EP0672835B1 - Mikro-Fluiddiode - Google Patents

Mikro-Fluiddiode Download PDF

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Publication number
EP0672835B1
EP0672835B1 EP95101737A EP95101737A EP0672835B1 EP 0672835 B1 EP0672835 B1 EP 0672835B1 EP 95101737 A EP95101737 A EP 95101737A EP 95101737 A EP95101737 A EP 95101737A EP 0672835 B1 EP0672835 B1 EP 0672835B1
Authority
EP
European Patent Office
Prior art keywords
fluid
micro
silicon
diode
capillaries
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP95101737A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP0672835A1 (de
Inventor
Minh Tan Dr. Pham
Steffen Dr. Howitz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Forschungszentrum Dresden Rossendorf eV
Original Assignee
Forschungszentrum Dresden Rossendorf eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Forschungszentrum Dresden Rossendorf eV filed Critical Forschungszentrum Dresden Rossendorf eV
Publication of EP0672835A1 publication Critical patent/EP0672835A1/de
Application granted granted Critical
Publication of EP0672835B1 publication Critical patent/EP0672835B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C4/00—Circuit elements characterised by their special functions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
    • B01F25/30—Injector mixers
    • B01F25/31—Injector mixers in conduits or tubes through which the main component flows
    • B01F25/314—Injector mixers in conduits or tubes through which the main component flows wherein additional components are introduced at the circumference of the conduit
    • B01F25/3142—Injector mixers in conduits or tubes through which the main component flows wherein additional components are introduced at the circumference of the conduit the conduit having a plurality of openings in the axial direction or in the circumferential direction
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F33/00—Other mixers; Mixing plants; Combinations of mixers
    • B01F33/30—Micromixers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/206—Flow affected by fluid contact, energy field or coanda effect [e.g., pure fluid device or system]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/206—Flow affected by fluid contact, energy field or coanda effect [e.g., pure fluid device or system]
    • Y10T137/2224—Structure of body of device
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/87571—Multiple inlet with single outlet
    • Y10T137/87652—With means to promote mixing or combining of plural fluids

