EP0726590A2 - Procédé de fabrication d'une cathode froide à émission de champ - Google Patents

Procédé de fabrication d'une cathode froide à émission de champ Download PDF

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Publication number
EP0726590A2
EP0726590A2 EP96102013A EP96102013A EP0726590A2 EP 0726590 A2 EP0726590 A2 EP 0726590A2 EP 96102013 A EP96102013 A EP 96102013A EP 96102013 A EP96102013 A EP 96102013A EP 0726590 A2 EP0726590 A2 EP 0726590A2
Authority
EP
European Patent Office
Prior art keywords
cone
refractory metal
silicon
silicon oxide
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP96102013A
Other languages
German (de)
English (en)
Other versions
EP0726590A3 (fr
EP0726590B1 (fr
Inventor
Toshio Kaihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Publication of EP0726590A2 publication Critical patent/EP0726590A2/fr
Publication of EP0726590A3 publication Critical patent/EP0726590A3/fr
Application granted granted Critical
Publication of EP0726590B1 publication Critical patent/EP0726590B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/30—Cold cathodes, e.g. field-emissive cathode
    • H01J1/304—Field-emissive cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2209/00—Apparatus and processes for manufacture of discharge tubes
    • H01J2209/02—Manufacture of cathodes
    • H01J2209/022—Cold cathodes
    • H01J2209/0223—Field emission cathodes
    • H01J2209/0226—Sharpening or resharpening of emitting point or edge
EP96102013A 1995-02-13 1996-02-12 Procédé de fabrication d'une cathode froide à émission de champ Expired - Lifetime EP0726590B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP23582/95 1995-02-13
JP2358295A JPH08222126A (ja) 1995-02-13 1995-02-13 電界放出冷陰極の製造方法

Publications (3)

Publication Number Publication Date
EP0726590A2 true EP0726590A2 (fr) 1996-08-14
EP0726590A3 EP0726590A3 (fr) 1996-12-11
EP0726590B1 EP0726590B1 (fr) 1999-04-07

Family

ID=12114577

Family Applications (1)

Application Number Title Priority Date Filing Date
EP96102013A Expired - Lifetime EP0726590B1 (fr) 1995-02-13 1996-02-12 Procédé de fabrication d'une cathode froide à émission de champ

Country Status (4)

Country Link
EP (1) EP0726590B1 (fr)
JP (1) JPH08222126A (fr)
KR (1) KR0181326B1 (fr)
DE (1) DE69601961T2 (fr)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4855636A (en) * 1987-10-08 1989-08-08 Busta Heinz H Micromachined cold cathode vacuum tube device and method of making
EP0483814A2 (fr) * 1990-10-30 1992-05-06 Sony Corporation Emetteur du type à effet de champ et procédé de fabrication
EP0508737A1 (fr) * 1991-04-12 1992-10-14 Fujitsu Limited Procédé de fabrication d'une cathode froide métallique de dimensions microscopiques
US5201992A (en) * 1990-07-12 1993-04-13 Bell Communications Research, Inc. Method for making tapered microminiature silicon structures
FR2700222A1 (fr) * 1993-01-06 1994-07-08 Samsung Display Devices Co Ltd Procédé de formation d'un dispositif à effet de champ en silicium.

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4855636A (en) * 1987-10-08 1989-08-08 Busta Heinz H Micromachined cold cathode vacuum tube device and method of making
US5201992A (en) * 1990-07-12 1993-04-13 Bell Communications Research, Inc. Method for making tapered microminiature silicon structures
EP0483814A2 (fr) * 1990-10-30 1992-05-06 Sony Corporation Emetteur du type à effet de champ et procédé de fabrication
EP0508737A1 (fr) * 1991-04-12 1992-10-14 Fujitsu Limited Procédé de fabrication d'une cathode froide métallique de dimensions microscopiques
FR2700222A1 (fr) * 1993-01-06 1994-07-08 Samsung Display Devices Co Ltd Procédé de formation d'un dispositif à effet de champ en silicium.

Also Published As

Publication number Publication date
KR0181326B1 (ko) 1999-03-20
KR960032553A (ko) 1996-09-17
DE69601961T2 (de) 1999-10-14
DE69601961D1 (de) 1999-05-12
EP0726590A3 (fr) 1996-12-11
EP0726590B1 (fr) 1999-04-07
JPH08222126A (ja) 1996-08-30

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