EP0363832B1 - Radiating device having a high output - Google Patents

Radiating device having a high output Download PDF

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Publication number
EP0363832B1
EP0363832B1 EP89118546A EP89118546A EP0363832B1 EP 0363832 B1 EP0363832 B1 EP 0363832B1 EP 89118546 A EP89118546 A EP 89118546A EP 89118546 A EP89118546 A EP 89118546A EP 0363832 B1 EP0363832 B1 EP 0363832B1
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Prior art keywords
electrodes
dielectric
radiator according
power radiator
discharge
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German (de)
French (fr)
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EP0363832A1 (en
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Bernd Dr. Gellert
Ulrich Dr. Kogelschatz
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Heraeus Noblelight GmbH
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ABB Asea Brown Boveri Ltd
Heraeus Noblelight GmbH
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel

Definitions

  • the invention relates to a state of the art, such as results from EP application 87109674.9 (publication number 257111).
  • UV sources The industrial use of photochemical processes depends heavily on the availability of suitable UV sources.
  • the classic UV lamps deliver low to medium UV intensities at some discrete wavelengths, e.g. the mercury low-pressure lamps at 185 nm and especially at 254 nm. Really high UV power can only be obtained from high-pressure lamps (Xe, Hg), which then distribute their radiation over a larger wavelength range.
  • high-pressure lamps Xe, Hg
  • the new excimer lasers have provided some new wavelengths for basic photochemical experiments. currently for cost reasons for an industrial process probably only suitable in exceptional cases.
  • the invention has for its object to provide a high-performance radiator, in particular for UV or VUV light, which is characterized in particular by higher efficiency, is economical to manufacture and also enables the construction of very large area radiators.
  • the high-power radiator according to the invention permits radiator geometries of almost any shape.
  • cylindrical or elliptical emitters can be created.
  • the radiators do not necessarily have to be flat or elongated, but can be curved or curved in one or more dimensions.
  • the invention allows the walls delimiting the discharge space to be provided with a luminescence layer either on the wall facing the discharge space or on the outer wall for converting the UV light into visible light.
  • the wall no longer has to be UV-permeable because it only has to let visible light through.
  • Dielectrics which are not necessarily transparent to UV light can be used in the arrangement according to the invention, which means that particularly high efficiencies can be expected for special applications.
  • UV light can be used directly for some applications without having to leave the discharge space. This applies in particular to those applications that can be carried out in the discharge space.
  • Such applications with growing economic importance include e.g. use as a strong UV lamp for pre-ionization purposes of other discharges, e.g. Lasers, treatment of surfaces with UV exposure, chemical processes such as preparation of new chemicals or surfaces and coating processes such as plasma CVD (Chemical Vapor Deposition), Photo CVD, in which a substrate to be treated is brought as close as possible to the UV light source with a suitable filling gas becomes.
  • plasma CVD Chemical Vapor Deposition
  • Photo CVD Photo CVD
  • 1 and 2 consists of two spaced UV-transparent plates 1, 2 made of quartz glass, between which a further plate 3 made of dielectric material, e.g. Glass or ceramic or a plastic dielectric is arranged. Spacers 4, 5 distributed over the surface secure the spacing of the plates 1, 2 and 3 and at the same time serve to hold them together.
  • an adjustable AC voltage in the order of magnitude of several 100 volts to 20,000 volts at frequencies in the range of technical alternating current up to a few kHz - depending on the electrode geometry, pressure in the discharge space and composition of the filling gas.
  • the discharge spaces 8 and 9 between the plates 1 and 3 or 3 and 2 are filled with a filling gas which emits radiation under discharge conditions, e.g. Mercury, noble gas, noble gas-metal vapor mixture, noble gas-halogen mixture, optionally using an additional further noble gas, preferably Ar, He, Ne, as a buffer gas.
  • a filling gas which emits radiation under discharge conditions, e.g. Mercury, noble gas, noble gas-metal vapor mixture, noble gas-halogen mixture, optionally using an additional further noble gas, preferably Ar, He, Ne, as a buffer gas.
  • a plurality of discharge channels 10 form from one electrode 6' through the dielectric 3 along the surface of the dielectric 3 and back into the dielectric 3 to the adjacent electrode 6".
  • These sliding discharges 10 running along the surface emit the UV light, which then penetrates through the transparent plates 1, 2 in the example. If different filling gases are used in rooms 8 and 9, two different radiations can be generated with one and the same radiator if the electrode arrangement and distribution are selected accordingly.
  • a coating 11, 12 By applying a coating 11, 12 to the two surfaces of the dielectric 3, lower ignition voltages for the discharge can be achieved, so that the costs for the supply can be reduced.
  • the oxides of magnesium, ytterbium, lanthanum and cerium are primarily suitable as coating material.
  • the UV light can also be used directly for some applications without it having to penetrate through the cover plates 1, 2. This applies to those applications that can be carried out in the discharge spaces 8, 9 themselves.
  • Such applications with growing economic importance include e.g. the treatment of surfaces with UV exposure, chemical processes such as the preparation of new chemicals or surface coating such as plasma CVD, photo CVD, i.e. processes in which a substrate to be treated with a suitable filler gas is as close as possible to the dielectric surface, i.e. where the Radiation is created, brought up.
  • FIG. 6 a tube 21 made of dielectric material is arranged coaxially between two quartz tubes 19, 20. Spacers, not shown, secure the mutual position of the three tubes.
  • metal electrodes 22 ′, 22 ′′ are embedded in the dielectric tube 21, which analogously to FIG. 2 are alternately connected to one and the other pole of an AC power source (not shown).
  • the cylinder emitter according to FIG. 6 emits both inwards (into the interior of the tube 20) and outwards. If different filling gases are used in rooms 8 and 9, two different radiations can be generated with one and the same radiator if the electrode arrangement and distribution are selected accordingly. Of course, this also applies to a radiator according to Fig. 4.
  • the desired reactions can also take place in the discharge space (s) 8 or 9 itself in the case of cylindrical radiators according to FIG. 6.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Discharge Lamps And Accessories Thereof (AREA)
  • Vessels And Coating Films For Discharge Lamps (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)

