F03H1/0075—Electrostatic ion thrusters grid-less with an applied magnetic field with an annular channel; Hall-effect thrusters with closed electron drift
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/54—Plasma accelerators

Definitions

  • the present invention relates to ion sources with closed electron drift which can be used as propellants, more particularly for spacecraft, or as ion sources for industrial treatments such as, in particular, deposition under vacuum, deposition assisted by ion production (IAD, "Ion Assisted Deposition”) or dry etching of microcircuits.
  • IAD deposition assisted by ion production
  • dry etching of microcircuits dry etching of microcircuits.
  • Industrial ion beam treatments can involve ion sources with a grid or a closed electron drift. These two types of ion sources were initially developed for space use (ion propellants or plasma thrusters).
  • Grid sources known as ion bombardment thrusters, were invented by Pr. Kaufman in 1961.
  • These sources produce relatively high energy ions (500 to 1000 eV) with relatively low beam densities (2 to 6 mA / cm 2 at the grid). They are well suited to certain applications such as deep fine etching or uniform ion erosion of targets.
  • Figure 1 depicts a closed electron drift plasma thruster as proposed in an article by LH Artsimovitch et al. published in 1974 in "Machinostroenie", pp. 75-84, about the program development of the stationary thruster and its tests on the "METEOR” satellite.
  • Such thrusters of the "closed electron drift” type, or stationary plasma thrusters are distinguished from other categories by the fact that ionization and acceleration are not differentiated and that the acceleration zone has a number equal of ions and electrons, which eliminates any space charge phenomenon.
  • annular channel 1 can be seen defined by a part 2 made of insulating material and placed in an electromagnet comprising external annular pole pieces 3 and internal 4 placed respectively outside and inside part 2 in insulating material, a magnetic yoke 12 disposed upstream of the motor and of the electromagnet coils 11 which extend over the entire length of the channel 1 and are mounted in series around magnetic cores 10 connecting the external pole piece 3 to the yoke 12.
  • a hollow cathode 7, connected to ground, is coupled to a xenon supply device to form a plasma cloud in front of the downstream outlet of the channel 1.
  • the ionization and neutralization electrons come from the hollow cathode 7.
  • the ionization electrons are drawn into the insulating annular channel 1 by the electric field prevailing between the anode 5 and the plasma cloud coming from the cathode 7.
  • the ionization electrons take a drift trajectory in azimuth necessary to maintain the electric field in the channel.
  • the ionization electrons then drift along closed paths inside the insulating channel, hence the name of the propellant.
  • the specific pulse obtained by conventional ion thrusters with closed electron drift operating with xenon is of the order of 1000 to 2500 seconds.
  • Figure 2 is an axial section of an example of a thruster developed by Professor Morozov which was the subject of a publication in document FR-A-2 693 770.
  • This propellant 20 comprises, like the propellant of FIG. 1, an annular channel 21 defined by a part 22 of insulating material, a magnetic circuit comprising annular parts external 24 a and internal 24 b , a magnetic yoke 32 disposed upstream of the propellant and a central core 28 connecting the annular parts 24 a , 24 b and the magnetic yoke 32.
  • Coils 31 make it possible to create a magnetic field and an electric field in the annular channel.
  • the hollow cathode 40 is coupled to a xenon supply device to form a plasma cloud in front of the downstream outlet of the channel 21.
  • This motor is characterized by the presence of a still chamber 23 which has a dimension in the radial direction larger than that of the main annular channel 21.
  • An anode 25 is disposed on the insulating parts 22 delimiting the annular channel 21, in an area located immediately downstream of the stilling chamber 23.
  • An annular ionizable gas distributor 27 is disposed at the bottom of the ple
  • a strong beam divergence is beneficial for certain industrial applications such as IAD (Ion Assisted Deposition) on spherical caps.
  • Figure 3 shows the section through an ALT anode layer propellant.
  • the magnetic circuit is very close to that of a first generation SPT stationary plasma thruster. It comprises a central pole piece 54 around which is wound an internal coil 61 serving to support the propellant, and an external annular pole piece 53, these two pole pieces grounded being connected by magnetic cores 60 supporting external coils 61.
