EP0671271A2 - Tintenstrahlaufzeichnungsgerät - Google Patents

Tintenstrahlaufzeichnungsgerät Download PDF

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Publication number
EP0671271A2
EP0671271A2 EP95103252A EP95103252A EP0671271A2 EP 0671271 A2 EP0671271 A2 EP 0671271A2 EP 95103252 A EP95103252 A EP 95103252A EP 95103252 A EP95103252 A EP 95103252A EP 0671271 A2 EP0671271 A2 EP 0671271A2
Authority
EP
European Patent Office
Prior art keywords
diaphragm
volume
actuator
vibration chamber
nozzle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP95103252A
Other languages
English (en)
French (fr)
Other versions
EP0671271A3 (de
EP0671271B1 (de
Inventor
Masahiro Fujii
Keiichi Mukaiyama
Hiroyuki Maruyama
Tadaaki Hagata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of EP0671271A2 publication Critical patent/EP0671271A2/de
Publication of EP0671271A3 publication Critical patent/EP0671271A3/de
Application granted granted Critical
Publication of EP0671271B1 publication Critical patent/EP0671271B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14314—Structure of ink jet print heads with electrostatically actuated membrane
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14379—Edge shooter
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/11—Embodiments of or processes related to ink-jet heads characterised by specific geometrical characteristics