Description

Die Erfindung bezieht sich auf einen Hochleistungsstrahler, insbesondere für ultraviolettes Licht, mit einem mit unter Entladungsbedingungen Strahlung aussendendem Füllgas gefüllten, von Wänden begrenzten Entladungsraum und mit Elektrodenpaaren, die paarweise an die beiden Pole einer Hochspannungsquelle angeschlossen sind, wobei zwischen zwei auf unterschiedlichem Potential liegenden Elektroden mindestens ein dielektrisches Material liegt, das an den Entladungsraum angrenzt.The invention relates to a high-power radiator, in particular for ultraviolet light, with a discharge space filled with filling gas emitting radiation under discharge conditions and delimited by walls, and with electrode pairs which are connected in pairs to the two poles of a high-voltage source, with two electrodes lying at different potentials there is at least one dielectric material which adjoins the discharge space.

Die Erfindung nimmt dabei Bezug auf einen Stand der Technik, wie er sich etwa aus der EP-Anmeldung 87109674.9 (Veröffentlichungsnummer 257111) ergibt.The invention relates to a state of the art, such as results from EP application 87109674.9 (publication number 257111).

Der industrielle Einsatz photochemischer Verfahren hängt stark von der der Verfügbarkeit geeigneter UV-Quellen ab. Die klassischen UV-Strahler liefern niedrige bis mittlere UV-Intensitäten bei einigen diskreten Wellenlängen, wie z.B. die Quecksilber-Niederdrucklampen bei 185 nm und insbesondere bei 254 nm. Wirklich hohe UV-Leistungen erhält man nur aus Hochdrucklampen (Xe, Hg), die dann aber ihre Strahlung über einen grösseren Wellenlängenbereich verteilen. Die neuen Excimer-Laser haben einige neue Wellenlängen für photochemische Grundlagenexperimente bereitgestellt, sind. z.Zt. aus Kostengründen für einen industriellen Prozess wohl nur in Ausnahmefällen geeignet.The industrial use of photochemical processes depends heavily on the availability of suitable UV sources. The classic UV lamps deliver low to medium UV intensities at some discrete wavelengths, e.g. the mercury low-pressure lamps at 185 nm and especially at 254 nm. Really high UV power can only be obtained from high-pressure lamps (Xe, Hg), which then distribute their radiation over a larger wavelength range. The new excimer lasers have provided some new wavelengths for basic photochemical experiments. currently for cost reasons for an industrial process probably only suitable in exceptional cases.

In der eingangs genannten EP-Patentanmeldung oder auch in dem Konferenzdruck "Neue UV- und VUV-Excimerstrahler von U.Kogelschatz und B.Eliasson, verteilt an der 10.Vortragstagung der Gesellschaft Deutscher Chemiker, Fachgruppe Photochemie, in Würzburg (BRD) 18.- 20.November 1987, wird ein neuer Excimerstrahler beschrieben. Dieser neue Strahlertyp basiert auf der Grundlage, dass man Excimerstrahlung auch in stillen elektrischen Entladungen erzeugen kann, einem Entladungstyp, der in der Ozonerzeugung grosstechnisch eingesetzt wird. In den nur kurzzeitig « 1 Mikrosekunde) vorhandenen Stromfilamenten dieser Entladung werden durch Elektronenstoss Edelgasatome angeregt, die zu angeregten Molekülkomplexen (Excimeren) weitereagieren. Diese Excimere leben nur einige 100 Nanosekunden und geben beim Zerfall ihre Bindungsenergie in Form von UV-Strahlung ab.In the EP patent application mentioned at the beginning or in the conference paper "New UV and VUV excimer emitters from U.Kogelschatz and B.Eliasson, distributed at the 10th lecture conference of the Society of German Chemists, Photochemistry Group, in Würzburg (FRG) 18. A new excimer emitter is described on November 20, 1987. This new type of emitter is based on the fact that excimer radiation can also be generated in silent electrical discharges, a type of discharge that is used on a large scale in ozone generation. In the short term «1 microsecond) Existing current filaments of this discharge are excited by electron impact noble gas atoms, which react further to excited molecular complexes (excimers) which only live for a few 100 nanoseconds and release their binding energy in the form of UV radiation when they decay.

Der Aufbau eines derartigen Excimerstrahlers entspricht bis hin zur Stromversorgung weitgehend dem eines klassischen Ozonerzeugers, mit dem wesentlichen Unterschied, dass mindestens eine der den Entladungraum begrenzenden Elektroden und/oder Dielektrikumsschichten für die erzeugte Strahlung durchlässig ist.The construction of such an excimer radiator, up to the power supply, largely corresponds to that of a conventional ozone generator, with the essential difference that at least one of the electrodes and / or dielectric layers delimiting the discharge space is transparent to the radiation generated.

