EP0363497A4 - Cryogenic adsorption pump - Google Patents

Cryogenic adsorption pump

Info

Publication number
EP0363497A4
EP0363497A4 EP19890903491 EP89903491A EP0363497A4 EP 0363497 A4 EP0363497 A4 EP 0363497A4 EP 19890903491 EP19890903491 EP 19890903491 EP 89903491 A EP89903491 A EP 89903491A EP 0363497 A4 EP0363497 A4 EP 0363497A4
Authority
EP
European Patent Office
Prior art keywords
pump
unit
vessel
reservoir
adsorbent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP19890903491
Other languages
German (de)
English (en)
Russian (ru)
Other versions
EP0363497A1 (fr
Inventor
Marxen Petrovich Larin
Maxim Leonidovich Alexandrov
Valery Ivanovich Nikolaev
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NAUCHNO-TEKHNICHESKOE OBIEDINENIE AKADEMII NAUK SSSR
Original Assignee
NAUCHNO-TEKHNICHESKOE OBIEDINENIE AKADEMII NAUK SSSR
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NAUCHNO-TEKHNICHESKOE OBIEDINENIE AKADEMII NAUK SSSR filed Critical NAUCHNO-TEKHNICHESKOE OBIEDINENIE AKADEMII NAUK SSSR
Publication of EP0363497A1 publication Critical patent/EP0363497A1/fr
Publication of EP0363497A4 publication Critical patent/EP0363497A4/de
Withdrawn legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S417/00Pumps
    • Y10S417/901Cryogenic pumps

