EP0641657B1 - Plaque à buses pour une tête d'impression à jet fluide et son procédé de fabrication - Google Patents
Plaque à buses pour une tête d'impression à jet fluide et son procédé de fabrication Download PDFInfo
- Publication number
- EP0641657B1 EP0641657B1 EP94111846A EP94111846A EP0641657B1 EP 0641657 B1 EP0641657 B1 EP 0641657B1 EP 94111846 A EP94111846 A EP 94111846A EP 94111846 A EP94111846 A EP 94111846A EP 0641657 B1 EP0641657 B1 EP 0641657B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- nozzle plate
- piece
- plastic
- producing
- functional regions
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000012530 fluid Substances 0.000 title claims description 51
- 238000000034 method Methods 0.000 title claims description 32
- 238000004519 manufacturing process Methods 0.000 title claims description 17
- 239000002184 metal Substances 0.000 claims description 37
- 229910052751 metal Inorganic materials 0.000 claims description 37
- 239000004033 plastic Substances 0.000 claims description 30
- 229920003023 plastic Polymers 0.000 claims description 30
- 238000000465 moulding Methods 0.000 claims description 18
- 230000000295 complement effect Effects 0.000 claims description 13
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 11
- 238000005323 electroforming Methods 0.000 claims description 7
- 239000010949 copper Substances 0.000 claims description 5
- 229910052759 nickel Inorganic materials 0.000 claims description 5
- 229920003229 poly(methyl methacrylate) Polymers 0.000 claims description 5
- 239000004926 polymethyl methacrylate Substances 0.000 claims description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- -1 polyethersulphone Polymers 0.000 claims description 3
- 229910000531 Co alloy Inorganic materials 0.000 claims description 2
- 229920000106 Liquid crystal polymer Polymers 0.000 claims description 2
- 239000004977 Liquid-crystal polymers (LCPs) Substances 0.000 claims description 2
- 229910001297 Zn alloy Inorganic materials 0.000 claims description 2
- QXZUUHYBWMWJHK-UHFFFAOYSA-N [Co].[Ni] Chemical compound [Co].[Ni] QXZUUHYBWMWJHK-UHFFFAOYSA-N 0.000 claims description 2
- PDYXSJSAMVACOH-UHFFFAOYSA-N [Cu].[Zn].[Sn] Chemical compound [Cu].[Zn].[Sn] PDYXSJSAMVACOH-UHFFFAOYSA-N 0.000 claims description 2
- 229920002492 poly(sulfone) Polymers 0.000 claims description 2
- 239000004417 polycarbonate Substances 0.000 claims description 2
- 229920000515 polycarbonate Polymers 0.000 claims description 2
- 238000010137 moulding (plastic) Methods 0.000 claims 4
- 229920002530 polyetherether ketone Polymers 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 11
- 229910052710 silicon Inorganic materials 0.000 description 11
- 239000010703 silicon Substances 0.000 description 10
- 239000000463 material Substances 0.000 description 6
- 239000006096 absorbing agent Substances 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 238000001459 lithography Methods 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 229910003266 NiCo Inorganic materials 0.000 description 2
- 239000003086 colorant Substances 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 238000001746 injection moulding Methods 0.000 description 2
- 239000012811 non-conductive material Substances 0.000 description 2
- 229920002635 polyurethane Polymers 0.000 description 2
- 239000004814 polyurethane Substances 0.000 description 2
- 238000007639 printing Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 230000005469 synchrotron radiation Effects 0.000 description 2
- 241001295925 Gegenes Species 0.000 description 1
- 239000004695 Polyether sulfone Substances 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000002202 Polyethylene glycol Substances 0.000 description 1
- 238000002679 ablation Methods 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004049 embossing Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- RTZKZFJDLAIYFH-UHFFFAOYSA-N ether Substances CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 238000000608 laser ablation Methods 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 229920006393 polyether sulfone Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920001223 polyethylene glycol Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000012805 post-processing Methods 0.000 description 1
- 238000003908 quality control method Methods 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14032—Structure of the pressure chamber
- B41J2/1404—Geometrical characteristics
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/1433—Structure of nozzle plates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1601—Production of bubble jet print heads
- B41J2/1603—Production of bubble jet print heads of the front shooter type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/162—Manufacturing of the nozzle plates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1623—Manufacturing processes bonding and adhesion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1625—Manufacturing processes electroforming
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
- B41J2/1634—Manufacturing processes machining laser machining
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1637—Manufacturing processes molding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14387—Front shooter
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14403—Structure thereof only for on-demand ink jet heads including a filter
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S29/00—Metal working
- Y10S29/005—Method or apparatus with casting
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/4998—Combined manufacture including applying or shaping of fluent material
- Y10T29/49982—Coating
- Y10T29/49984—Coating and casting
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/4998—Combined manufacture including applying or shaping of fluent material
- Y10T29/49988—Metal casting
Definitions
- the invention relates to a nozzle plate for printheads which are used in inkjet and Color beam printers are used, as well as a process for their production.
- the invention aims such nozzle plates and the equipped with it Produce printheads more economically and their function in terms Improve printing speed and resolution.
