EP0480045A1 - Sonde ultrasonique - Google Patents

Sonde ultrasonique Download PDF

Info

Publication number
EP0480045A1
EP0480045A1 EP91906265A EP91906265A EP0480045A1 EP 0480045 A1 EP0480045 A1 EP 0480045A1 EP 91906265 A EP91906265 A EP 91906265A EP 91906265 A EP91906265 A EP 91906265A EP 0480045 A1 EP0480045 A1 EP 0480045A1
Authority
EP
European Patent Office
Prior art keywords
piezoelectric
piezoelectric elements
ultrasonic probe
electromechanical coupling
polymer material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP91906265A
Other languages
German (de)
English (en)
Other versions
EP0480045A4 (en
Inventor
Kohetsu Saitoh
Yasushi Koishihara
Fumika Shinoda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2071085A external-priority patent/JPH03270597A/ja
Priority claimed from JP7108490A external-priority patent/JPH03270599A/ja
Priority claimed from JP2071082A external-priority patent/JPH03270598A/ja
Priority claimed from JP2071083A external-priority patent/JPH03270282A/ja
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Publication of EP0480045A1 publication Critical patent/EP0480045A1/fr
Publication of EP0480045A4 publication Critical patent/EP0480045A4/en
Withdrawn legal-status Critical Current

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
    • B06B1/0622—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface
    • B06B1/0629—Square array
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction

