EP0628175B1 - Selbstausrichtender flexibler optischer koppler - Google Patents

Selbstausrichtender flexibler optischer koppler Download PDF

Info

Publication number
EP0628175B1
EP0628175B1 EP94905390A EP94905390A EP0628175B1 EP 0628175 B1 EP0628175 B1 EP 0628175B1 EP 94905390 A EP94905390 A EP 94905390A EP 94905390 A EP94905390 A EP 94905390A EP 0628175 B1 EP0628175 B1 EP 0628175B1
Authority
EP
European Patent Office
Prior art keywords
optical
waveguide
coupler
substrate
ports
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP94905390A
Other languages
English (en)
French (fr)
Other versions
EP0628175A1 (de
Inventor
Charles T. Sullivan
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honeywell Inc
Original Assignee
Honeywell Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell Inc filed Critical Honeywell Inc
Publication of EP0628175A1 publication Critical patent/EP0628175A1/de
Application granted granted Critical
Publication of EP0628175B1 publication Critical patent/EP0628175B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/42Coupling light guides with opto-electronic elements
    • G02B6/43Arrangements comprising a plurality of opto-electronic elements and associated optical interconnections

Definitions

  • Optical waveguide ports 30 and 34 and alignment stops 25 and 26 are on flexible optical coupler carrier 40, as can be noted in figure 2c.
  • This particular design is exemplary only.
  • the registration of the alignment stops 24 to the waveguide end face 12 can be very precise as it is limited by mask writing precision (approximately 100 nanometer precision) or inter-mask registration (approximately 200 nanometer precision), respectively, depending on whether a single-step or sequential process steps are used.
  • alignment stops 25 and waveguide end face 30 on the flexible optical coupler 32 are used.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)
  • Optical Couplings Of Light Guides (AREA)

Claims (3)

  1. Optische Koppelstruktur zum Übertragen optischer Signale von einer ersten optischen Vorrichtung (14) zu einer zweiten optischen Vorrichtung (18), die sich auf unterschiedlichen Ebenen befinden, dadurch gekennzeichnet, daß
    a) ein stegförmiger polymerer Wellenleiter (35) von einem flexiblen, streifenförmigen Substrat (40) getragen wird, welches sich über den stegförmigen Wellenleiter hinaus erstreckt;
    b) das Substrat (40) zu beiden Seiten der Endteile (30, 34) des Wellenleiters (35) Ausrichtstege (24, 27) aufweist; so daß
    c) der stegförmige Wellenleiter (35) an den optischen Anschluß (12, 36) einer optischen Vorrichtung (14, 18) angeschlossen und passiv ausgerichtet werden kann, welche entsprechende Ausrichtmittel (25, 26) aufweist.
  2. Koppelstruktur nach Anspruch 1, dadurch gekennzeichnet, daß der optische Wellenleiter (35) mehrere Kanäle umfaßt, von denen jeder erste und zweite Anschlüsse (30, 40) hat.
  3. Verfahren zum Herstellen einer selbstausrichtenden flexiblen optischen Koppelstruktur nach Anspruch 1 oder 2 mit den Schritten:
    a) Anbringen einer entfernbaren Schicht (44) auf einem temporären Substrat (42);
    b) Aufbringen einer Trägerschicht (40) auf der entfernbaren Schicht (44);
    c) Anbringen einer optischen Deckschicht (33) auf der Trägerschicht (40);
    d) Aufbringen eines optischen Wellenleiters (35) auf der optischen Deckschicht (33);
    e) Maskieren und Aufbringen von Ausrichtmitteln auf der Trägerschicht; und
    f) Ablösen der entfernbaren Schicht (44), um den selbstausrichtenden optischen Koppler vom temporären Substrat (42) abzunehmen.
EP94905390A 1992-12-29 1993-12-16 Selbstausrichtender flexibler optischer koppler Expired - Lifetime EP0628175B1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US07/998,319 US5375184A (en) 1992-12-29 1992-12-29 Flexible channel optical waveguide having self-aligned ports for interconnecting optical devices
PCT/US1993/012186 WO1994015235A1 (en) 1992-12-29 1993-12-16 Self-aligning flexible optical coupler
US998319 1997-12-24

Publications (2)

Publication Number Publication Date
EP0628175A1 EP0628175A1 (de) 1994-12-14
EP0628175B1 true EP0628175B1 (de) 1998-04-29

Family

ID=25545051

Family Applications (1)

Application Number Title Priority Date Filing Date
EP94905390A Expired - Lifetime EP0628175B1 (de) 1992-12-29 1993-12-16 Selbstausrichtender flexibler optischer koppler

Country Status (4)