- Nozzle plates for ink and color jet print heads are known (Hewlett-Packard Journal, August 1988, pages 28 to 31) (EP-495 663; EP-500 068); such nozzle plates contain 12 up to about 100 nozzles with a hole diameter down to 20 ⁇ m.
- a Device for ejecting drops with a volume of 1 to 1,000 Picoliters are connected to each nozzle.
- the print head often arises by joining the ink tank with generally three plates, where one plate has a thin film structure, the next plate a lithographic one generated plastic structure with feed channel and ink chamber is (channel plate), and the third plate contains the nozzles (nozzle plate). Both the manufacture of the nozzle plate and the channel plate as well Assembling the plates to form the printhead requires considerable effort and high precision.
- the nozzle plate is made, for example, by laser processing of plastic parts manufactured. Other methods are based on a conductive method Base plate made with a non-conductive plastic layer at certain points is provided. The non-conductive points are circular; their Distance corresponds to the nominal distance of the nozzles in the nozzle plate. On the The base plate is deposited electrolytically. This metal layer is thicker than the non-conductive layer, and the electrodeposited Metal inevitably grows over the edge of the non-conductive areas on the non-conductive layer. This way, smaller nozzle diameters realized as the dimensions of the lithographically produced non-conductive Places the plastic layer corresponds. To the nozzle cross section and its variation from nozzle to nozzle within the prescribed tolerances keep, complex manufacturing and measuring methods are to be used. In which last described manufacturing process, the hole spacing is inevitable greater than the thickness of the plate to be manufactured. Because the plate for reasons The stability must have a minimum thickness, the smallest possible hole spacing and thus also limits the print density.
- EP - 0 109 755 has a nozzle plate with it attached Partitions between the fluid chambers indicated that by galvanic deposition of metal on a structured Plate is made.
- the structured plate is made of metal, on the complementary to the shape of the fluid chambers molded body made of non-conductive material attached are.
- the structured two-piece plate is made for several Impression processes used.
- the bodies made of non-conductive material are structured again before each electroforming Plate applied, which is a constantly repeating Adjustment effort required.
- the nozzles are replaced by partial Overgrow the top of the non-conductive body with Metal generated and are thus determined by the molding process. This means that only nozzles with an aspect ratio can be smaller generate as 1.
- One complementary to the shape of the nozzles Body is on the plate used for electroforming unavailable.
- EP - 0 564 102 describes a plastic nozzle plate and their manufacturing processes.
- the nozzle plate has at least two structural levels; the one level contains the Nozzles, the level above contains the fluid chambers and the connecting channels between the fluid chambers and the ink supply channel and possibly also the ink supply channel.
- Both structure levels are structured one after the other by laser ablation or other etching or shaping processes, which according to a pattern given by a mask the partial removal of plastic or its Effect formation.
- the masks are used for every ablation step constantly re-adjusted in every structural level.
- Each Nozzle plate is on a long belt in at least two Process steps manufactured separately.
- the channel structures and the nozzle carrier are made by molding manufactured.
- the nozzles are each using a laser beam drilled individually.
- Channel structures and nozzles are created in two steps completely different processes. There is also post-processing required. This process is also very complex.
- the nozzle plate contains nozzles, fluid chambers, functional areas the connecting channels between the fluid chambers and the storage container for the fluid and possibly adjustment elements, all Functional areas as a one-piece multifunctional microstructure body by molding a one-piece mold insert can be produced in a single molding step.
- Filters and filters can be added to the functional areas of the nozzle plate Fluidic structures are part of increasing the print quality.
- a one-piece micro-structured metal insert used all functional areas contains the nozzle plate in a complementary structure, and the z. B. by Lithography, preferably deep lithography with X-rays, and electroforming will be produced.
- Lithography preferably deep lithography with X-rays
- electroforming By using the lithographic process also non-round or non-square nozzle outlet openings realized become.
- a second layer of an X-ray resist is then generally applied applied in a suitable thickness using a second mask X-rays are irradiated, this second mask having a different absorber structure wears as the first mask.
- a second resist layer is made in the microstructure on the base plate Plastic (resist) a metal electrodeposited, all Cavities of the microstructure can be completely filled with metal. Subsequently more metal is deposited, creating the whole microstructure is covered.
- microstructure made of metal is different from that on the base plate Microstructure made of plastic separated, the microstructured mold insert is obtained from metal, the all functional areas of the nozzle plate contains in a complementary structure.
- the micro-structured nozzle plate is made of plastic by means of the mold insert with all functional areas as a one-piece microstructure body e.g. B. made by injection molding.
- a one-piece nozzle plate can be created, the functional elements contains on both sides.
- the nozzles are on a side running parallel to its axis open. This side of the nozzles is closed, once the nozzle plate has a thin film structure supporting plate is assembled.
- Figure 4 is one using this method manufacturable nozzle plate shown by structuring Nozzle channels on two sides of the plate doubled the print density and / or the use of two different colors is permitted.
- the plastic nozzle plate can be made by injection molding, reaction molding or Embossing can be produced using a metal mold insert. This procedure enable inexpensive mass production of nozzle plates.