Definitions

  • the present invention relates to an ultrasonic probe used in a sensor for a sonar, an ultrasonic diagnostic apparatus and the like.
  • a piezoelectric element used in an ultrasonic probe of a sonar or an ultrasonic diagnostic apparatus used for water or a living body employs piezoelectric ceramic having uneven thickness as material thereof to obtain a wide frequency band. Further, there has been studied a method of obtaining an ultrasonic image having high resolution by an improved ultrasonic beam pattern with a reduced side lobe level by means of a shape of electrodes provided in the piezoelectric material or of sound absorbing material.
  • This ultrasonic probe includes a plurality of vibration elements arranged in an array to control an ultrasonic beam.
  • an area of each of electrodes of the vibration elements is differed in area or a sound absorbing material provided in a rear surface of the vibration elements is differed in thickness so as to effect weighting (apodization) for reducing unnecessary side lobe level.
  • the ultrasonic probe includes a plurality of vibration elements 1 arranged in an array to control an ultrasonic beam, wherein each of electrodes 2 of the vibration elements 1 is differed in area as shown in Fig. 1(A), or sound absorbing material 4 disposed in a rear surface of vibration elements 3 is differed in thickness as shown in Fig. 1(B) so as to effect weighting (apodization) for reducing unnecessary side lobe level.
  • the present invention is to solve the above conventional problems and it is an object of the present invention to provide an excellent ultrasonic probe in which piezoelectric composite has a wide frequency band characteristic and an ultrasonic amplitude distribution to make it possible to effect weighting in the piezoelectric composite by itself so that the side lobe level is reduced to obtain an ultrasonic image with high resolution.
  • a piezoelectric composite including electrodes formed on both end surfaces thereof and a plurality of piezoelectric elements which are arranged and connected with each other by polymer material and having electromechanical coupling coefficients distributed and varied by differing volume ratios of the piezoelectric elements to the polymer material, and there may be further provided a piezoelectric composite including electrodes formed on both end surfaces thereof and a plurality of piezoelectric elements which are arranged and connected with each other by the polymer material so that the electromechanical coupling coefficients are largest in a middle portion and reducing gradually as approaching to the periphery.
  • Fig. 1(A) is a perspective view schematically illustrating a conventional ultrasonic probe together with amplitude distribution
  • Fig. 1(B) is a sectional view of the ultrasonic probe of Fig. 1
  • Fig. 2 is a perspective view schematically illustrating a basic structure of a piezoelectric composite of an ultrasonic probe in embodiments of the present invention
  • Fig. 3 is a sectional view of the same piezoelectric composite
  • Fig. 4 is a perspective view of an ultrasonic probe showing a first embodiment of the present invention
  • Fig. 5 is a sectional view of the ultrasonic probe shown in Fig. 4
  • Fig. 6 is a plan view schematically illustrating an ultrasonic probe showing a second embodiment of the present invention
  • Fig. 7 is a sectional view of the ultrasonic probe shown in Fig. 6;
  • Fig. 8 is a graph showing a relation of an electromechanical coupling coefficient versus a volume ratio of piezoelectric ceramic; and
  • Fig. 9 is a sectional view of a piezoelectric composite body showing a third embodiment of the present invention.
  • Fig. 2 is a perspective view schematically illustrating a basic structure of a piezoelectric composite used in embodiments of the present invention
  • Fig. 3 is a sectional view of the piezoelectric composite shown in Fig. 2.
  • numeral 11 denotes a piezoelectric composite
  • numeral 12 denotes a plurality of piezoelectric elements shaped in a square pillar made of piezoelectric ceramic such as PZT and PbTiO3.
  • Numeral 13 denotes polymer material which is filled between the piezoelectric elements 12 to connect them together, and which is made from silicone rubber, epoxy resin and polyurethane resin, for example.
  • Numerals 14 and 15 denote electrodes disposed on end surfaces of the piezoelectric elements 12 and formed by a method of plating, depositing, sintering or the like.
  • the piezoelectric elements 12 have one-dimensional connection by the electrodes 14 and 15 provided on both of the end surfaces pruned in same level.
  • the polymer material 13 has three-dimensional connection by being filled into gaps among the piezoelectric elements 12.
  • the piezoelectric elements 12 are arranged so that intervals P between the elements are fixed, while volume ratios of the piezoelectric elements 12 to the polymer material 13 are different.
  • the volume ratios are set to have different volume ratios in three kinds of areas A, B and C in which the volume fraction of the piezoelectric ceramic is largest in the middle portion A and is getting the smaller in the peripheral portions B and C, the nearer to the periphery, so that the electromechanical coupling coefficients are distributed and varied.
  • FIG. 8 A relation of the electromechanical coupling coefficient k t versus the volume fraction V of the piezoelectric ceramic forming the piezoelectric element versus the whole including the polymer material is shown in Fig. 8, which shows a curve in the case where PZT 5 is used as the piezoelectric ceramic and epoxy resin is used as the polymer material.
  • the volume ratio V of the piezoelectric ceramic is varied from 10 to 20 and 30%, for example, the electromechanical coupling coefficient k t varies from 50 to 60 and 64% respectively.
