EP0655815B1 - Einrichtung für die elektrische Verbindung von integrierten Schaltungen - Google Patents

Einrichtung für die elektrische Verbindung von integrierten Schaltungen Download PDF

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Publication number
EP0655815B1
EP0655815B1 EP93830484A EP93830484A EP0655815B1 EP 0655815 B1 EP0655815 B1 EP 0655815B1 EP 93830484 A EP93830484 A EP 93830484A EP 93830484 A EP93830484 A EP 93830484A EP 0655815 B1 EP0655815 B1 EP 0655815B1
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EP
European Patent Office
Prior art keywords
wire
resonator
bonding head
bonding
instrument
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Expired - Lifetime
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EP93830484A
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English (en)
French (fr)
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EP0655815A1 (de
Inventor
Luigi Romano'
Pierangelo Magni
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STMicroelectronics SRL
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SGS Thomson Microelectronics SRL
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Priority to DE69311347T priority Critical patent/DE69311347T2/de
Priority to EP93830484A priority patent/EP0655815B1/de
Publication of EP0655815A1 publication Critical patent/EP0655815A1/de
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L24/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/10—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating making use of vibrations, e.g. ultrasonic welding
    • H—ELECTRICITY
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    • H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
    • H01L24/78—Apparatus for connecting with wire connectors
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    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/02—Bonding areas; Manufacturing methods related thereto
    • H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
    • H01L2224/0554—External layer
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    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
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    • H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/45001—Core members of the connector
    • H01L2224/45099—Material
    • H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
    • H01L2224/45144—Gold (Au) as principal constituent
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    • H01L2224/481—Disposition
    • H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/48247—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
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    • H01L2224/491—Disposition
    • H01L2224/4912—Layout
    • H01L2224/49171—Fan-out arrangements
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    • H01L2224/7825—Means for applying energy, e.g. heating means
    • H01L2224/783—Means for applying energy, e.g. heating means by means of pressure
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    • H01L2224/786—Means for supplying the connector to be connected in the bonding apparatus
    • H01L2224/78621—Holding means, e.g. wire clampers
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    • H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
    • H01L2224/851—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector the connector being supplied to the parts to be connected in the bonding apparatus
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    • H01L2224/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
    • H01L2224/8512—Aligning
    • H01L2224/85148—Aligning involving movement of a part of the bonding apparatus
    • H01L2224/85169—Aligning involving movement of a part of the bonding apparatus being the upper part of the bonding apparatus, i.e. bonding head, e.g. capillary or wedge
    • H01L2224/8518—Translational movements
    • H01L2224/85181—Translational movements connecting first on the semiconductor or solid-state body, i.e. on-chip, regular stitch
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    • H01L2224/852—Applying energy for connecting
    • H01L2224/85201—Compression bonding
    • H01L2224/85205—Ultrasonic bonding
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    • H01L24/42—Wire connectors; Manufacturing methods related thereto
    • H01L24/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
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    • H01L24/42—Wire connectors; Manufacturing methods related thereto
    • H01L24/47—Structure, shape, material or disposition of the wire connectors after the connecting process
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    • H01L24/42—Wire connectors; Manufacturing methods related thereto
    • H01L24/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L24/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
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    • H01L2924/12—Passive devices, e.g. 2 terminal devices
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    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
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    • H01L2924/14—Integrated circuits