- the nozzle plate made of metal can be manufactured inexpensively a negative mold made of plastic, as described above. To the negative form in a galvanoform process - analogous to the process, described in the manufacture of the mold insert - in a metal structure transferred with the desired nozzle holes and functional elements.
- plastics such as polysulfone, polyether sulfone, polymethyl methacrylate, Polycarbonate, polyethylene ether ketone and liquid crystal polymers suitable.
- nozzle plate made of metal for. B. nickel or nickel-cobalt alloys or copper-tin-zinc alloys; such Panels are used either directly or with a coating.
- Example 1 Method for producing a mold insert for a nozzle plate with an axial fluid jet
- PMMA polymethyl methacrylate
- This layer will irradiated with synchrotron radiation through a first X-ray mask.
- the first mask is in a shape that matches the structure of the nozzle plate structured.
- the irradiated areas of the first resist layer soluble. Those irradiated through the first mask Areas are removed from GG developers with a solution.
- the areas detached from the first resist layer filled with nickel, and the whole plate is covered with a 50 ⁇ m thick PMMA resist layer.
- This layer is covered by a irradiated with synchrotron radiation through the second X-ray mask.
- the second Mask is in one of the structure of the channel plate and the structure of the first Structured mask matching shape.
- the irradiated areas of the second resist layer to a depth of approximately 65 ⁇ m soluble through targeted dose deposition. That through the second mask Irradiated areas of the second resist layer are covered with a solution GG developer detached.
- Nickel is electrodeposited in the extracted areas, and the entire plate is covered with an approximately 8 mm thick layer of nickel, whereby the nickel structure of the first level serves as an electrical contact.
- the base plate made of copper is milled off, and the remaining parts both resist layers are dissolved with polyethylene glycol. So that gets the mold insert, its structure to the structure of the nozzle and channel plate is complementary.
- Example 2 Nozzle plate for a printhead with an axially emerging fluid jet
- the nozzle plate produced by means of a mold insert according to Example 1 contains 108 nozzles with a diameter of 50 ⁇ m and one in 2 rows Nozzle length of 100 ⁇ m
- the fluid chamber is 50 ⁇ m deep and below the 70 ⁇ m wide nozzles.
- the fluid pan is also 50 ⁇ m deep.
- the closest The location of the fluid channels is about 30 ⁇ m wide.
- This one-piece nozzle plate comes with a silicon plate that is a heating element for each nozzle, its electrical connections and the fluid inlet contains, glued. Polyurethane glue serves as the adhesive.
- Example 3 Nozzle plate for a printhead with a fluid jet emerging in the plate plane
- Nozzle plate contains 216 nozzles on both sides.
- the nozzles on each side has a distance of 84 ⁇ m. Both rows of nozzles are against each other offset by 42 ⁇ m.
- the dimensions of the nozzle channel are on the narrowest point 40 ⁇ m in width and 40 ⁇ m in depth.
- the diameter the fluid chamber in front of the nozzle is 60 ⁇ m, the wall thickness between the fluid chambers 24 ⁇ m
- the narrowest part of the fluid channel is 20 ⁇ m wide.
- This one-piece nozzle plate is covered on both sides with a silicon plate, which is a heating element for each nozzle and its electrical connections contains, glued.
- a polyurethane adhesive is used as the adhesive.
Claims (9)
- Procédé de fabrication d'une plaque à buses (12, 23) en matière plastique pour une tête d'impression à jet de liquide comportant des buses (13) ou des canaux à liquide (24) comme préformes de buses, chambres à liquide (16, 25) et canaux de liaison (22, 26) entre les chambres à liquide et un réservoir (15, 27) pour le liquide,
caractérisé en ce qu'on réalise un insert de moulage en une seule pièce en métal pour toutes les zones fonctionnelles de la plaque à buses (12, 23) suivant une structure complémentaire,on moule la plaque à buses (12, 23) en une seule pièce à microstructure, avec de la matière plastique, par moulage de matière plastique à l'aide de l'insert de moulage métallique avec toutes les zones fonctionnelles sous la forme d'un corps microstructuré multifonctionnel en une seule pièce au cours d'une seule opération de moulage. - Procédé selon la revendication 1 pour fabriquer une plaque à buses (12, 23) en matière plastique pour une tête d'impression à jet de liquide qui comporte en outre des éléments d'ajustage intégrés, des filtres et des structures fluidiques à l'intérieur des zones fonctionnelles,