  • the volume ratios 30, 20 and 10% of this example correspond to the volume ratios of the portions A, B and C of the piezoelectric composite 11 shown in Fig.
  • the electromechanical coupling coefficient of the piezoelectric composite 11 is distributed so that it is as largest as 64% in the middle portion and is getting smaller as 60 and 50% in the peripheral portions B and C.
  • the electromechanical coupling coefficient is distributed in this manner, an amplitude of the ultrasonic wave produced by the piezoelectric composite 11 can be weighted.
  • sound pressure of the ultrasonic wave is produced high by the portion A of the piezoelectric composite 11 and produced gradually lowered by the portions B and C so that the amplitude of the ultrasonic wave is weighted (apodized) in a single piezoelectric composite 11 itself to reduce the side lobe level of an ultrasonic beam pattern produced by the piezoelectric composite 11 and thereby an ultrasonic image having high resolution may be obtained.
  • Figs. 4 and 5 show a first embodiment of the ultrasonic probe according to the present invention using the piezoelectric composite having the above structure.
  • numeral 21 denotes a piezoelectric composite having the same structure as the above basic structure
  • 22 a plurality of piezoelectric elements which are arranged straight with one-dimensional connection and have the electromechanical coupling coefficient varied by changing the volume ratio
  • 23 polymer material such as silicone rubber, epoxy resin or polyurethane resin and filled into gaps between the piezoelectric elements 22 to have three-dimensional connection
  • Numeral 26 denotes an acoustic matching layer disposed on the side of the common electrode 25 for propagating an ultrasonic wave effectively, and 27 an acoustic lens disposed on the side of the acoustic matching layer 26 for focusing an ultrasonic beam.
  • the acoustic lens 27 is provided if necessary.
  • Numeral 28 denotes backing material disposed on the side of the arrayed electrodes 24 for absorbing an ultrasonic wave and holding the piezoelectric composite 21.
  • the structure of such a piezoelectric composite 21 is the same as that used in a so-called arrayed ultrasonic probe and its operation is also the same. More particularly, a voltage is applied to the plurality of arrayed electrodes 24a, 24b, 24c, ... 24n provided in the piezoelectric composite 21 in a manner that a certain group of the electrodes is provided with a voltage supply having a time delay. Thus, the ultrasonic wave produced by the piezoelectric composite is converged to a certain distance. As the groups are scanned channel by channel, the ultrasonic wave reflected by an inside portion of a living body is received. The received ultrasonic wave is image-processed to be displayed on a display at a real time for diagnosis of the inside portion of the living body.
  • Fig. 5 is a sectional view of the piezoelectric composite 21 cut in the direction perpendicular to the arrayed direction of the array electrodes 24.
  • the piezoelectric elements 22 having different volume ratios are arranged in this direction. More particularly, the piezoelectric elements 22a having a largest volume ratio are arranged in the middle portion A so that the electromechanical coupling coefficient is largest in the middle portion A and the piezoelectric elements 22b and 22c having the volume ratios which are gradually reduced are arranged in the peripheral portions B and C so that the electromechanical coupling coefficients are gradually lowered as approaching to the periphery.
  • the electromechanical coupling coefficients of the portions A, B and C are 64, 60 and 50%, respectively.
  • the radiation amplitude of the ultrasonic wave produced by the piezoelectric elements 22a in the middle portion A is larger corresponding to the larger electromechanical coupling coefficient and the radiation amplitude of the ultrasonic wave produced by the peripheral portions B and C is lower corresponding to the lower electromechanical coupling coefficient as approaching to the periphery. Accordingly, weighting (apodizing) of the amplitude can be made in the perpendicular direction to the arraying direction of the arrayed electrodes 24 and then the side lobe level can be reduced to obtain an ultrasonic image having high resolution.
  • the arrayed ultrasonic probe having a plurality of arrayed electrodes 24 is described, while even if a piezoelectric composite 21 is also divided at the same intervals as well as the arrayed electrodes 24a, 24b, 24c, ... 24n and arranged in an array, the same effects can be obtained.
  • FIG. 6 and 7 A second embodiment of the present invention is described with reference to Figs. 6 and 7.
  • numeral 31 denotes a piezoelectric composite having the same structure as the basic structure described above
  • numeral 32 denotes a plurality of piezoelectric elements each of which is formed into a square pillar and having the electromechanical coupling coefficients varied by changing the volume ratios with one-dimensional connection and which are divided into groups each having the same volume ratio and arranged concentrically.
  • Numeral 33 denotes polymer material such as silicone rubber, epoxy resin, polyurethane resin or the like which is filled into gaps between the piezoelectric elements 32 and has three-dimensional connection.
  • Numeral 34 denotes concentrically arrayed electrodes each of which is formed on one end surfaces of the piezoelectric elements 32 for each group by plating, depositing, sintering or the like.
  • Numeral 35 denotes a common electrode disposed on the other end surfaces of the piezoelectric elements 32.