  • the walls 56 of the acceleration channel 51 of ALT anode layer thrusters are made of a metallic conductive material.
  • a massive anode 55 and a cathode 59 also serve to distribute the propellants.
  • the massive anode 55 occupies most of the acceleration chamber, the acceleration channel 51 being reduced to a very thin area located between the massive anode 55 and the conductive walls 56 (hence the name anode layer). In fact, all parts of the propellant in contact with the discharge are metallic.
  • FIG. 4A which relates to a conventional plasma thruster with an acceleration channel fully defined by an insulating part 62
  • the internal surface delimiting the acceleration channel is divided into two zones under the influence of the operation. of the propellant.
  • the downstream zone 67 of length L (the length L can have values of the order of 5 to 7 mm for a thruster with a diameter of 100 mm), corresponds to a zone permanently eroded by ion bombardment.
  • the upstream zone 68 corresponds on the contrary to a zone for depositing the eroded products.
  • FIG. 4B shows the evolution of the value of the radial component of the magnetic induction B r as a function of the axial position Z on the imaginary cylindrical surface 65 corresponding to an average radius of the acceleration channel.
  • FIG. 4C represents the value of the potential V as a function of the axial position Z on the same imaginary cylindrical surface 65 corresponding to an average radius of the acceleration channel.
  • the deposition zone 68 corresponds to an almost zero potential gradient (Figure 4C) and to a relatively weak radial magnetic field B r ( Figure 4B).
  • the operation of the propellant is linked to plasma-wall interactions and in particular to the secondary emission characteristics of the wall.
  • the secondary emission properties may be different in zones 67 and 68.
  • the plasma thruster channel comprises boron nitride
  • the erosion of this channel can bring boron atoms onto the substrate to be treated. This can be particularly troublesome for microelectronic applications because boron is a silicon dopant.
  • stationary plasma thrusters like anode layer thrusters, have practically non-removable anodes, which does not allow, for example, to easily pass from oxygen to argon.
  • plasma thrusters with an acceleration channel defined by fully ceramic parts have drawbacks insofar as the ceramic channel must obey contradictory requirements: resistance to sputtering, mechanical strength, resistance to thermal gradient and thermal shock.
  • the object of the present invention is to remedy the drawbacks of known electron drift ion sources and, more particularly, to modify them to allow greater flexibility. of use.
  • the improvements of the invention aim in particular to reduce the mass of these sources while increasing their longevity, to simplify the manufacture of these sources while facilitating their dismantling and to increase their mechanical resistance.
  • the invention also aims to reduce the emission of particles resulting from the erosion of the walls of the acceleration channel so that these sources may be capable of being used effectively as sources of ions in industrial treatments at large scale, while their structure has so far limited their use mainly to the propulsion of satellites or other spacecraft.
  • a source of ions with closed electron drift comprising a main annular ionization and acceleration channel open at its downstream end, at least one hollow compensation cathode disposed outside the channel.
  • main annular means for creating a magnetic field in the main annular channel, adapted to produce in said channel a substantially radial magnetic field having a gradient with maximum induction at the downstream end of the channel, a first supply means in ionizable gas associated with the hollow cathode and a second means for supplying ionizable gas situated upstream from the main annular channel, and biasing means cooperating with an anode, characterized in that at least the internal wall of the main annular channel of this source consists of an electrically conductive material, and in that end pieces brought to a potential p read lower than that of the anode extend the annular channel downstream thereof.
  • the downstream part of the channel which is subjected to the intensive erosion of the ions which can thus lead to possible pollution of the substrate to be treated by the erosion products
  • the downstream part extending the channel using a material different from that of the upstream part of the main annular channel which, for its part, must be essentially compatible with the partially ionized plasma gas.
  • At least part of the main internal channel is electrically polarized by the polarization means so that at least part of the internal wall of the main annular channel directly constitutes said anode.
  • the main annular ionization and acceleration channel is a one-piece assembly made of an electrically conductive material.
