EP0753599A1 - Method and apparatus for producing corrosion and wear resistant protective coatings on iron based substrates - Google Patents

Method and apparatus for producing corrosion and wear resistant protective coatings on iron based substrates Download PDF

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Publication number
EP0753599A1
EP0753599A1 EP96110790A EP96110790A EP0753599A1 EP 0753599 A1 EP0753599 A1 EP 0753599A1 EP 96110790 A EP96110790 A EP 96110790A EP 96110790 A EP96110790 A EP 96110790A EP 0753599 A1 EP0753599 A1 EP 0753599A1
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Prior art keywords
nitrogen
carried out
nitrocarburizing
iron
oxidation
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EP96110790A
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German (de)
French (fr)
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EP0753599B1 (en
EP0753599B2 (en
Inventor
Steffen Dr. Hoppe
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Oerlikon Metaplas GmbH
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Metaplas Ionon Oberflaechenveredelungstechnik GmbH
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/34—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases more than one element being applied in more than one step
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/28—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases more than one element being applied in one step
    • C23C8/30—Carbo-nitriding
    • C23C8/32—Carbo-nitriding of ferrous surfaces

Definitions

  • the invention relates to a method for producing corrosion and wear protection layers on iron-based materials, in which areas near the surface are enriched with nitrogen, carbon and oxygen.
  • the invention relates to a device for performing this method.
  • a further disadvantage is that the use of salt bath processes in particular is very polluting and the surfaces produced in this way are rough, which is why they have to be subjected to intermediate or post-processing.
  • the invention has for its object to provide a method for producing corrosion and wear protection layers on iron-based materials, which on the one hand does not have the disadvantages mentioned above and on the other hand allows longer service lives of the materials treated in this way. Furthermore, the invention has for its object to provide an apparatus for performing this method.
  • the areas near the surface are enriched with nitrogen and carbon in order to form a connecting layer consisting of iron carbonitrides.
  • Iron base materials treated in this way have a service life of up to 600 hours in standardized corrosion tests (such as the salt spray test according to DIN 500 21 SS).
  • the nitrocarburizing and oxidizing process steps take place in a normal pressure gas process.
  • the iron carbonitrides are enriched by nitrogen and carbon in the areas near the surface ⁇ - Fe 2 (N, C) 1-x and or ⁇ '- Fe 4 (N, C) 1-y educated.
  • the oxygenation is carried out in a nitrogen-water vapor mixture of defined composition in order to enrich the regions near the surface with oxygen.
  • the oxidation is carried out in a temperature range from 480 ° C to 520 ° C.
  • the activation of the surface of the material during the plasma-assisted vacuum process is advantageously carried out by bombarding the surface of the material with nitrogen, hydrogen, carbon and oxygen ions.
  • the device-based solution is characterized according to the invention in that the normal pressure gas processes nitrocarburizing and oxidizing and the plasma-assisted vacuum process can be carried out in the same system.
  • the iron base materials to be treated are first heated to the treatment temperature of about 500 ° C to 590 ° C and then subjected to the nitrocarburizing process in an ammonia-nitrogen-carbon dioxide atmosphere, in which the enrichment of nitrogen and carbon leads to a connecting layer consisting of iron carbonitrides.
  • the nitrocarburizing process takes place under normal pressure, the workpiece is brought to the temperature of the oxidation treatment.
  • the workpiece can also be cooled to room temperature.
  • the process space is evacuated for the subsequent plasma-assisted ion bombardment of the workpiece surface. In addition to this evacuation, if the workpiece is cooled to room temperature beforehand, a simultaneous heating of the workpiece to the temperature of the oxidation treatment is necessary.
  • the material is switched as a cathode, while, for example, the system wall is switched as an anode. Due to the ions striking the surface of the material with high kinetic energy, the areas near the surface of the connecting layer formed in the nitrocarburizing step are changed by heating, implantation and sputtering in such a way that a closed and uniform oxide layer can form in and on the connecting layer in the subsequent oxidation step. The formation of the uniform oxide layer is supported by the fact that the plasma forms around the entire surface of the material during the activation process.
  • the system is flooded with nitrogen as an inert gas to normal pressure and the material is reheated to its treatment temperature of approximately 480 ° C to 520 ° C.
  • steam is then used for the oxidation process to produce a nitrogen-water vapor mixture in managed the facility.
  • the material treated in this way is cooled with a further supply of nitrogen.