  • Numeral 36 denotes an acoustic matching layer disposed on the side of the common electrode 35 for propagating an ultrasonic wave effectively, and numeral 37 denotes backing material disposed on the side of the arrayed electrodes 34 for absorbing an ultrasonic wave and holding the piezoelectric composite 31.
  • the arrayed electrodes 34 include a plurality of electrodes 34a, 34b, 34c, ... 34n arranged concentrically, and piezoelectric elements 32a, 32b, 32c, ... 32n having electromechanical coupling coefficients varied by changing volume ratios are grouped and arranged nearly corresponding to the electrodes 34. More particularly, the piezoelectric elements 32a having the largest volume ratio are arranged in the middle portion A corresponding to the electrode 34a so that the electromechanical coupling coefficient is largest in the middle portion A and the piezoelectric elements 32b, 32c, ... 32n having the volume ratios which are gradually lowered correspondingly are arranged in the peripheral portions so that the electromechanical coupling coefficients are gradually decreased as approaching to the periphery.
  • the ultrasonic probe structured as above is a so-called annular-arrayed ultrasonic probe, and when the same voltage is applied to each of arrayed electrodes 34 of the piezoelectric composite 31, the amplitude distribution of ultrasonic wave may be attained such that the radiation amplitude of ultrasonic wave produced from the central portion A is largest and the radiation amplitude of ultrasonic wave from the peripheral portions is progressively reduced as approaching to the periphery. Accordingly, the amplitude can be weighted in any radial direction and then the side lobe level can be reduced to obtain an ultrasonic image having high resolution.
  • the piezoelectric elements 32 hav corresponding volume ratio to each of the arrayed electrodes 34 disposed in the piezoelectric composite 31, while the group of the piezoelectric elements 32 having same volume ratio is not required to exactly correspond to each portion of the arrayed electrodes 34 but the volume ratios of the piezoelectric elements are to be set substantially so that the electromechanical coupling coefficients are progressively lowered from the central portion to the periphery.
  • Fig. 9 is a perspective view schematically illustrating a basic structure of a piezoelectric composite usable in embodiments of the present invention.
  • numeral 11 denotes a piezoelectric composite and numeral 12 denotes a plurality of piezoelectric elements including piezoelectric elements 12a and 12b each of which has a different frequency constant and is formed into a square pillar having the same length and size and which are juxtaposed alternately in the mutually orthogonal direction.
  • Numeral 13 denotes polymer material filled between the piezoelectric elements 12a and 12b to couple each other, and silicone rubber, epoxy resin or polyurethane resin, for example, is used therefor.
  • Numerals 14 and 15 denote electrodes formed on both of end surfaces of the piezoelectric elements 12 by a method of plating, depositing or sintering.
  • the piezoelectric elements 12a and 12b have one-dimensional connection by providing the electrodes 14 and 15 on both of the end surfaces pruned in same level.
  • the polymer material 13 has three-dimensional connection by filling the material into gaps among the piezoelectric elements 12.
  • the piezoelectric composite having the plurality of piezoelectric elements combined integrally with each other by the polymer material is named a so-called 1-3 type piezoelectric composite and is known by the paper (Proc. IEEE, 1985, Ultrasonics Symp. pp. 643-647), for example.
  • the conventional piezoelectric composite includes the piezoelectric elements having the same frequency constant
  • the piezoelectric composite of the invention includes the piezoelectric elements 12 having different frequency constants, and groups of the piezoelectric elements 12a and 12b having different frequency constants being arranged alternately in a two-dimensional plane. Therefore, the frequency band is wider and a shorter pulse is obtained according to the invention so that the ultrasonic image having higher resolution can be obtained.
  • the frequency constants of the elements may be more than two different kinds and its arrangement may be irregular.
  • This piezoelectric composite is used in the ultrasonic probe shown in Figs. 4 and 5 described of the first embodiment.
  • the piezoelectric elements 22 having different electromechanical coupling coefficients are arranged in the direction perpendicular to the arrangement direction of the arrayed electrodes 24. More particularly, the piezoelectric elements 22a having the largest electromechanical coupling coefficient are disposed in the middle portion A and the piezoelectric elements 22b and 22c are disposed in the peripheral portions B and C respectively so that the electromechanical coupling coefficients are gradually reduced as approaching to the periphery.
  • the polymer material 23 such as silicon rubber, epoxy resin or polyurethane resin is filled into gaps among the piezoelectric elements 22a, 22b and 22c to thereby form the piezoelectric composite 21.
  • the radiation amplitude of the ultrasonic wave produced by the piezoelectric elements 22a in the middle portion A is large since the electromechanical coupling coefficient thereof is large, while the radiation amplitude of the ultrasonic wave produced by the piezoelectric elements in the peripheral portions B and C is small in accordance with the lowered electromechanical coupling coefficients as approaching to the periphery. Accordingly, weighting (apodizing) of the amplitude can be made in the direction perpendicular to the arrangement direction of the arrayed electrodes 24 and the side lobe level can be reduced to obtain the ultrasonic image having high resolution.