Ausgehend vom Stand der Technik liegt der Erfindung die Aufgabe zugrunde, einen Hochleistungsstrahler, insbesondere für UV- oder VUV-Licht, zu schaffen, der sich insbesondere durch höhere Effizienz auszeichnet, wirtschaftlich zu fertigen ist und auch den Aufbau sehr grosser Flächenstrahler ermöglicht.Starting from the prior art, the invention has for its object to provide a high-performance radiator, in particular for UV or VUV light, which is characterized in particular by higher efficiency, is economical to manufacture and also enables the construction of very large area radiators.

Zur Lösung dieser Aufgabe bei einem Hochleistungsstrahler der eingangs genannten Gattung ist erfindungsgemäss vorgesehen, dass die genannten Elektrodenpaare, räumlich getrennt von besagten Wänden und voneinander getrennt durch dielektrisches Material, nebeneinander angeordnet sind, derart, dass sich die stille elektrische Entladung im Entladungsraum im wesentlichen zur im Bereich der Dielektrikumsoberfläche ausbildet.To solve this problem in a high-power radiator of the type mentioned at the outset, it is provided according to the invention that the electrode pairs mentioned, spatially separated from said walls and separated from one another by dielectric material, are arranged next to one another in such a way that the silent electrical discharge in the discharge space essentially corresponds to the Area of the dielectric surface.

Bei Anliegen der Spannung bildet sich eine Vielzahl von Gleitentladungen von einer Elektrode durch das Dielektrikum im wesentlichen längs der Oberfläche des Dielektrikums und wieder in das Dielektrikum hinein zur benachbarten Elektrode. Diese Entladungen strahlen das verwendbare UV-Licht ab, das dann z.B. durch die den Entladungsraum begrenzende Wand dringt. Im Gegensatz zu den bekannten Konfigurationen wird hier die gesamte Ausdehnung der Entladungskanäle zur Strahlungserzeugung ausgenutzt.When the voltage is applied, a large number of sliding discharges form from one electrode through the dielectric essentially along the surface of the dielectric and back into the dielectric to the adjacent electrode. These discharges emit the usable UV light, which then e.g. penetrates through the wall delimiting the discharge space. In contrast to the known configurations, the entire expansion of the discharge channels is used here to generate radiation.

Die Herstellung des erfindungsgemässen Hochleistungsstrahlers ist vereinfacht und kostengünstiger als bei den bekannten Strahlern. Man kann Materialien verwenden, die man leicht giessen kann, sodass die Elektroden eingegossen werden können. Dadurch werden Probleme beim Einhalten von Toleranzen (Z.B. Dicke des Dielektrikums oder der Abstände) verkleinert. Auch für das begrenzende Glas/Quarz-Material sind keine sehr hohen Ansprüche zu stellen, da die begrenzenden Wände lediglich transparent sein müssen und nicht durch die Entladung beansprucht werden. Dies führt zu einer höheren Lebensdauer des Strahlers. Auch ist die Spaltweite und deren Toleranzen weit weniger kritisch.Insbesondere lassen sich nunmehr wegen der geringeren Anforderungen bezüglich Toleranzen sehr grosse Flächenstrahler realisieren, die sehr dünn ausgeführt werden können.The manufacture of the high-power radiator according to the invention is simplified and less expensive than in the known radiators. You can use materials that are easy to cast so that the electrodes can be cast in. This reduces problems with compliance with tolerances (e.g. thickness of the dielectric or the distances). Also for the limiting glass / quartz material there are no very high demands, since the limiting walls only have to be transparent and are not stressed by the discharge. This leads to a longer lamp life. The gap width and its tolerances are also far less critical. In particular, because of the lower requirements with regard to tolerances, very large area radiators can be realized, which can be made very thin.

Weil praktisch die gesamte Länge des Entladungsraum zu Emission beiträgt, ist die UV-Ausbeute sehr hoch. Transmissionsverluste eines Elektrodengitters oder einer teildurchlässigen Schicht liegen nicht vor.Because practically the entire length of the discharge space contributes to emission, the UV yield is very high. There are no transmission losses from an electrode grid or a partially permeable layer.

Der erfindungsgemässe Hochleistungsstrahler erlaubt Strahler-Geometrien nahezu beliebiger Gestalt. Neben Flächenstrahlern, die nach einer oder nach beiden Flachseiten strahlen, können zylindrische oder elliptische Strahler geschaffen werden. Auch müssen die Strahler nicht notwendig eben oder langestreckt sein, sondern können in einer oder mehreren Dimensionen gekrümmt oder gebogen sein.The high-power radiator according to the invention permits radiator geometries of almost any shape. In addition to surface emitters that emit on one or both flat sides, cylindrical or elliptical emitters can be created. Also, the radiators do not necessarily have to be flat or elongated, but can be curved or curved in one or more dimensions.

Selbstverständlich erlaubt es die Erfindung in Analogie zur CH-A-675 504, die den Entladungsraum begrenzenden Wände entweder auf der dem Entladungsraum zugewandten oder der äusseren Wand mit einer Lumineszenz-Schicht zu versehen zur Umwandlung des UV-Lichts in sichtbares Licht. Bei der ersten Alternative muss dann die Wand nicht mehr UV-durchlässig sein, weil sie nur noch sichtbares Licht durchlassen muss.Of course, in analogy to CH-A-675 504, the invention allows the walls delimiting the discharge space to be provided with a luminescence layer either on the wall facing the discharge space or on the outer wall for converting the UV light into visible light. In the first alternative, the wall no longer has to be UV-permeable because it only has to let visible light through.

