EP0377445A3 - Procédé et dispositif pour la génération de faisceaux d'ions à grande section transversale - Google Patents
Procédé et dispositif pour la génération de faisceaux d'ions à grande section transversale Download PDFInfo
- Publication number
- EP0377445A3 EP0377445A3 EP19900100045 EP90100045A EP0377445A3 EP 0377445 A3 EP0377445 A3 EP 0377445A3 EP 19900100045 EP19900100045 EP 19900100045 EP 90100045 A EP90100045 A EP 90100045A EP 0377445 A3 EP0377445 A3 EP 0377445A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- ions
- grid
- ion beam
- help
- ion beams
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/08—Ion sources; Ion guns using arc discharge
- H01J27/10—Duoplasmatrons ; Duopigatrons
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Electron Sources, Ion Sources (AREA)
- Drying Of Semiconductors (AREA)
- ing And Chemical Polishing (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE3900252A DE3900252C1 (fr) | 1989-01-05 | 1989-01-05 | |
DE3900252 | 1989-01-05 |
Publications (3)
Publication Number | Publication Date |
---|---|
EP0377445A2 EP0377445A2 (fr) | 1990-07-11 |
EP0377445A3 true EP0377445A3 (fr) | 1991-07-03 |
EP0377445B1 EP0377445B1 (fr) | 1994-05-11 |
Family
ID=6371639
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP90100045A Expired - Lifetime EP0377445B1 (fr) | 1989-01-05 | 1990-01-02 | Procédé et dispositif pour la génération de faisceaux d'ions à grande section transversale |
Country Status (2)
Country | Link |
---|---|
EP (1) | EP0377445B1 (fr) |
DE (2) | DE3900252C1 (fr) |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2764707A (en) * | 1955-07-22 | 1956-09-25 | Richard B Crawford | Ion source |
DE2942386A1 (de) * | 1979-10-19 | 1981-04-30 | Ulrich Dr. 8000 München Boesl | Ionenquelle |
US4737688A (en) * | 1986-07-22 | 1988-04-12 | Applied Electron Corporation | Wide area source of multiply ionized atomic or molecular species |
WO1988007259A1 (fr) * | 1987-03-18 | 1988-09-22 | Hans Oechsner | Source d'ions de haute frequence |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3005931A (en) * | 1960-03-29 | 1961-10-24 | Raphael A Dandl | Ion gun |
-
1989
- 1989-01-05 DE DE3900252A patent/DE3900252C1/de not_active Expired - Fee Related
-
1990
- 1990-01-02 DE DE59005653T patent/DE59005653D1/de not_active Expired - Fee Related
- 1990-01-02 EP EP90100045A patent/EP0377445B1/fr not_active Expired - Lifetime
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2764707A (en) * | 1955-07-22 | 1956-09-25 | Richard B Crawford | Ion source |
DE2942386A1 (de) * | 1979-10-19 | 1981-04-30 | Ulrich Dr. 8000 München Boesl | Ionenquelle |
US4737688A (en) * | 1986-07-22 | 1988-04-12 | Applied Electron Corporation | Wide area source of multiply ionized atomic or molecular species |
WO1988007259A1 (fr) * | 1987-03-18 | 1988-09-22 | Hans Oechsner | Source d'ions de haute frequence |
Non-Patent Citations (1)
Title |
---|
IBM TECHNICAL DISCLOSURE BULLETIN. vol. 17, no. 5, Oktober 1974, NEW YORK US Seite 1379 W.C. KO, R.WINNARD: "HOLLOW CATHODE DISCHARGE ION SOURCE" * |
Also Published As
Publication number | Publication date |
---|---|
DE59005653D1 (de) | 1994-06-16 |
DE3900252C1 (fr) | 1990-05-23 |
EP0377445B1 (fr) | 1994-05-11 |
EP0377445A2 (fr) | 1990-07-11 |
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Legal Events
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GBT | Gb: translation of ep patent filed (gb section 77(6)(a)/1977) |
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ET | Fr: translation filed | ||
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