EP0613050A3 - Universaler negativ arbeitender Photoresist. - Google Patents
Universaler negativ arbeitender Photoresist. Download PDFInfo
- Publication number
- EP0613050A3 EP0613050A3 EP94480003A EP94480003A EP0613050A3 EP 0613050 A3 EP0613050 A3 EP 0613050A3 EP 94480003 A EP94480003 A EP 94480003A EP 94480003 A EP94480003 A EP 94480003A EP 0613050 A3 EP0613050 A3 EP 0613050A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- negative tone
- tone photoresist
- universal negative
- universal
- photoresist
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
- C09B3/00—Dyes with an anthracene nucleus condensed with one or more carbocyclic rings
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
- G03F7/033—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polymers obtained by reactions only involving carbon-to-carbon unsaturated bonds, e.g. vinyl polymers
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
- G03F7/105—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having substances, e.g. indicators, for forming visible images
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/38—Treatment before imagewise removal, e.g. prebaking
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Chemical & Material Sciences (AREA)
- Structural Engineering (AREA)
- Architecture (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials For Photolithography (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US23401 | 1987-03-09 | ||
US2340193A | 1993-02-26 | 1993-02-26 |
Publications (3)
Publication Number | Publication Date |
---|---|
EP0613050A2 EP0613050A2 (de) | 1994-08-31 |
EP0613050A3 true EP0613050A3 (de) | 1995-07-05 |
EP0613050B1 EP0613050B1 (de) | 1997-03-26 |
Family
ID=21814865
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP94480003A Revoked EP0613050B1 (de) | 1993-02-26 | 1994-01-14 | Universaler negativ arbeitender Photoresist |
Country Status (5)
Country | Link |
---|---|
EP (1) | EP0613050B1 (de) |
JP (1) | JP2708363B2 (de) |
KR (1) | KR940020179A (de) |
DE (1) | DE69402232T2 (de) |
TW (1) | TW338119B (de) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB9700877D0 (en) * | 1997-01-17 | 1997-03-05 | Horsell Graphic Ind Ltd | Lithographic plates |
US6077641A (en) * | 1997-01-17 | 2000-06-20 | Kodak Polychrome Graphics Llc | Lithographic plates |
JP3810510B2 (ja) * | 1997-03-26 | 2006-08-16 | 富士写真フイルム株式会社 | ネガ型画像記録材料及び平版印刷版原版 |
TW419615B (en) * | 1997-09-18 | 2001-01-21 | Ibm | Photo crosslinkable, aqueous base developable negative photoresist composition and method for use thereof |
US6455228B1 (en) | 1999-08-25 | 2002-09-24 | Tokyo Ohka Kogyo Co., Ltd. | Multilayered body for photolithographic patterning |
TWI289238B (en) * | 2000-01-13 | 2007-11-01 | Fujifilm Corp | Negative resist compositions using for electronic irradiation |
US6482567B1 (en) * | 2000-08-25 | 2002-11-19 | Shipley Company, L.L.C. | Oxime sulfonate and N-oxyimidosulfonate photoacid generators and photoresists comprising same |
JP4645789B2 (ja) | 2001-06-18 | 2011-03-09 | Jsr株式会社 | ネガ型感放射線性樹脂組成物 |
WO2003045915A1 (fr) | 2001-11-30 | 2003-06-05 | Wako Pure Chemical Industries, Ltd. | Compose de bisimide, generateur d'acide et composition de reserve contenant ledit compose, procede de formation de motif au moyen de ladite composition |
US7714065B2 (en) | 2003-12-17 | 2010-05-11 | The Procter & Gamble Company | Polymeric structures comprising a hydrophile/lipophile system |