Definitions

  • the vessel is empty and has a clean economy.
  • ⁇ a- chivayuschii elemen ⁇ vy ⁇ lnen as ⁇ ltsev ⁇ g ⁇ s ⁇ suda for ⁇ i- ⁇ agen ⁇ a, ⁇ dnshtsu ⁇ g ⁇ ⁇ iva ⁇ en dis ⁇ vyi ⁇ e ⁇ l ⁇ v ⁇ d and 5- ⁇ bechae ⁇ ⁇ e ⁇ l ⁇ v ⁇ d ⁇ v and ⁇ bechae ⁇ - ⁇ is ⁇ y ⁇ e ⁇ an ⁇ v, ⁇ as ⁇ l ⁇ - zhenny ⁇ ⁇ a ⁇ sialn ⁇ s ⁇ sudu and za ⁇ e ⁇ lenny ⁇ on dis ⁇ v ⁇ m ⁇ e ⁇ l ⁇ ⁇ v ⁇ de.
  • the spaces between the processing bins and the adjacent processing bins are filled with adsorbent, and the spaces between the adjacent billing facilities
  • the conditioned screen contains a ready-to-use vessel for the installed agent, a ready-to-use unit, and a fully-equipped
  • the cross section of the pipe is fitted with a Chevron, which has a warm contact with a radiating vessel.
  • the vessel of the radioactive discharge is filled with liquid nitrogen, and the vessel of the discharging element is filled with
  • the pump mode in this area is set to a pressure lower than ⁇ 0 ⁇ 4 Pa, due to which a reliable decrease in the process pressure of the industrial gases is ensured.
  • the upper end of the pipe is hermetically connected to the vessel of the discharging element.
  • the system is free of charge and the external end of the pipe is closed and the pump is running.
  • the pump should be equipped with a large vessel, housed inside and inside the radiating vessel and discharging two pipes.
  • this optional 35 vessel plays a role of a nitrogen trap, all in all , for a radioactive agent.
  • Fig. ⁇ depicts the proposed adsorbent pump in a separate section, Fig. 2 - through section P-P line ⁇ and Fig. 3 - through section W-III line 2.
  • processors are manufactured from simple materials, and the other processors 7 have processing. ⁇ réelle On the other hand, the material for the support 9 may be used
  • ⁇ at the top of the 5th vessel 4 are hermetically sealed two tubes - 6 -
  • the discharging element is shaken off by the radiation shield to reduce the thermal radiation of the emergency room I.
  • the emergency shielding consists of a cargo vessel 15 (fig. 3)
  • a supplementary screen 23 has been installed, designed to reduce the thermal radiation of the external housing of the I radio frequency drive.
  • the pump contains a vacuum free warming area 24, made in the form of a quick access boiler
  • a small bridge 24 of 35 is made from a thick stainless steel tape with a thickness of 0.15-0.2 mm, so that its cross-sectional area was much smaller, and the hour was longer. Efficient 24-hour heat sinks - 7 - reduction of the output cost of the output of the 16 radiation unit for the discharging element.
  • valve 34 (FIG. 2) mounted on a 2-bar edge.
  • the inside of the vessel 15 of the radiation screen is located on the third floor 38, which has section 39 (Fig. 3), a hermetic
  • one of these off-flanges connects through a panel to a mechanical vacuum pump, and the other is also pumped out.
  • unit 43 is used for connecting via a valve and a large vacuum pump and a working camera.
  • VARIOUS VALVES 44 and 45 serve to prevent the destruction of ava ry-gniny situations 24 (fig. 3), which has a comparatively small diameter.
  • Chevron screens 17 and 29 have a thickness of at least 200 microns and a steady frequency of at least 0.99 in a range of lengths of 2-200 microns.
  • 3 connects the proper working camera (not shown) through a plug (not shown), and the inlet is non-hazardous (non-hazardous)
  • the working chamber is disconnected from the pump and connected to it through the valve (not shown), one of the flanges, connected to one of them (40).
  • the 35th flange also through the valve connects to the mechanical pump and discharges the chamber through 38 pressure vessels, I Pa.
  • This vessel 38 With this vessel 38, the function of a nitrogen pond for steaming oils of a vacuum pump is not available. -10 - any falling into the pumped volume. This completes the process of initial vacuum operation of the working camera.
  • the outgoing element one of which is 5 side 13, is filled with a coolant with a lower tempera- ture than the one in the vessel, the ⁇ roy
  • the decrease in the temperature of the refrigerant in the vessel 5 the discharging element is reached by pumping it through the pipe
  • the accessory Simultaneously with the vessel 5 through the devices 6, 7 and 8, the accessory, which is in the slots of the 10 wetting element, is cooled. It absorbs gases emitted from the working chamber, ensuring a minimum pressure of ⁇ 0 ⁇ 7 Pa and lower. With a temperature of about 50 ⁇ a special operation
  • the calculation of the total pressure of the discharging element for example, in the case of pumping, the pressure of 0.1 Pa decreases by 2.3.
  • the intentional use of the invention may be used to pump dust and plasma installations, for example, in electrical

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Nitrogen And Oxygen Or Sulfur-Condensed Heterocyclic Ring Systems (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
EP19890903491 1988-03-10 1989-02-10 Cryogenic adsorption pump Withdrawn EP0363497A4 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
SU4391234 1988-03-10
SU884391234A SU1682628A1 (ru) 1988-03-10 1988-03-10 Криоадсорбционный насос

Publications (2)

Publication Number Publication Date
EP0363497A1 EP0363497A1 (fr) 1990-04-18
EP0363497A4 true EP0363497A4 (en) 1991-01-23

Family

ID=21360806

Family Applications (2)

Application Number Title Priority Date Filing Date
EP19890903490 Withdrawn EP0394452A4 (en) 1988-03-10 1989-02-10 Cryogenic adsorption pump
EP19890903491 Withdrawn EP0363497A4 (en) 1988-03-10 1989-02-10 Cryogenic adsorption pump

Family Applications Before (1)

Application Number Title Priority Date Filing Date
EP19890903490 Withdrawn EP0394452A4 (en) 1988-03-10 1989-02-10 Cryogenic adsorption pump

Country Status (6)

