EP0641657B1 - Plaque à buses pour une tête d'impression à jet fluide et son procédé de fabrication - Google Patents

Plaque à buses pour une tête d'impression à jet fluide et son procédé de fabrication Download PDF

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Publication number
EP0641657B1
EP0641657B1 EP94111846A EP94111846A EP0641657B1 EP 0641657 B1 EP0641657 B1 EP 0641657B1 EP 94111846 A EP94111846 A EP 94111846A EP 94111846 A EP94111846 A EP 94111846A EP 0641657 B1 EP0641657 B1 EP 0641657B1
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EP
European Patent Office
Prior art keywords
nozzle plate
piece
plastic
producing
functional regions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP94111846A
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German (de)
English (en)
Other versions
EP0641657A1 (fr
Inventor
Nezih Ünal
Dr. Ralf-Peter Peters
Dr. Frank Bartels
Dr. Holger Reinecke
Friedolin Franz Nöker
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Boehringer Ingelheim Microparts GmbH
Original Assignee
Microparts Gesellschaft fuer Mikrostrukturtechnik mbH
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Publication of EP0641657A1 publication Critical patent/EP0641657A1/fr
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Publication of EP0641657B1 publication Critical patent/EP0641657B1/fr
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1631Manufacturing processes photolithography
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/14016Structure of bubble jet print heads
    • B41J2/14032Structure of the pressure chamber
    • B41J2/1404Geometrical characteristics
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/1433Structure of nozzle plates
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1601Production of bubble jet print heads
    • B41J2/1603Production of bubble jet print heads of the front shooter type
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/162Manufacturing of the nozzle plates
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1623Manufacturing processes bonding and adhesion
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1625Manufacturing processes electroforming
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1626Manufacturing processes etching
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1632Manufacturing processes machining
    • B41J2/1634Manufacturing processes machining laser machining
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1637Manufacturing processes molding
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2002/14387Front shooter
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2002/14403Structure thereof only for on-demand ink jet heads including a filter
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S29/00Metal working
    • Y10S29/005Method or apparatus with casting
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49401Fluid pattern dispersing device making, e.g., ink jet
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/4998Combined manufacture including applying or shaping of fluent material
    • Y10T29/49982Coating
    • Y10T29/49984Coating and casting
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/4998Combined manufacture including applying or shaping of fluent material
    • Y10T29/49988Metal casting

