EP0426078B1 - Procédé de fonctionnement d'une pompe volumétrique - Google Patents

Procédé de fonctionnement d'une pompe volumétrique Download PDF

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Publication number
EP0426078B1
EP0426078B1 EP90120721A EP90120721A EP0426078B1 EP 0426078 B1 EP0426078 B1 EP 0426078B1 EP 90120721 A EP90120721 A EP 90120721A EP 90120721 A EP90120721 A EP 90120721A EP 0426078 B1 EP0426078 B1 EP 0426078B1
Authority
EP
European Patent Office
Prior art keywords
gas
pump
stator
clearance
operating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Revoked
Application number
EP90120721A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP0426078A1 (fr
Inventor
Jean-Marie Crinquette
Eric Taberlet
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel CIT SA
Original Assignee
Alcatel CIT SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=9387014&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=EP0426078(B1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Alcatel CIT SA filed Critical Alcatel CIT SA
Priority to AT90120721T priority Critical patent/ATE92159T1/de
Publication of EP0426078A1 publication Critical patent/EP0426078A1/fr
Application granted granted Critical
Publication of EP0426078B1 publication Critical patent/EP0426078B1/fr
Anticipated expiration legal-status Critical
Revoked legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids

Definitions

  • the present invention relates to a method of operating a positive displacement pump or primary vacuum pump, comprising a stator and a rotor rotating in the stator, while maintaining a predetermined leakage game with respect to the latter.
  • Positive displacement pumps are capable of creating pressures from 0.001 to 0.0001 millibars, by driving back against the atmosphere.
  • the characteristic curve of the volume flow S (in m3 / h) as a function of the pressure P (in millibars) of such a pump depends on the play existing between the rotor and the stator of the pump.
  • Volume flow S / pressure P diagrams have been represented in FIG. 1. Each of the curves corresponds to a given clearance, the clearance increasing from one curve to another according to the arrow j.
  • the document GBA 947383 describes a positive displacement compressor of the twin screw type in which a liquid such as oil is injected into the machine so as to ensure a seal by liquid seal.
  • a liquid such as oil
  • such an injection is incompatible with a clean vacuum.
  • the constant problem posed to the pump manufacturer is to produce a pump which does not seize up and which has the minimum clearance between the rotor and the stator.
  • An object of the present invention is to provide a vacuum pump in which the pumping efficiency is optimal, without mechanical modifications thereof.
  • This object is achieved by injecting into the clearance between the rotor and the stator, a gas of molecular mass different from that of the pumped gas.
  • the European document EP-A-320956 (on which the preamble of claim 1 is based) describes a positive displacement pump into which an inert gas, nitrogen in the example cited, is injected into the working chambers of the pump, so as to reduce the partial pressure of ammonium chloride which is produced during the manufacture of silicon nitride.
  • an inert gas nitrogen in the example cited
  • ammonium chloride is deposited on the walls of the stator and the rotor.
  • the introduction of nitrogen decreases the partial pressure of ammonium chloride so that it no longer deposits on the walls.
  • the gas introduced here nitrogen has a lower molecular mass than that of the pumped gas.
  • the subject of the invention is therefore a method of operating a positive displacement pump, comprising a rotor rotating in a stator with a given clearance, used for pumping a gas or a mixture of gases of given molecular mass, and comprising means for injecting a gas into the above-mentioned set, characterized in that said injected gas has a higher molecular mass than that of the gas or of the pumped gas mixture.
  • the flow rate of injected gas is between 3 and 15 times the flow rate of pumped gas.
  • the flow rate of injected gas is adjustable.
  • the invention is specified on an example of a pump, namely a multi-stage Roots type pump, but it should be understood that the invention applies to any type of positive displacement pump such as vane pump, cylindrical or conical groove pump helical, twin screw pump, etc.
  • FIG. 2 schematically represents a multi-stage Roots pump having three stages 10, 20 and 30 respectively comprising stators 11, 21, 31 and rotors 12, 13; 22, 23; 32, 33.
  • the reference 4 designates the admission of stage 10, 14 is the discharge of stage 10 and the admission of stage 20, 24 is the discharge of stage 20 and the admission of stage 30, 34 is the delivery of stage 30.
  • a means for injecting, within the clearance 35 between the rotor and the stator of the stage, a gas higher molecular weight than that of the pumped gas. This is achieved for example by a nozzle 40 formed in the stator and connected to an auxiliary gas source, not shown, with adjustable flow rate.
  • any other gas injection means can be used such as for example multiple orifices in the wall of the stator, slot in the stator, porous part of the wall of the stator, etc.
  • molecular mass 28 can be injected.
  • This gas will advantageously be injected with a flow rate equal to several times that of the pumped gas, for example with a flow rate of between 3 times and 15 times that of the pumped gas.
  • This injected gas produces a kind of molecular seal which prevents the molecules of pumped gas from going in the direction of delivery-inlet, so that the efficiency of the pump is improved.
  • the invention finds application for any type of positive displacement pump.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Reciprocating Pumps (AREA)
  • Rotary Pumps (AREA)
  • Details And Applications Of Rotary Liquid Pumps (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
EP90120721A 1989-11-02 1990-10-29 Procédé de fonctionnement d'une pompe volumétrique Revoked EP0426078B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AT90120721T ATE92159T1 (de) 1989-11-02 1990-10-29 Verfahren zum betrieb einer volumetrischen pumpe.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR8914354 1989-11-02
FR8914354A FR2653831A1 (fr) 1989-11-02 1989-11-02 Pompe volumetrique.

