EP0390338A1 - Méthode pour fabriquer un substrat pour une tête d'enregistrement à jet liquide - Google Patents

Méthode pour fabriquer un substrat pour une tête d'enregistrement à jet liquide Download PDF

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Publication number
EP0390338A1
EP0390338A1 EP90302165A EP90302165A EP0390338A1 EP 0390338 A1 EP0390338 A1 EP 0390338A1 EP 90302165 A EP90302165 A EP 90302165A EP 90302165 A EP90302165 A EP 90302165A EP 0390338 A1 EP0390338 A1 EP 0390338A1
Authority
EP
European Patent Office
Prior art keywords
recording head
substrate
jet recording
ink
electro
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP90302165A
Other languages
German (de)
English (en)
Other versions
EP0390338B1 (fr
Inventor
Hirokazu 21-21-203 Shimoda-Cho 5-Chome Komuro
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP4883989A external-priority patent/JPH02227255A/ja
Priority claimed from JP4883889A external-priority patent/JP2659238B2/ja
Application filed by Canon Inc filed Critical Canon Inc
Priority to EP93201057A priority Critical patent/EP0559295B1/fr
Publication of EP0390338A1 publication Critical patent/EP0390338A1/fr
Application granted granted Critical
Publication of EP0390338B1 publication Critical patent/EP0390338B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14088—Structure of heating means
    • B41J2/14112—Resistive element
    • B41J2/14129—Layer structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1604—Production of bubble jet print heads of the edge shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B41J2/1634—Manufacturing processes machining laser machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering

Definitions

  • the liquid jet recording method disclosed in the above Gazzette can not only be very effectively applied to the so-called drop-on demand recording method, but also can be easily realized by providing the recording head unit with highly dense multiple orifices over the full line width thereof corresponding to the recording region of the recorded member and therefore, has an advantage that images of high resolution and high quality can be obtained at a high speed.
  • the heat generating resistance layer 107 and electrodes 103 and 104 are patterned into a predeter­mined shape by etching. That is, in the other portions than the portion being constituted the heat generating region 102, they are patterned almost into one and the same shape, and in the portion, being constituted the heat generating region 102, the electrodes are not laminated on the heat generating resistance layer 107, but the heat generating resistance layer 107 constitutes a heat generating portion 111.
  • the first upper protective layer 108 and the third upper protec­tive layer 110 are laminated over the whole surface of the base plate 101, while the second upper protective layer 109 is patterned so as not to be laminated on the heat generating region 102.
  • the third protective layer 110 is in contact with ink, and with regard to the defects of the film forming these layers, care must be particularly taken of insulative­ness or the like.
  • Pin-holes and dust in the film may be mentioned as the defects of the film, and with regard to pin-holes, for example, as shown in JP Laid-Open Patent Application No. 60-157872 (corresponding USP 4777494), could be dissolved by anode-oxidizing the ground of the film portion, but the entry of dust into the film could not be sufficiently dissolved.
  • Another object of the present invention is to eliminate the problems as noted above and to provide a method of manufacturing a substrate for a liquid jet recording head which is free of the possibility of recording liquid permeating from a recess created by the short-circuited wiring portion of electrodes being cut to thereby corrode the wiring and which is high in reliability, a substrate manufactured by the method, a liquid jet recording head using the substrate, and a liquid jet recording apparatus having the head.
  • the present invention brings about excellent effects particularly in a recording head, recording device of the bubble jet system among the ink jet recording system.
  • any ink which is solid or softened at room temperature may also be used in the present invention.
  • the ink jet recording apparatus it is a common practice to control the temperature of ink itself within a range of 30 to 70 °C, thus adjusting the viscosity of the ink to be within the stable ejec­tion range. Accordingly any ink which is liquid upon applying a recording signal may be used. Furthermore, any ink which is liquefied upon application of thermal energy may also be used in the present invention.

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
EP90302165A 1989-03-01 1990-02-28 Méthode pour fabriquer un substrat pour une tête d'enregistrement à jet liquide Expired - Lifetime EP0390338B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP93201057A EP0559295B1 (fr) 1989-03-01 1990-02-28 Méthode pour fabriquer un substrat pour une tête d'enregistrement à jet liquide

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP48839/89 1989-03-01
JP4883989A JPH02227255A (ja) 1989-03-01 1989-03-01 液体噴射記録ヘッド用基体の製造方法およびその方法により製造された基体、並びにその基体を用いた液体噴射記録ヘッド
JP48838/89 1989-03-01
JP4883889A JP2659238B2 (ja) 1989-03-01 1989-03-01 インクジェット記録ヘッド、該ヘッド用基体および該基体の製造方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
EP93201057.2 Division-Into 1990-02-28