Definitions

  • the invention relates to a nozzle plate for printheads which are used in inkjet and Color beam printers are used, as well as a process for their production.
  • the invention aims such nozzle plates and the equipped with it Produce printheads more economically and their function in terms Improve printing speed and resolution.
  • Nozzle plates for ink and color jet print heads are known (Hewlett-Packard Journal, August 1988, pages 28 to 31) (EP-495 663; EP-500 068); such nozzle plates contain 12 up to about 100 nozzles with a hole diameter down to 20 ⁇ m.
  • a Device for ejecting drops with a volume of 1 to 1,000 Picoliters are connected to each nozzle.
  • the print head often arises by joining the ink tank with generally three plates, where one plate has a thin film structure, the next plate a lithographic one generated plastic structure with feed channel and ink chamber is (channel plate), and the third plate contains the nozzles (nozzle plate). Both the manufacture of the nozzle plate and the channel plate as well Assembling the plates to form the printhead requires considerable effort and high precision.
  • the nozzle plate is made, for example, by laser processing of plastic parts manufactured. Other methods are based on a conductive method Base plate made with a non-conductive plastic layer at certain points is provided. The non-conductive points are circular; their Distance corresponds to the nominal distance of the nozzles in the nozzle plate. On the The base plate is deposited electrolytically. This metal layer is thicker than the non-conductive layer, and the electrodeposited Metal inevitably grows over the edge of the non-conductive areas on the non-conductive layer. This way, smaller nozzle diameters realized as the dimensions of the lithographically produced non-conductive Places the plastic layer corresponds. To the nozzle cross section and its variation from nozzle to nozzle within the prescribed tolerances keep, complex manufacturing and measuring methods are to be used. In which last described manufacturing process, the hole spacing is inevitable greater than the thickness of the plate to be manufactured. Because the plate for reasons The stability must have a minimum thickness, the smallest possible hole spacing and thus also limits the print density.
  • EP - 0 109 755 has a nozzle plate with it attached Partitions between the fluid chambers indicated that by galvanic deposition of metal on a structured Plate is made.
  • the structured plate is made of metal, on the complementary to the shape of the fluid chambers molded body made of non-conductive material attached are.
  • the structured two-piece plate is made for several Impression processes used.
  • the bodies made of non-conductive material are structured again before each electroforming Plate applied, which is a constantly repeating Adjustment effort required.
  • the nozzles are replaced by partial Overgrow the top of the non-conductive body with Metal generated and are thus determined by the molding process. This means that only nozzles with an aspect ratio can be smaller generate as 1.
  • One complementary to the shape of the nozzles Body is on the plate used for electroforming unavailable.
  • EP - 0 564 102 describes a plastic nozzle plate and their manufacturing processes.
  • the nozzle plate has at least two structural levels; the one level contains the Nozzles, the level above contains the fluid chambers and the connecting channels between the fluid chambers and the ink supply channel and possibly also the ink supply channel.
  • Both structure levels are structured one after the other by laser ablation or other etching or shaping processes, which according to a pattern given by a mask the partial removal of plastic or its Effect formation.
  • the masks are used for every ablation step constantly re-adjusted in every structural level.
  • Each Nozzle plate is on a long belt in at least two Process steps manufactured separately.
  • the channel structures and the nozzle carrier are made by molding manufactured.
  • the nozzles are each using a laser beam drilled individually.
  • Channel structures and nozzles are created in two steps completely different processes. There is also post-processing required. This process is also very complex.
  • the nozzle plate contains nozzles, fluid chambers, functional areas the connecting channels between the fluid chambers and the storage container for the fluid and possibly adjustment elements, all Functional areas as a one-piece multifunctional microstructure body by molding a one-piece mold insert can be produced in a single molding step.
  • Filters and filters can be added to the functional areas of the nozzle plate Fluidic structures are part of increasing the print quality.
  • a one-piece micro-structured metal insert used all functional areas contains the nozzle plate in a complementary structure, and the z. B. by Lithography, preferably deep lithography with X-rays, and electroforming will be produced.
  • Lithography preferably deep lithography with X-rays
  • electroforming By using the lithographic process also non-round or non-square nozzle outlet openings realized become.
