EP0548084A1 - Deposition sous vide d'une couche sombre sur un substrat - Google Patents

Deposition sous vide d'une couche sombre sur un substrat

Info

Publication number
EP0548084A1
EP0548084A1 EP91911523A EP91911523A EP0548084A1 EP 0548084 A1 EP0548084 A1 EP 0548084A1 EP 91911523 A EP91911523 A EP 91911523A EP 91911523 A EP91911523 A EP 91911523A EP 0548084 A1 EP0548084 A1 EP 0548084A1
Authority
EP
European Patent Office
Prior art keywords
metal compound
coating
substrate
oxynitride
nitride
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP91911523A
Other languages
German (de)
English (en)
Other versions
EP0548084A4 (en
Inventor
Chong T. Wan
Douglas L. Chambers
Guy T. Susi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
XYTORR Corp
Original Assignee
XYTORR Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by XYTORR Corp filed Critical XYTORR Corp
Publication of EP0548084A1 publication Critical patent/EP0548084A1/fr
Publication of EP0548084A4 publication Critical patent/EP0548084A4/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0015—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterized by the colour of the layer
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/225—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0635—Carbides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0664—Carbonitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0676—Oxynitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/081—Oxides of aluminium, magnesium or beryllium
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/083—Oxides of refractory metals or yttrium
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C03C2217/229—Non-specific enumeration
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/28—Other inorganic materials
    • C03C2217/281—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/28—Other inorganic materials
    • C03C2217/282—Carbides, silicides
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/10—Deposition methods
    • C03C2218/15—Deposition methods from the vapour phase