caractérisé en ce qu'on réalise un insert de moulage en une seule pièce en métal qui comporte, en plus des éléments d'ajustage intégrés, des filtres et des structures fluidiques sous forme de structures complémentaires,on moule la plaque à buses (12, 23) en une seule pièce microstructurée en matière plastique par moulage de matière plastique à l'aide de l'insert de moulage métallique avec toutes les zones fonctionnelles et, en plus des éléments d'ajustage intégrés, des filtres et des structures fluidiques comme corps à microstructure multifonctionnelle en une seule pièce au cours d'une seule opération de moulage. - Procédé selon les revendications 1 et 2 pour fabriquer une plaque à buses (12) en matière plastique à plusieurs zones fonctionnelles sur une face, des buses (13) dont l'axe est perpendiculaire à la plaque à buses ou des canaux à liquide (24) dont les axes sont parallèles à la plaque à buses,
caractérisé en ce qu'on réalise un insert de moulage en une seule pièce en métal qui comporte toutes les zones fonctionnelles de la plaque à buses sur une face, suivant une structure complémentaire,on moule, à partir de la plaque à buses en une seule pièce à une face microstructurée, avec de la matière plastique selon la technique de moulage de matière plastique à l'aide de l'insert de moulage métallique avec toutes les zones fonctionnelles comme corps microstructuré multifonctionnel en une seule pièce au cours d'une seule étape de moulage. - Procédé selon les revendications 1 et 2 pour fabriquer une plaque à buses (23) en matière plastique avec des canaux à liquide (24) dont les axes sont parallèles à la plaque à buses, cette plaque ayant des deux côtés des zones fonctionnelles,
caractérisé en ce qu'on réalise deux inserts de moule en une seule pièce en métal, chacun d'eux ayant toutes les zones fonctionnelles associées à chaque côté de la plaque à buses suivant une structure complémentaire,on copie par moulage la plaque à buses en une seule pièce avec les deux faces microstructurées, avec de la matière plastique par moulage de la matière plastique tout en utilisant simultanément les deux inserts de moulage, métalliques en une seule pièce, qui sont prévus à une certaine distance l'un de l'autre, les côtés structurés des inserts de moulage étant en regard avec toutes les zones fonctionnelles comme corps microstructuré multifonctionnel en une seule pièce au cours d'une seule opération de moulage. - Procédé selon les revendications 1 à 4 pour fabriquer une plaque à buses (12, 23) en matière plastique,
caractérisé en ce qu'
on utilise comme matière plastique un polysulfone, un polyéthersulfone, du polyméthylacrylate, un polycarbonate, un polyéthyléthercétone ou un polymère à cristaux liquides. - Procédé de fabrication d'une plaque à buses (12, 23) en métal pour une tête d'impression à jet de liquide comportant des buses (13), des chambres à liquide (16, 25) ainsi que des canaux de liaison (22, 26) reliant les chambres à liquide et un réservoir d'alimentation (15, 27) pour le liquide,
caractérisé en ce qu'on réalise un insert de moule en une seule pièce en matière plastique qui comporte toutes les zones fonctionnelles de la plaque à buses (12, 23) sur une structure complémentaire,par galvanoplastie de la plaque à buses (12, 23) en une seule pièce à microstructure en métal avec toutes les zones fonctionnelles, avec l'insert de moulage, avec de la matière plastique comme corps microstructuré multifonctionnel en une seule pièce au cours d'une seule opération de moulage. - Procédé selon la revendication 6 pour la fabrication d'une plaque à buses (12, 23) en métal à plusieurs zones fonctionnelles pour une tête d'impression à jet de fluide qui comporte en outre des éléments d'ajustage intégrés, des structures de filtres et des structures fluidiques, à l'intérieur des zones fonctionnelles,
caractérisé en ce qu'on réalise un insert de moule en une seule pièce en matière plastique qui comporte en outre des éléments d'ajustage intégrés, des filtres et des structures fluidiques sous la forme d'une structure complémentaire,on réalise par galvanoplastie de la plaque à buses (12, 23), en une seule pièce à microstructure en métal, à l'aide de l'insert de moulage en matière plastique qui comporte toutes les zones fonctionnelles ainsi qu'en plus des éléments d'ajustage intégrés, des filtres et des structures fluidiques comme corps à microstructure multifonctionnel en une seule pièce au cours d'une seule opération de moulage. - Procédé selon les revendications 6 et 7 pour la fabrication d'une plaque à buses (12) en métal avec des buses (13) dont les axes sont perpendiculaires à la plaque à buses et des zones fonctionnelles réparties d'un côté de la plaque à buses,
