EP0411022A1 - Procede et dispositif generateur d'impulsions de haute tension et de haute puissance, notamment pour lasers a gaz a decharge partielle - Google Patents

Procede et dispositif generateur d'impulsions de haute tension et de haute puissance, notamment pour lasers a gaz a decharge partielle

Info

Publication number
EP0411022A1
EP0411022A1 EP89905050A EP89905050A EP0411022A1 EP 0411022 A1 EP0411022 A1 EP 0411022A1 EP 89905050 A EP89905050 A EP 89905050A EP 89905050 A EP89905050 A EP 89905050A EP 0411022 A1 EP0411022 A1 EP 0411022A1
Authority
EP
European Patent Office
Prior art keywords
voltage
charging
laser
switch
pulse
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP89905050A
Other languages
German (de)
English (en)
Inventor
Dirk Friede
Willi Bette
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of EP0411022A1 publication Critical patent/EP0411022A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
    • H01S3/0971—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser transversely excited
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03K—PULSE TECHNIQUE
    • H03K3/00—Circuits for generating electric pulses; Monostable, bistable or multistable circuits
    • H03K3/02—Generators characterised by the type of circuit or by the means used for producing pulses
    • H03K3/53—Generators characterised by the type of circuit or by the means used for producing pulses by the use of an energy-accumulating element discharged through the load by a switching device controlled by an external signal and not incorporating positive feedback
    • H03K3/55—Generators characterised by the type of circuit or by the means used for producing pulses by the use of an energy-accumulating element discharged through the load by a switching device controlled by an external signal and not incorporating positive feedback the switching device being a gas-filled tube having a control electrode