Definitions

  • the present invention relates generally to vacuum vapor deposition processes and coatings for primarily glass or plastic substrates, and more particularly, to a dark coating which provides a decorative and/or functional border or band on glass, plastic or other transparent article for automotive win ⁇ nwR an windshields including glass roofs, aircraft windows and windshields, architectural applications, computer screens, display panels, glass freezer doors, microwave oven glass doors, home or office skylights, mirrors, marine vehicle windows, framed glass as well as many other similar applications.
  • U.S. Patent No. 4,684,388 to Boaz discloses a method for forming a glass sheet with a UV-base ceramic paint l-hprsnn.
  • ⁇ .PT-RIT ⁇ r paint- compositions are generally well-known in the art. These paints usually include a mixture of metal oxides which act as a coloring agent.
  • Such ceramic paint compositions include a low melting point glass frit. This frit bonds the mixture of metal oxides to the glass sheet and insures that the mixture remains bonded after the glass sheet has been cooled to room temperature.
  • the metal oxide frits and enamels are heated to a temperature in a range up to 1300°F.
  • a zinc metal powder is mixed with stannous oxide and the aforementioned materials to form a liquid type paint which can be silkscreen printed.
  • Ceramic base paints also contain volatiles which must be driven off.
  • Non-reactive metal oxides are used such as chrome, cobalt, nickel, manganese, iron, and copper. Such mixtures are commonly known as black oxide powders. Other mixtures of oxides may be used in order to get different colors which is well-known in the art.
  • Boaz uses the addition of the stannous oxide powder to the zinc metal powder to prevent sticking of the paint to a forming die. In Boaz the forming die is what comes in contact with the glass and paint during the application of the paint to the glass.
  • Vapor deposition processes are also well known in the art but until now have been used primarily for applying transparent conductive coatings for heated windshields.
  • U.S. Patent No. 4,861,669 to Gillery (incorporated by reference herein) describes one such process called sputtering.
  • vapor deposition processes have not been used for applying dark coatings for various reasons. One reason is that it is difficult to get the dark coating to adhere to a substrate when the coating is applied using this process. Without adhesion the coating may peel off with time.
  • the present invention discloses a way to use a vapor deposition process to apply dark coatings and to get the coatings to adhere to the substrate. Other reasons may be difficulty with, obtaining a dark color using a vapor deposition process or, masking areas of the substrate not to be coated for placing in a vacuum chamber.
  • the present invention provides a coating or film of ceramic carbonitrides, metal oxides, metal nitrides or combinations thereof, deposited by using anyone of three vapor deposition processes known as sputtering, cathodic arc, or ion plating.
  • the coating is applied upon a selected substrate to the thickness necessary to control light transmission and reflectance.
  • an opaque coating 500 Angstroms to 5,000 Angstroms or more is deposited to form an obscured band that light cannot pass through.
  • the coating may be continuous or segmented or even applied in a particular pattern. In some applications, thinner coatings may be desired in which partial light may be transmitted. Oxynitride mixtures are used to change color and light transmission.
  • FIGURE 1 is a perspective view of an automobile windshield having the coating of the present invention
  • FIGURE 2 is a cross-sectional view taken along the section line 2-2 in FIGURE 1.
  • FIGURE 1 there is shown a typical automobile windshield 10 comprising a glass panel 11.
  • the glass panel 11 may have electrical bus bars (not shown) at a top portion 12 and bottom portion 14 of the windshield. These bus bars may be used to transfer electrical current across the windshield, through a conductive coating, to heat, defrost, defog or de-ice the windshield.
  • a dark coating 16 may be applied in a band shape around the border or on other portions or segments of the glass 11 to conceal the bus bars or other assorted components.
  • a windshield 10 panel 11 may typically- contain multiple layers. Starting from outside the • automobile, there is a first surface 18 on a first outside layer 20 of glass. Inside the first layer 20 of glass is a second surface 22 which lies between the first layer 20 of glass and a layer of plastic 24. Inside the layer of plastic 24 s a third surf ⁇ ce 26 which lies between the l3 * "-er of plastic 24 and a second inner layer 28 of glass. Lastly, there is the inside surface 30 of the glass which is inside the automobile.
  • the coating band 16 or border of the present invention is preferably applied to the second surface 22 or the third surface 26. However, it is also feasible to apply the coating to the fourth, inside surface 30 of the second glass layer 28. In case of a single monolithic glass sheet or window the coating band would preferably be applied to the inner surface of the glass or window.
  • any applied coatings 16 is usually not applied across the entire surface of the glass 11, but typically at the edges, when the layers 20, 24, 28 are compressed together, they will tend to bow at the edges if the coating 16 is too thick. This may induce critical stresses.
  • the coating 16 can be applied in a much thinner layer than previous ceramic type paints applied with high temperature firing.
  • the substrate In order to obtain good adhesion of the coating to the substrate, the substrate must be washed. First it is washed with a warm water detergent wash. Then it is rinsed with water followed by rinsing again with deionized water. The substrate is then dried with warm air blown over it. The substrate is then placed in a vacuum chamber and heated or glow discharge cleaned by ionic bombardment in a wet gas as is known in the glass cleaning art. The coating is then applied immediately.
  • the coating may be applied in a DC reactive vacuum sputtering apparatus which uses an ion sputtering method with a shield or mask to protect selected uncoated areas of the glass.
  • This low temperature process allows a very thin, durable coating with no curing required. This translates into less stress in the glass.
  • the coating can be altered to appear black, gray, magenta, golden, brown, bronze, and blue as well as other darker shades.
  • the sputtering process is compatible with the window lamination process currently in use by most windshield manufacturers. Because sputtering does not require high temperatures, or silk screening the application of the coating of the present invention can be accomplished faster by using fewer process steps.
  • the metal rich coating of the present invention may be comprised of a chromium oxide-nitride or oxynitride.
  • Other metal compounds may also be used, such as: oxides, nitrides, carbides, and oxynitrides of base metals chromium, aluminum, titanium, molybdenum, tantalum, tungsten, stainless steel, niobium, and zirconium, and their alloys.
  • the dark color of the coating is obtained by regulating reactive gases which interact with the metal and its compound in the vacuum chamber.
  • the sputtering process also uses argon gas which is non-reactive. Atmospheric air has the three reactive gases which make it suitable for this process.
  • the relative amounts of the. reactive gases mixed with the argon in a metal rich environment are varied to develop different colors. Generally, as the percentage of reactive gases are increased and the thickness of the coating remains the same the color of the coating will lighten (the light transmittance will increase) .

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Surface Treatment Of Glass (AREA)
  • Laminated Bodies (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

Procédé amélioré permettant d'appliquer une couche sombre (16), par exemple une bordure sur un substrat (11) tel que du verre, du plastique, ou tout autre matériau transparent. Le procédé comprend l'utilisation de carbures, d'oxydes et de nitrures métalliques déposés sur le substrat (11) selon un procédé de métallisation sous vide tel qu'un procédé de pulvérisation cathodique. Pour appliquer la couche (16), on peut également utiliser d'autres procédés de métallisation sous vide tels que le plaquage à l'arc cathodique ou le plaquage ionique. Selon cette invention, on applique la couche (16) à des températures beaucoup plus basses que celles nécessaires aux peintures céramiques utilisées en sérigraphie et la couche (16) est beaucoup moins épaisse que lorsqu'on applique une peinture de type céramique. On peut appliquer la couche (16) de telle sorte qu'elle comprend plusieurs couleurs différentes.
EP19910911523 1990-05-01 1991-04-30 A vacuum deposited dark coating on a substrate Pending EP0548084A4 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US51716890A 1990-05-01 1990-05-01
US517168 1990-05-01

Publications (2)