  • the main annular channel constitutes a main annular channel block closed upstream by a stilling chamber supplied with plasma gas by said second gas supply means which comprises an annular distributor connected to a supply pipe.
  • the means for creating a magnetic field comprise a magnetic circuit constituted by a yoke on which the main annular channel block is fixed, said yoke comprising an axial core supporting a central lower pole piece and a pole piece central upper concentric with the main annular channel block, said cylinder head further comprising a plurality of tie rods arranged around the annular channel block once it is mounted on the cylinder head, said tie rods supporting a peripheral upper pole piece, said pieces central and peripheral upper poles constituting said end pieces brought to a lower potential than that of the anode, said upper pole pieces comprising guard rings disposed at the mouth of the main annular channel, which guard rings protect the pole pieces from ion erosion of the plasma and determine by their thickness the magnetic field profile in the plasma.
  • the guard rings are removable so as to adapt the nature of the material constituting them to the application using the ion source.
  • the main annular channel block is electrically and thermally isolated by vacuum with respect to the elements of the rest of the ion source comprising electrostatic screens, the space between the annular channel block and the elements of the rest of the ion source.
  • ions being between 1 and 5 mm.
  • the annular channel block is fixed to the magnetic yoke by a plurality of posts made of thermal insulating material and held in place by insulators, these posts being able to be separated from the insulators to allow disassembly of the annular canal block.
  • the upper pole pieces comprise removable guard rings disposed at the mouth of the main annular channel.
  • the guard rings are made of one of the following conductive materials: carbon, carbon-carbon composite, nickel alloy, noble metal, ceramic composite consisting of nitrides bonded by silicon, silicon, stainless steel, aluminum
  • the guard rings are made of one of the following insulating materials: boron nitride, alumina, quartz.
  • the main annular channel block can be made of one of the following conductive materials: refractory nickel alloy, molybdenum, carbon-carbon composite.
  • a material to be evaporated is capable of being deposited in the annular channel and the internal walls of the annular channel are partially covered with an insulating deposit in order to avoid attack by the electrically conductive material constituting said channel through the material to be evaporated.
  • the internal walls of the annular channel block are plated with a noble metal such as platinum, gold or rhodium in order to eliminate the chemical attacks due to the gases present in said channel.
  • a noble metal such as platinum, gold or rhodium
  • the outer walls and the inner walls of the main annular channel are made of an electrically conductive material, and are electrically isolated from the rest of the structural elements of the source, including the anode.
  • said end pieces are made of a dielectric material partially covering the main annular channel.
  • said end pieces are produced in the form of inserts made of ceramic material which are fixed to supports such as metal sheets which can be fixed, for example by screws, to the pole pieces.
  • the electrically conductive walls of the annular channel and of the plenum are at a floating potential slightly lower than that of the anode. This arrangement makes it possible to reduce the plasma-wall interactions, therefore the heating of the channel.
  • the latter can therefore be made of relatively thin sheet metal.
  • the channel block is held vis-à-vis the magnetic circuit by small columns of weakly conductive material.
  • the anode is held opposite the channel block by insulators and supplied by a conductor in the axis of one of the columns.
  • the gas supply is at the potential of the channel block.
  • FIG. 5 shows an overall view, in axial section, of a first example of ion source with closed electron drift in accordance with the invention.
  • annular channel design and construction of an annular channel are notably simplified compared to the case of a source for spatial use such as that of FIG. 2.
  • a stilling chamber 123 which is of reduced dimensions, and the upstream part of a main annular acceleration channel form a monobloc metallic assembly 122 which will be referred to hereinafter as "channel block" and which plays in particular the role of an anode 125.
  • a magnetic circuit consisting of a yoke 136, an axial core 138, a pole piece 132, an inner pole piece 135, tie rods 137 and an outer pole piece 134, determines a maximum magnetic field in the air gap defined by the pole pieces 134, 135.
  • This field includes a minimum in the vicinity of the pole piece 132.
  • the field is created by an internal coil 133 and one or more external coils 131, which makes it possible to adjust its distribution and thus to regulate the divergence of the ion beam.