caractérisé en ce qu'on réalise un insert de moulage en une seule pièce en matière plastique, cet insert comportant d'un côté toutes les zones fonctionnelles de la plaque à buses sur une structure complémentaire,par galvanoplastie de la plaque à buses (12), en une seule pièce à microstructure, on réalise en métal, avec toutes les zones fonctionnelles, avec l'insert de moulage en matière plastique comme corps à microstructure et multifonctionnel en une seule pièce en matière plastique au cours d'une seule opération de moulage. - Procédé selon les revendications 6 à 8 pour la réalisation d'une plaque à buses (12, 23) en métal,
caractérisé en ce que
le métal est du nickel, du cuivre, un alliage nickel-cobalt ou cuivre-zinc-étain.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE4329728 | 1993-09-03 | ||
DE4329728A DE4329728A1 (de) | 1993-09-03 | 1993-09-03 | Düsenplatte für Fluidstrahl-Druckkopf und Verfahren zu deren Herstellung |
Publications (2)
Publication Number | Publication Date |
---|---|
EP0641657A1 EP0641657A1 (fr) | 1995-03-08 |
EP0641657B1 true EP0641657B1 (fr) | 1999-02-03 |
Family
ID=6496729
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP94111846A Expired - Lifetime EP0641657B1 (fr) | 1993-09-03 | 1994-07-29 | Plaque à buses pour une tête d'impression à jet fluide et son procédé de fabrication |
Country Status (6)
Country | Link |
---|---|
US (2) | US5588597A (fr) |
EP (1) | EP0641657B1 (fr) |
JP (1) | JPH0781069A (fr) |
KR (1) | KR950008131A (fr) |
CN (2) | CN1068280C (fr) |
DE (2) | DE4329728A1 (fr) |
Families Citing this family (50)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5818479A (en) * | 1993-09-03 | 1998-10-06 | Microparts Gmbh | Nozzle plate for a liquid jet print head |
DE4329728A1 (de) * | 1993-09-03 | 1995-03-09 | Microparts Gmbh | Düsenplatte für Fluidstrahl-Druckkopf und Verfahren zu deren Herstellung |
US5992769A (en) * | 1995-06-09 | 1999-11-30 | The Regents Of The University Of Michigan | Microchannel system for fluid delivery |
KR100225082B1 (ko) * | 1997-01-15 | 1999-10-15 | 윤종용 | 프린트 헤드의 잉크 분사 장치 구조 |
EP1019696A4 (fr) * | 1997-09-19 | 2003-07-23 | Aclara Biosciences Inc | Systeme et procede de transfert de liquides |
JP2957528B2 (ja) * | 1997-10-07 | 1999-10-04 | 株式会社東京機械製作所 | インクジェット印刷用ノズル、そのオリフィス部材及びオリフィス部材の製造方法 |
US6339881B1 (en) * | 1997-11-17 | 2002-01-22 | Xerox Corporation | Ink jet printhead and method for its manufacture |
US6209203B1 (en) * | 1998-01-08 | 2001-04-03 | Lexmark International, Inc. | Method for making nozzle array for printhead |
US6382777B1 (en) * | 1998-06-19 | 2002-05-07 | Canon Kabushiki Kaisha | Liquid jet recording head |
KR100325520B1 (ko) * | 1998-12-10 | 2002-04-17 | 윤종용 | 유체 분사 장치의 제조 방법_ |
US6416678B1 (en) * | 1998-12-22 | 2002-07-09 | Xerox Corporation | Solid bi-layer structures for use with high viscosity inks in acoustic ink printing and methods of fabrication |
US6507001B1 (en) | 1999-01-19 | 2003-01-14 | Xerox Corporation | Nozzles for ink jet devices and laser ablating or precision injection molding methods for microfabrication of the nozzles |
US6161270A (en) * | 1999-01-29 | 2000-12-19 | Eastman Kodak Company | Making printheads using tapecasting |
JP2001113698A (ja) * | 1999-10-19 | 2001-04-24 | Nec Niigata Ltd | ノズルプレート及びその製造方法及びインクジェット記録ヘッド |
JP2003136728A (ja) * | 2001-11-05 | 2003-05-14 | Sony Corp | インクジェットプリントヘッド及びこれを備えたインクジェットプリンタ、並びにインクジェットプリントヘッドの製造方法 |
SE522623C2 (sv) * | 2001-09-19 | 2004-02-24 | Aamic Ab | Metod för tillverkning av munstycksplatta med miniatyrmunstycken, munstycksplatta med miniatyrmunstycken och skrivarhuvud av bläckstråletyp |
JP4249438B2 (ja) * | 2002-07-05 | 2009-04-02 | 日本ニュークローム株式会社 | 銅―錫合金めっき用ピロリン酸浴 |
US20040021741A1 (en) * | 2002-07-30 | 2004-02-05 | Ottenheimer Thomas H. | Slotted substrate and method of making |
US6666546B1 (en) | 2002-07-31 | 2003-12-23 | Hewlett-Packard Development Company, L.P. | Slotted substrate and method of making |
KR20040051879A (ko) * | 2002-12-13 | 2004-06-19 | 강신일 | 유리 성형용 초경합금제 마이크로 몰드인서트 및 그 제조방법 |
EP1671794A4 (fr) * | 2003-09-24 | 2009-04-08 | Seiko Epson Corp | Tete de jet de liquide et procede permettant de produire cette tete de jet et dispositif de jet de liquide |