  • a second layer of an X-ray resist is then generally applied applied in a suitable thickness using a second mask X-rays are irradiated, this second mask having a different absorber structure wears as the first mask.
  • a second resist layer is made in the microstructure on the base plate Plastic (resist) a metal electrodeposited, all Cavities of the microstructure can be completely filled with metal. Subsequently more metal is deposited, creating the whole microstructure is covered.
  • microstructure made of metal is different from that on the base plate Microstructure made of plastic separated, the microstructured mold insert is obtained from metal, the all functional areas of the nozzle plate contains in a complementary structure.
  • the micro-structured nozzle plate is made of plastic by means of the mold insert with all functional areas as a one-piece microstructure body e.g. B. made by injection molding.
  • a one-piece nozzle plate can be created, the functional elements contains on both sides.
  • the nozzles are on a side running parallel to its axis open. This side of the nozzles is closed, once the nozzle plate has a thin film structure supporting plate is assembled.
  • Figure 4 is one using this method manufacturable nozzle plate shown by structuring Nozzle channels on two sides of the plate doubled the print density and / or the use of two different colors is permitted.
  • the plastic nozzle plate can be made by injection molding, reaction molding or Embossing can be produced using a metal mold insert. This procedure enable inexpensive mass production of nozzle plates.
  • the nozzle plate made of metal can be manufactured inexpensively a negative mold made of plastic, as described above. To the negative form in a galvanoform process - analogous to the process, described in the manufacture of the mold insert - in a metal structure transferred with the desired nozzle holes and functional elements.
  • plastics such as polysulfone, polyether sulfone, polymethyl methacrylate, Polycarbonate, polyethylene ether ketone and liquid crystal polymers suitable.
  • nozzle plate made of metal for. B. nickel or nickel-cobalt alloys or copper-tin-zinc alloys; such Panels are used either directly or with a coating.
  • Example 1 Method for producing a mold insert for a nozzle plate with an axial fluid jet
  • PMMA polymethyl methacrylate
  • This layer will irradiated with synchrotron radiation through a first X-ray mask.
  • the first mask is in a shape that matches the structure of the nozzle plate structured.
  • the irradiated areas of the first resist layer soluble. Those irradiated through the first mask Areas are removed from GG developers with a solution.
  • the areas detached from the first resist layer filled with nickel, and the whole plate is covered with a 50 ⁇ m thick PMMA resist layer.
  • This layer is covered by a irradiated with synchrotron radiation through the second X-ray mask.
  • the second Mask is in one of the structure of the channel plate and the structure of the first Structured mask matching shape.
  • the irradiated areas of the second resist layer to a depth of approximately 65 ⁇ m soluble through targeted dose deposition. That through the second mask Irradiated areas of the second resist layer are covered with a solution GG developer detached.
  • Nickel is electrodeposited in the extracted areas, and the entire plate is covered with an approximately 8 mm thick layer of nickel, whereby the nickel structure of the first level serves as an electrical contact.
  • the base plate made of copper is milled off, and the remaining parts both resist layers are dissolved with polyethylene glycol. So that gets the mold insert, its structure to the structure of the nozzle and channel plate is complementary.
  • Example 2 Nozzle plate for a printhead with an axially emerging fluid jet
  • the nozzle plate produced by means of a mold insert according to Example 1 contains 108 nozzles with a diameter of 50 ⁇ m and one in 2 rows Nozzle length of 100 ⁇ m
  • the fluid chamber is 50 ⁇ m deep and below the 70 ⁇ m wide nozzles.
  • the fluid pan is also 50 ⁇ m deep.
  • the closest The location of the fluid channels is about 30 ⁇ m wide.
  • This one-piece nozzle plate comes with a silicon plate that is a heating element for each nozzle, its electrical connections and the fluid inlet contains, glued. Polyurethane glue serves as the adhesive.
  • Example 3 Nozzle plate for a printhead with a fluid jet emerging in the plate plane
  • Nozzle plate contains 216 nozzles on both sides.
  • the nozzles on each side has a distance of 84 ⁇ m. Both rows of nozzles are against each other offset by 42 ⁇ m.
  • the dimensions of the nozzle channel are on the narrowest point 40 ⁇ m in width and 40 ⁇ m in depth.
  • the diameter the fluid chamber in front of the nozzle is 60 ⁇ m, the wall thickness between the fluid chambers 24 ⁇ m
  • the narrowest part of the fluid channel is 20 ⁇ m wide.
  • This one-piece nozzle plate is covered on both sides with a silicon plate, which is a heating element for each nozzle and its electrical connections contains, glued.
  • a polyurethane adhesive is used as the adhesive.