Definitions

  • the invention relates to a device for generating high-voltage pulses of high power, in particular for TE gas lasers.
  • a pulse-generating network which is connected on the input side to the at least one charger and on the output side to the laser electrodes
  • the capacitance of which is smaller than that of the first charging capacitor are connected in parallel to one another to the laser electrodes, and at least one high-voltage switch is also used as a trigger to initiate saturation of the magnetic switch and discharge of the first charging capacitor via the saturated magnetic switch into the laser Electrode section serves.
  • FIG. 1 of the accompanying drawing in which four exemplary embodiments for a device according to the invention are subsequently shown in FIGS. 2 to 5 using a plurality of circuits.
  • FIG. 2 shows a device according to the invention, in which a trigger branch having the high-voltage switch is parallel to the electrode path of the laser; 3 shows a second exemplary embodiment of a device according to the invention, in which the trigger branch has a magnetic switch and a pulse charging stage belongs to the pulse-generating network?
  • FIG. 4 shows a third exemplary embodiment, in which, in comparison to FIG. 2, the connection sequence of the magnetic switch M1 and the first charging capacitor C-, is exchanged, ie the magnetic switch M1 is directly grounded at one end
  • FIG. 5 shows a fourth exemplary embodiment in which an additional pulse voltage source with a second charger LG2 is connected to the circuit points b, b 1 according to FIG.
  • LG1 and LG2 mean sockets which are connected to a first and second charger, LG means a socket which is connected to a (single) charger.
  • the chargers are not shown.
  • the first and second charging capacitors C, and ⁇ 2 are referred to in the following as capacitors C-, and ⁇ 2.
  • C- ⁇ is the energy-storing capacitor which is insulated from the laser electrodes by the magnetic switch M.
  • C 2 and C are smaller capacities, which together with the spark gap FS cause the voltage increase at the laser LK.
  • the capacitors C, and C 2 are charged to a voltage which corresponds approximately to twice the voltage which arises across the laser electrodes when the laser LK is ignited (the so-called firing voltage).
  • the laser LK must hold this voltage over a longer period of time without spontaneously igniting.
  • the capacitor C is charged to a higher voltage and, after the spark gap has been ignited, transfers its charge to the capacitor ' j - so that there is a rapid rise in voltage across the laser electrodes until the laser breakdown. During this time, the magnetic switch M is unsaturated, so that no significant current flows through the switch due to its high inductance. The voltage on capacitor C is therefore retained.
  • the core size and number of turns of the magnetic switch are designed such that it becomes saturated at the time of the laser breakthrough, ie it becomes low-inductive. Of this
  • the capacitor C- its energy in the laser LK feed.
  • the active switching element FS ie a spark gap or a thyratron
  • the active switching element FS is subjected to a significantly lower load in this circuit technology than in conventionally constructed lasers, since only a fraction of the total stored energy is switched. Most of the energy flows through the magnetic switch after saturation.
  • a disadvantage of this circuit technology is the high voltages occurring at the switching element FS, so that under certain circumstances inexpensive thyratrons cannot be used.
  • an additional switching element is also required.
  • the switch FS e.g. a spark gap or a thyratron
  • the switch FS is not grounded in this circuit, so that the voltage supply of this switch (e.g. trigger voltage, heating voltage) is also exposed to the high voltages to be switched.
  • the invention has for its object to provide a device for generating high-voltage pulses of high power, in particular for TE gas lasers, of the type defined at the outset, with which the difficulties described above can be overcome, i.e. with which the voltage and current load of the high-voltage switch in the trigger branch can be reduced without having to accept losses in terms of the efficiency of the laser discharge.
  • the object is achieved with a device for generating high-voltage pulses of high power, in particular for TE gas lasers, according to claim 1 in that a. the trigger branch having the high-voltage switch is connected to it parallel to the electrode path of the laser.
  • the trigger branch consists of the series connection of a high-voltage switch and a choke.
  • Such a high-voltage switch is in particular a thyratron.
  • the trigger branch has a magnetic switch and belongs to the pulse-generating network, a pulse charging stage, consisting of a buffer capacitor which can be charged by the charger and a series circuit comprising a high-voltage switch and inductance connected to its high pole, the other end of which the high-lying longitudinal branch of the pulse-generating network to which the one laser electrode is connected is connected.
  • the capacitance of the first charging capacitor is expediently larger by at least one order of magnitude, i.e. at least ten times as large as that of the second charging capacitor, because this first charging capacitor is the energy supplier for maintaining the laser discharge.
  • the capacitance of the first charging capacitor is 15 to 20 times as large as that of the second charging capacitor.
  • the invention also relates to an advantageous method for generating high-voltage pulses with a device as described in claims 1 to 10.
  • This method according to the invention is based on a method sequence which is the basis of the circuit according to FIG. 1,
  • At least one charger is used to charge a pulse-generating network to a charging voltage and this charging voltage is applied to the laser electrodes of a TE gas laser on the output side of the pulse-generating network
  • this charging voltage is applied to a first branch of the pulse-generating network consisting of a first charging capacitor of larger capacity and a magnetic switch in the form of a saturable one
  • Inductor and is connected to a second branch of the pulse-generating network connected in parallel to the first branch, said branch consisting of a second charging capacitor which is at least one order of magnitude smaller than the first charging capacitor and which is connected in parallel to the laser electrodes, C) and wherein the saturation of the magnetic switch is initiated by closing at least one high-voltage switch.