Definitions

  • the present invention relates to an inkjet recording apparatus and, more particularly, to an electrostatically driven inkjet head of the recording apparatus.
  • Inkjet recording apparatus having an inkjet head for ejecting ink droplets towards a recording medium in response to electric drive pulses are well known and commonly used.
  • the inkjet head includes an actuator for converting each electric drive pulse into a pressure pulse whereby an ink droplet is ejected from a nozzle of the inkjet head.
  • Inkjet heads in which the force of electrostatic attraction is used for the actuator are disclosed in, for example, JP-A-289351/1990, EP-A-0 580 283 and in EP-A-0 634 272, EP-A-0 629 502 and EP-A-0 629 503 (the latter three documents forming prior art according to Art. 54(3) EPC).
  • An inkjet head in accordance with this art comprises one or more nozzles, a respective ink passage continuous to the or each nozzle, a diaphragm forming one plate of a capacitor and provided at one part of the or each ink passage, and a nozzle electrode located opposite to the diaphragm with an air gap in between.
  • the nozzle electrode forms the other plate of the capacitor.
  • the actuator contains a vibration chamber formed between the diaphragm and nozzle electrode.
  • the vibration chamber When the vibration chamber is exposed to the open air, dust and other airborne particulate is attracted to the actuator's vibration chamber when the diaphragm is driven.
  • this problem can be corrected by sealing the actuator.
  • air sealed inside the vibration chamber adds resistance to the electrostatic attraction of the diaphragm, and may inhibit sufficient electrostatic attraction for normal operation.
  • the electrostatic attraction of the vibration chamber decreases, insufficient pressure is generated to adequately eject ink, and print quality and reliability drop significantly.
  • the decrease of electrostatic attraction can be compensated for by raising the drive voltage applied to the actuator.
  • EP-A-0 580 283 discloses a drive voltage of 70 to 100 V. Such high drive voltage is undesirable, however.
  • the object of the present invention is to provide an inkjet head whereby sufficient electrostatic attraction can be obtained even with a sealed actuator and with a drive voltage no higher than about 45 V.
  • the vibration chamber in the actuator is an airtight structure, thereby eliminating the possibility of foreign matter such as airborne particulate being attracted to and penetrating the vibration chamber when the diaphragm vibrates.
  • the pressure increase inside the vibration chamber is sufficiently low not to prevent distortion of the diaphragm by electrostatic attraction, when the volume V of the sealed vibration chamber (hereinafter referred to as "actuator volume”) is two or more times greater than the volume ⁇ V displaced by that diaphragm distortion that is necessary to ensure reliable ink ejection (hereinafter referred to as "displacement volume").
  • actuator volume volume of the sealed vibration chamber
  • displacement volume the volume V of the sealed vibration chamber
  • sufficient diaphragm distortion can be obtained without requiring an undesirably high drive voltage.
  • the upper limit for the ratio V/ ⁇ V is determined such as to avoid an unnecessary increase of the inkjet head to obtain a high wafer yield (the number of heads made from one wafer) on the other hand.
  • Sparking and actuator deterioration due to sparking can be prevented by sealing an inert gas, nitrogen gas, or dry air in the actuator or vibration chamber.
  • the embodiment of the invention described below is an edge type inkjet head wherein ink droplets are ejected from nozzles provided at the edge of a substrate. It is to be noted that the invention may also be applied to a face type inkjet head wherein the ink is ejected from nozzles provided on the top surface of the substrate.
  • the inkjet head 10 of this embodiment is made up of three substrates 1, 2, 3 one stacked upon the other and structured as described in detail below.
  • a first substrate 1 is sandwiched between second and third substrates 2 and 3, and is made from a silicon wafer.
  • Multiple nozzles 4 are formed between the first and the third substrate by means of corresponding nozzle grooves 11 provided in the top surface of the first substrate 1 such as to extend substantially in parallel at equal intervals from one edge of the substrate.
  • the end of each nozzle groove opposite said one edge opens into a respective recess 12.
  • Each recess in turn is connected via a respective narrow groove 13 to a recess 14.
  • each ejection chamber 6 comprises a diaphragm 5 formed integrally with the substrate 1.
  • the grooves and recesses referred to above can be easily and precisely formed by photolithographic etching of the semiconductor substrate. Note that diaphragms 5 are formed by first doping substrate 1 with boron to provide for etch stopping followed by etching to form the diaphragms with a thin, uniform thickness.