Publications (2)

Publication Number Publication Date
EP0426078A1 EP0426078A1 (fr) 1991-05-08
EP0426078B1 true EP0426078B1 (fr) 1993-07-28

Family

ID=9387014

Family Applications (1)

Application Number Title Priority Date Filing Date
EP90120721A Revoked EP0426078B1 (fr) 1989-11-02 1990-10-29 Procédé de fonctionnement d'une pompe volumétrique

Country Status (7)

Country Link
EP (1) EP0426078B1 (es)
JP (1) JPH0730744B2 (es)
AT (1) ATE92159T1 (es)
DE (1) DE69002439T2 (es)
ES (1) ES2042175T3 (es)
FR (1) FR2653831A1 (es)
RU (1) RU1831588C (es)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2691382B1 (fr) * 1992-05-22 1994-09-09 Cit Alcatel Installation de pompage pour pomper une enceinte contenant des gaz mélangés à des particules solides ou susceptibles de générer des particules ou condensats solides.
DE19819538C2 (de) 1998-04-30 2000-02-17 Rietschle Werner Gmbh & Co Kg Druck-Saug-Pumpe
GB0719394D0 (en) * 2007-10-04 2007-11-14 Edwards Ltd A multi stage clam shell vacuum pump
DE102010044918A1 (de) * 2010-09-09 2012-03-15 Oerlikon Leybold Vacuum Gmbh Verfahren zur Bestimmung eines Arbeitsbereichs eines Hochvakuumpumpsystems
JP5627035B2 (ja) * 2012-06-18 2014-11-19 株式会社ササクラ 蒸発式空調装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB385192A (en) * 1932-05-10 1932-12-22 Otto Becker Junior Improvements in and relating to rotary blowers
SE317154B (es) * 1959-01-15 1969-11-10 Svenska Rotor Maskiner Ab
JPS5517236A (en) * 1978-07-19 1980-02-06 Mitsubishi Electric Corp Manufacturing method of mica plate for commutator segment
JP2515831B2 (ja) * 1987-12-18 1996-07-10 株式会社日立製作所 スクリユ―真空ポンプ

Also Published As

Publication number Publication date
FR2653831A1 (fr) 1991-05-03
ATE92159T1 (de) 1993-08-15
DE69002439D1 (de) 1993-09-02
ES2042175T3 (es) 1993-12-01
RU1831588C (ru) 1993-07-30
DE69002439T2 (de) 1993-11-18
JPH0730744B2 (ja) 1995-04-10
JPH03160185A (ja) 1991-07-10
EP0426078A1 (fr) 1991-05-08

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