  • the method according to the invention further develops this process sequence in that a) the charging capacitors - before the ignition between the laser electrodes sets in - are charged to a voltage which corresponds to approximately twice the burning voltage of the laser, and the magnetic switch is still in the unsaturated state is maintained, b) the high-voltage switch of the trigger branch is then closed and the second charging capacitor is at least partially discharged via the choke, while the charge on the first charging capacitor is practically retained due to only a small magnetizing current flowing through the magnetic switch, c ) that the magnetic switch is brought into saturation and thus its values of inductance and impedance, which are greatly reduced in the saturation state, allow a charge transfer current to flow from the first charging capacitor to the at least partially discharged second charging capacitor, this charge transfer current an increase in voltage at the laser electrodes to approximately twice the charging voltage and thus the ignition of the laser, d) that the first charging capacitor now stores its stored energy via the saturated and thus highly conductive magnetic switch feeds into the laser discharge and the high-voltage switch of the trigger branch is opened,
  • the capacitor C- the energy storage capacitor and C 2 denotes a smaller capacity, which is only required to ignite the laser.
  • the capacitor C is separated from the rest of the circuit by the magnetic switch M1.
  • the capacitor C is no longer required, so that no second charger is necessary.
  • the active switch Thy (in this example a thyratron) is parallel to the laser electrodes and is therefore earthed on one side. The voltage to which the switch Thy is exposed thus corresponds to the laser voltage. It is not higher than that of conventional circuit technology.
  • the capacitors C 1 and C 2 are initially charged to a voltage which corresponds to twice the nominal voltage of the laser; the magnetic switch Ml is unsaturated. After activating the active switch Thy J , the capacitor C is discharged via the choke Lsl, while the charge on C 1 is practically retained. By the core size, number of Wi ⁇ dungs and period C 2 . L, the time of saturation of the magnetic switch Ml is specified. At this point in time, the voltage at C ⁇ is almost unchanged and therefore higher than the voltage at C 2 , which was partially discharged.
  • a wide variety of switch types can be used as an active switching element in this circuit (e.g. spark gaps, multi-channel spark gaps, pseudo spark switches, thyratrons, etc.).
  • the scope of the invention is not limited to the use of a thyratron.
  • the magnetic switches M1 and M2 are unsaturated. Since the pulse charging process takes a few ⁇ s, the size and number of turns of the magnetic core of M2 must be designed not to saturate during this time. In contrast, the core of Ml is for a much shorter one Saturation time designed (typically 200 ns). After the start of the pulse charging process, the core Ml saturates very quickly and thus enables simultaneous charging of C and C 2> The core material of Ml is selected such that the core becomes unsaturated again after the pulse charging has ended (so-called F -Material, no remanence).
  • the process sequence is preceded by the pulse charging process and that the two magnetic switches M1 and the magnetic switch M2 arranged as a high-voltage switch in the trigger branch are advantageous Working together wisely.
  • the trigger branch opens in the exemplary embodiment according to FIG. 2, ie the thyratron Thy shown there automatically locks when the voltage applied to it drops below a limit value, and in the event In the exemplary embodiment according to FIG. 3, the saturation state of the magnetic switch M2 ceases and it jumps from the highly conductive to the practically non-conductive or only very poorly conductive state (unsaturated state).
  • the third exemplary embodiment according to FIG. 4 differs from the first according to FIG. 2 in that the first charging capacitor C and the saturable magnetic inductor Ml are interchanged, so that there is the advantage that the abbreviated as magnetic switch Ml saturable magnetic inductor is connected to the ground potential. It can thus be seen when looking at FIG. 4 that, seen in the direction from the high potential to the ground potential, when the first branch is connected in series to the first charging capacitor C, the magnet Switch Ml follows and the latter is accordingly directly grounded. In principle, the circuit properties are not changed thereby, that is to say that the method according to the invention can also be implemented with this circuit, as explained above with reference to FIG. 2, so that a more detailed description of the process sequence can be dispensed with here.
  • a second charger LG2 with a pulse charging stage PAS 1 is connected in addition to the first charger LG1 to the pulse-generating network by means of a coupling circuit in parallel with the magnetic switch M1, the feed points of the first charger LG1 and those of the coupling circuit being connected by the first Charging capacitor C, are electrically isolated from each other.
  • Low-inductance high-voltage pulse transformers such as are described in more detail in EP-A1-0 215 286 can advantageously be used for such a coupling circuit.
  • the arrangement is such that the coupling circuit in the form of the pulse charging stage PAS 1 has a second trigger branch L ⁇ 2 -S, which is additional to the trigger branch L s , -Ty, and consists of the series connection of a high-voltage switch S and a 'choke L ⁇ - 2 .
  • This second trigger branch is connected in parallel with a third charging capacity C., and this parallel connection is at one end to the second charger LG2 and at the other
  • the switching connection to the rest of the pulse-generating network is made - apart from the aisle-side connection - to the high longitudinal branch via a coupling capacitance C , which is connected to the high-voltage end of the magnetic switch Ml.
  • the connection to the second charger LG2 and the associated pulse charging stage PAS 1 have been added, specifically the connection to the terminals b ', b of the circuit according to FIG. 4.
  • This additional pulse charging stage PAS 1 with the second charger LG2 has the advantage that the polarity of the pulse voltage can be chosen so that the discharge process of the capacitor C 2 initiated by the high-voltage switch Thy is amplified.
  • the pulse charging stage is labeled PAS in FIG.
  • the switching thyratron Thy shown there contains in its trigger branch a large inductance of approx.
  • the capacitance of the second charging capacitor C 2 was 15 nF and that of the first charging capacitor C ⁇ 235 nF.
  • a pulse charging of the charging capacitors was carried out, for example, within a period of 5 ⁇ s; after a brief discharge phase of the second charging capacitor C 2 , there was a steep rise in voltage to the laser breakdown voltage or to a value above it in about 20 ns.
  • X-ray preionization is expediently used for the preionization of the TE gas lasers, which are designed in particular as exciter lasers, because the required number of charge carriers (ions, electrons) can be made available practically uniformly over the entire laser discharge volume.
  • the current in the high-voltage switching element, in particular a thyratron could be reduced by a factor of 1/5 compared to the prior art. Similar advantages result with regard to the use of a thyratron in the trigger branch in the third and fourth exemplary embodiment according to FIGS. 4 and 5.
  • the example according to FIG. 3 differs from the other exemplary embodiments by the use of a second magnetic switch M2 and, as explained, is distinguished by an advantageous interaction of the two magnetic switches M1 and M2.