  • Electrostatic actuators each comprising a diaphragm and an associated nozzle electrode are formed between the first and the second substrate.
  • a common electrode 17 of the actuators is provided on the first substrate 1.
  • the magnitude of the work function of the semiconductor forming the first substrate 1 and the metal used for the common electrode 17 are important factors determining the effect of electrode 17 on first substrate 1.
  • the semiconductor material used in this embodiment has a resistivity of 8 - 12 ⁇ cm, and the common electrode 17 has in fact a two-layer structure made from platinum on a titanium base layer or gold on a chrome base layer.
  • the base layer is provided mainly to improve the bonding strength between the substrate and the electrode.
  • the present invention shall not be so limited, however, and various other material combinations may be used according to the characteristics of the semiconductor and electrode materials.
  • a thin oxide film 24, approximately 1 ⁇ m thick, is formed on the entire surface of first substrate 1 except for the common electrode 17. This creates an insulation layer for preventing dielectric breakdown and shorting during inkjet head drive.
  • Borosilicate glass is used for the second substrate 2 bonded to the bottom surface of first substrate 1.
  • a recess 15 for accommodating a respective nozzle electrode 21 is formed in the top of second substrate 2 below each diaphragm 5.
  • vibration chambers 9 are formed at the positions of recesses 15 between each diaphragm 5 and the opposing nozzle electrode 21.
  • a long, thin support member 35 is located in the middle of each recess 15. The purpose of the support member 35 is to provide for an additional support in case of very thin diapragms. Support members 35 are not required if sufficient rigidity (resilience) for ink ejection is obtained by forming diaphragm 5 with sufficient thickness. The height of the support members 35 may correspond to or be less the depth of the recesses.
  • recesses 15 formed in the top surface of the second substrate 2 provide for gaps between the diaphragms and the respective electrodes 21.
  • the length G (see Fig. 3; hereinafter the "gap length") of each gap is equal to the difference between the depth of recess 15 and the thickness of the electrode 21.
  • this recess can alternatively be formed in the bottom surface of the first substrate 1.
  • the depth of recess 15 is 0.3 ⁇ m
  • the pitch and width of nozzle grooves 11 are 0.2 mm and 80 ⁇ m, respectively.
  • the wiring formed in the top surface of second substrate 2 comprises the nozzle electrodes 21 and lead members 22 connecting each nozzle electrode to a respective terminal member 23.
  • the lead members are located in grooves 22a connecting to the recesses 15.
  • the terminal members 23 are located in a corresponding recess formed at one edge of second substrate 2. All recesses and grooves accommodating this wiring are preferably formed with the same depth although this may not always be necessary.
  • the wiring (nozzle electrodes 21, lead members 22 and terminal members 23) is formed by sputtering gold onto the second substrate 2 to a thickness of 0.1 ⁇ m.
  • Nozzle electrodes 21 are formed at positions and with shapes respectively matching diaphragms 5. ITO or another conductive oxide film material may be used in place of gold in the formation of the electrodes 21, their lead members 22 and terminal members 23.
  • Borosilicate glass is also used for the third substrate 3.
  • Nozzles 4, ejection chambers 6, orifices 7, and ink cavity 8 are formed by bonding third substrate 3 to the top surface of first substrate 1.
  • Support member 36 in ink cavity 8 adds reinforcement to prevent collapsing recess 14 when first substrate 1 and third substrate 3 are bonded together.
  • First substrate 1 and second substrate 2 are anodically bonded at 270 ⁇ 400°C by applying a 500 ⁇ 800-V charge, and first substrate 1 and third substrate 3 are then bonded under the same conditions to assemble the inkjet head as shown in Fig. 3.
  • the gap length G formed between diaphragm 5 and nozzle electrode 21 on second substrate 2 is 0.2 ⁇ m in this embodiment.
  • drive circuit 102 is connected by connecting flexible printed circuit (FPC) 101 between common electrode 17 and terminal members 23 of nozzle electrodes 21 as shown in Figs. 3 and 4.
  • FPC flexible printed circuit
  • An anisotropic conductive film is used in this embodiment to bond leads 101 with electrodes 17 and 23.
  • vibration chambers 9 are then sealed airtight using an insulating sealing agent 30.
  • Vibration chambers 9 are sealed near terminal members 23 in this embodiment, thus enclosing vibration chamber 9 and the volume of the lead member grooves within the "volume of the actuator" (this is described in greater detail below).
  • Ink supply tube 33 and ink supply vessel 32 are fit externally to the back of the inkjet head.
  • Ink 103 is supplied from an ink tank (not shown in the figures) into first substrate 1 via ink supply tube 33, vessel 32 and the ink supply opening at the rear of ink cavity 8 to fill ink cavity 8 and ejection chambers 6.