US7548775B2 (en) * | 2003-10-21 | 2009-06-16 | The Regents Of The University Of Michigan | Intracranial neural interface system |
US7490405B2 (en) * | 2004-03-24 | 2009-02-17 | Fujifilm Corporation | Method for manufacturing a liquid droplet discharge head. |
JP4639718B2 (ja) * | 2004-09-22 | 2011-02-23 | セイコーエプソン株式会社 | 液体噴射ヘッドの圧力発生室形成板製造装置、液体噴射ヘッドの圧力発生室形成板製造方法及び液体噴射ヘッド |
CA2588290A1 (fr) * | 2004-12-01 | 2006-06-08 | Haldex Hydraulics Corporation | Systeme d'entrainement hydraulique |
JP4840756B2 (ja) * | 2005-01-14 | 2011-12-21 | セイコーインスツル株式会社 | 電鋳型とその製造方法及び電鋳部品の製造方法 |
JP4362629B2 (ja) * | 2005-01-31 | 2009-11-11 | 独立行政法人産業技術総合研究所 | 一括転写型インクジェット用ノズルプレートの製造方法 |
JP4513626B2 (ja) * | 2005-03-28 | 2010-07-28 | 住友ベークライト株式会社 | マイクロチャネル基板作製用鋳型の作製方法 |
WO2006138358A2 (fr) | 2005-06-14 | 2006-12-28 | The Regents Of The University Of Michigan Technology Management Office | Microelectrode polymere souple a capacite d'administration de liquide |
WO2007042999A2 (fr) * | 2005-10-07 | 2007-04-19 | Neuronexus Technologies | Reseau de microelectrodes multivoie modulaire et son procede de fabrication |
WO2007089738A2 (fr) * | 2006-01-26 | 2007-08-09 | The Regents Of The University Of Michigan | microélectrode avec une plate-forme s'étendant latéralement pour la réduction de l'encapsulation du tissu |
JP4577226B2 (ja) * | 2006-02-02 | 2010-11-10 | ソニー株式会社 | 液体吐出ヘッド及び液体吐出装置 |
US8877074B2 (en) * | 2006-12-15 | 2014-11-04 | The Regents Of The University Of California | Methods of manufacturing microdevices in laminates, lead frames, packages, and printed circuit boards |
US8731673B2 (en) | 2007-02-26 | 2014-05-20 | Sapiens Steering Brain Stimulation B.V. | Neural interface system |
US8224417B2 (en) * | 2007-10-17 | 2012-07-17 | Neuronexus Technologies, Inc. | Guide tube for an implantable device system |
US8958862B2 (en) * | 2007-10-17 | 2015-02-17 | Neuronexus Technologies, Inc. | Implantable device including a resorbable carrier |
US8565894B2 (en) * | 2007-10-17 | 2013-10-22 | Neuronexus Technologies, Inc. | Three-dimensional system of electrode leads |
US8498720B2 (en) * | 2008-02-29 | 2013-07-30 | Neuronexus Technologies, Inc. | Implantable electrode and method of making the same |
US9289142B2 (en) | 2008-03-24 | 2016-03-22 | Neuronexus Technologies, Inc. | Implantable electrode lead system with a three dimensional arrangement and method of making the same |
US20090240314A1 (en) * | 2008-03-24 | 2009-09-24 | Kong K C | Implantable electrode lead system with a three dimensional arrangement and method of making the same |
RU2012120108A (ru) * | 2009-10-16 | 2013-11-27 | Сапиенс Стиринг Брейн Стимьюлейшн Б.В. | Нейроинтерфейсная система |
WO2011057137A1 (fr) * | 2009-11-05 | 2011-05-12 | Neuronexus Technologies | Dispositif d'interface neuronale à guide d'ondes |
US9155861B2 (en) | 2010-09-20 | 2015-10-13 | Neuronexus Technologies, Inc. | Neural drug delivery system with fluidic threads |
US8657420B2 (en) * | 2010-12-28 | 2014-02-25 | Fujifilm Corporation | Fluid recirculation in droplet ejection devices |
KR101670382B1 (ko) * | 2015-03-10 | 2016-10-28 | 우범제 | 퍼지가스 분사 플레이트 및 그 제조 방법 |
US10144008B2 (en) * | 2016-04-26 | 2018-12-04 | International Business Machines Corporation | Vertical microfluidic probe head with large scale surface processing apertures |
JP7218574B2 (ja) * | 2018-03-08 | 2023-02-07 | 株式会社リコー | インクセット、画像形成装置、及び画像形成方法 |
JP7015926B2 (ja) | 2018-03-12 | 2022-02-03 | ヒューレット-パッカード デベロップメント カンパニー エル.ピー. | ノズル配列 |
JP6970304B2 (ja) | 2018-03-12 | 2021-11-24 | ヒューレット−パッカード デベロップメント カンパニー エル.ピー.Hewlett‐Packard Development Company, L.P. | ノズル構成および供給チャネル |
US11247470B2 (en) | 2018-03-12 | 2022-02-15 | Hewlett-Packard Development Company, L.P. | Nozzle arrangements and feed holes |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3777344A (en) * | 1969-05-28 | 1973-12-11 | Cava Ind | Method of fabricating fluidic elements by assembling together a plurality of plastic strips |
JPS55123476A (en) * | 1979-03-19 | 1980-09-22 | Hitachi Ltd | Multinozzle ink jetting recorder |
DE3039110A1 (de) * | 1980-10-16 | 1982-05-13 | Siemens AG, 1000 Berlin und 8000 München | Verfahren fuer die spannungsfreie entwicklung von bestrahlten polymethylmetacrylatschichten |
US4745670A (en) * | 1980-10-28 | 1988-05-24 | Rockwell International Corporation | Method for making chemical laser nozzle arrays |
US4528577A (en) * | 1982-11-23 | 1985-07-09 | Hewlett-Packard Co. | Ink jet orifice plate having integral separators |
JPS60253553A (ja) * | 1983-08-15 | 1985-12-14 | Seiko Epson Corp | エア−フロ−方式インクジェット記録ヘッド |