  • the channel block 122 comprises, at its upstream part, a stilling chamber 123 which is equipped with a gas injection manifold 127 supplied by a pipe 126.
  • This channel block 122 serving as anode 125 is maintained by at least three balusters 121, one of which may be constituted by the pipe 126 itself.
  • These balusters 121,126 are fixed on insulators 145 by nuts 146.
  • the balusters 121, 126 can thus be separated from the isolators 145 to allow the disassembly of the annular channel block 122.
  • Electrostatic covers 147, 148, 154 make it possible to prevent discharges .
  • the gas supply is carried out using a ground pipe 150, an insulator 151 and a connector comprising a gasket 152 and a nut 153. This assembly is housed in a base 130 which serves as source support.
  • the electric discharge producing the ion beam is established between a hollow cathode 140 supplied with rare gas and the channel block 122 forming the anode 125, supplied by a pure gas or a mixture of gases, at least one of these gas can be reactive.
  • the nature of the material of the channel 122 can be adapted to the gas to be ionized while the nature of the guard rings 164, 165 which are placed in the extension of the channel block 122, downstream of the latter and which are subjected to erosion ions, can be adapted both to the nature of the gas and to the requirements of the substrate to be treated (for example semiconductor or optical thin layer).
  • these removable guard rings 164, 165 which are arranged respectively in the outer pole pieces 134 and inner pole 135, can be made of carbon (having a low rate of erosion), of ceramic composite materials (such as a composite consisting of silicon, silicon nitride and titanium nitride) made of aluminum, stainless steel, noble metal (such as platinum or gold).
  • Screens 139, 159, 160 disposed outside of the channel block 122, play both a thermal and electrostatic role with respect to the channel block 122. They prevent excessive heating of the pole pieces and of the coils and determine, around the channel block 122, a field preventing discharges.
  • the main annular channel 122 is thus electrically and thermally isolated from the rest of the source 139, 159, 160 by vacuum, the space between the annular channel 122 and the rest of the source being typically between 1 and 5 mm.
  • Tests show that with a channel block 122 made entirely of conductive material cooperating downstream with end pieces 134, 135, 164, 165 brought to a different lower potential, in this case to ground, a profile of the plasma potential along the median axis of channel 122 (Figure 6B) practically identical to that of first generation stationary plasma thrusters (SPT) ( Figure 4C). It is therefore possible to generate a progressive acceleration of the ions in a channel formed by two zones brought to different potentials.
  • the profile of the magnetic field in the plasma is determined by the thickness of the guard rings 164, 165 protecting the pole pieces from ionic erosion of the plasma.
  • the electrical insulation of the channel block 122 with respect to the cylinder head is carried out by means of the three columns 121 provided with insulators 145.
  • the electrical insulation of the front, side and rear faces of the channel block 122 from the grounded parts (i.e. pole pieces 134 and 135 and heat shields 139 and 159) is provided by vacuum. Indeed, the small distance between these walls (of the order of a millimeter) and the low pressure (2.10 -4 to 5.10 -4 mbar) lead to a discharge voltage much higher than the operating voltage (according to Paschen's law ).
  • the channel block 122 receives the heat flux, radiated and dissipated (resulting from inelastic collisions of ions and electrons) by the plasma. This corresponds to a power of a few hundred watts for a source of 1.5 kW.
  • the thermal losses of the channel block 122 forming the anode 125, towards the rest of the source are limited by specific constructive provisions.
  • the only conductive connection with the source is formed by the hollow support columns 121 and the gas inlet duct 126.
  • These columns can be made of a weakly conductive material (stainless steel, Inconel), so that the conductive heat flux can be very reduced.
  • these columns allow differential expansion of the channel block 122 forming the anode 125 with respect to the magnetic yoke 136.
  • This screen can for example be either a solid block 139, as can be seen in Figure 5, rejecting the heat flow over a large area, or a screen provided with screened windows 179, shown in Figure 7, allowing the direct radiation from the channel block 122 forming the anode 125 at a certain solid angle.
  • the part which extends the channel block 122 downstream thereof is divided into two removable and interchangeable rings.