Country Link
US (1) US5375184A (de)
EP (1) EP0628175B1 (de)
DE (1) DE69318293T2 (de)
WO (1) WO1994015235A1 (de)

Families Citing this family (60)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW281731B (de) * 1994-08-26 1996-07-21 Akzo Nobel Nv
US5629991A (en) * 1995-08-11 1997-05-13 Lucent Technologies Inc. Method for reducing birefringence in optical gratings
CA2272751A1 (en) * 1996-12-31 1998-07-09 Honeywell Inc. Flexible optic connector assembly
US5974214A (en) * 1997-04-08 1999-10-26 Alliedsignal Inc. Raised rib waveguide ribbon for precision optical interconnects
US5850498A (en) * 1997-04-08 1998-12-15 Alliedsignal Inc. Low stress optical waveguide having conformal cladding and fixture for precision optical interconnects
US6095697A (en) * 1998-03-31 2000-08-01 Honeywell International Inc. Chip-to-interface alignment
US6690845B1 (en) 1998-10-09 2004-02-10 Fujitsu Limited Three-dimensional opto-electronic modules with electrical and optical interconnections and methods for making
US6611635B1 (en) 1998-10-09 2003-08-26 Fujitsu Limited Opto-electronic substrates with electrical and optical interconnections and methods for making
US6684007B2 (en) 1998-10-09 2004-01-27 Fujitsu Limited Optical coupling structures and the fabrication processes
US6845184B1 (en) 1998-10-09 2005-01-18 Fujitsu Limited Multi-layer opto-electronic substrates with electrical and optical interconnections and methods for making
US6343171B1 (en) 1998-10-09 2002-01-29 Fujitsu Limited Systems based on opto-electronic substrates with electrical and optical interconnections and methods for making
US6785447B2 (en) 1998-10-09 2004-08-31 Fujitsu Limited Single and multilayer waveguides and fabrication process
US6706546B2 (en) 1998-10-09 2004-03-16 Fujitsu Limited Optical reflective structures and method for making
US6588949B1 (en) * 1998-12-30 2003-07-08 Honeywell Inc. Method and apparatus for hermetically sealing photonic devices
TW460717B (en) 1999-03-30 2001-10-21 Toppan Printing Co Ltd Optical wiring layer, optoelectric wiring substrate mounted substrate, and methods for manufacturing the same
US7004644B1 (en) 1999-06-29 2006-02-28 Finisar Corporation Hermetic chip-scale package for photonic devices
US6583902B1 (en) 1999-12-09 2003-06-24 Alvesta, Inc. Modular fiber-optic transceiver
US6792178B1 (en) 2000-01-12 2004-09-14 Finisar Corporation Fiber optic header with integrated power monitor
JP2001274528A (ja) 2000-01-21 2001-10-05 Fujitsu Ltd 薄膜デバイスの基板間転写方法
US7058245B2 (en) 2000-04-04 2006-06-06 Waveguide Solutions, Inc. Integrated optical circuits
US6619858B1 (en) 2000-05-20 2003-09-16 Sun Microsystems, Inc. Optical interconnect
US6636671B2 (en) * 2000-12-19 2003-10-21 Intel Corporation Markings for aligning fiber optic bundle
US6788847B2 (en) * 2001-04-05 2004-09-07 Luxtera, Inc. Photonic input/output port
GB2379283B (en) * 2001-05-24 2004-10-27 Sun Microsystems Inc Optical interconnect
US6922508B2 (en) * 2001-08-17 2005-07-26 Fujitsu Limited Optical switching apparatus with adiabatic coupling to optical fiber
US6898343B2 (en) 2001-08-17 2005-05-24 Fujitsu Limited Optical switching apparatus and method for fabricating
US7446261B2 (en) 2001-09-06 2008-11-04 Finisar Corporation Flexible circuit boards with tooling cutouts for optoelectronic modules
US7439449B1 (en) 2002-02-14 2008-10-21 Finisar Corporation Flexible circuit for establishing electrical connectivity with optical subassembly
JP4007113B2 (ja) * 2002-08-01 2007-11-14 富士ゼロックス株式会社 アライメントマーク付き高分子光導波路及び積層型高分子光導波路の製造方法
US7526207B2 (en) 2002-10-18 2009-04-28 Finisar Corporation Flexible circuit design for improved laser bias connections to optical subassemblies
US7184617B2 (en) * 2004-03-12 2007-02-27 Matsushita Electric Industrial Co., Ltd. Portable device
US7130511B2 (en) * 2004-03-30 2006-10-31 Motorola, Inc. Flexible active signal cable
US7275937B2 (en) 2004-04-30 2007-10-02 Finisar Corporation Optoelectronic module with components mounted on a flexible circuit
US7311240B2 (en) 2004-04-30 2007-12-25 Finisar Corporation Electrical circuits with button plated contacts and assembly methods
US7425135B2 (en) * 2004-04-30 2008-09-16 Finisar Corporation Flex circuit assembly
JP3906870B2 (ja) * 2004-06-25 2007-04-18 オムロン株式会社 フィルム光導波路の製造方法
US7629537B2 (en) * 2004-07-09 2009-12-08 Finisar Corporation Single layer flex circuit
US7343060B2 (en) * 2005-03-04 2008-03-11 Fuji Xerox Co., Ltd. Light transmission and reception module, sub-mount, and method of manufacturing the sub-mount
GB2426831B (en) * 2005-06-01 2007-04-25 Xyratex Tech Ltd An optical connector, a communication system and a method of connecting a user circuit to an optical backplane
WO2007010184A1 (en) * 2005-07-15 2007-01-25 Xyratex Technology Limited Optical printed circuit board and manufacturing method
CN101401332B (zh) * 2006-03-06 2012-05-30 莫列斯公司 光纤数据链
JP5156502B2 (ja) * 2007-06-26 2013-03-06 パナソニック株式会社 光モジュール
US7724992B2 (en) 2007-10-29 2010-05-25 Corning Incorporated Glass-based micropositioning systems and methods
US7627204B1 (en) * 2007-11-02 2009-12-01 National Semiconductor Corporation Optical-electrical flex interconnect using a flexible waveguide and flexible printed circuit board substrate
US7684663B2 (en) * 2007-11-02 2010-03-23 National Semiconductor Corporation Coupling of optical interconnect with electrical device
CN101981482B (zh) * 2008-03-28 2013-03-13 惠普发展公司,有限责任合伙企业 柔性光学互连件
KR101173983B1 (ko) * 2008-12-23 2012-08-16 한국전자통신연구원 유연성 도파로 및 광 연결 어셈블리
US8755655B2 (en) * 2009-09-22 2014-06-17 Oracle America, Inc. Edge-coupled optical proximity communication
WO2012049273A1 (en) * 2010-10-14 2012-04-19 Rwth Aachen Laser to chip coupler
JP2013050651A (ja) * 2011-08-31 2013-03-14 Omron Corp 光導波路、光伝送モジュールおよび電子機器
US8534927B1 (en) 2012-03-23 2013-09-17 International Business Machines Corporation Flexible fiber to wafer interface
US9243784B2 (en) 2012-12-20 2016-01-26 International Business Machines Corporation Semiconductor photonic package
US9400356B2 (en) 2013-03-14 2016-07-26 International Business Machines Corporation Fiber pigtail with integrated lid
US8923665B2 (en) 2013-03-15 2014-12-30 International Business Machines Corporation Material structures for front-end of the line integration of optical polarization splitters and rotators
JP6798996B2 (ja) * 2015-02-18 2020-12-09 テクニッシュ ウニバルシテイト アイントホーフェン 光集積回路の特性評価及びパッケージ化のためのマルチポート光学プローブ
US11327225B2 (en) * 2016-04-29 2022-05-10 Arizona Board Of Regents On Behalf Of The University Of Arizona Optical printed circuit board with polymer array stitch
JP6959731B2 (ja) * 2016-11-30 2021-11-05 日東電工株式会社 光電気混載基板
JP2023056060A (ja) * 2020-03-25 2023-04-19 住友電気工業株式会社 光コネクタ、光ハーネスおよび車載通信システム
US11698308B2 (en) * 2020-10-05 2023-07-11 Openlight Photonics, Inc. Optical temperature measurements in photonic circuits
US11726383B2 (en) * 2020-10-14 2023-08-15 California Institute Of Technology Modular hybrid optical phased arrays