Bei der erfindungsgemässen Anordnung können Dielektrika verwendet werden, die nicht notwendigerweise transparent für das UV-Licht sind, was für besondere Anwendungen besonders hohe Wirkungsgrade erwarten lässt. So kann insbesondere das UV-Licht für manche Anwendungen direkt verwendet werden, ohne dass es den Entladungsraum verlassen muss. Dies gilt insbesondere für solche Anwendungen, die sich im Entladungsraum durchführen lassen. Zu solchen Anwendungen mit wachsender wirtschaftlicher Bedeutung zählen z.B. der Einsatz als starker UV-Strahler für Vorionisierungszwecke anderer Entladungen, z.B. Laser, Behandlung von Oberflächen mit UV-Belichtung, chemische Prozesse wie Präparation neuer Chemikalien oder Oberflächen und Beschichtungsverfahren wie Plasma-CVD (Chemical Vapor Deposition), Photo-CVD, bei denen ein zu behandelndes Substrat bei geeignetem Füllgas möglichst dicht an UV-Lichtquelle gebracht wird. Die besonderen Vorteile einer solchen "Innen"-Anordnung liegen u.a. in der Vermeidung von Absorptionsverlusten durch Fenster und in der Ausnutzung zusätzlicher Effekte durch die Entladung selbst.Dielectrics which are not necessarily transparent to UV light can be used in the arrangement according to the invention, which means that particularly high efficiencies can be expected for special applications. In particular, UV light can be used directly for some applications without having to leave the discharge space. This applies in particular to those applications that can be carried out in the discharge space. Such applications with growing economic importance include e.g. use as a strong UV lamp for pre-ionization purposes of other discharges, e.g. Lasers, treatment of surfaces with UV exposure, chemical processes such as preparation of new chemicals or surfaces and coating processes such as plasma CVD (Chemical Vapor Deposition), Photo CVD, in which a substrate to be treated is brought as close as possible to the UV light source with a suitable filling gas becomes. The particular advantages of such an "inside" arrangement include in avoiding absorption losses through windows and in utilizing additional effects through the discharge itself.

In der Zeichnung sind Ausführungsbeispiele der Erfindung schematisch dargestellt; darin zeigt

  • Fig. 1 Ein erstes Ausführungsbeispiel eines Flächenstrahlers mit beidseitiger Abstrahlung im Querschnitt;
  • Fig. 2 der Flächenstrahler nach Fig.1 im Längsschnitt mit einer schematischen Darstellung der elektrischen Anspeisung;
  • Fig. 3 eine eines erste Abwandlung des Flächenstrahlers nach Fig.1 und 2 mit einseitiger Abstrahlung und Elektroden, die auf ein Substrat aufgebracht und mit einer dielektrischen Schicht überzogen sind;
  • Fig. 4 eine zweite Abwandlung des Flächenstrahlers nach Fig.1 und 2 mit inhomogenem Dielektrikum;
  • Fig. 5 eine dritte Abwandlung des Flächenstrahlers nach Fig.1 und 2 mit von dielektrischen Material ummantelten Einzelelektroden;
  • Fig. 6 ein Ausführungsbeispiel der Erfindung in Form eines Zylinderstrahlers im Querschnitt;
In the drawing, embodiments of the invention are shown schematically; in it shows
  • Fig. 1 A first embodiment of a panel radiator with radiation on both sides in cross section;
  • 2 shows the surface radiator according to FIG. 1 in longitudinal section with a schematic illustration of the electrical feed;
  • 3 shows a first modification of the surface radiator according to FIGS. 1 and 2 with one-sided radiation and electrodes which are applied to a substrate and coated with a dielectric layer;
  • 4 shows a second modification of the surface radiator according to FIGS. 1 and 2 with an inhomogeneous dielectric;
  • 5 shows a third modification of the surface radiator according to FIGS. 1 and 2 with individual electrodes encased by dielectric material;
  • Fig. 6 shows an embodiment of the invention in the form of a cylinder radiator in cross section;

Der Flächenstrahler nach Fig.1 und 2 besteht aus zwei beabstandeten UV-durchlässigen Platten 1, 2 aus Quarzglas, zwischen denen eine weitere Platte 3 aus dielektrischen Material, z.B. Glas oder Keramik oder ein Kunststoff-Dielektrikum angeordnet ist. Ueber die Fläche verteilte Abstandshalter 4, 5 sichern die Distanzierung der Platten 1, 2 und 3 und dienen gleichzeitig deren Zusammenhalt. In die Platte 3 sind in regelmässigen Abständen und voneinander beabstandet Metallelektroden 6',6" eingebettet. Wie in Fig.2 zu erkennen ist, sind die Elektroden 6'6", abwechselnd mit dem einen und dem anderen Pol einer Wechselstromquelle 7 verbunden.Die Wechselstromquelle 7 entspricht grundsätzlich jenen, wie sie zur Anspeisung von Ozonerzeugern verwendet werden. Typisch liefert sie eine einstellbare Wechselspannung in der Grössenordnung von mehreren 100 Volt bis 20000 Volt bei Frequenzen im Bereich des technischen Wechselstroms bis hin zu einigen kHz - abhängig von der Elektrodengeometrie, Druck im Entladungsraum und Zusammensetzung des Füllgases.1 and 2 consists of two spaced UV-transparent plates 1, 2 made of quartz glass, between which a further plate 3 made of dielectric material, e.g. Glass or ceramic or a plastic dielectric is arranged. Spacers 4, 5 distributed over the surface secure the spacing of the plates 1, 2 and 3 and at the same time serve to hold them together. Metal electrodes 6 ', 6 "are embedded in the plate 3 at regular intervals and at a distance from one another. As can be seen in FIG. 2, the electrodes 6'6" are alternately connected to one and the other pole of an AC power source 7 AC source 7 basically corresponds to those used for feeding ozone generators. Typically, it supplies an adjustable AC voltage in the order of magnitude of several 100 volts to 20,000 volts at frequencies in the range of technical alternating current up to a few kHz - depending on the electrode geometry, pressure in the discharge space and composition of the filling gas.

