EP0585893B1 - Dispositif et procédé pour la mesure très précise de la distance de surfaces - Google Patents

Dispositif et procédé pour la mesure très précise de la distance de surfaces Download PDF

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Publication number
EP0585893B1
EP0585893B1 EP93113944A EP93113944A EP0585893B1 EP 0585893 B1 EP0585893 B1 EP 0585893B1 EP 93113944 A EP93113944 A EP 93113944A EP 93113944 A EP93113944 A EP 93113944A EP 0585893 B1 EP0585893 B1 EP 0585893B1
Authority
EP
European Patent Office
Prior art keywords
angle
light
reflected
pencil
internal reflection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP93113944A
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German (de)
English (en)
Other versions
EP0585893A1 (fr
Inventor
Guido Dipl.-Phys. Wurbs
Bertold Dipl.-Ing. Krüger
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BETR FORSCH INST ANGEW FORSCH
BFI VDEH Institut fuer Angewandte Forschung GmbH
Original Assignee
BETR FORSCH INST ANGEW FORSCH
BFI VDEH Institut fuer Angewandte Forschung GmbH
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Filing date
Publication date
Application filed by BETR FORSCH INST ANGEW FORSCH, BFI VDEH Institut fuer Angewandte Forschung GmbH filed Critical BETR FORSCH INST ANGEW FORSCH
Publication of EP0585893A1 publication Critical patent/EP0585893A1/fr
Application granted granted Critical
Publication of EP0585893B1 publication Critical patent/EP0585893B1/fr
Anticipated expiration legal-status Critical
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/46—Indirect determination of position data
    • G01S17/48—Active triangulation systems, i.e. using the transmission and reflection of electromagnetic waves other than radio waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/88—Lidar systems specially adapted for specific applications
    • G01S17/89—Lidar systems specially adapted for specific applications for mapping or imaging

Definitions

  • the invention relates to a method in the preamble of Claim 1 specified type. Furthermore, the invention relates to a device according to the preamble of claim 6.
  • Such a method with device is according to DE-OS 34 35 033 known. Then the procedure for height or distance Measurements in the plane of the object to be measured without having to focus on the imaging optics, if the arrangement was made according to the conditions of Scheimpflug's rule becomes. Above all, this allows the accuracy of the determination improve if there is a shift in the light spot on the photoreceiver.
  • the light spot to be kept as small as possible is included generated an edge that mapped onto the surface to be measured and from there it focuses on the photo receiver.
  • the laser By using the laser as a light source, it occurs on rough surfaces to a strong noise of the measured values, especially through many, so-called speckles in the one shown on the photo receiver Spot of light.
  • the resulting noise is the stronger, the smaller the light spot on the surface to be measured.
  • the diameter is a few ⁇ m, from which Basically a laser light is to be used.
  • the invention is based on the task that Laser or speckles noise of the measured values at one To reduce triangulation methods in such a way that Even with very small light spot diameters, changes in distance can measure with high accuracy without thereby a loss of information due to the average To have to buy. In this way, everyone should Things the opportunity to be created, the roughness to be determined by such a measurement.
  • the invention thus consists in the fact that the Scattered / reflected light bundles with optical means in two light beams with approximately the same area distribution of the Intensities are broken down transversely to their direction of radiation. Under these Prerequisites there is an intensity relationship between the two Sub-beam, which is from the main beam direction of the surface scattered / reflected light beam. In the sense of the invention it is then photodiodic to one or both sub-bundles detect and evaluate as a measure of roughness.
  • Figure 1 shows a laser diode 1, the collimated laser beam 2 of an imaging optic 3 on the sample surface 4 to be measured is judged.
  • the scattered / reflected light beam 5 is then from a collimator 6 into an almost parallel light beam 7 reshaped.
  • This light beam 7 then strikes a deflecting prism 8, that this bundle in two sub-bundles 9, 10 with approximately the same Intensity area distribution transverse to their main beam direction disassembled. Looking at the main beam direction of the light beam 7, so is the angle of incidence on the hypotenuse surface of the deflecting prism 8 preferably in the transition to total reflection.
  • the intensity ratio the total intensities (totaled over the cross-section) of the two sub-bundles 9, 10 is then only from the angle of incidence, thus from the main beam direction of the scattered / reflected from the surface 4 Beam 5 dependent. Then that will reflected sub-bundle a first and / or the transmitted sub-bundle fed to a second photo receiver.
  • the electrical Signals from the two photo receivers 11, 12 can be used so that the signal of the one of the two photodiodes 11 or 12 e.g. by changing the Light intensity of the laser diode 1 is kept at a constant value and the signal of the other photodiode 11 or 12 is displayed becomes. In this way, changes in the reflection of the surface 4 fix.
  • Another option is the sum of the two Keeping photodiodes constant and displaying the difference.
  • Figure 2 shows, as in embodiment 1, a laser diode 1, the collimated laser beam 2 of an imaging optics 3 the sample surface 4 to be measured and the scattered / reflected Beam 5 then from a collimator 6 in almost parallel light beam 7 is formed.
  • the light beam 7 will then through a beam splitter 13 into two equal sub-beams disassembled, which then in each case on the hyotenus surfaces of the two downstream Prisms 14, 15 and 16, 17 are deflected.
  • the angle of incidence on the hypotenuse surfaces of the deflecting prisms 14, 15 and 16, 17 are preferably in the transition to total reflection.
  • Prisms 14, 15 and 16, 17 are set so that when the angle of the Beam 7 the angle of incidence of a sub-beam the total reflection angle approach while the other's angle of incidence Remove partial bundle from the total reflection angles.
  • the two of them Sub-beams reflected twice are then each via a lens 18, 19 fed to a photodiode 20, 21, the transmitted components are not used in this embodiment.
  • the signal processing happens as in embodiment 1.
  • the adjustability the prism sets achieved free choice of the working point on the transmission reflection curve enables optimal utilization the sensitivity of the process.