  • the ink in ejection chambers 6 becomes ink droplets 104 ejected from nozzles 4 and printed to recording paper 105 when inkjet head 10 is driven as shown in Fig. 3.
  • the present invention is characterized by thus sealing vibration chambers 9 within the actuator, and setting the volume V of the actuator such that the ratio between the actuator volume V and the volume ⁇ V displaced by a distortion of diaphragm 5 is within the range 2 ⁇ V/ ⁇ V ⁇ 8 .
  • Fig. 6 is used to describe the operation of diaphragm 5.
  • Fig. 6 shows the case without support member.
  • Fig. 6 could be regarded as showing only one half of the arrangement (w/2 instead of w), i.e. between one lateral egde of the diapragm and the support member 35, the other half between the support member and the other lateral edge being symmetrical. While the following discussion is based on the assumption that no support members are employed it applies in substantially the same way to the case of using support members.
  • the lower limit for the ratio V/ ⁇ V ensures that the pressure increment ⁇ P in the vibration chamber is sufficiently low.
  • the reason for the upper limit of V/ ⁇ V is described below.
  • the values shown in Table 1 are the design values for inkjet heads of various printing resolutions.
  • head types (1) and (2) are edge ejection type inkjet heads using a (100) face silicon substrate for the first substrate 1.
  • the actuator volume includes the volume of vibration chamber 9 only and does not include any volume related to the wiring (lead members and terminal members) connected to the electrode.
  • the actuator is sealed near the electrode terminals (see Figs. 3 and 5), and the actuator volume includes the volume of the cavity formed by the lead member groove 22a (which functions as "dummy volume” to increase the actuator volume) in addition to the volume of vibration chamber 9, thereby reducing the pressure increment ⁇ P in the vibration chamber associated with the displacement volume ⁇ V.
  • Head types (3), (4), and (5) are face ejection type inkjet heads using a (110) face silicon substrate for the first substrate 1 with the actuator volume similarly maximized by using the dummy volume inside the limited head size.
  • Each of head types (1) ⁇ (5) functions sufficiently as an inkjet head, and is designed so as to maximize the yield from each wafer.
  • the V/ ⁇ V ratio is 2.31, and the increased pressure P i in the vibration chamber is 1.77 kgf/cm2 (17.3 x 104 Pa). If a dummy volume is provided in this type of head without changing the head size, the V/ ⁇ V ratio increases to 4.69 and the increased pressure P i drops approximately 30% to 1.27 kgf/cm2 (12.4 x 104 Pa) as shown in the type (2) head.
  • the displacement volume ⁇ V decreases, because the volume of each ink droplet ejected is smaller than in case of a low resolution head.
  • the more nozzles the head has the larger the dummy volume becomes, and the V/ ⁇ V ratio is therefore increased, because the area of the lead members 22 relative to the total head area increases.
  • the area occupied by diaphragms is approximately 40% of the total area of head chip in the case of head types (1) and (2), but is approximately 25% in head types (3), (4), and (5).
  • the ratio V/ ⁇ V is ⁇ 8 when the greatest possible dummy volume is used in these high resolution inkjet heads without sacrificing yield per wafer or inkjet head functionality.
  • V/ ⁇ V ratio greater than 8 without increasing the head size, which would reduce the yield per wafer and increase unit cost.
  • the reduction in pressure increment ⁇ P in the vibration chamber obtained with V/ ⁇ V ⁇ 8 is sufficient, and a further increase in the V/ ⁇ V ratio does not provide a significant further reduction of the pressure increment: for example, the increased pressure P i declines from 1.15 kgf/cm2 (11.3 x 104 Pa) to only about 1 kgf/cm2 (9.8 x 104 Pa). Therefore, the rational range for the V/ ⁇ V ratio considering inkjet heads of various resolutions is 2 ⁇ V/ ⁇ V ⁇ 8 .
  • the sealed gas of the invention shall not be so limited, and may alternatively be any (a) inert gas (e.g., He, Ne), (b) nitrogen gas, or (c) dry air that is chemically stable and will not chemically react when the inkjet head is driven (during electrical discharge), causing the gas properties to change and corroding or damaging diaphragm 5 or individual electrode 21.
  • the preferred order of selection for these sealed gases is (a), (b), and (c) considering these performance requirements, but is (c), (b), (a) considering cost. It therefore follows that (b), nitrogen gas, is the preferred selection overall with respect to both performance and cost considerations.
  • the respective actuator volumes are equalized.
  • the individual lead members 22 have different lenghts. Therefore, when the dummy volume provided by grooves 22a accommodating the lead members 22 is included within the total actuator volume, these grooves should preferably be dimensioned such that despite their different lengths each provides the same dummy volume.