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
  • Chemical Vapour Deposition (AREA)
  • Coating With Molten Metal (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Preventing Corrosion Or Incrustation Of Metals (AREA)
  • Laminated Bodies (AREA)

Abstract

The method concerns production of corrosion and wear resistant layers on ferrous material, according to which near-surface regions are enriched with nitrogen, carbon and oxygen. It is characterized by the following process steps: (a) carbonitration of the material to produce a connector layer consisting of iron carbonitrides; (b) activation of the material surface by a low-pressure plasma-assisted process; (c) oxidation of the material to produce a closed oxide layer. Also claimed is an appts. for implementation of the method in which processes at normal and low pressures can be carried out.

Description

Die Erfindung betrifft ein Verfahren zur Erzeugung von Korrosions- und Verschleißschutzschichten auf Eisenbasiswerkstoffen, bei dem oberflächennahe Bereiche mit Stickstoff, Kohlenstoff sowie Sauerstoff angereichert werden. Darüber hinaus betrifft die Erfindung eine Vorrichtung zur Durchführung dieses Verfahrens.The invention relates to a method for producing corrosion and wear protection layers on iron-based materials, in which areas near the surface are enriched with nitrogen, carbon and oxygen. In addition, the invention relates to a device for performing this method.

Seit Anfang der 80er Jahre ist es bekannt, daß das Korrosions- und Verschleißverhalten von Eisenbasiswerkstoffen durch die nachträgliche Oxidation von Nitridschichten deutlich verbessert werden kann. Besonders gute Ergebnisse wurden durch die Kombination der Verfahrensschritte Nitrocarburieren und anschließendes Oxidieren erreicht. Beide Verfahrensschritte können sowohl in gasförmigen als auch flüssigen Medien erfolgen. Die Aufgabe der nachträglichen Oxidation der Nitrierschichten besteht dabei in der Ausbildung einer geschlossenen Oxidschicht an der Oberfläche des Werkstoffs.It has been known since the beginning of the 1980s that the corrosion and wear behavior of iron-based materials can be significantly improved by the subsequent oxidation of nitride layers. Particularly good results were achieved by combining the nitrocarburizing and subsequent oxidizing process steps. Both process steps can take place in both gaseous and liquid media. The task of the subsequent oxidation of the nitriding layers is to form a closed oxide layer on the surface of the material.

Obwohl des sehr effektiven Einsatzes einer Oxidation eine Vielzahl von kommerziell anwendbaren Technologien existieren, sind die bisher erreichten Kennwerte des Korrosionsverhaltes derart behandelter Werkstoffe für eine Vielzahl industrieller Anwendungen nicht ausreichend.Although there is a large number of commercially applicable technologies due to the very effective use of oxidation, the previously achieved characteristic values of the corrosion behavior of materials treated in this way are not sufficient for a large number of industrial applications.

Nachteilig ist darüber hinaus, daß insbesondere der Einsatz von Salzbadverfahren sehr umweltbelastend ist und die solchermaßen erzeugten Oberflächen rauh sind, weshalb sie einer Zwischen- oder Nachbearbeitung unterzogen werden müssen.A further disadvantage is that the use of salt bath processes in particular is very polluting and the surfaces produced in this way are rough, which is why they have to be subjected to intermediate or post-processing.

Der Erfindung liegt die Aufgabe zugrunde, ein Verfahren zur Erzeugung von Korrosions- und Verschleißschutzschichten auf Eisenbasiswerkstoffen zu schaffen, das einerseits die voran genannten Nachteile nicht aufweist und andererseits höhere Standzeiten der solchermaßen behandelten Werkstoffe ermöglicht. Ferner liegt der Erfindung die Aufgabe zugrunde, eine Vorrichtung zur Durchführung dieses Verfahrens zu schaffen.The invention has for its object to provide a method for producing corrosion and wear protection layers on iron-based materials, which on the one hand does not have the disadvantages mentioned above and on the other hand allows longer service lives of the materials treated in this way. Furthermore, the invention has for its object to provide an apparatus for performing this method.