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Centrifugal Separators (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Transition And Organic Metals Composition Catalysts For Addition Polymerization (AREA)
  • Mechanical Operated Clutches (AREA)
  • Control Of Combustion (AREA)

Claims (8)

  1. Procédé pour la mesure de distance, sans contact, pour la détermination du profil, en particulier de la rugosité de surfaces, dans lequel le rayon de mesure (2) d'un laser (1) est dirigé sur la surface (4) à mesurer, et les rayons lumineux (5) dispersés/réfléchis par la surface (4) sont collectés par une optique de représentation (6), les rayons lumineux (7) étant selon l'angle d'incidence plus ou moins réfléchis ou transmis sur une surface limite (8, 15, 16) d'un milieu diélectrique à proximité de l'angle de réflexion totale et les rayons lumineux (9, 10) réfléchis, respectivement transmis, étant respectivement détectés à l'aide de photocapteurs (11, 12, 20, 21), caractérisé en ce que le rayon de mesure (2) du laser (1) touche par rapport à l'axe de l'optique de représentation (3) sous un angle déterminé, la surface (4) à mesurer, de manière que les rayons lumineux (7) touchent sensiblement parallèlement la surface limite (8, 15, 16) du milieu diélectrique sensiblement parallèlement les uns aux autres.
  2. Procédé selon la revendication 1, caractérisé en ce que le signal de l'un des deux photocapteurs (11, 12, 20, 21) est maintenu à une valeur constante par modification de l'intensité du rayon de mesure (2) et le signal de l'autre photocapteur (11, 12, 20, 21) est soumis à affichage, ou bien la somme des signaux des deux photocapteurs (11, 12; 20, 21) est maintenue constante par modification de l'intensité du rayon de mesure (2) et la différence étant mise en affichage.
  3. Procédé selon la revendication 1 ou 2, caractérisé en ce que le rayon de mesure (2) est divisé dans un diviseur de rayon (13) en deux faisceaux lumineux, dont chacun tombe, après décomposition, sur une surface limite (15, 16), avec une transition verre/air constituée par un prisme (14, 17), à proximité de l'angle de réflexion totale, les prismes (14, 17) étant réglés de manière que lors de la modification d'angle du faisceau lumineux constitué des rayons lumineux (7) parallèles réfléchis, les angles d'incidence d'un faisceau partiel s'approchent des angles de réflexion totale, tandis que les angles d'incidence de l'autre faisceau partiel s'éloignent des angles de réflexion totale.
  4. Procédé selon la revendication 3, caractérisé en ce que les surfaces limites (15, 16) des deux transitions verre/air sont orientées l'une par rapport à l'autre sous un angle qui au maximum est égal à la somme de leurs angles de réflexion totale, en plus de l'angle d'ouverture des faisceaux partiels.
  5. Procédé selon la revendication 4, caractérisé en ce que les fractions réfléchies des deux faisceaux lumineux sont soumises à la détection par des photocapteurs (20, 21), leurs signaux étant amenés à un amplificateur de différence.
  6. Procédé de mesure de distance sans contact pour la détermination du profil, en particulier de la rugosité de surfaces, avec un laser (1) destiné à émettre un rayon laser (2) par l'intermédiaire d'une optique de représentation (3), sur la surface (4) à mesurer, un collimateur (6), qui transforme les rayons lumineux (5) dispersés/réfléchis sur la surface (4) à mesurer, en un faisceau lumineux (7) à peu près parallèle, un moyen optique destiné à décomposer le faisceau lumineux (7), dont la surface limite (8, 15, 16) est disposée près de l'angle limite de réflexion totale, quant au cheminement du rayon, au moins deux photocapteurs (11, 12, 20, 21) pour la détection réfléchi et transmis sur la surface limite (8, 15, 16) du moyen optique destiné à effectuer la décomposition et un dispositif de traitement du signal, relié aux photocapteurs (11, 12, 20, 21), caractérisé en ce que le laser (1) est dirigé de manière que le rayon de mesure (2) du laser touche la surface (4) à mesurer sous un angle déterminé par rapport à l'axe de l'optique de représentation (6), de manière que les rayons lumineux (7) touchent la surface (8, 15, 16) du moyen optique de décomposition du faisceau lumineux (7) en étant sensiblement parallèles entre eux.
  7. Dispositif selon la revendication 6, caractérisé en ce qu'est prévu comme moyen optique pour la décomposition du faisceau lumineux (7), un prisme de renvoi (8) sur la surface d'hypoténuse duquel le faisceau lumineux dispersé/réfléchi est dirigé sous un angle proche de l'angle limite de réflexion totale.
  8. Dispositif selon la revendication 6, caractérisé en ce qu'est prévu un diviseur de rayon (13), auquel sont associés côté sortie deux prismes (14, 17) montés en aval, sur les surfaces d'hypoténuse desquels les faisceaux partiels sont dirigés sous un angle d'incidence qui est proche de la transition vis-à-vis de l'angle de réflexion totale, et en ce que les deux faisceaux partiels ayant été réfléchis deux fois sont amenés chaque fois à une lentille (18, 19) et chaque fois à un photocapteur (20, 21), qui soumettent leurs signaux à une évaluation.
EP93113944A 1992-09-02 1993-09-01 Dispositif et procédé pour la mesure très précise de la distance de surfaces Expired - Lifetime EP0585893B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE4229313A DE4229313A1 (de) 1992-09-02 1992-09-02 Verfahren und Vorrichtung zur hochgenauen Abstandsmessung von Oberflächen
DE4229313 1992-09-02