US4493137A (en) * | 1983-09-19 | 1985-01-15 | Ncr Corporation | Method of making a drive element assembly for ink jet printing |
JPS6087056A (ja) * | 1983-10-20 | 1985-05-16 | Ricoh Co Ltd | インクジエツトヘツド |
JPS63303754A (ja) * | 1987-06-04 | 1988-12-12 | Seiko Epson Corp | インクジェットヘッド基板 |
US4915718A (en) * | 1988-09-28 | 1990-04-10 | On Target Technology, Inc. | Fabrication of ink jet nozzles and resulting product |
US5469199A (en) * | 1990-08-16 | 1995-11-21 | Hewlett-Packard Company | Wide inkjet printhead |
EP0495663B1 (fr) * | 1991-01-18 | 1997-04-23 | Canon Kabushiki Kaisha | Ensemble à jet d'encre avec orifices et appareil d'enregistrement utilisant cet ensemble |
EP0500068B1 (fr) * | 1991-02-20 | 1996-10-16 | Canon Kabushiki Kaisha | Tête d'enregistrement à jet d'encre, appareil d'enregistrement l'utilisant et méthode pour sa fabrication |
DE4107851A1 (de) * | 1991-03-12 | 1992-09-17 | Basf Ag | Verfahren zur herstellung von mikroformkoerpern mit hohem aspektverhaeltnis |
JP2940225B2 (ja) * | 1991-06-20 | 1999-08-25 | 富士電機株式会社 | インクジェット記録ヘッドの製造方法 |
US5650810A (en) * | 1992-12-03 | 1997-07-22 | Brother Kogyo Kabushiki Kaisha | Ink jet print head having a manifold wall portion and method of producing the same by injection molding |
JP3132291B2 (ja) * | 1993-06-03 | 2001-02-05 | ブラザー工業株式会社 | インクジェットヘッドの製造方法 |
EP0636481B1 (fr) * | 1993-07-26 | 1998-06-17 | Canon Kabushiki Kaisha | Tête d'impression par jet liquide et imprimante à jet d'encre équipée de cette tête |
DE4329728A1 (de) * | 1993-09-03 | 1995-03-09 | Microparts Gmbh | Düsenplatte für Fluidstrahl-Druckkopf und Verfahren zu deren Herstellung |
US5560837A (en) * | 1994-11-08 | 1996-10-01 | Hewlett-Packard Company | Method of making ink-jet component |
-
1993
- 1993-09-03 DE DE4329728A patent/DE4329728A1/de not_active Withdrawn
-
1994
- 1994-07-29 DE DE59407762T patent/DE59407762D1/de not_active Expired - Fee Related
- 1994-07-29 EP EP94111846A patent/EP0641657B1/fr not_active Expired - Lifetime
- 1994-08-30 US US08/297,780 patent/US5588597A/en not_active Expired - Fee Related
- 1994-08-30 JP JP6205099A patent/JPH0781069A/ja active Pending
- 1994-08-31 KR KR1019940021734A patent/KR950008131A/ko not_active Application Discontinuation
- 1994-09-02 CN CN94115646A patent/CN1068280C/zh not_active Expired - Fee Related
-
1996
- 1996-09-17 US US08/715,096 patent/US5809646A/en not_active Expired - Fee Related
-
2000
- 2000-01-25 CN CN00101197A patent/CN1264646A/zh active Pending
Also Published As
Publication number | Publication date |
---|---|
KR950008131A (ko) | 1995-04-17 |
CN1264646A (zh) | 2000-08-30 |
CN1068280C (zh) | 2001-07-11 |
DE59407762D1 (de) | 1999-03-18 |
JPH0781069A (ja) | 1995-03-28 |
US5588597A (en) | 1996-12-31 |
CN1112879A (zh) | 1995-12-06 |
DE4329728A1 (de) | 1995-03-09 |
EP0641657A1 (fr) | 1995-03-08 |
US5809646A (en) | 1998-09-22 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP0641657B1 (fr) | Plaque à buses pour une tête d'impression à jet fluide et son procédé de fabrication | |
EP0547371B1 (fr) | Procédé pour la fabrication de garnitures de moulage étagées | |
DE69728336T2 (de) | Verfahren und Vorrichtung zum Herstellen eines Tintenstrahldruckkopfes | |
EP0885086B1 (fr) | Procede de production de micro-echangeurs de chaleur | |
DE3222680C2 (de) | Tintenstrahlkopf und Verfahren zu seiner Herstellung | |
EP1888321B1 (fr) | Procede de production d'un objet comprenant au moins deux elements mobiles | |
DE69721854T2 (de) | Verfahren zum Herstellen eines Flüssigkeitstrahlaufzeichnungskopfes | |
DE3704546A1 (de) | Verfahren zur herstellung eines filters und danach hergestelltes filter | |
EP0667450B1 (fr) | Procédé de fabrication d'une plaque à buses | |
US5818479A (en) | Nozzle plate for a liquid jet print head | |
EP0374441B1 (fr) | Procédé pour la fabrication d'un corps microstructurel bidimensionnel en métal à pluralité de trous fins et d'un outil à cet effet | |
DE60319271T2 (de) | Tintenstrahldruckkopf und verfahren zu seiner herstellung | |
EP0618502A1 (fr) | Procédé pour la fabrication de garnitures de moulage étagées; garnitures de moulage étagées ainsi que des microstructures à haute précision réalisées à partir de ces moules | |
DE19524099A1 (de) | Verfahren zur Herstellung von Formeinsätzen | |
DE69828923T2 (de) | Flüssigkeitsausstossverfahren, Flüssigkeitsausstosskopf, Kopfkassette und Flüssigkeitsausstossapparat welcher diesen Flüssigkeitsausstosskopf verwendet | |
DE3917434C2 (fr) | ||
DE69826769T2 (de) | Düsenplatte und Herstellungsverfahren, für ein Ausstossgerät | |
DE4243860C2 (de) | Mikrominiaturisierte, elektrostatische Pumpe und Verfahren zu deren Herstellung | |