Die verfahrensgemäße Lösung dieser Aufgabe durch die Erfindung ist gekennzeichnet durch die Verfahrensschritte:

  • a) Nitrocarburieren des Werkstoffs zur Bildung einer aus Eisenkarbonitriden bestehenden Verbindungsschicht;
  • b) Aktivieren der Oberfläche des Werkstoffs in einem plasmagestützten Unterdruckverfahren und
  • c) Oxidieren des Werkstoffs zur Bildung einer geschlossenen Oxidschicht.
The method-related solution to this problem by the invention is characterized by the method steps:
  • a) nitrocarburizing the material to form a compound layer consisting of iron carbonitrides;
  • b) activating the surface of the material in a plasma-assisted vacuum process and
  • c) Oxidizing the material to form a closed oxide layer.

Bei diesem erfindungsgemäß ausgebildeten Verfahren werden in dem Verfahrensschritt Nitrocarburieren die oberflächennahen Bereiche mit Stickstoff und Kohlenstoff angereichert, um eine aus Eisenkarbonitriden bestehende Verbindungsschicht zu bilden. Überraschenderweise hat sich herausgestellt, daR das Korrosions- und Verschleißverhalten von Eisenbasiswerkstoffen deutlich verbessert werden kann, wenn die der Nitrocarburierung unterzogenen Werkstoffe vor der nachfolgenden Oxidation einem plasmagestützten Unterdruckverfahren unterzogen werden. Die durch den Ionenbeschuß der Werkstoffoberfläche ablaufenden chemischen und physikalischen Wechselwirkungsreaktionen bewirken eine Aktivierung und gezielte Veränderung der oberflächennahen Bereiche der im Nitrocarburierschritt gebildeten Verbindungsschicht. Aufgrund dieses Ionenbeschusses führt die Anreicherung der oberflächennahen Bereiche mit Sauerstoff beim Oxidieren zu einer geschlossenen und gleichmäßigen Oxidschicht auf der bestehenden Verbindungsschicht. Solchermaßen behandelte Eisenbasiswerkstoffe weisen bei normierten Korrosionstests (wie den Salz-Sprühnebel-Test nach DIN 500 21 SS) Standzeiten von bis zu 600 Stunden auf.In this method designed according to the invention, in the nitrocarburizing step, the areas near the surface are enriched with nitrogen and carbon in order to form a connecting layer consisting of iron carbonitrides. Surprisingly, it has been found that the corrosion and wear behavior of iron-based materials can be significantly improved if the materials subjected to nitrocarburization are subjected to a plasma-assisted vacuum process before the subsequent oxidation. The chemical and physical interaction reactions that take place due to the ion bombardment of the material surface cause an activation and targeted change in the areas near the surface of the connecting layer formed in the nitrocarburizing step. Due to this ion bombardment, the enrichment of the areas near the surface with oxygen during oxidation leads to a closed and uniform oxide layer on the existing connection layer. Iron base materials treated in this way have a service life of up to 600 hours in standardized corrosion tests (such as the salt spray test according to DIN 500 21 SS).

Gemäß einer bevorzugten Ausführungsform des erfindungsgemäßen Verfahrens erfolgen die Verfahrensschritte Nitrocarburieren und Oxidieren in einem Normaldruck-Gasverfahren.According to a preferred embodiment of the process according to the invention, the nitrocarburizing and oxidizing process steps take place in a normal pressure gas process.

Zur Erzeugung einer besonders effektiven Verbindungsschicht während des Nitrocarburierens werden durch Anreicherung von Stickstoff und Kohlenstoff in den oberflächennahen Bereichen die Eisenkarbonitride

        ε- Fe2 (N, C)1-x

und/oder

        δ' - Fe4 (N, C)1-y

gebildet.To create a particularly effective compound layer during nitrocarburizing, the iron carbonitrides are enriched by nitrogen and carbon in the areas near the surface

ε- Fe 2 (N, C) 1-x

and or

δ '- Fe 4 (N, C) 1-y

educated.