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)

Abstract

Dans un dispositif générateur d'impulsions de haute tension et de haute puissance, notamment pour lasers à gaz à décharge partielle, les impulsions de haute tension pour le laser sont générées dans un réseau générateur d'impulsions qui comprend un premier condensateur de charge (C1) de capacité supérieure connecté en série à un commutateur magnétique (M1 = inducteur saturable) et un second condensateur de charge (C2) de moindre capacité connecté en parallèle à ce circuit en série (C1-M1) et en parallèle à la section des électrodes laser. Un circuit en série composé d'un commutateur de haute tension (Thy) et d'un étranglement (LS1) est connecté en parallèle à ladite section des électrodes laser. Le commutateur de haute tension (Thy) sert de déclencheur pour faire démarrer le processus de renversement de la charge du premier et du second condensateur de charge (C1, C2), qui sont chargés par un chargeur (LG) jusqu'au double environ de la tension de décharge du laser (LK). L'invention concerne également un procédé de génération d'impulsions de haute tension au moyen d'un tel dispositif. Les lasers excimer constituent un domaine préférentiel d'application.
EP89905050A 1988-04-20 1989-04-20 Procede et dispositif generateur d'impulsions de haute tension et de haute puissance, notamment pour lasers a gaz a decharge partielle Withdrawn EP0411022A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3813315 1988-04-20
DE3813315 1988-04-20

Publications (1)

Publication Number Publication Date
EP0411022A1 true EP0411022A1 (fr) 1991-02-06

Family

ID=6352485

Family Applications (1)

Application Number Title Priority Date Filing Date
EP89905050A Withdrawn EP0411022A1 (fr) 1988-04-20 1989-04-20 Procede et dispositif generateur d'impulsions de haute tension et de haute puissance, notamment pour lasers a gaz a decharge partielle

Country Status (4)

Country Link
US (1) US5138622A (fr)
EP (1) EP0411022A1 (fr)
JP (1) JPH03504429A (fr)
WO (1) WO1989010657A1 (fr)

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Also Published As

Publication number Publication date
US5138622A (en) 1992-08-11
WO1989010657A1 (fr) 1989-11-02
JPH03504429A (ja) 1991-09-26

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