  • the outer ring 164 is mounted by screws on the outer pole piece 134, while the inner ring 165 is locked in position by the inner pole piece 135. To change the rings 164 and 165, it is therefore sufficient to disassemble the pole pieces .
  • the gas distributor 127 is an integral part of the stilling chamber 123.
  • the channel block 122 also constitutes an easily interchangeable metal part. To dismantle the channel block 122, first remove the assembly consisting of the outer pole piece 134, the guard ring 164 and the screen 139 and the assembly consisting of the inner pole piece 135 and the ring guard 165. This first level of disassembly can be carried out without adjustment by keeping the source in place.
  • connection between the gas supply and the tube 126 is hermetic.
  • a flat seal 152 seals between the two parts. It is crushed by the nut 153.
  • the base 130 is removable ( Figure 5). It is provided with a screened degassing orifice 176, in order to prohibit the entry of the plasma prevailing in the vacuum chamber inside the space formed by the base 130 and the magnetic yoke 136.
  • the cable 143 polarization of the anode 125 and the gas supply 150 pass advantageously in the interface between the cylinder head 136 and the base 130 so as not to hinder the disassembly of the latter.
  • Figure 9 shows a device for supplying the channel block 122 with particles 195 of a sublimable solid under vacuum (metals with high vapor pressure, volatile oxides). This allows these vapors to be ionized (partially) to produce vacuum deposits, reactive or not.
  • the external screen 139 may be provided with a heating element 191. It will be noted that the shape of the stilling chamber affects that of a crucible, which makes it possible to standardize the vapor flow. If necessary, a conical cornice 192 can be introduced into this chamber.
  • FIG. 10 shows a variant of the channel block 122 provided with an internal insulating deposit 193 delimiting the conductive zone 198 constituting the anode 125 opposite the minimum of field.
  • Figure 11 shows an overall view, in axial section, of a second example of a source of ions with closed electron drift in accordance with the invention.
  • This ion source comprises the following constituent elements: a hollow compensation cathode 240 disposed outside the source proper, downstream of the latter; a magnetic circuit comprising a yoke 236 disposed upstream of the source and connecting bars 237, 238 connecting the yoke 236 to external pole pieces 234 and internal 235 in the form of rings, arranged downstream of the source of ions; means 231, 233 for creating a magnetomotive force constituted by coils which can be arranged for example around some of the connecting bars 237, 238 and auxiliary pole pieces 232, 239 determining a minimum of field in the vicinity of the anode; an annular channel block 222 of ionization and acceleration, delimited downstream by external cylindrical walls 281 and internal 282 metal, and extended in the acceleration zone by two annular pieces 264, 265 of dielectric material (ceramic) held vis-à-vis the internal 235 and external 234 pole pieces, either by mechanical mounting (positioning between the pole piece and a metal holding piece), or by brazing each
  • the bottom of the plenum receives a cylindrical anode 225 and a gas distributor 227, the anode 225 being held in place by insulators 283, compressed by the distributor 227 against the bottom of the chamber using tie rods 221 and spacers 221 a .
  • tie rod-spacer assemblies 221, 221a are mounted on insulators 245 ensuring positioning with respect to the magnetic circuit (and more particularly the yoke 236).
  • the distributor 227 is supplied with gas by a pipe 226 and a connector 252 mounted on an insulator 245.
  • the polarization of the anode is ensured by a tie rod 221b and a polarization wire 243.
  • the anode 225 and the distributor 227 remain easily removable.
  • the ion source also comprises conductive electrostatic screens 259, 339 which surround the annular channel 222.
  • the screens 259, 339 can slide at their downstream end respectively on the external ceramic ring 264 and the internal ceramic ring 265.
  • channel 222 the ends of which can be provided with a metal wire eliminating the peak effects, therefore the risks of discharge.
  • the free space created between the electrically conductive screens 259, 339 and the metal walls 281, 282 has an approximately constant width (typically between 1 and 5 mm) so as to avoid a risk of electric shock between the walls 281, 282 and the screens 259, 339.
  • the screens 259, 339 can be provided with a grid so as to allow the degassing of the space between these screens and the walls 281, 282.