Die Entladungsräume 8 und 9 zwischen den Platten 1 und 3 bzw. 3 und 2 sind mit einem unter Entladungsbedingungen Strahlung aussendenden Füllgas gefüllt, z.B. Quecksilber, Edelgas, Edelgas-Metalldampf-Gemisch, Edelgas-Halogen-Gemisch, gegebenenfalls unter Verwendung eines zusätzlichen weiteren Edelgases, vorzugsweise Ar, He, Ne, als Puffergas.The discharge spaces 8 and 9 between the plates 1 and 3 or 3 and 2 are filled with a filling gas which emits radiation under discharge conditions, e.g. Mercury, noble gas, noble gas-metal vapor mixture, noble gas-halogen mixture, optionally using an additional further noble gas, preferably Ar, He, Ne, as a buffer gas.

Je nach gewünschter spektraler Zusammensetzung der Strahlung kann dabei eine Substanz/Substanzgemisch gemäss nachfolgender Tabelle Vernwendung finden:

Figure imgb0001
Depending on the desired spectral composition of the radiation, a substance / substance mixture according to the following table can be used:
Figure imgb0001

Daneben kommen eine ganze Reihe weiterer Füllgase in Frage:

  • - Ein Edelgas (Ar, He, Kr, Ne, Xe) oder Hg mit einem Gas bzw. Dampf aus F2, J2, Br2, CI2 oder eine Verbindung, die in der Entladung ein oder mehrere Atome F, J, Br oder CI abspaltet;
  • - ein Edelgas (Ar, He, Kr, Ne, Xe) oder Hg mit 02 oder einer Verbindung, die in der Entladung ein oder mehrere O-Atome abspaltet;
  • - ein Edelgas (Ar, He, Kr, Ne, Xe) mit Hg.
In addition, a whole series of other filling gases are possible:
  • An inert gas (Ar, He, Kr, Ne, Xe) or Hg with a gas or vapor from F 2 , J 2 , Br 2 , CI 2 or a compound that contains one or more atoms F, J in the discharge Split off Br or CI;
  • - An inert gas (Ar, He, Kr, Ne, Xe) or Hg with 0 2 or a compound that releases one or more O atoms in the discharge;
  • - an inert gas (Ar, He, Kr, Ne, Xe) with Hg.

In der sich bildenden elektrischen Gleitentladung (surface discharge) kann die Elektronenenergieverteilung durch Dicke der dielektrischen Platte 3 und deren Eigenschaften, Abstand zwischen den Elektroden 6',6", Druck und/oder Temperatur optimal eingestellt werden.In the forming electrical discharge (surface discharge), the electron energy distribution can be optimally adjusted by the thickness of the dielectric plate 3 and its properties, distance between the electrodes 6 ', 6 ", pressure and / or temperature.

Bei Anliegen einer Spannung zwischen je zwei benachbarten Elektroden 6',6" bildet sich eine Vielzahl von Entladungskanälen 10 von einer Elektrode 6' durch das Dielektrikum 3 längs der Oberfläche des Dielektrikums 3 und wieder in das Dielektrikum 3 hinein zur benachbarten Elektrode 6". Diese längs der Oberfläche verlaufenden Gleitentladungen 10 strahlen das UV-Licht ab, das dann durch die im Beispielsfall transparenten Platten 1, 2 dringt. Verwendet man in den Räumen 8 und 9 unterschiedliche Füllgase, so lassen sich bei entsprechender Wahl der Elektrodenanordnung und -verteilung mit einunddemselben Strahler zwei unterschiedliche Strahlungen erzeugen. Durch Aufbringen einer Beschichtung 11, 12 auf die beiden Oberflächen des Dielektrikums 3 lassen sich niedrigere Zündspannungen für die Entladung erzielen, so dass die Kosten für die Speisung reduziert werden können. Als Beschichtungsmaterial kommen in erster Linie die Oxide von Magnesium, Ytterbium, Lanthan und Cer (MgO, Yb203, La203, Ce02) in Frage.When a voltage is applied between each two adjacent electrodes 6 ', 6 ", a plurality of discharge channels 10 form from one electrode 6' through the dielectric 3 along the surface of the dielectric 3 and back into the dielectric 3 to the adjacent electrode 6". These sliding discharges 10 running along the surface emit the UV light, which then penetrates through the transparent plates 1, 2 in the example. If different filling gases are used in rooms 8 and 9, two different radiations can be generated with one and the same radiator if the electrode arrangement and distribution are selected accordingly. By applying a coating 11, 12 to the two surfaces of the dielectric 3, lower ignition voltages for the discharge can be achieved, so that the costs for the supply can be reduced. The oxides of magnesium, ytterbium, lanthanum and cerium (MgO, Yb 2 0 3 , La 2 0 3 , Ce0 2 ) are primarily suitable as coating material.