Zur Bildung der geschlossenen und gleichmäßigen Oxidschicht hat es sich als besonders vorteilhaft erwiesen, daß zur Anreicherung der oberflächennahen Bereiche mit Sauerstoff die Oxidiation in einem Stickstoff-Wasserdampf-Gemisch definierter Zusammensetzung durchgeführt wird. Gemäß einer bevorzugten Ausführungsform des Verfahrens wird die Oxidation in einem Temperaturbereich von 480°C bis 520°C durchgeführt.In order to form the closed and uniform oxide layer, it has proven to be particularly advantageous for the oxygenation to be carried out in a nitrogen-water vapor mixture of defined composition in order to enrich the regions near the surface with oxygen. According to a preferred embodiment of the method, the oxidation is carried out in a temperature range from 480 ° C to 520 ° C.

Die Aktivierung der Werkstoffoberfläche während des plasmagestützten Unterdruckverfahrens erfolgt vorteilhafterweise durch den Beschuß der Werkstoffoberfläche mit Stickstoff-, Wasserstoff-, Kohlenstoff- und Sauerstoffionen. Durch die geeignete Wahl der Zusammensetzung eines Gasgemisches zur Erzeugung der voranstehend genannten Ionen im Plasma können definierte und gezielte Veränderungen der im Nitrocarburierschritt gebildeten Verbindungsschicht herbeigeführt werden, was sich wiederum auch auf den nachfolgenden Oxidationsschritt auswirkt.The activation of the surface of the material during the plasma-assisted vacuum process is advantageously carried out by bombarding the surface of the material with nitrogen, hydrogen, carbon and oxygen ions. Through the suitable choice of the composition of a gas mixture for generating the above-mentioned ions in the plasma, defined and targeted changes in the connection layer formed in the nitrocarburizing step can be brought about, which in turn also has an effect on the subsequent oxidation step.

Die vorrichtungsmäßige Lösung ist erfindungsgemäß dadurch gekennzeichnet, daß die Normaldruck-Gasverfahren Nitrocarburieren und Oxidieren und das plasmagestützte Unterdruckverfahren in der gleichen Anlage ausführbar sind.The device-based solution is characterized according to the invention in that the normal pressure gas processes nitrocarburizing and oxidizing and the plasma-assisted vacuum process can be carried out in the same system.

Durch die Integration aller drei Verfahrensschritte läßt sich das erfindungsgemäße Verfahren trotz des zusätzlichen Verfahrensschrittes einfach und kostengünstig durchführen.By integrating all three process steps, the process according to the invention can be carried out simply and inexpensively despite the additional process step.

Der Ablauf des erfindungsgemäßen Verfahrens läßt sich schematisch wie folgt beschreiben:The sequence of the method according to the invention can be described schematically as follows:

Die zu behandelnden Eisenbasisstoffe werden zunächst auf die Behandlungstemperatur von etwa 500°C bis 590°C erwärmt und anschließend in einer Ammoniak-Stickstof-Kohlendioxid-Atmosphäre dem Nitrocarburierprozeß unterzogen, bei dem die Anreicherung von Stickstoff und Kohlenstoff zu einer aus Eisenkarbonitriden bestehenden Verbindungsschicht führt. Nach dem unter Normaldruck stattfindenden Nitrocarburierverfahren wird das Werkstück auf die Temperatur der Oxidationsbehandlung geführt. Es kann ebenso eine Abkühlung des Werkstückes auf Raumtemperatur erfolgen. Für den nachfolgenden plasmagestützten Ionenbeschuß der Werkstückoberfläche wird der Prozeßraum evakuiert. Ebenso ist neben dieser Evakuierung bei vorheriger Abkühlung des Werkstückes auf Raumtemperatur eine gleichzeitige Erwärmung des Werkstückes auf die Temperatur der Oxidationsbehandlung notwendig. Zur Erzeugung des aus Stickstoff-, Wasserstoff-, Kohlenstoff- und Sauerstoffionen gebildeten Plasmas wird der Werkstoff als Kathode geschaltet, während beispielsweise die Anlagenwand als Anode geschaltet ist. Durch die mit hoher kinetischer Energie auf die Oberfläche des Werkstoffes auftreffenden Ionen werden die oberflächennahen Bereiche der im Nitrocarburierschritt gebildeten Verbindungsschicht durch Erwärmung, Implantation und Sputtern so verändert, daß sich im nachfolgenden Oxidationsschritt eine geschlossene und gleichmäßige Oxidschicht in und auf der Verbindungsschicht ausbilden kann. Die Ausbildung der gleichmäßigen Oxidschicht wird dadurch unterstützt, daß sich das Plasma während des Aktivierungsprozesses um die gesamte Oberfläche des Werkstoffes ausbildet.The iron base materials to be treated are first heated to the treatment temperature of about 500 ° C to 590 ° C and then subjected to the nitrocarburizing process in an ammonia-nitrogen-carbon dioxide atmosphere, in which the enrichment of nitrogen and carbon leads to a connecting layer consisting of iron carbonitrides. After the nitrocarburizing process takes place under normal pressure, the workpiece is brought to the temperature of the oxidation treatment. The workpiece can also be cooled to room temperature. The process space is evacuated for the subsequent plasma-assisted ion bombardment of the workpiece surface. In addition to this evacuation, if the workpiece is cooled to room temperature beforehand, a simultaneous heating of the workpiece to the temperature of the oxidation treatment is necessary. To generate the plasma formed from nitrogen, hydrogen, carbon and oxygen ions, the material is switched as a cathode, while, for example, the system wall is switched as an anode. Due to the ions striking the surface of the material with high kinetic energy, the areas near the surface of the connecting layer formed in the nitrocarburizing step are changed by heating, implantation and sputtering in such a way that a closed and uniform oxide layer can form in and on the connecting layer in the subsequent oxidation step. The formation of the uniform oxide layer is supported by the fact that the plasma forms around the entire surface of the material during the activation process.

Nach dem Plasmaprozeß wird die Anlage mit Stickstoff als Inertgas auf Normaldruck geflutet und der Werkstoff wieder auf seine Behandlungstemperatur von ca. 480°C bis 520°C erwärmt. Zur Anreicherung der oberflächennahen Verbindungsschicht mit Sauerstoff wird anschließend für den Oxidationsprozeß Wasserdampf zur Erzeugung eines Stickstoff-Wasserdampf-Gemisches in die Anlage geleitet. Nach Beendigung des Oxidationsprozesses wird der solchermaßen behandelte Werkstoff unter weiterer Stickstoffzufuhr abgekühlt.After the plasma process, the system is flooded with nitrogen as an inert gas to normal pressure and the material is reheated to its treatment temperature of approximately 480 ° C to 520 ° C. To enrich the near-surface connection layer with oxygen, steam is then used for the oxidation process to produce a nitrogen-water vapor mixture in managed the facility. After the oxidation process has ended, the material treated in this way is cooled with a further supply of nitrogen.

Claims (7)

Verfahren zur Erzeugung von Korrosions- und Verschleißschutzschichten auf Eisenbasiswerkstoffen, bei dem oberflächennahe Bereiche mit Stickstoff, Kohlenstoff sowie Sauerstoff angereichert werden,
gekennzeichnet durch die Verfahrensschritte: a) Nitrocarburieren des Werkstoffes zur Bildung einer aus Eisenkarbonitriden bestehenden Verbindungsschicht; b) Aktivieren der Oberfläche des Werkstoffs in einem plasmagestützten Unterdruckverfahren und c) Oxidieren des Werkstoffs zur Bildung einer geschlossenen Oxidschicht. Process for the production of corrosion and wear protection layers on iron-based materials, in which near-surface areas are enriched with nitrogen, carbon and oxygen,
characterized by the process steps: a) nitrocarburizing the material to form a connecting layer consisting of iron carbonitrides; b) activating the surface of the material in a plasma-assisted vacuum process and c) Oxidizing the material to form a closed oxide layer. Verfahren nach Anspruch 1, dadurch gekennzeichnet, daß die Verfahrensschritte Nitrocarburieren und Oxidieren unter Normaldruck gefahren werden.A method according to claim 1, characterized in that the nitrocarburizing and oxidizing steps are carried out under normal pressure. Verfahren nach Anspruch 1 oder 2, dadurch gekennzeichnet, daß beim Nitrocarburieren die Eisenkarbonitride