  • the end pieces 264, 265 have a length along the acceleration channel 222 which extends at least over an area corresponding to the length L of FIG. 4, that is to say over the area of erosion due to ions.
  • the electrically conductive walls 281, 282 define a width of the acceleration channel 222, in the radial direction, which can be greater than the width of the acceleration channel 222 defined in the radial direction by the end pieces 264, 265 of dielectric material.
  • this arrangement makes it possible to avoid the appearance of a discontinuity due to the transition from the deposition area to the erosion area, the deposition occurring progressively on the surfaces 281 and 282.
  • a source can also be produced where the surfaces 281 and 282 are at the diameter of the end pieces 264, 265 or even at a lower (281) and upper (282) diameter with a conical connection, this allowing to reduce the air gap of the auxiliary pole pieces 232, 239.
  • the electrically conductive walls 281, 282 are electrically connected together by a conductive bottom 270 constituting, with the conductive walls 281, 282, a monobloc assembly which can itself be integral with the set 227 gas distributor.
  • the cylindrical surfaces 281 and 282 are connected to the chamber bottom 270 by radii of curvature ensuring a smooth surface progressively evolving.
  • the electric field between the conductive surfaces 281, 282 and the conductive screens 259, 339, which are grounded, does not undergo a significant increase which can cause breakdown.
  • the upstream part of the acceleration channel 222 is separated from the pole pieces 232, 239 as well as from the electrostatic screens 259, 339 by an empty space.
  • the main annular channel 222 is electrically and thermally isolated from the rest of the source 259, 339, 232, 239, 236 by the vacuum, the space between the annular channel main 222 and the rest of the source being typically between 1 and 5mm.
  • the walls 281, 282 of the annular channel 222 are electrically isolated from the rest of the structural elements of the source, including the anode 225.
  • the external surface of the walls 281, 282, 270 as well as the external and internal surfaces of the screens 259, 339 can be polished so as to reduce the radial radiative losses. This allows in particular to reduce the heat flux on the central coil 233 ( Figure 11).
  • the outer surface of the external wall 281 of the chamber, and only this chamber, can on the contrary be covered with a coating with high emissivity, as well as the faces of the screen 339, the part of the screen 259, which faces the inner wall 282, remaining polished.
  • This arrangement improves the radiant cooling of the conductive channel while preventing the central coil 233 from overheating.
  • the lifespan and efficiency of the ion source depend on the functional phenomena which occur within the ionization layer.
  • the main phenomenon which determines the lifetime is the erosion of the end pieces 264, 265 of the discharge chamber-acceleration channel assembly 222, due to the projection onto the walls of the ions which have been accelerated.
  • the integrity characteristics of the closed electron drift ion source are largely determined by the geometry and the intensity of the magnetic field in the acceleration channel and remain stable even when the downstream outlet part of the discharge widened as a result of the projection of ions (see Figure 4A).
  • a significant deterioration in the operating efficiency of the propellant is observed only when a complete projection of the ions has been carried out on the walls of the discharge chamber in the interpole space of the magnetic system and when the poles 234, 235 them - themselves have undergone significant projections. In this case, changes in the topology and the intensity of the magnetic field are the main causes of performance degradation.
  • the walls 281, 282 can however also be connected to the anode 225 by an electrical resistance.
  • electrically conductive walls 281, 282, made of metal or composite material leads to a reduction in the mass of the entire ion source.
  • the electrically conductive walls 281, 282 have a potential close to that of the anode while in operation the structural elements of the magnetic system (elements 236, 237, 238) will be found at a potential close to that of the cathode. It is to avoid the appearance of electric discharges between the magnetic system and the chamber that the latter is surrounded by conductive screens 339, 259 which are placed at a relatively constant distance from the walls 281, 282 and 270.
  • FIG. 12 gives an example of a brazed connection making it possible to allow differential expansion between a part 264, respectively 265, and a metal support 274, respectively 275, while respecting the requirements of electric field between the screen 339 respectively 259 and the wall 281, respectively 282.