Das UV-Licht kann für manchen Anwendungen auch direkt verwendet werden, ohne dass es durch die Abdeckplatten 1, 2 dringen muss. Dies gilt für solche Anwendungen, die sich in den Entladungsräumen 8, 9 selbst durchführen lassen. Zu solchen Applikationen mit wachsender wirtschaftlicher Bedeutung zählen z.B. die Behandlung von Oberflächen mit UV-Belichtung, chemische Prozesse wie Präparation neuer Chemikalien oder Oberflächen-Beschichtung wie Plasma-CVD, Photo-CVD, also Verfahren, bei denen ein zu behandelndes Substrat bei geeignetem Füllgas möglichst dicht an die Dielektrikumsoberfläche, also dort wo die Strahlung entsteht, herangebracht wird.The UV light can also be used directly for some applications without it having to penetrate through the cover plates 1, 2. This applies to those applications that can be carried out in the discharge spaces 8, 9 themselves. Such applications with growing economic importance include e.g. the treatment of surfaces with UV exposure, chemical processes such as the preparation of new chemicals or surface coating such as plasma CVD, photo CVD, i.e. processes in which a substrate to be treated with a suitable filler gas is as close as possible to the dielectric surface, i.e. where the Radiation is created, brought up.

Die besonderen Vorteile einer solchen "Innen"-Anordnung liegen u.a. in der Vermeidung von Absorptionsverlusten (durch die Platten 1,2) und in der Ausnutzung zusätzlicher Effekte durch die Entladung selbst, wobei die elektrischen Eigenschaften des zu behandelnden Substrats relativ unerheblich sind.The particular advantages of such an "inside" arrangement include in the avoidance of absorption losses (through the plates 1, 2) and in the use of additional effects through the discharge itself, the electrical properties of the substrate to be treated being relatively insignificant.

Die Herstellung des Dielektrikums 3 samt der in ihm eingebetteten Elektroden 6', 6" ist gegenüber den bekannten Hochleistungsstrahlern vereinfacht und damit kostengünstiger. Man kann Materialien verwenden, die man relativ einfach giessen kann, so dass die Elektroden 6', 6" gleich miteingegossen werden können. Dadurch werden Probleme beim Einhalten von Toleranzen, z.B. die Dicke des Dielektrikums 3 oder der Abstände zwischen den Platten 1 und 3 bzw. 3 und 2 verkleinert. Auch für das Material der UV-durchlässigen Platten - sofern sie überhaupt UV-durchlässig sein müssen - sind keine sehr hohen Ansprüche zu stellen, da sie nicht durch die Entladung beansprucht sind. Dies führt wiederum zu einer Erhöhung der Gesamtlebensdauer des Strahlers.The manufacture of the dielectric 3, including the electrodes 6 ', 6 "embedded in it, is simplified and therefore less expensive than the known high-power radiators. Materials can be used which are relatively easy to cast, so that the electrodes 6', 6" are cast in at the same time can. This eliminates problems with compliance with tolerances, e.g. the thickness of the dielectric 3 or the distances between the plates 1 and 3 or 3 and 2 is reduced. Also for the material of the UV-permeable plates - if they have to be UV-permeable at all - there are no very high demands, since they are not stressed by the discharge. This in turn leads to an increase in the total life of the lamp.

Für eine kostengünstige Herstellung der in das Dielektrikum 3 eingebetteten Elektroden 6, 6" kann auch auf Techniken zurückgegriffen werden, die bei der Herstellung von Plasmadisplay-Zellen Anwendung finden (vgl. "AC Plasma Display" von T.N.Criscimagna & P.Pleshko in "Display Devices", J.I.Pamkove (Ed.), Springer-Verlag Berlin, Heidelberg, New York 1980, S. 92 - 150).For an inexpensive manufacture of the electrodes 6, 6 "embedded in the dielectric 3, techniques can also be used which are used in the manufacture of plasma display cells (cf. "AC Plasma Display" by TNCriscimagna & P.Pleshko in "Display Devices", JIPamkove (Ed.), Springer-Verlag Berlin, Heidelberg, New York 1980, pp. 92-150).

Anstelle von metallischen Drähten 6', 6" nach Fig.1 sind die Elektroden gemäss Fig.3 als diskrete Leiterbahnen 6a, 6b mittels Dünnfilm- oder Dickfilm-Techniken auf ein Substrat 13 aus Glas, Quarz oder Keramik aufgebracht. Dabei werden einerseits Bedampfungs- und Sputter-Prozesse zur Metallisierung verwendet, andererseits leitfähige Pasten.Feine Leiterbahnen können durch photo-lithographische Verfahren, breitere (> 25 um) können durch Metallabscheidung durch eine Maske hindurch erzeugt werden. Die so aufgebrachten Leiterbahnen (Elektroden) werden danach durch eine dielektrische Schicht 14 abgedeckt. So kann man z.B. Schichten aus Bleioxydglas als Spray oder Paste auftragen und anschliessend erhitzen, wobei sich eine durchgehende Glasschicht bildet. Schichten aus Borsilikatglas kann man durch Verdampfungstechniken herstellen. Es ist auch möglich, dass man andere dielektrische Schichten abscheidet mit Methoden, die in der Halbleitertechnik üblich sind, z.B. mittels Plasma-CVD oder Photo-CVD.Instead of metallic wires 6 ', 6 "according to FIG. 1, the electrodes according to FIG. 3 are applied to a substrate 13 made of glass, quartz or ceramic using thin-film or thick-film techniques as discrete conductor tracks 6a, 6b. and sputtering processes for metallization, on the other hand conductive pastes. Fine conductor tracks can be produced by photo-lithographic processes, wider ones (> 25 µm) can be produced by metal deposition through a mask. The conductor tracks (electrodes) thus applied are then covered by a dielectric layer 14. For example, layers of lead oxide glass can be applied as a spray or paste and then heated to form a continuous glass layer. Layers of borosilicate glass can be produced by evaporation techniques. It is also possible to deposit other dielectric layers using methods that are common in semiconductor technology, for example by means of plasma CVD or Photo-CVD.