        ε- Fe2 (N, C)1-x

und/oder

        δ' - Fe4 (N, C)1-y

gebildet werden.Process according to Claim 1 or 2, characterized in that the iron carbonitrides are used in nitrocarburizing

ε- Fe 2 (N, C) 1-x

and or

δ '- Fe 4 (N, C) 1-y

be formed. Verfahren nach einem der Ansprüche 1 bis 3, dadurch gekennzeichnet, daß das Oxidieren in einem Stickstoff-Wasserdampf-Gemisch definierter Zusammensetzung durchgeführt wird.Method according to one of claims 1 to 3, characterized in that the oxidation is carried out in a nitrogen-water vapor mixture of defined composition. Verfahren nach einem der Ansprüche 1 bis 4, dadurch gekennzeichnet, daß das Oxidieren insbesondere in einem Temperaturbereich von 480°C bis 520°C durchgeführt wird.Method according to one of claims 1 to 4, characterized in that the oxidation is carried out in particular in a temperature range from 480 ° C to 520 ° C. Verfahren nach einem der Ansprüche 1 bis 5, dadurch gekennzeichnet, daß beim Aktivieren die Werkstoffoberfläche mit Stickstoff-, Wasserstoff, Kohlenstoff- und Sauerstoffionen beschossen wird.Method according to one of claims 1 to 5, characterized in that the material surface is bombarded with nitrogen, hydrogen, carbon and oxygen ions during activation. Vorrichtung zum Durchführen des Verfahrens nach mindestens einem der Ansprüche 2 bis 6, dadurch gekennzeichnet, daß die Normaldruckverfahren und das plasmagestützte Unterdruckverfahren in der gleichen Anlage ausführbar sind.Device for performing the method according to at least one of claims 2 to 6, characterized in that the normal pressure method and the plasma-assisted vacuum method can be carried out in the same system.
EP96110790A 1995-07-11 1996-07-04 Method for producing corrosion and wear resistant protective coatings on iron based substrates Expired - Lifetime EP0753599B2 (en)

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DE19525182A DE19525182C2 (en) 1995-07-11 1995-07-11 Process for the production of corrosion and wear protection layers on iron-based materials
DE19525182 1995-07-11

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EP0753599A1 true EP0753599A1 (en) 1997-01-15
EP0753599B1 EP0753599B1 (en) 1999-04-07
EP0753599B2 EP0753599B2 (en) 2005-04-13

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EP (1) EP0753599B2 (en)
JP (1) JP3185015B2 (en)
KR (1) KR100245361B1 (en)
AT (1) ATE178659T1 (en)
BR (1) BR9603031A (en)
CA (1) CA2180927C (en)
DE (2) DE19525182C2 (en)

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US6361836B1 (en) * 1999-12-09 2002-03-26 Johns Manville International, Inc. Method of making spinner discs for rotary fiberization processes
DE10127020B4 (en) * 2001-06-01 2004-07-08 Federal-Mogul Friedberg Gmbh Piston ring with an oxide-nitride composite layer
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EP0753599B2 (en) 2005-04-13
US5679411A (en) 1997-10-21
JPH09104960A (en) 1997-04-22
DE59601585D1 (en) 1999-05-12
KR100245361B1 (en) 2000-03-02
DE19525182A1 (en) 1997-01-16
BR9603031A (en) 1998-05-05
DE19525182C2 (en) 1997-07-17
ATE178659T1 (en) 1999-04-15
CA2180927A1 (en) 1997-01-12
JP3185015B2 (en) 2001-07-09
KR970006536A (en) 1997-02-21
CA2180927C (en) 2006-10-03

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