  • piezoelectric ceramic is used for the three kinds of piezoelectric elements 22a, 22b and 22c having different electromechanical coupling coefficients, while piezoelectric material of a combination of piezoelectric ceramic and monocrystal such as LiNbO3 and LiTaO3 or porous piezoelectric ceramic may be used therefor to obtain the same effects.
  • the electromechanical coupling coefficients are not limited to be three kinds, and two or four or more kinds of electromechanical coupling coefficients may be used.
  • the arrayed ultrasonic probe having the plurality of arrayed electrodes 24 has been described, while even the piezoelectric composite 21 may be divided at the same intervals as the arrayed electrodes 24a, 24b, 24c, ... 24n and arranged in an array to obtain the same effects.
  • the piezoelectric composite 31 described in the embodiment 3 is utilized for the annular arrayed ultrasonic probe shown in Figs. 6 and 7.
  • Numeral 32 denotes a plurality of piezoelectric elements each of which is formed into a square pillar and which have one-dimensional connection and are divided into groups each having different electromechanical coupling coefficient and arranged concentrically
  • numeral 33 denotes polymer material such as silicone rubber, epoxy resin or polyurethane resin filled into gaps among the piezoelectric elements 32 and having three-dimensional connection
  • numeral 34 denotes arrayed electrodes formed on one end surface of the grouped piezoelectric elements 32 concentrically by a method of plating, depositing or sintering
  • numeral 35 denotes a common electrode formed on the other end surface of the piezoelectric elements 32.
  • Numeral 36 denotes an acoustic matching layer disposed on the side of the common electrode 35 for propagating an ultrasonic wave efficiently
  • numeral 37 denotes backing material disposed on the side of the arrayed electrodes 34 for absorbing an ultrasonic wave and holding the piezoelectric composite 31.
  • Piezoelectric ceramic such as of PZT system or PbTiO3 system is used as the piezoelectric elements 32.
  • the arrayed electrodes 34 include a plurality of electrodes 34a, 34b, 34c, ... 34n arranged concentrically, and piezoelectric elements 32a, 32b, 32c, ... 32n having different electromechanical coupling coefficients are divided into groups and arranged approximately in alignment with the electrodes 34.
  • the piezoelectric elements 32a having the largest electromechanical coupling coefficient are arranged in the central portion A corresponding to the electrode 34a and the piezoelectric elements 32b, 32c, ... 32n are arranged so that the electromechanical coupling coefficients are gradually reduced as approaching to the periphery.
  • the ultrasonic probe structured as above is a so-called annular arrayed ultrasonic probe, and when the same voltage is applied to each of arrayed electrodes 34 of the piezoelectric composite 31, the amplitude distribution of the ultrasonic wave can be attained in which the radiation amplitude of the ultrasonic wave produced from the central portion A is largest and the radiation amplitude is gradually lowered as approaching to the periphery. Accordingly, weighting of the amplitude can be made in any radial direction and the side lobe level can be reduced to thereby obtain the ultrasonic image having high resolution.
  • piezoelectric ceramic is utilized as the piezoelectric elements having different electromechanical coupling coefficients, while even piezoelectric material of a combination of piezoelectric ceramic with monocyrstal such as LiNbO3 and LiTaO3 or porous piezoelectric ceramic may be utilized therefor to obtain the same effects.
  • the piezoelectric elements 32 having different electromechanical coupling coefficients are arranged corresponding to the arrayed electrodes 34 disposed in the piezoelectric composite 31, while the electromechanical coupling coefficients of the piezoelectric elements 32 are not required to correspond exactly to the arrayed electrodes 34 but the piezoelectric elements are to be arranged so that the electromechanical coupling coefficients are gradually lowered from the central portion to the peripheral portions.
  • the present invention provides a piezoelectric composite including electrodes formed on both end surfaces thereof, a plurality of piezoelectric elements which are arranged and coupled with each other by polymer material and electromechanical coupling coefficients distributed and varied by changing volume ratios of the piezoelectric elements versus polymer material and accordingly the electromechanical coupling coefficients of a single piezoelectric composite can be varied partially.
  • the piezoelectric composite itself can possess the amplitude distribution that the amplitude is large in the central portion and is gradually smaller as approaching to the periphery.
  • a piezoelectric composite including electrodes formed on the both end surfaces thereof, a plurality of piezoelectric elements which are arranged so that the electromechanical coupling coefficients are largest in the central portion and gradually reduced as approaching to the periphery and are coupled with each other by the polymer material, the amplitude distribution that the radiation amplitude of the ultrasonic wave is large in the central portion and is gradually lowered from the central portion to the peripheral portions and accordingly an ultrasonic beam pattern having reduced side lobe level can be formed and the ultrasonic image having higher resolution can be obtained.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Transducers For Ultrasonic Waves (AREA)