Publication Number Publication Date
EP0548084A1 true EP0548084A1 (fr) 1993-06-30
EP0548084A4 EP0548084A4 (en) 1993-07-28

Family

ID=24058655

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19910911523 Pending EP0548084A4 (en) 1990-05-01 1991-04-30 A vacuum deposited dark coating on a substrate

Country Status (3)

Country Link
EP (1) EP0548084A4 (fr)
CA (1) CA2081912A1 (fr)
WO (1) WO1991017283A1 (fr)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2699164B1 (fr) * 1992-12-11 1995-02-24 Saint Gobain Vitrage Int Procédé de traitement de couches minces à base d'oxyde ou de nitrure métallique.
DE10001381A1 (de) * 2000-01-14 2001-07-19 Hauzer Techno Coating Europ B PVD-Verfahren zur Herstellung einer gefärbten, gegenüber Fingerabdrücken unempfindlichen Beschichtung auf Gegenständen sowie Gegenstände mit einer solchen Beschichtung
ATE544878T1 (de) * 2004-08-06 2012-02-15 Applied Materials Gmbh & Co Kg Vorrichtung und verfahren für die herstellung von gasundurchlässigen schichten
CN102400095A (zh) * 2010-09-16 2012-04-04 鸿富锦精密工业（深圳）有限公司 壳体及其制作方法
CN102477529B (zh) * 2010-11-26 2014-07-16 鸿富锦精密工业（深圳）有限公司 真空镀膜件及其制造方法
DE102011112288A1 (de) * 2011-09-05 2013-03-07 Oerlikon Trading Ag, Trübbach Zierteil für Kraftfahrzeuge
JP6084286B2 (ja) * 2013-03-29 2017-02-22 シチズン時計株式会社 グレー色調層を有する硬質装飾部材
KR102202928B1 (ko) 2017-04-24 2021-01-14 주식회사 엘지화학 투광성 필름 및 이를 포함하는 전기변색소자
CN108914069B (zh) * 2018-08-08 2020-07-31 宁波威霖住宅设施有限公司 Rpvd绿色镀膜工艺

Citations (3)

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Publication number Priority date Publication date Assignee Title
FR2138946A1 (fr) * 1971-05-24 1973-01-05 Ulvac Corp
JPS62138345A (ja) * 1985-12-12 1987-06-22 Seiko Instr & Electronics Ltd カバ−ガラス
DE3724014A1 (de) * 1987-01-17 1988-07-28 Flachglas Ag Kraftfahrzeugscheibe mit aufgebrachtem schwarzen sichtschutzrandstreifen und zumindest einem elektrisch leitenden element

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EP0035906B2 (fr) * 1980-03-10 1989-11-08 Teijin Limited Structure stratifiée transmettant sélectivement la lumière
NO157212C (no) * 1982-09-21 1988-02-10 Pilkington Brothers Plc Fremgangsmaate for fremstilling av belegg med lav emisjonsevne.
DE3316548C2 (de) * 1983-03-25 1985-01-17 Flachglas AG, 8510 Fürth Verfahren zur Beschichtung eines transparenten Substrates
DE3311815C3 (de) * 1983-03-31 1997-12-04 Leybold Ag Verfahren zum Herstellen von Scheiben
US4799745A (en) * 1986-06-30 1989-01-24 Southwall Technologies, Inc. Heat reflecting composite films and glazing products containing the same
US4938857A (en) * 1987-03-26 1990-07-03 Ppg Industries, Inc. Method for making colored metal alloy/oxynitride coatings
US4790922A (en) * 1987-07-13 1988-12-13 Viracon, Inc. Temperable low emissivity and reflective windows

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2138946A1 (fr) * 1971-05-24 1973-01-05 Ulvac Corp
JPS62138345A (ja) * 1985-12-12 1987-06-22 Seiko Instr & Electronics Ltd カバ−ガラス
DE3724014A1 (de) * 1987-01-17 1988-07-28 Flachglas Ag Kraftfahrzeugscheibe mit aufgebrachtem schwarzen sichtschutzrandstreifen und zumindest einem elektrisch leitenden element

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 011, no. 365 (C-460)1987 & JP-A-62 138 345 ( SEIKO INSTR & ELECTRONICS ) 22 June 1987 *
See also references of WO9117283A1 *
SILIKATTECHNIK vol. 39, no. 9, 1988, BERLIN DD pages 316 - 319 G. BEISTER ET AL. 'Zur Herstellung von dekorativen Titannitrid-Schichten auf Glasartikeln durch reaktives DC-Plasmatronsputtern' *

Also Published As

Publication number Publication date
EP0548084A4 (en) 1993-07-28
WO1991017283A1 (fr) 1991-11-14
CA2081912A1 (fr) 1991-11-02

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