Definitions

  • the present invention relates to an instrument for the electrical connection of predetermined areas of a plate of semiconductor material, commonly known as a "chip", to metal terminals by fine wires.
  • operations to connect the chip to the metal terminals used for external connections are generally carried out by microbonding fine gold wires, using either heat-compression or ultrasound.
  • Such operations are normally carried out by instruments known as wire bonders, which have a bonding head which includes a ceramic capillary tube through which runs a gold wire, means for supporting and feeding this wire and an ultrasound generator or, alternatively, microresistances which act on the gold wire.
  • the type of instrument most commonly used and to which, in any case, this invention relates, is that using ultrasound.
  • FIG. 1 A few details of one commonly used instrument are illustrated in Figure 1.
  • a chip 5 is fixed, along with other similar chips to a metal strip 8 worked in such a way as to have identical structures each having one portion 8' which acts as support for the chip and others 8" which will be the terminals of the device.
  • This strip rests on a heated base 10 and is advanced by means which are not shown in such a way that each chip may be bonded in turn.
  • the bonding head of the instrument has an ultrasound transducer 1 which includes an ultrasound generator 9 and a metal portion 2 for transmitting the ultrasonic vibrations to a ceramic capillary tube 3 which is securely fixed to one end of the portion 2 and extends perpendicular thereto.
  • a device in itself known and therefore not shown, feeds and supports a fine gold wire 6.
  • the gold wire 6 runs through the capillary tube 3.
  • the ultrasound transducer 1 transmits to the ceramic capillary tube 3 containing the gold wire a reciprocating movement at an ultrasonic frequency in a fixed direction which coincides with the axis Y of the transducer itself. This vibration, together with the pressure exerted by the ceramic tube and the fairly high temperature (180-260 degrees centigrade) to which the chip is heated, enables the wire to be bonded.
  • An instrument of this type can carry out two types of bonding on semiconductor electronic devices: a first type of bonding (known as ball-bonding) occurs when the gold wire is bonded onto an area or pad of the chip and a second type (wedge-bonding) occurs when the gold wire is bonded to the metal terminal of the device.
  • a first type of bonding (known as ball-bonding) occurs when the gold wire is bonded onto an area or pad of the chip and a second type (wedge-bonding) occurs when the gold wire is bonded to the metal terminal of the device.
  • the two types of bonding have very different mechanical characteristics and their reliability therefore also differs.
  • the first type of bonding is symmetrical in terms of both shape and of the position of the wire to be bonded (always vertical within the ceramic tube), while the second type is markedly asymmetric as the wire may be at any angle whatever to the axis Y of the ultrasound transducer and therefore to the direction of the ultrasonic vibrations which effect the bonding. If the portion of wire to be bonded is not parallel to the direction of the ultrasonic vibrations, the bonds may not be perfect; in practice, it may be said that bonding efficiency depends on the above angle and is at its maximum at angles of 0 and 180 degrees and at its minimum at angles of 90 and 270 degrees.
  • the prior art offers two solutions to this problem: a first which provides for an increases in the power of the signal applied to the transducer by a magnitude which is proportional to the angle between the wire to be bonded and the axis of the ultrasound transducer and a second which provides for the bonding head itself to vibrate along a direction perpendicular to the direction of the ultrasonic vibration.
  • the vibration of the bonding head has a lower frequency and greater amplitude than that of the ultrasound transducer, owing to the considerable mass of the head.
  • the inertia of the head leads to a considerable delay between the activation command and the actual vibration of the head.
  • the problem at the root of the present invention is that of providing an instrument of the type described above which has structural and operating characteristics able to overcome the disadvantages reported with reference to the prior art.
  • the function of the resonator is to make the end of the ultrasound transducer, to which the ceramic capillary tube is fixed, resonate, thereby causing vibrations perpendicular to the vibrations produced by the transducer itself.
  • a bonding head is generally indicated 7 and has an ultrasound transducer 1 to one end of which a capillary tube 3 is securely fixed and forms a guide for the fine gold wire 6, and a metal strip is indicated 8 onto which chips are fixed on which the instrument is to carry out the bonding.
  • the direction of the oscillating movement imposed on the capillary tube by the transducer is indicated Y, this direction coinciding with the axis of the transducer itself.
  • the direction parallel to the work surface and perpendicular to the direction Y is indicated X.
  • a resonator 4 of either acoustic or magnetic type, is securely fixed to the base of the instrument. This is associated with the end portion of the bonding head, that is with the transducer 1, and is arranged, shaped and powered so as to cause the end of the ultrasound transducer 1, to which the ceramic capillary tube 3 is fixed, to resonate and therefore to vibrate along the direction X perpendicular to the axis of the transducer itself.
  • the first type of bonding (ball-bonding), of the gold wire onto a pad of the chip, is effected in exactly the same way as it is by the prior art instrument shown in Figure 1 and described earlier.
  • the second type of bonding known as wedge-bonding because of the shape of the bond, is carried out as follows:
  • the action of the resonator is varied according to the angle (indicated A in Figure 3) between the piece of wire to be bonded and the axis of the ultrasound transducer so as proportionally to compensate for the decrease in bonding efficiency.
  • Modulator means enable the strength of the vibrations induced by the resonator 4 to be modulated according to the angle A.
  • This angle is measured by the system which controls the movement of the bonding head on the basis of movements carried out along the two axes X and Y between two successive bondings.
  • the ability to vary the effect of the resonator provides a substantially constant bonding efficiency which does not depend on the angle of the wire to be bonded.
  • the section of the transducer In order to ensure that the vibrations induced in the end of the transducer by the resonator are contained in a plane parallel to the work surface, it is useful for the section of the transducer to be elongate along the vertical axis Z so as to facilitate bending in the horizontal plane and to limit bending in the vertical plane.
  • An example of such a cross-section is shown in Figure 4.
  • the resonator used here to make the end of the ultrasound transducer vibrate, is in itself known and may be either of a magnetic or an acoustic type. As to its position, the resonator may be securely fixed equally successfully either to the base 10, as shown in Figures 2 and 3, or to the bonding head, as shown in Figure 5 where it is indicated 4'.
  • the instrument described above has the advantage over the prior art of enabling bonding to be effected with a high degree of reliability, independently of the alignment of the gold wire on the surface where the bonding is being carried out, thanks to a second vibration, along a direction perpendicular to the first, of a frequency comparable to that of the first and of a sufficiently limited amplitude.