Publications (2)

Publication Number Publication Date
EP0585893A1 EP0585893A1 (fr) 1994-03-09
EP0585893B1 true EP0585893B1 (fr) 1998-11-25

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Application Number Title Priority Date Filing Date
EP93113944A Expired - Lifetime EP0585893B1 (fr) 1992-09-02 1993-09-01 Dispositif et procédé pour la mesure très précise de la distance de surfaces

Country Status (5)

Country Link
EP (1) EP0585893B1 (fr)
JP (1) JP4130236B2 (fr)
AT (1) ATE173814T1 (fr)
DE (2) DE4229313A1 (fr)
FI (1) FI933818A (fr)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4420293A1 (de) * 1994-06-10 1995-12-14 Dresden Messelektronik Gmbh Vorrichtung zur berührungslosen Bestimmung des Oberflächenprofils eines Werkstücks
DE4445535A1 (de) * 1994-12-20 1996-06-27 Tr Elektronic Gmbh Optischer Sensor zur berührungslosen Abstandserfassung
US6428171B1 (en) 1997-05-16 2002-08-06 Olympus Optical Co., Ltd. Height measuring apparatus
IL180964A (en) * 2002-09-05 2010-11-30 Inventio Ag Drive engine for a lift installation and method of mounting a drive engine
DE102010033373A1 (de) 2010-08-04 2012-02-09 Inficon Gmbh Lecksuchgerät
JP2014232005A (ja) 2013-05-28 2014-12-11 富士ゼロックス株式会社 計測装置
JP2017003461A (ja) 2015-06-11 2017-01-05 東芝テック株式会社 距離測定装置
ES2654805T3 (es) * 2015-08-14 2018-02-15 Sick Ag Sensor óptico
DE102017204550A1 (de) * 2017-03-20 2018-09-20 Robert Bosch Gmbh Senderoptik für ein LiDAR-System, LiDAR-System und Arbeitsvorrichtung
DE102018128269A1 (de) 2018-11-12 2020-05-14 Monti-Werkzeuge Gmbh Verfahren zur Bearbeitung einer Oberfläche eines Werkstückes
CN113077506B (zh) * 2021-06-04 2021-08-10 深圳联合安防科技有限公司 基于图像处理的物体安全监测方法及控制端

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5990007A (ja) * 1982-11-16 1984-05-24 Olympus Optical Co Ltd 光学式寸度測定装置

Also Published As

Publication number Publication date
ATE173814T1 (de) 1998-12-15
EP0585893A1 (fr) 1994-03-09
JP4130236B2 (ja) 2008-08-06
DE4229313A1 (de) 1994-03-03
FI933818A0 (fi) 1993-09-01
JPH06213658A (ja) 1994-08-05
FI933818A (fi) 1994-03-03
DE59309152D1 (de) 1999-01-07

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