DE3401963C2 (fr) | ||
DE10305427B4 (de) | Herstellungsverfahren für eine Lochscheibe zum Ausstoßen eines Fluids | |
DE60108640T2 (de) | Tröpfchenaufzeichnungsgerät mit lösbarer düsenplatte | |
WO2001004384A1 (fr) | Procede de production d'outils de micropoinçonnage | |
DE4026457C2 (fr) | ||
DE10305425B4 (de) | Herstellungsverfahren für eine Lochscheibe zum Ausstoßen eines Fluids | |
EP1046507A1 (fr) | Procédé de fabrication de corps creux miniaturisés |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): BE CH DE FR GB IT LI LU NL |
|
17P | Request for examination filed |
Effective date: 19950208 |
|
17Q | First examination report despatched |
Effective date: 19960301 |
|
GRAG | Despatch of communication of intention to grant |
Free format text: ORIGINAL CODE: EPIDOS AGRA |
|
GRAG | Despatch of communication of intention to grant |
Free format text: ORIGINAL CODE: EPIDOS AGRA |
|
GRAH | Despatch of communication of intention to grant a patent |
Free format text: ORIGINAL CODE: EPIDOS IGRA |
|
RAP1 | Party data changed (applicant data changed or rights of an application transferred) |
Owner name: MICROPARTS GESELLSCHAFT FUER MIKROSTRUKTURTECHNIK |
|
GRAH | Despatch of communication of intention to grant a patent |
Free format text: ORIGINAL CODE: EPIDOS IGRA |
|
GRAA | (expected) grant |
Free format text: ORIGINAL CODE: 0009210 |
|
AK | Designated contracting states |
Kind code of ref document: B1 Designated state(s): BE CH DE FR GB IT LI LU NL |
|
REG | Reference to a national code |
Ref country code: CH Ref legal event code: NV Representative=s name: SCHMAUDER & PARTNER AG PATENTANWALTSBUERO Ref country code: CH Ref legal event code: EP |
|
ITF | It: translation for a ep patent filed |
Owner name: SOCIETA' ITALIANA BREVETTI S.P.A. |
|
GBT | Gb: translation of ep patent filed (gb section 77(6)(a)/1977) |
Effective date: 19990205 |
|
REF | Corresponds to: |
Ref document number: 59407762 Country of ref document: DE Date of ref document: 19990318 |
|
ET | Fr: translation filed | ||
PLBE | No opposition filed within time limit |
Free format text: ORIGINAL CODE: 0009261 |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT |
|
26N | No opposition filed | ||
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: GB Payment date: 20010510 Year of fee payment: 8 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: BE Payment date: 20010605 Year of fee payment: 8 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: CH Payment date: 20010712 Year of fee payment: 8 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: FR Payment date: 20010730 Year of fee payment: 8 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: NL Payment date: 20010731 Year of fee payment: 8 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: LU Payment date: 20010806 Year of fee payment: 8 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: DE Payment date: 20010821 Year of fee payment: 8 |
|
REG | Reference to a national code |
Ref country code: GB Ref legal event code: IF02 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: LU Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20020729 Ref country code: GB Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20020729 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: LI Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20020731 Ref country code: CH Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20020731 Ref country code: BE Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20020731 |
|
BERE | Be: lapsed |
Owner name: *MICROPARTS G.- FUR MIKROSTRUKTURTECHNIK M.B.H. Effective date: 20020731 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: NL Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20030201 Ref country code: DE Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20030201 |
|
REG | Reference to a national code |
Ref country code: CH Ref legal event code: PL |
|
GBPC | Gb: european patent ceased through non-payment of renewal fee |
Effective date: 20020729 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: FR Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20030331 |
|
NLV4 | Nl: lapsed or anulled due to non-payment of the annual fee |
Effective date: 20030201 |
|
REG | Reference to a national code |
Ref country code: FR Ref legal event code: ST |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: IT Payment date: 20060731 Year of fee payment: 13 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: IT Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20070729 |