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4092061A (en) * 1976-12-29 1978-05-30 International Business Machines Corp. Side-coupling of light for an optical fiber
JPS63280206A (ja) * 1987-05-13 1988-11-17 Nec Corp 光接続回路
DE68914000T2 (de) * 1988-01-05 1994-07-07 British Telecomm Optischer Leistungsbegrenzer.
DE3910710A1 (de) * 1989-04-03 1990-10-04 Standard Elektrik Lorenz Ag Optisch-elektrische mehrfachverbindung
KR920005445B1 (ko) * 1989-08-10 1992-07-04 한국과학기술원 광도파로 제작방법 및 구조
US5048907A (en) * 1990-02-23 1991-09-17 Amoco Corporation Electric field induced quantum well waveguides
US5122852A (en) * 1990-04-23 1992-06-16 Bell Communications Research, Inc. Grafted-crystal-film integrated optics and optoelectronic devices
GB9014639D0 (en) * 1990-07-02 1990-08-22 British Telecomm Optical component packaging
US5157748A (en) * 1990-09-28 1992-10-20 Siemens Aktiengesellschaft Controllable integrated optical directional coupler
US5123078A (en) * 1990-11-09 1992-06-16 National Semiconductor Corp. Optical interconnects
US5125054A (en) * 1991-07-25 1992-06-23 Motorola, Inc. Laminated polymer optical waveguide interface and method of making same
US5249245A (en) * 1992-08-31 1993-09-28 Motorola, Inc. Optoelectroinc mount including flexible substrate and method for making same
US5253311A (en) * 1992-11-02 1993-10-12 The United States Of America As Represented By The Secretary Of The Army Device and method for performing optical coupling without pigtails
JP3405560B2 (ja) * 1993-05-27 2003-05-12 京セラミタ株式会社 ドラムチャッキング装置