Abstract

Une sonde ultrasonique pour l'imagerie à ultrasons à haute résolution est décrite. La sonde comprend un assemblage d'éléments piézoélectriques (11) qui a une large plage de fréquence et une distribution auto-pondérée d'amplitudes ultrasoniques pour atténuer les niveaux de lobes latéraux.
EP19910906265 1990-03-20 1991-03-19 Ultrasonic probe Withdrawn EP0480045A4 (en)

Applications Claiming Priority (8)

Application Number Priority Date Filing Date Title
JP71082/90 1990-03-20
JP71083/90 1990-03-20
JP2071085A JPH03270597A (ja) 1990-03-20 1990-03-20 超音波探触子
JP7108490A JPH03270599A (ja) 1990-03-20 1990-03-20 超音波探触子
JP71085/90 1990-03-20
JP71084/90 1990-03-20
JP2071082A JPH03270598A (ja) 1990-03-20 1990-03-20 複合圧電体
JP2071083A JPH03270282A (ja) 1990-03-20 1990-03-20 複合圧電体

Publications (2)

Publication Number Publication Date
EP0480045A1 true EP0480045A1 (fr) 1992-04-15
EP0480045A4 EP0480045A4 (en) 1993-04-14

Family

ID=27465317

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19910906265 Withdrawn EP0480045A4 (en) 1990-03-20 1991-03-19 Ultrasonic probe

Country Status (3)

Country Link
EP (1) EP0480045A4 (fr)
CA (1) CA2054698A1 (fr)
WO (1) WO1991015090A1 (fr)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0615225A2 (fr) * 1993-03-10 1994-09-14 Hewlett-Packard Company Normalisation de l'impédance électrique d'un arrangement de transducteurs à ultrason
WO2003064064A1 (fr) * 2002-01-29 2003-08-07 Verteq, Inc. Dispositif dirigeant l'energie d'une sonde megasonique
US7309947B2 (en) * 2003-07-08 2007-12-18 Kabushiki Kaisha Toshiba Piezoelectric transducer including a plurality of piezoelectric members
CN102959987A (zh) * 2010-06-30 2013-03-06 日本电气株式会社 振荡器
CN102986249A (zh) * 2010-07-23 2013-03-20 日本电气株式会社 振荡器和电子设备

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021210055A1 (fr) 2020-04-14 2021-10-21 本多電子株式会社 Vibreur ultrasonore pour traitement médical

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0142215A2 (fr) * 1983-05-26 1985-05-22 Advanced Technology Laboratories, Inc. Transducteur ultrasonore ayant des modes vibratoires améliorées
EP0162515A1 (fr) * 1984-05-22 1985-11-27 Laboratoires D'electronique Philips Dispositif de transduction ultrasonore à réseau d'éléments transducteurs piézoélectrique

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4518889A (en) * 1982-09-22 1985-05-21 North American Philips Corporation Piezoelectric apodized ultrasound transducers
JPS59183098U (ja) * 1983-05-24 1984-12-06 オムロン株式会社 圧電装置
JPH069553B2 (ja) * 1984-09-25 1994-02-09 株式会社日立製作所 超音波探触子
JPH01120998A (ja) * 1987-11-04 1989-05-12 Shimadzu Corp 超音波探触子

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0142215A2 (fr) * 1983-05-26 1985-05-22 Advanced Technology Laboratories, Inc. Transducteur ultrasonore ayant des modes vibratoires améliorées
EP0162515A1 (fr) * 1984-05-22 1985-11-27 Laboratoires D'electronique Philips Dispositif de transduction ultrasonore à réseau d'éléments transducteurs piézoélectrique