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  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Wire Bonding (AREA)

Claims (5)

  1. Eine Einrichtung für die elektrische Verbindung vorbestimmter Bereiche einer Platte aus einem Halbleitermaterial mit Metall-Verbinderanschlüssen durch Drahtabschnitte mit folgenden Merkmalen:
    - einer Vorrichtung zum Zuführen des Drahts (6),
    - einem Bondkopf (7) mit einem Endabschnitt (2, 3), der eine Einrichtung (3) zum Führen und Aufbringen des Drahts aufweist,
    - einem Ultraschallgenerator (9), der mit dem Endabschnitt (2, 3) des Bondkopfs verbunden ist, um zu bewirken, daß derselbe entlang einer vorbestimmten Richtung (Y) schwingt, und
    - einem Resonator (4), der dem Endabschnitt (2, 3) des Bondkopfs zugeordnet ist, um zu bewirken, daß derselbe entlang einer Richtung (X) schwingt, die im wesentlichen senkrecht zu der Richtung (Y) der Schwingung, die durch den Generator induziert ist, ist, wodurch der Resonator von einem akustischen Typ ist.
  2. Eine Einrichtung für die elektrische Verbindung vorbestimmter Bereiche einer Platte aus einem Halbleitermaterial mit Metall-Verbinderanschlüssen durch Drahtabschnitte mit folgenden Merkmalen:
    - einer Vorrichtung zum Zuführen des Drahts (6),
    - einem Bondkopf (7) mit einem Endabschnitt (2, 3), der eine Einrichtung (3) zum Führen und Aufbringen des Drahts aufweist,
    - einem Ultraschallgenerator (9), der mit dem Endabschnitt (2, 3) des Bondkopfs verbunden ist, um zu bewirken, daß derselbe entlang einer vorbestimmten Richtung (Y) schwingt, und
    - einem Resonator (4), der dem Endabschnitt (2, 3) des Bondkopfs zugeordnet ist, um zu bewirken, daß derselbe entlang einer Richtung (X) schwingt, die im wesentlichen senkrecht zu der Richtung (Y) der Schwingung, die durch den Generator induziert wird, ist, wodurch der Resonator von einem magnetischen Typ ist.
  3. Eine Einrichtung gemäß Anspruch 1 oder 2, dadurch gekennzeichnet, daß dieselbe eine Basis aufweist, die den Bondkopf (7) trägt, und daß der Resonator (4) fest an der Basis befestigt ist.
  4. Eine Einrichtung gemäß Anspruch 1 oder 2, dadurch gekennzeichnet, daß der Resonator fest an dem Bondkopf befestigt ist.
  5. Eine Einrichtung gemäß Anspruch 3 oder 4, dadurch gekennzeichnet, daß dieselbe eine Modulatoreinrichtung zum Modulieren der Stärke der Schwingungen, die durch den Resonator (4) induziert werden, entsprechend dem Winkel zwischen dem Drahtabschnitt, der zu irgendeinem Zeitpunkt durch eines seiner Enden an einen der vorbestimmten Bereiche der Platte gebondet wird, und der Richtung, entlang der der Endabschnitt (2, 3) des Bondkopfs (7) schwingt, aufweist.
EP93830484A 1993-11-30 1993-11-30 Einrichtung für die elektrische Verbindung von integrierten Schaltungen Expired - Lifetime EP0655815B1 (de)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE69311347T DE69311347T2 (de) 1993-11-30 1993-11-30 Einrichtung für die elektrische Verbindung von integrierten Schaltungen
EP93830484A EP0655815B1 (de) 1993-11-30 1993-11-30 Einrichtung für die elektrische Verbindung von integrierten Schaltungen

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EP93830484A EP0655815B1 (de) 1993-11-30 1993-11-30 Einrichtung für die elektrische Verbindung von integrierten Schaltungen

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EP0655815A1 EP0655815A1 (de) 1995-05-31
EP0655815B1 true EP0655815B1 (de) 1997-06-04

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JP3568496B2 (ja) * 2001-07-06 2004-09-22 株式会社アルテクス 超音波ワイヤボンディング用共振器
CN104511689A (zh) * 2014-12-22 2015-04-15 江苏洪昌科技股份有限公司 一种超声波焊接装置
CN107160017A (zh) * 2017-07-12 2017-09-15 奇瑞商用车（安徽）有限公司 一种焊机搭铁机构及其使用方法

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JPS6362242A (ja) * 1986-09-02 1988-03-18 Toshiba Corp ワイヤボンディング装置

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