Definitions

  • the invention relates to a micro-fluid diode that is only permeable to fluid in one direction directional coupling of submicroliter amounts of one fluid medium into another standing or flowing target fluid in a closed system.
  • Appropriate Requirements exist when dosing, mixing and injecting fluids in the sub-microliter range for applications in particular in the field of biomedical engineering and chemical microsensor technology.
  • Liquid is a widely used procedure in the field of medical technology and Flow injection analysis. It is known to be by injecting through a rubber septum [P. W. Alexander et al., Analyst 107 (1982) 1335] or using rotary injection valves [M. D. Luque de Castro et al., Analyst 109 (1984) 413] or based on the hydrodynamic injection [J. Ruzicka et al., Anal. Chim. Acta, 145 (1983) 1].
  • the devices that use these techniques and are currently commercially available are based exclusively on costly precision mechanical manufacturing technologies.
  • the aim of the invention is to avoid adhering to the micromechanical valves Problems a technical solution for coupling a dosing fluid into a standing one or flowing target fluid can be found, which has a high dosing accuracy in the Has submicroliter range and maximum security against penetration of the target fluid into the dosing fluid.
  • the object is achieved by a micro-fluid diode which is only permeable to fluid in one direction and which consists of one or a system of a plurality of microcapillaries which are open on both sides and are in direct contact on the output side with the target fluid and whose input side facing the metering fluid is provided by an air or gas cushion is separated from the metering fluid so that the target fluid that expands in the capillaries is prevented from advancing due to the surface tension with the formation of a meniscus.
  • the metering fluid is applied to this meniscus discontinuously, preferably as a self-supporting fluid jet, and is coupled into the target fluid as a result of diffusion or convection processes.
  • the micro-fluid diode according to the invention is preferably integrated into a microtechnical flow channel, whereby it reliably prevents the liquid (target fluid) standing or flowing in the flow channel from escaping and at the same time ensures the entry of a second liquid (metering fluid) to be applied to the micro-fluid diode from the outside.
  • a coupling surface for the introduction of microdrops of a metering fluid is formed by the large number of open capillaries directed outwards.
  • the gas-liquid interface at each end of the microcapillaries is a mandatory prerequisite for the maintenance of the micro-fluid diode function at all times for the component functions and thus part of the component.
  • the microcapillaries have three-dimensional dimensions in the ⁇ m range and, due to the high precision requirements for their geometry, are preferably manufactured by anisotropic etching on ⁇ 100> or ⁇ 110> silicon substrates.
  • the length of each individual microcapillary is to be dimensioned such that the target fluid extends up to the capillary ends, and there, under the influence of the surface tension and the acting fluidic gravity pressures, forms a defined liquid-gas interface in the form of a meniscus at each microcapillary end.
  • each meniscus With the formation of each meniscus, the process of spreading the liquid in the corresponding microcapillary is completed and the coupling surface is thus brought into a reproducible state.
  • This state represents the prevailing equilibrium between the static gravity pressures and, in the event that the target fluid moves in the flow channel, the dynamic hydrostatic pressures. As long as the equilibrium conditions of the pressures are met, the desired directional dependence exists on all menisci of the entire coupling area. This means that the target fluid moved or standing in the flow channel does not leave the microcapillaries in the direction of the droplet chamber, but a metering fluid sprayed through the gas space of the droplet chamber onto any meniscus can get into the interior of the microcapillary and thus the flow channel.
  • the unhindered entry of the second liquid into the flow channel via the meniscus of the first liquid takes place via diffusion and / or convection mechanisms.
  • the flow velocity in the flow channel is exactly zero or the microcapillaries of the micro fluid diode are chosen long enough, only the diffusion component comes into play when the metering and target fluids are mixed. All flow velocities other than zero in the channel lead directly to the formation of convection components in the microcapillary, which are also superimposed by diffusion components.
  • the rate of inflow of the metering fluid through the microcapillaries of the coupling surface into the flow channel can be adjusted by choosing their geometric dimensions.
  • the figure shows the sectional view of the planar construction of a complete MFD component containing the actual inventive micro fluid diode (hereinafter referred to as MFD).
  • the MFD is a chip-shaped component 1 made entirely of ⁇ 100> or ⁇ 110> silicon. It is etched on one side as a lattice structure 6 and on the other side as a continuous flow channel 9.
  • the MFD chip 1 is mounted with the spacer chip 2, which is also made of silicon, in the glass-silicon flow cell 3 in such a way that a target fluid 7 can move past the MFD unhindered, thereby forming 6 small micromenisci in the lattice structure.
  • the lattice structure forms the coupling surface of the microfluidic diode in the direction of the spacer chip 2.
  • the entire component of the MFD comprises the stack arrangement of fluidic flow cell 3, 4 with flow channel 7, 9 and channel stopper 8, the MFD chip 1 with its microcapillary array 6 and the spacer chip 2, which is connected to the adjacent gas or air cushion over the microcapillary array.
  • the spacer chip 2, which forms the droplet chamber, is also produced by anisotropic etching in ⁇ 100> silicon. If the flow channel 7 is now flowed through by the target fluid, it wets the microcapillaries and spreads up to their opposite opening, where it forms a target fluid meniscus 6 independently of the flow speed depending on its surface tension and the system-internal gravity pressures, the total field of the capillary openings providing a coupling area for one Dosing fluid forms. If the metering fluid 5 is now sprayed onto this coupling surface 6 by means of a microtechnical pump, it can pass through the MFD arrangement 1 and directly reach the flow channel of the target fluid.
  • the micro fluid diode according to the invention provides a new element for microfluid handling without mechanical valves.
  • the construction of the micro fluid diode according to the invention is much simpler than that of the micromechanical valves, so that in addition to the smaller space requirement, the production is more cost-effective.
  • they can be used to implement a new concept for coupling unsupported fluid jets into a flowing target fluid located in a closed system.
EP95101737A 1994-02-17 1995-02-09 Mikro-Fluiddiode Expired - Lifetime EP0672835B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE4405005 1994-02-17
DE4405005A DE4405005A1 (de) 1994-02-17 1994-02-17 Mikro-Fluiddiode

Publications (2)

Publication Number Publication Date
EP0672835A1 EP0672835A1 (de) 1995-09-20
EP0672835B1 true EP0672835B1 (de) 1999-05-12

Family

ID=6510442

Family Applications (1)

Application Number Title Priority Date Filing Date
EP95101737A Expired - Lifetime EP0672835B1 (de) 1994-02-17 1995-02-09 Mikro-Fluiddiode

Country Status (7)

Country Link
US (1) US5730187A (da)
EP (1) EP0672835B1 (da)
JP (1) JP3786421B2 (da)
AT (1) ATE180044T1 (da)
DE (2) DE4405005A1 (da)
DK (1) DK0672835T3 (da)
WO (1) WO1995022696A1 (da)

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US6601613B2 (en) 1998-10-13 2003-08-05 Biomicro Systems, Inc. Fluid circuit components based upon passive fluid dynamics
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JP4520166B2 (ja) * 2004-02-02 2010-08-04 独立行政法人農業・食品産業技術総合研究機構 樹脂製マイクロチャネル基板及びその製造方法
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Also Published As

Publication number Publication date
EP0672835A1 (de) 1995-09-20
DK0672835T3 (da) 1999-11-29
US5730187A (en) 1998-03-24
JP3786421B2 (ja) 2006-06-14
JPH09509466A (ja) 1997-09-22
DE4405005A1 (de) 1995-08-24
DE59505877D1 (de) 1999-06-17
ATE180044T1 (de) 1999-05-15
WO1995022696A1 (de) 1995-08-24

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