Ohne den durch die Erfindung gesteckten Rahmen zu verlassen, sind eine Fülle von Modifikationen des vorstehend beschriebenen UV-Hochleistungsstrahlers möglich, auf die nachstehend eingegangen werden soll.Without departing from the scope of the invention, a multitude of modifications of the UV high-power lamp described above are possible, which will be dealt with below.

So können statt zweier Entladungsräume 8,9 auch nur ein Entladungsraum vorgesehen sein. Dazu ist durch eine entsprechende Isolation, z.B.Schwefelhexafluorid oder Wasser, in dem einen Raum oder eine andere Geometrie des Dielektrikums und/oder der Elektroden, z.B. eine solche nach Fig.3, sicherzustellen, dass sich die Gleitentladungen nur in dem anderen Raum ausbilden.Instead of two discharge spaces 8, 9, only one discharge space can be provided. Appropriate insulation, e.g. sulfur hexafluoride or water, in which a space or another geometry of the dielectric and / or the electrodes, e.g. one according to FIG. 3, to ensure that the sliding discharges only form in the other room.

Statt runder Elektroden 6',6" nach Fig.1 können auch Elektroden mit nahezu beliebigem Querschnitt verwendet werden. Auch müssen die Elektroden nicht geradlinig verlaufen, sondern können auch z.B. mäanderförmig oder im Zickzack nebeneinander angeordnet sein.Instead of round electrodes 6 ', 6 "according to FIG. 1, electrodes with almost any cross-section can also be used. The electrodes also do not have to run in a straight line, but can also be arranged, for example, in a meandering shape or in a zigzag manner.

Zur Verbesserung der Wärmeabfuhr aus dem Dielektrikum ist es möglich, die Elektroden 6',6" als Hohlelektroden auszuführen, oder im Dielektrikum 3 in Fig.1 oder im Substrat 13 in Fig.3 zusätzlich in Elektrodenlängsrichtung verlaufende Kanäle (Pos. 15 in Fig.3) vorzusehen, durch welche Kanäle ein flüssiges oder gasförmiges Kühlmittel geleitet wird.To improve the heat dissipation from the dielectric, it is possible to design the electrodes 6 ', 6 "as hollow electrodes, or in the dielectric 3 in FIG. 1 or in the substrate 13 in FIG. 3, additional channels running in the longitudinal direction of the electrode (item 15 in FIG. 3) to provide through which channels a liquid or gaseous coolant is passed.

Neben einzelnen in ein flächiges Dielektrikum 3 bzw. 14 eingebetteten Elektroden ist es darüber hinaus möglich, gemäss Fig.4 und 5 einzelne Drähte 16',16" mit je einer dielektrischen Umhüllung 17 zu verwenden, die entweder dicht an dicht (Fig.5), locker nebeneinander oder durch Zwischenlagen 18 oder Abstandsstücke voneinander distanziert, zwischen den beiden Platten 1 und 2 angeordnet sind.In addition to individual electrodes embedded in a flat dielectric 3 or 14, it is also possible, according to FIGS. 4 and 5, to use individual wires 16 ′, 16 ″, each with a dielectric sheath 17, which are either close to close (FIG. 5). , loosely spaced apart or spaced from one another by intermediate layers 18 or spacers, are arranged between the two plates 1 and 2.

Anstelle von Flächenstrahlern nach den Figuren 1 bis 5 sind auch Zylinderstrahler möglich, wie es in Fig.6 veranschaulicht ist. Dort ist zwischen zwei Quarzrohren 19, 20 ein Rohr 21 aus dielektrischen Material koaxial angeordnet. Nicht dargestellte Abstandhalter sichern die gegenseitige Lage der drei Rohre. Analog Fig.1 sind in das dielektrische Rohr 21 Metallelektroden 22', 22" eingebettet, die analog Fig.2 abwechselnd mit dem einen und dem anderen Pol einer (nicht dargestellten) Wechselstromquelle verbunden sind.Instead of surface emitters according to FIGS. 1 to 5, cylindrical emitters are also possible, as is illustrated in FIG. 6. There, a tube 21 made of dielectric material is arranged coaxially between two quartz tubes 19, 20. Spacers, not shown, secure the mutual position of the three tubes. Analogously to FIG. 1, metal electrodes 22 ′, 22 ″ are embedded in the dielectric tube 21, which analogously to FIG. 2 are alternately connected to one and the other pole of an AC power source (not shown).