Publications (2)

Publication Number Publication Date
EP0390338A1 true EP0390338A1 (fr) 1990-10-03
EP0390338B1 EP0390338B1 (fr) 1994-12-07

Family

ID=26389165

Family Applications (2)

Application Number Title Priority Date Filing Date
EP90302165A Expired - Lifetime EP0390338B1 (fr) 1989-03-01 1990-02-28 Méthode pour fabriquer un substrat pour une tête d'enregistrement à jet liquide
EP93201057A Expired - Lifetime EP0559295B1 (fr) 1989-03-01 1990-02-28 Méthode pour fabriquer un substrat pour une tête d'enregistrement à jet liquide

Family Applications After (1)

Application Number Title Priority Date Filing Date
EP93201057A Expired - Lifetime EP0559295B1 (fr) 1989-03-01 1990-02-28 Méthode pour fabriquer un substrat pour une tête d'enregistrement à jet liquide

Country Status (3)

Country Link
EP (2) EP0390338B1 (fr)
AT (2) ATE139940T1 (fr)
DE (2) DE69014690T2 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0698494A3 (fr) * 1994-08-26 1997-02-19 Canon Kk Procédé de production d'une couche de base pour tête d'enregistrement à jet d'encre, tête d'enregistrement à jet d'encre et appareil d'enregistrement à jet d'encre
EP0768182A2 (fr) * 1995-10-13 1997-04-16 Canon Kabushiki Kaisha Méthode de fabrication d'une tête d'enregistrement par jet d'encre, tête d'enregistrement par jet d'encre fabriquée par cette méthode et appareil d'enregistrement par jet d'encre équipé avec une telle tête
CN1094425C (zh) * 1998-11-03 2002-11-20 三星电子株式会社 微型喷射装置的喷嘴板组件和制造喷嘴板组件的方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0032087A2 (fr) * 1980-01-04 1981-07-15 Thomson-Csf Plaquette de résistances en ligne à très faible pas
US4536250A (en) * 1983-04-20 1985-08-20 Canon Kabushiki Kaisha Method of making liquid jet recording head

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4707708A (en) * 1985-09-27 1987-11-17 Hitachi, Ltd. Thermal print head

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0032087A2 (fr) * 1980-01-04 1981-07-15 Thomson-Csf Plaquette de résistances en ligne à très faible pas
US4536250A (en) * 1983-04-20 1985-08-20 Canon Kabushiki Kaisha Method of making liquid jet recording head

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
IEEE CIRCUITS AND DEVICES MAGAZINE *
PATENT ABSTRACTS OF JAPAN *

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0698494A3 (fr) * 1994-08-26 1997-02-19 Canon Kk Procédé de production d'une couche de base pour tête d'enregistrement à jet d'encre, tête d'enregistrement à jet d'encre et appareil d'enregistrement à jet d'encre
US5660739A (en) * 1994-08-26 1997-08-26 Canon Kabushiki Kaisha Method of producing substrate for ink jet recording head, ink jet recording head and ink jet recording apparatus
EP0768182A2 (fr) * 1995-10-13 1997-04-16 Canon Kabushiki Kaisha Méthode de fabrication d'une tête d'enregistrement par jet d'encre, tête d'enregistrement par jet d'encre fabriquée par cette méthode et appareil d'enregistrement par jet d'encre équipé avec une telle tête
EP0768182A3 (fr) * 1995-10-13 1998-12-02 Canon Kabushiki Kaisha Méthode de fabrication d'une tête d'enregistrement par jet d'encre, tête d'enregistrement par jet d'encre fabriquée par cette méthode et appareil d'enregistrement par jet d'encre équipé avec une telle tête
US6315853B1 (en) 1995-10-13 2001-11-13 Canon Kabushiki Kaisha Method for manufacturing an ink jet recording head
CN1094425C (zh) * 1998-11-03 2002-11-20 三星电子株式会社 微型喷射装置的喷嘴板组件和制造喷嘴板组件的方法

Also Published As

Publication number Publication date
EP0559295B1 (fr) 1996-07-03
EP0559295A1 (fr) 1993-09-08
DE69027685D1 (de) 1996-08-08
EP0390338B1 (fr) 1994-12-07
DE69027685T2 (de) 1996-11-28
DE69014690T2 (de) 1995-05-04
ATE115051T1 (de) 1994-12-15
ATE139940T1 (de) 1996-07-15
DE69014690D1 (de) 1995-01-19

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