  • the support 274 has an inverted end 272 which is wetted by the solder 271 and the support 275 can be produced identically.

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Spectroscopy & Molecular Physics (AREA)
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  • Electron Sources, Ion Sources (AREA)
EP96402873A 1995-12-29 1996-12-23 Ionenquelle mit geschlossener Elektronendrift Expired - Lifetime EP0781921B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9515718 1995-12-29
FR9515718A FR2743191B1 (fr) 1995-12-29 1995-12-29 Source d'ions a derive fermee d'electrons

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EP0781921A1 true EP0781921A1 (de) 1997-07-02
EP0781921B1 EP0781921B1 (de) 2002-05-29

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EP96402873A Expired - Lifetime EP0781921B1 (de) 1995-12-29 1996-12-23 Ionenquelle mit geschlossener Elektronendrift

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US (1) US5945781A (de)
EP (1) EP0781921B1 (de)
DE (1) DE69621411T2 (de)
FR (1) FR2743191B1 (de)
UA (1) UA43863C2 (de)

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EP0879959A1 (de) * 1997-05-23 1998-11-25 International Space Technology, Inc. Plasmabeschleuniger mit geschlossener Elektronenlaufbahn und leitenden eingesetzten Stücken
EP0982976A1 (de) * 1998-08-25 2000-03-01 Societe Nationale D'etude Et De Construction De Moteurs D'aviation "Snecma" Auf hohen thermischen Belastungen abgestimmter Plasmamotor mit geschlossenem Elektronendrift
WO2000063459A1 (en) * 1999-04-17 2000-10-26 Advanced Energy Industries, Inc. Method and apparatus for deposition of diamond like carbon
CN105245132A (zh) * 2015-10-16 2016-01-13 中国航天科技集团公司第九研究院第七七一研究所 一种霍尔发动机启动供电系统及方法
FR3040442A1 (fr) * 2015-08-31 2017-03-03 Ecole Polytech Propulseur ionique a grille avec propergol solide integre
WO2018210929A1 (fr) * 2017-05-16 2018-11-22 Safran Aircraft Engines Dispositif de regulation de debit de fluide propulsif pour propulseur electrique

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US6150764A (en) * 1998-12-17 2000-11-21 Busek Co., Inc. Tandem hall field plasma accelerator
US6259102B1 (en) * 1999-05-20 2001-07-10 Evgeny V. Shun'ko Direct current gas-discharge ion-beam source with quadrupole magnetic separating system
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US6281622B1 (en) 1998-08-25 2001-08-28 Societe Nationale D'etude Et De Construction De Moteurs D'aviation - S.N.E.C.M.A Closed electron drift plasma thruster adapted to high thermal loads
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WO2017037062A1 (fr) * 2015-08-31 2017-03-09 Ecole Polytechnique Propulseur ionique a grille avec agent propulsif solide integre
FR3040442A1 (fr) * 2015-08-31 2017-03-03 Ecole Polytech Propulseur ionique a grille avec propergol solide integre
CN105245132A (zh) * 2015-10-16 2016-01-13 中国航天科技集团公司第九研究院第七七一研究所 一种霍尔发动机启动供电系统及方法
CN105245132B (zh) * 2015-10-16 2018-04-20 中国航天科技集团公司第九研究院第七七一研究所 一种霍尔发动机启动供电系统及方法
WO2018210929A1 (fr) * 2017-05-16 2018-11-22 Safran Aircraft Engines Dispositif de regulation de debit de fluide propulsif pour propulseur electrique
FR3066557A1 (fr) * 2017-05-16 2018-11-23 Safran Aircraft Engines Dispositif de regulation de debit de fluide propulsif pour propulseur electrique
CN110799751A (zh) * 2017-05-16 2020-02-14 赛峰飞机发动机公司 用于调节用于电力推进器的推进剂流体的流量的装置

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FR2743191A1 (fr) 1997-07-04
EP0781921B1 (de) 2002-05-29
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FR2743191B1 (fr) 1998-03-27
DE69621411T2 (de) 2003-01-09
UA43863C2 (uk) 2002-01-15

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