Der Zylinderstrahler nach Fig.6 strahlt im Beispielsfall sowohl nach innen (in den Innenraum des Rohres 20) als auch nach aussen ab. Verwendet man in den Räumen 8 und 9 unterschiedliche Füllgase, so lassen sich bei entsprechender Wahl der Elektrodenanordnung und -verteilung mit einunddemselben Strahler zwei unterschiedliche Strahlungen erzeugen. Dies gilt selbstverständlich auch für einen Strahler nach Fig.4.In the example, the cylinder emitter according to FIG. 6 emits both inwards (into the interior of the tube 20) and outwards. If different filling gases are used in rooms 8 and 9, two different radiations can be generated with one and the same radiator if the electrode arrangement and distribution are selected accordingly. Of course, this also applies to a radiator according to Fig. 4.

Wie bereits im Zusammenhang mit Fig.1 beschrieben, können auch bei Zylinderstrahlern nach Fig.6 die gewünschten Reaktionen in dem bzw. den Entladungsräumen 8 bzw. 9 selbst stattfinden.As already described in connection with FIG. 1, the desired reactions can also take place in the discharge space (s) 8 or 9 itself in the case of cylindrical radiators according to FIG. 6.

Die vorstehende Beschreibung von Ausführungsbeispielen der Erfindung konzentrierte sich auf die Erzeugung von UV- bzw. VUV-Strahlung. Durch Beschichtung der Platten 1, 2 bzw. der Rohre 19, 20 mit einer Lumineszenzschicht 23, 24 (Fig.1) lässt sich in Anlehung an die bei den Lumineszenzröhren für Beleuchtungszwecke bekannte Technik auch sichtbares Licht hoher Leistung erzeugen. Derartige Schichten sind bekannt und können auch auf die den Entladungsraum 8 bzw. 9 angrenzenden inneren Oberflächen der Platten 1, 2 bzw. der Rohre 19, 20 aufgebracht werden. Im letztren Fall brauchen diese Platten bzw. Rohre nicht mehr UV-durchlässig sondern nur für das sichtbare Licht transparent sein.The above description of exemplary embodiments of the invention focused on the generation of UV or VUV radiation. By coating the plates 1, 2 or the tubes 19, 20 with a luminescent layer 23, 24 (FIG. 1), visible light of high power can also be generated based on the technology known for luminescent tubes for lighting purposes. Such layers are known and can also be applied to the inner surfaces of the plates 1, 2 or the tubes 19, 20 adjacent to the discharge space 8 or 9. In the latter case, these plates or tubes no longer need to be UV-transparent but only transparent to visible light.

Claims (10)

1. High-power radiator, in particular for ultraviolet light, having a discharge space (8,9), delimited by walls (1,2) and filled with filler gas emitting radiation under discharge conditions and having electrode pairs which are connected in pairs to the two poles of a high-voltage source (7), at least one dielectric material which adjoins the discharge space lying between two electrodes at different potentials, characterised in that the aforesaid electrode pairs (6', 6"; 6a, 6b; 16', 16"; 22', 22"), spatially separated from said walls (1, 2) and separated from each other by dielectric material (3; 14; 21), are arranged adjacent to one another in such a way that the electrical discharge in the discharge space (8, 9) forms essentially only in the region of the surface of the dielectric.
2. High-power radiator according to Claim 1, characterised in that the electrodes (6', 6"; 6a, 6b; 16', 16"; 22', 22") are embedded in the dielectric material (3; 14; 21) and adjacent electrodes (6', 6"; 6a, 6b; 16', 16"; 22', 22") are in each case connected to different poles of the high-voltage source (7).
3. High-power radiator according to Claim 2, characterised in that all electrodes (6', 6"; 22', 22") are embedded in a common carrier made of dielectric material.
4. High-power radiator according to Claim 2, characterised in that the electrodes (16', 16") are each individually surrounded by a dielectric enclosure (17).
5. High-power radiator according to Claim 1, characterized in that the electrodes (6a, 6b) are arranged on a substrate (13) made of insulating material and are covered by a dielectric layer (14).
6. High-power radiator according to one of Claims 1 to 5, characterized in that cooling channels (15) extending in the longitudinal direction of the electrodes are provided in the electrodes or in the material in which these are embedded or on which they are arranged.
7. High-power radiator according to one of Claims 1 to 6, characterized in that there is provided on the surface of the dielectric facing the discharge space (8, 9) an additional layer (11, 12) for reducing the firing voltage of the electrical surface discharge, preferably a layer of an oxide of magnesium, ytterbium, lanthanum or cerium.
8. High-power radiator according to one of Claims 1 to 7, characterised in that, for generating radiation with several different wavelengths in one discharge space (8; 9), a filler gas with at least two noble gases and at least one non-noble gas is provided.
9. High-power radiator according to one of Claims 1 to 8, characterised in that filler gases of different composition are provided in the two discharge spaces (8, 9).
10. High-power radiator according to one of Claims 1 to 9, characterised in that the sheets (1, 2) delimiting the discharge space (8, 9) or tubes (19, 20) are provided with a luminescent layer (24, 25).
EP89118546A 1988-10-10 1989-10-06 Radiating device having a high output Expired - Lifetime EP0363832B1 (en)

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DE58904712D1 (en) 1993-07-22
JP2812736B2 (en) 1998-10-22
US5006758A (en) 1991-04-09
JPH02158049A (en) 1990-06-18
EP0363832A1 (en) 1990-04-18

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