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
PROCEEDINGS IEEE 1988 ULTRASONICS SYMPOSIUM vol. 1, October 1988, CHICAGO, ILLINOIS, USA pages 627 - 630 TUAN BUI ET AL. 'A multifrequency composite ultrasonic transducer system' *
See also references of WO9115090A1 *

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0615225A2 (fr) * 1993-03-10 1994-09-14 Hewlett-Packard Company Normalisation de l'impédance électrique d'un arrangement de transducteurs à ultrason
EP0615225A3 (fr) * 1993-03-10 1995-08-09 Hewlett Packard Co Normalisation de l'impédance électrique d'un arrangement de transducteurs à ultrason.
WO2003064064A1 (fr) * 2002-01-29 2003-08-07 Verteq, Inc. Dispositif dirigeant l'energie d'une sonde megasonique
CN100344385C (zh) * 2002-01-29 2007-10-24 艾奎昂技术股份有限公司 强超声波探棒能量引导器
US7287537B2 (en) 2002-01-29 2007-10-30 Akrion Technologies, Inc. Megasonic probe energy director
US7309947B2 (en) * 2003-07-08 2007-12-18 Kabushiki Kaisha Toshiba Piezoelectric transducer including a plurality of piezoelectric members
CN102959987A (zh) * 2010-06-30 2013-03-06 日本电气株式会社 振荡器
US9095880B2 (en) 2010-06-30 2015-08-04 Nec Corporation Oscillator
CN102959987B (zh) * 2010-06-30 2016-02-24 日本电气株式会社 振荡器
CN102986249A (zh) * 2010-07-23 2013-03-20 日本电气株式会社 振荡器和电子设备
CN102986249B (zh) * 2010-07-23 2015-08-12 日本电气株式会社 振荡器和电子设备

Also Published As

Publication number Publication date
EP0480045A4 (en) 1993-04-14
WO1991015090A1 (fr) 1991-10-03
CA2054698A1 (fr) 1991-09-21

Similar Documents

Publication Publication Date Title
US4658176A (en) Ultrasonic transducer using piezoelectric composite
US4801835A (en) Ultrasonic probe using piezoelectric composite material
EP0370107B1 (fr) Appareil de diagnostic ultrasonique
US4217516A (en) Probe for ultrasonic diagnostic apparatus
US5099459A (en) Phased array ultrosonic transducer including different sized phezoelectric segments
US4437033A (en) Ultrasonic transducer matrix having filler material with different acoustical impedance
US6656124B2 (en) Stack based multidimensional ultrasonic transducer array
CN100398224C (zh) 换能器的频率和振幅旁瓣缩减
CN1863485B (zh) 超声波探头、超声波成像设备以及超声波成像方法
US4880012A (en) Ultrasonic probe
GB2232321A (en) Focusing piezoelectric transducer
CN112893067B (zh) 多胞元换能器
WO2007046180A1 (fr) Transducteur, sonde et dispositif d'imagerie par ultra-sons
US8033997B2 (en) Interdigitated geometry transducer for optimizing the irradiated acoustic beam
JPH078486A (ja) 超音波トランスデューサ
EP0480045A1 (fr) Sonde ultrasonique
EP0005071A2 (fr) Tête de mesure du type à balayage électronique pour un appareil de diagnostic ultrasonore
JPH03270282A (ja) 複合圧電体
US3962673A (en) System for reading acoustic images
JP3208845B2 (ja) 超音波探触子
JPH03270599A (ja) 超音波探触子
JP2000253496A (ja) アレイ型超音波トランスデューサおよびその製造方法
JPH02271839A (ja) 超音波プローブ
JP2682342B2 (ja) 複合圧電体
JPH03270597A (ja) 超音波探触子

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 19911119

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): DE FR GB

A4 Supplementary search report drawn up and despatched

Effective date: 19930224

AK Designated contracting states

Kind code of ref document: A4

Designated state(s): DE FR GB

17Q First examination report despatched

Effective date: 19940118

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION HAS BEEN WITHDRAWN

18W Application withdrawn

Withdrawal date: 19940414