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  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
EP19950103252 1994-03-09 1995-03-07 Tintenstrahlaufzeichnungsgerät Expired - Lifetime EP0671271B1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP38733/94 1994-03-09
JP3873394 1994-03-09
JP3873394 1994-03-09

Publications (3)

Publication Number Publication Date
EP0671271A2 true EP0671271A2 (de) 1995-09-13
EP0671271A3 EP0671271A3 (de) 1996-08-07
EP0671271B1 EP0671271B1 (de) 2000-07-05

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EP19950103252 Expired - Lifetime EP0671271B1 (de) 1994-03-09 1995-03-07 Tintenstrahlaufzeichnungsgerät

Country Status (3)

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EP (1) EP0671271B1 (de)
JP (1) JP3329125B2 (de)
DE (1) DE69517720T2 (de)

Cited By (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0827833A2 (de) * 1996-08-27 1998-03-11 Topaz Technologies, Inc. Tintenstrahlkopfvorrichtung
EP0999933A1 (de) * 1997-07-15 2000-05-17 Silverbrook Research Pty. Limited Magnetfeld-betätigte tintenstrahldüse
US6786574B2 (en) 1997-07-15 2004-09-07 Silverbrook Research Pty Ltd Micro-electromechanical fluid ejection device having a chamber that is volumetrically altered for fluid ejection
US6824252B2 (en) 1997-07-15 2004-11-30 Silverbrook Research Pty Ltd Micro-electromechanical fluid ejection device having a nozzle guard
US6877841B2 (en) 2001-09-20 2005-04-12 Ricoh Company, Ltd. Electrostatic ink jet head and a recording apparatus
US6986202B2 (en) 1997-07-15 2006-01-17 Silverbrook Research Pty Ltd. Method of fabricating a micro-electromechanical fluid ejection device
US7066575B2 (en) 1997-07-15 2006-06-27 Silverbrook Research Pty Ltd Micro-electromechanical fluid ejection device having a buckle-resistant actuator
US7125103B2 (en) 1997-07-15 2006-10-24 Silverbrook Research Pty Ltd Fluid ejection device with a through-chip micro-electromechanical actuator
US7219982B2 (en) 1997-07-15 2007-05-22 Silverbrook Research Pty Ltd Printer nozzle for ejecting ink
US7234795B2 (en) 1997-07-15 2007-06-26 Silverbrook Research Pty Ltd Inkjet nozzle with CMOS compatible actuator voltage
US7293855B2 (en) 1997-07-15 2007-11-13 Silverbrook Research Pty Ltd Inkjet nozzle with ink supply channel parallel to drop trajectory
US7328975B2 (en) 1997-07-15 2008-02-12 Silverbrook Research Pty Ltd Injet printhead with thermal bend arm exposed to ink flow
US7334874B2 (en) 1997-07-15 2008-02-26 Silverbrook Research Pty Ltd Inkjet nozzle chamber with electrostatically attracted plates
US7360871B2 (en) 1997-07-15 2008-04-22 Silverbrook Research Pty Ltd Inkjet chamber with ejection actuator between inlet and nozzle
US7393083B2 (en) 1997-07-15 2008-07-01 Silverbrook Research Pty Ltd Inkjet printer with low nozzle to chamber cross-section ratio
US7401884B2 (en) 1997-07-15 2008-07-22 Silverbrook Research Pty Ltd Inkjet printhead with integral nozzle plate
US7410250B2 (en) 1997-07-15 2008-08-12 Silverbrook Research Pty Ltd Inkjet nozzle with supply duct dimensioned for viscous damping
US7410243B2 (en) 1997-07-15 2008-08-12 Silverbrook Research Pty Ltd Inkjet nozzle with resiliently biased ejection actuator
US7472984B2 (en) 1997-07-15 2009-01-06 Silverbrook Research Pty Ltd Inkjet chamber with plurality of nozzles
US7475965B2 (en) 1997-07-15 2009-01-13 Silverbrook Research Pty Ltd Inkjet printer with low droplet to chamber volume ratio
US7497555B2 (en) 1998-07-10 2009-03-03 Silverbrook Research Pty Ltd Inkjet nozzle assembly with pre-shaped actuator
US7527357B2 (en) 1997-07-15 2009-05-05 Silverbrook Research Pty Ltd Inkjet nozzle array with individual feed channel for each nozzle
US7578582B2 (en) 1997-07-15 2009-08-25 Silverbrook Research Pty Ltd Inkjet nozzle chamber holding two fluids
US7591539B2 (en) 1997-07-15 2009-09-22 Silverbrook Research Pty Ltd Inkjet printhead with narrow printing zone
US7628468B2 (en) 1997-07-15 2009-12-08 Silverbrook Research Pty Ltd Nozzle with reciprocating plunger
US7661793B2 (en) 1997-07-15 2010-02-16 Silverbrook Research Pty Ltd Inkjet nozzle with individual ink feed channels etched from both sides of wafer
US7708372B2 (en) 1997-07-15 2010-05-04 Silverbrook Research Pty Ltd Inkjet nozzle with ink feed channels etched from back of wafer
US7753491B2 (en) 1997-07-15 2010-07-13 Silverbrook Research Pty Ltd Printhead nozzle arrangement incorporating a corrugated electrode
US7753469B2 (en) 1997-07-15 2010-07-13 Silverbrook Research Pty Ltd Inkjet nozzle chamber with single inlet and plurality of nozzles
US7775634B2 (en) 1997-07-15 2010-08-17 Silverbrook Research Pty Ltd Inkjet chamber with aligned nozzle and inlet
US8117751B2 (en) 1997-07-15 2012-02-21 Silverbrook Research Pty Ltd Method of forming printhead by removing sacrificial material through nozzle apertures
US8366243B2 (en) 1997-07-15 2013-02-05 Zamtec Ltd Printhead integrated circuit with actuators proximate exterior surface