US7426775B2 (en) | 2003-12-17 | 2008-09-23 | The Procter + Gamble Company | Polymeric structures comprising a hydrophile/lipophile system |
JP4396849B2 (ja) | 2005-01-21 | 2010-01-13 | 信越化学工業株式会社 | ネガ型レジスト材料及びパターン形成方法 |
EP2109005A1 (de) * | 2008-04-07 | 2009-10-14 | Stichting Dutch Polymer Institute | Verfahren zur Herstellung einer Polymerreliefstruktur |
JP6369132B2 (ja) * | 2013-06-28 | 2018-08-08 | 住友ベークライト株式会社 | ネガ型感光性樹脂組成物、硬化膜、電子装置およびポリマー |
JP6122754B2 (ja) | 2013-09-30 | 2017-04-26 | 富士フイルム株式会社 | 感活性光線性又は感放射線性樹脂組成物、感活性光線性又は感放射線性膜、感活性光線性又は感放射線性膜を備えたマスクブランクス、パターン形成方法、及び電子デバイスの製造方法 |
JP6209103B2 (ja) | 2014-02-25 | 2017-10-04 | 富士フイルム株式会社 | 感活性光線性又は感放射線性樹脂組成物、それを用いたレジスト膜、レジスト塗布マスクブランクス、レジストパターン形成方法、及び、フォトマスク |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0441524A2 (de) * | 1990-02-07 | 1991-08-14 | Minnesota Mining And Manufacturing Company | Polymere mit Halomethyl-1,3,5-triazin-Funktionen |
EP0487794A1 (de) * | 1990-11-27 | 1992-06-03 | Sony Corporation | Verfahren zur Herstellung von Photolackmustern |
EP0537524A1 (de) * | 1991-10-17 | 1993-04-21 | Shipley Company Inc. | Strahlungsempfindliche Zusammensetzungen und Verfahren |
EP0543761A1 (de) * | 1991-11-22 | 1993-05-26 | International Business Machines Corporation | Vernetzbare, wässrig entwickelbare Photoresistzusammensetzung und Verfahren zu deren Verwendung |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01293339A (ja) * | 1988-05-23 | 1989-11-27 | Tosoh Corp | フォトレジスト組成物 |
JPH0215270A (ja) * | 1988-07-04 | 1990-01-18 | Tosoh Corp | フォトレジスト組成物 |
KR900005226A (ko) * | 1988-09-29 | 1990-04-13 | 윌리엄 비이 해리스 | 감광성 조성물 및 양화 상과 음화 상의 생성방법 |
DE3943413A1 (de) * | 1989-12-30 | 1991-07-04 | Basf Ag | Strahlungsempfindliches gemisch und verfahren zur herstellung von reliefstrukturen |
JP3000740B2 (ja) * | 1991-07-26 | 2000-01-17 | 日本ゼオン株式会社 | レジスト組成物 |
-
1994
- 1994-01-14 EP EP94480003A patent/EP0613050B1/de not_active Revoked
- 1994-01-14 DE DE69402232T patent/DE69402232T2/de not_active Revoked
- 1994-02-18 JP JP6021226A patent/JP2708363B2/ja not_active Expired - Fee Related
- 1994-02-24 KR KR1019940003276A patent/KR940020179A/ko not_active Application Discontinuation
- 1994-05-19 TW TW083104557A patent/TW338119B/zh active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0441524A2 (de) * | 1990-02-07 | 1991-08-14 | Minnesota Mining And Manufacturing Company | Polymere mit Halomethyl-1,3,5-triazin-Funktionen |
EP0487794A1 (de) * | 1990-11-27 | 1992-06-03 | Sony Corporation | Verfahren zur Herstellung von Photolackmustern |
EP0537524A1 (de) * | 1991-10-17 | 1993-04-21 | Shipley Company Inc. | Strahlungsempfindliche Zusammensetzungen und Verfahren |
EP0543761A1 (de) * | 1991-11-22 | 1993-05-26 | International Business Machines Corporation | Vernetzbare, wässrig entwickelbare Photoresistzusammensetzung und Verfahren zu deren Verwendung |
Also Published As
Publication number | Publication date |
---|---|
JP2708363B2 (ja) | 1998-02-04 |
EP0613050B1 (de) | 1997-03-26 |
DE69402232D1 (de) | 1997-04-30 |
JPH06301200A (ja) | 1994-10-28 |
EP0613050A2 (de) | 1994-08-31 |
DE69402232T2 (de) | 1997-09-18 |
KR940020179A (ko) | 1994-09-15 |
TW338119B (en) | 1998-08-11 |
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Legal Events
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PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
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