Claims (9)

  1. Procédé de fabrication d'une plaque à buses (12, 23) en matière plastique pour une tête d'impression à jet de liquide comportant des buses (13) ou des canaux à liquide (24) comme préformes de buses, chambres à liquide (16, 25) et canaux de liaison (22, 26) entre les chambres à liquide et un réservoir (15, 27) pour le liquide,
    caractérisé en ce qu'
    on réalise un insert de moulage en une seule pièce en métal pour toutes les zones fonctionnelles de la plaque à buses (12, 23) suivant une structure complémentaire,
    on moule la plaque à buses (12, 23) en une seule pièce à microstructure, avec de la matière plastique, par moulage de matière plastique à l'aide de l'insert de moulage métallique avec toutes les zones fonctionnelles sous la forme d'un corps microstructuré multifonctionnel en une seule pièce au cours d'une seule opération de moulage.
  2. Procédé selon la revendication 1 pour fabriquer une plaque à buses (12, 23) en matière plastique pour une tête d'impression à jet de liquide qui comporte en outre des éléments d'ajustage intégrés, des filtres et des structures fluidiques à l'intérieur des zones fonctionnelles,
    caractérisé en ce qu'
    on réalise un insert de moulage en une seule pièce en métal qui comporte, en plus des éléments d'ajustage intégrés, des filtres et des structures fluidiques sous forme de structures complémentaires,
    on moule la plaque à buses (12, 23) en une seule pièce microstructurée en matière plastique par moulage de matière plastique à l'aide de l'insert de moulage métallique avec toutes les zones fonctionnelles et, en plus des éléments d'ajustage intégrés, des filtres et des structures fluidiques comme corps à microstructure multifonctionnelle en une seule pièce au cours d'une seule opération de moulage.
  3. Procédé selon les revendications 1 et 2 pour fabriquer une plaque à buses (12) en matière plastique à plusieurs zones fonctionnelles sur une face, des buses (13) dont l'axe est perpendiculaire à la plaque à buses ou des canaux à liquide (24) dont les axes sont parallèles à la plaque à buses,
    caractérisé en ce qu'
    on réalise un insert de moulage en une seule pièce en métal qui comporte toutes les zones fonctionnelles de la plaque à buses sur une face, suivant une structure complémentaire,
    on moule, à partir de la plaque à buses en une seule pièce à une face microstructurée, avec de la matière plastique selon la technique de moulage de matière plastique à l'aide de l'insert de moulage métallique avec toutes les zones fonctionnelles comme corps microstructuré multifonctionnel en une seule pièce au cours d'une seule étape de moulage.
  4. Procédé selon les revendications 1 et 2 pour fabriquer une plaque à buses (23) en matière plastique avec des canaux à liquide (24) dont les axes sont parallèles à la plaque à buses, cette plaque ayant des deux côtés des zones fonctionnelles,
    caractérisé en ce qu'
    on réalise deux inserts de moule en une seule pièce en métal, chacun d'eux ayant toutes les zones fonctionnelles associées à chaque côté de la plaque à buses suivant une structure complémentaire,
    on copie par moulage la plaque à buses en une seule pièce avec les deux faces microstructurées, avec de la matière plastique par moulage de la matière plastique tout en utilisant simultanément les deux inserts de moulage, métalliques en une seule pièce, qui sont prévus à une certaine distance l'un de l'autre, les côtés structurés des inserts de moulage étant en regard avec toutes les zones fonctionnelles comme corps microstructuré multifonctionnel en une seule pièce au cours d'une seule opération de moulage.
  5. Procédé selon les revendications 1 à 4 pour fabriquer une plaque à buses (12, 23) en matière plastique,
    caractérisé en ce qu'
    on utilise comme matière plastique un polysulfone, un polyéthersulfone, du polyméthylacrylate, un polycarbonate, un polyéthyléthercétone ou un polymère à cristaux liquides.
  6. Procédé de fabrication d'une plaque à buses (12, 23) en métal pour une tête d'impression à jet de liquide comportant des buses (13), des chambres à liquide (16, 25) ainsi que des canaux de liaison (22, 26) reliant les chambres à liquide et un réservoir d'alimentation (15, 27) pour le liquide,
    caractérisé en ce qu'
    on réalise un insert de moule en une seule pièce en matière plastique qui comporte toutes les zones fonctionnelles de la plaque à buses (12, 23) sur une structure complémentaire,
    par galvanoplastie de la plaque à buses (12, 23) en une seule pièce à microstructure en métal avec toutes les zones fonctionnelles, avec l'insert de moulage, avec de la matière plastique comme corps microstructuré multifonctionnel en une seule pièce au cours d'une seule opération de moulage.
  7. Procédé selon la revendication 6 pour la fabrication d'une plaque à buses (12, 23) en métal à plusieurs zones fonctionnelles pour une tête d'impression à jet de fluide qui comporte en outre des éléments d'ajustage intégrés, des structures de filtres et des structures fluidiques, à l'intérieur des zones fonctionnelles,
    caractérisé en ce qu'
    on réalise un insert de moule en une seule pièce en matière plastique qui comporte en outre des éléments d'ajustage intégrés, des filtres et des structures fluidiques sous la forme d'une structure complémentaire,
    on réalise par galvanoplastie de la plaque à buses (12, 23), en une seule pièce à microstructure en métal, à l'aide de l'insert de moulage en matière plastique qui comporte toutes les zones fonctionnelles ainsi qu'en plus des éléments d'ajustage intégrés, des filtres et des structures fluidiques comme corps à microstructure multifonctionnel en une seule pièce au cours d'une seule opération de moulage.
  8. Procédé selon les revendications 6 et 7 pour la fabrication d'une plaque à buses (12) en métal avec des buses (13) dont les axes sont perpendiculaires à la plaque à buses et des zones fonctionnelles réparties d'un côté de la plaque à buses,
    caractérisé en ce qu'
    on réalise un insert de moulage en une seule pièce en matière plastique, cet insert comportant d'un côté toutes les zones fonctionnelles de la plaque à buses sur une structure complémentaire,
    par galvanoplastie de la plaque à buses (12), en une seule pièce à microstructure, on réalise en métal, avec toutes les zones fonctionnelles, avec l'insert de moulage en matière plastique comme corps à microstructure et multifonctionnel en une seule pièce en matière plastique au cours d'une seule opération de moulage.
  9. Procédé selon les revendications 6 à 8 pour la réalisation d'une plaque à buses (12, 23) en métal,
    caractérisé en ce que
    le métal est du nickel, du cuivre, un alliage nickel-cobalt ou cuivre-zinc-étain.
EP94111846A 1993-09-03 1994-07-29 Plaque à buses pour une tête d'impression à jet fluide et son procédé de fabrication Expired - Lifetime EP0641657B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE4329728 1993-09-03
DE4329728A DE4329728A1 (de) 1993-09-03 1993-09-03 Düsenplatte für Fluidstrahl-Druckkopf und Verfahren zu deren Herstellung

Publications (2)

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EP0641657A1 EP0641657A1 (fr) 1995-03-08
EP0641657B1 true EP0641657B1 (fr) 1999-02-03

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EP94111846A Expired - Lifetime EP0641657B1 (fr) 1993-09-03 1994-07-29 Plaque à buses pour une tête d'impression à jet fluide et son procédé de fabrication

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US (2) US5588597A (fr)
EP (1) EP0641657B1 (fr)
JP (1) JPH0781069A (fr)
KR (1) KR950008131A (fr)
CN (2) CN1068280C (fr)
DE (2) DE4329728A1 (fr)

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Also Published As

Publication number Publication date
KR950008131A (ko) 1995-04-17
CN1264646A (zh) 2000-08-30
CN1068280C (zh) 2001-07-11
DE59407762D1 (de) 1999-03-18
JPH0781069A (ja) 1995-03-28
US5588597A (en) 1996-12-31
CN1112879A (zh) 1995-12-06
DE4329728A1 (de) 1995-03-09
EP0641657A1 (fr) 1995-03-08
US5809646A (en) 1998-09-22

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