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JPH10305578A (ja) * 1997-03-03 1998-11-17 Seiko Epson Corp インクジェット式記録ヘッド
JPH11291493A (ja) * 1998-04-06 1999-10-26 Seiko Epson Corp インクジェット式記録ヘッド
US6616270B1 (en) 1998-08-21 2003-09-09 Seiko Epson Corporation Ink jet recording head and ink jet recording apparatus comprising the same
JP4052781B2 (ja) 2000-03-30 2008-02-27 株式会社リコー 静電インクジェットヘッド及びインクジェット記録装置
DE112006003352B4 (de) * 2005-12-06 2017-05-11 Thk Co., Ltd. XY-Tisch-Stellglied
US7880344B2 (en) * 2007-05-30 2011-02-01 Thk Co., Ltd. X-Y table actuator

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Cited By (84)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0827833A2 (de) * 1996-08-27 1998-03-11 Topaz Technologies, Inc. Tintenstrahlkopfvorrichtung
EP0827833A3 (de) * 1996-08-27 1999-01-20 Topaz Technologies, Inc. Tintenstrahlkopfvorrichtung
US7540592B2 (en) 1997-07-15 2009-06-02 Silverbrook Research Pty Ltd Micro-electromechanical nozzle assembly with an arcuate actuator
US7950774B2 (en) 1997-07-15 2011-05-31 Silverbrook Research Pty Ltd Inkjet printhead with narrow printing zone
US6786574B2 (en) 1997-07-15 2004-09-07 Silverbrook Research Pty Ltd Micro-electromechanical fluid ejection device having a chamber that is volumetrically altered for fluid ejection
US6824252B2 (en) 1997-07-15 2004-11-30 Silverbrook Research Pty Ltd Micro-electromechanical fluid ejection device having a nozzle guard
US7527357B2 (en) 1997-07-15 2009-05-05 Silverbrook Research Pty Ltd Inkjet nozzle array with individual feed channel for each nozzle
US6986202B2 (en) 1997-07-15 2006-01-17 Silverbrook Research Pty Ltd. Method of fabricating a micro-electromechanical fluid ejection device
US8366243B2 (en) 1997-07-15 2013-02-05 Zamtec Ltd Printhead integrated circuit with actuators proximate exterior surface
US7066575B2 (en) 1997-07-15 2006-06-27 Silverbrook Research Pty Ltd Micro-electromechanical fluid ejection device having a buckle-resistant actuator
US7086720B2 (en) 1997-07-15 2006-08-08 Silverbrook Research Pty Ltd Micro-electromechanical fluid ejection device that incorporates a shape memory alloy based actuator
US7125103B2 (en) 1997-07-15 2006-10-24 Silverbrook Research Pty Ltd Fluid ejection device with a through-chip micro-electromechanical actuator
US7125102B2 (en) 1997-07-15 2006-10-24 Silverbrook Research Pty Ltd Micro-electromechanical fluid ejection device with guided actuator movement
US7147792B2 (en) 1997-07-15 2006-12-12 Silverbrook Research Pty Ltd Method of fabricating inkjet nozzle chambers
US7175774B2 (en) 1997-07-15 2007-02-13 Silverbrook Research Pty Ltd Method of fabricating inkjet nozzles
US7178903B2 (en) 1997-07-15 2007-02-20 Silverbrook Research Pty Ltd Ink jet nozzle to eject ink
US7192119B2 (en) 1997-07-15 2007-03-20 Silverbrook Research Pty Ltd Printhead nozzle arrangement with a micro-electromechanical shape memory alloy based actuator
US7219982B2 (en) 1997-07-15 2007-05-22 Silverbrook Research Pty Ltd Printer nozzle for ejecting ink
US7234795B2 (en) 1997-07-15 2007-06-26 Silverbrook Research Pty Ltd Inkjet nozzle with CMOS compatible actuator voltage
US7255424B2 (en) 1997-07-15 2007-08-14 Silverbrook Research Pty Ltd Ink nozzle
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Also Published As

Publication number Publication date
EP0671271A3 (de) 1996-08-07
JPH07299908A (ja) 1995-11-14
JP3329125B2 (ja) 2002-09-30
EP0671271B1 (de) 2000-07-05
DE69517720T2 (de) 2001-02-01
DE69517720D1 (de) 2000-08-10

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