Also Published As

Publication number Publication date
WO1994015235A1 (en) 1994-07-07
EP0628175A1 (de) 1994-12-14
US5375184A (en) 1994-12-20
DE69318293T2 (de) 1998-11-12
DE69318293D1 (de) 1998-06-04

Similar Documents

Publication Publication Date Title
EP0628175B1 (de) Selbstausrichtender flexibler optischer koppler
KR960014123B1 (ko) 광도파로와 광파이버의 접속방법
EP1784669B1 (de) Optische anordnung mit optoelektronischer geräteausrichtung
US6118917A (en) Optical fiber passive alignment apparatus using alignment platform
US5371820A (en) Optical hybrid motherboard interconnection system and method of assembling same
EP0309102B1 (de) Mikrooptisches Bausteinsystem und Herstellungsverfahren
US6986608B2 (en) Passive alignment connection for fiber optics
US6647184B2 (en) Optical waveguide device and method of manufacturing the same
US11460637B2 (en) Optical connection substrates for passive fiber to waveguide coupling
US7054523B2 (en) Optical waveguide member and optical module
US5535295A (en) Coupling structure for waveguide connection and process of forming the same
JPH11271562A (ja) 光学素子を光学集積回路に取付ける受動的方法と該方法を実施するためのテンプレ―ト
EP2083301B1 (de) Herstellungsverfahren für eine Lichtwellenleitervorrichtung
US20060193560A1 (en) Coupling structure between a fiber and a planar lightwave circuit (PLC) and manufacturing method therefor
KR100265795B1 (ko) 광도파로칩
JP3151699B2 (ja) 光回路部品の作製方法
US5640477A (en) Electro-optical component alignment technique
US20020164129A1 (en) Optical fiber passive alignment fixture
US5280550A (en) Method of coupling an optical fiber to an optoelectronic component and connector devices obtained thereby
US5879571A (en) Lensed planar optical waveguides for packaging opto-electronic devices
JPH01261604A (ja) 光結合装置
JP2002357731A (ja) 光導波路デバイス用チップ及びその製造方法並びに光導波路デバイス
JP2943629B2 (ja) 光導波路型モジュールとその配列体及びその製造方法
Barry et al. Highly efficient coupling between single-mode fiber and polymer optical waveguides
JP2001154035A (ja) シリコン基板及びシリコン基板モジュール

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 19940812

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): DE FR GB

17Q First examination report despatched

Effective date: 19960925

GRAG Despatch of communication of intention to grant

Free format text: ORIGINAL CODE: EPIDOS AGRA

GRAG Despatch of communication of intention to grant

Free format text: ORIGINAL CODE: EPIDOS AGRA

GRAG Despatch of communication of intention to grant

Free format text: ORIGINAL CODE: EPIDOS AGRA

GRAH Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOS IGRA

GRAH Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOS IGRA

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): DE FR GB

REF Corresponds to:

Ref document number: 69318293

Country of ref document: DE

Date of ref document: 19980604

ET Fr: translation filed
PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

26N No opposition filed
REG Reference to a national code

Ref country code: GB

Ref legal event code: IF02

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: GB

Payment date: 20101123

Year of fee payment: 18

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: FR

Payment date: 20111205

Year of fee payment: 19

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 20111230

Year of fee payment: 19

GBPC Gb: european patent ceased through non-payment of renewal fee

Effective date: 20121216

REG Reference to a national code

Ref country code: FR

Ref legal event code: ST

Effective date: 20130830

REG Reference to a national code

Ref country code: DE

Ref legal event code: R119

Ref document number: 69318293

Country of ref document: DE

Effective date: 20130702

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: DE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20130702

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GB

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20121216

Ref country code: FR

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20130102