Country Link
US (2) US5014517A (fr)
EP (2) EP0394452A4 (fr)
JP (2) JPH02503461A (fr)
AU (2) AU623387B2 (fr)
SU (1) SU1682628A1 (fr)
WO (2) WO1989008781A1 (fr)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU1682628A1 (ru) * 1988-03-10 1991-10-07 Институт Аналитического Приборостроения Научно-Технического Объединения Ан Ссср Криоадсорбционный насос
CA2096419A1 (fr) * 1990-11-19 1992-05-20 Gerd Flick Procede de regeneration d'une cryopompe et cryopompe pour appliquer le procede
US5261244A (en) * 1992-05-21 1993-11-16 Helix Technology Corporation Cryogenic waterpump
AT398849B (de) * 1992-09-08 1995-02-27 Sitte Hellmuth Kammer zur gefriertrocknung durch kryosorption
US5537833A (en) * 1995-05-02 1996-07-23 Helix Technology Corporation Shielded cryogenic trap
US5799493A (en) * 1996-09-05 1998-09-01 Helix Technology Corporation Corrosion resistant cryopump
US6154478A (en) * 1998-06-30 2000-11-28 The Boeing Company Chemical oxygen-iodine laser (coil)/cryosorption vacuum pump system
US6621848B1 (en) 2000-04-25 2003-09-16 The Boeing Company SECOIL reprocessing system
US6650681B1 (en) 2000-04-25 2003-11-18 The Boeing Company Sealed exhaust chemical oxygen-iodine laser system
US6438992B1 (en) * 2000-10-18 2002-08-27 Thermal Products Development, Inc. Evacuated sorbent assembly and cooling device incorporating same
US7320224B2 (en) * 2004-01-21 2008-01-22 Brooks Automation, Inc. Method and apparatus for detecting and measuring state of fullness in cryopumps
US20070051242A1 (en) * 2005-09-08 2007-03-08 Petrik Viktor I Configurations and methods for assisted condensation

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL112391C (fr) * 1960-05-06 1900-01-01
NL110751C (fr) * 1960-05-07
US3335550A (en) * 1964-04-24 1967-08-15 Union Carbide Corp Cryosorption apparatus
US3310227A (en) * 1965-04-12 1967-03-21 Milleron Norman Surge and backstreaming porous diaphragm filter for vacuum system
US3371499A (en) * 1966-11-02 1968-03-05 Union Carbide Corp Cryosorption vacuum pumping system
US3416326A (en) * 1967-06-02 1968-12-17 Stuffer Rowen Efficient nitrogen trap
FR1549434A (fr) * 1967-10-20 1968-12-13
FR2048253A5 (fr) * 1969-12-01 1971-03-19 Air Liquide
DE2208743A1 (de) * 1971-02-26 1972-09-07 Air Liquide Verfahren und Vorrichtung zur Gasübertragung
FR2146100B2 (fr) * 1971-07-16 1974-03-29 Air Liquide
SU547549A1 (ru) * 1974-07-05 1977-02-25 Предприятие П/Я А-3605 Адсорбционный насос
SU659792A2 (ru) * 1977-12-06 1979-04-30 Предприятие П/Я В-8851 Форвакуумна криогенна ловушка
SU696176A2 (ru) * 1978-04-12 1979-11-05 Предприятие П/Я В-8851 Адсорбционный насос
SU769080A1 (ru) * 1978-07-31 1980-10-07 Предприятие П/Я В-8851 Криогенный вакуумный насос
SU992814A2 (ru) * 1981-12-31 1983-01-30 Физико-технический институт низких температур АН УССР Криогенный конденсационный насос
US4494381A (en) * 1983-05-13 1985-01-22 Helix Technology Corporation Cryopump with improved adsorption capacity
JPS6065287A (ja) * 1983-09-20 1985-04-15 Toshiba Corp クライオソープシヨンポンプ
SU1333833A1 (ru) * 1985-08-19 1987-08-30 Организация П/Я М-5273 Криоадсорбционный насос
SU1439278A1 (ru) * 1987-03-09 1988-11-23 Предприятие П/Я Р-6681 Сорбционный вакуумный насос
SU1698481A1 (ru) * 1987-12-17 1991-12-15 Институт Аналитического Приборостроения Научно-Технического Объединения Ан Ссср Криогенный адсорбционный насос
SU1698482A1 (ru) * 1988-01-08 1991-12-15 Институт Анатилического Приборостроения Научно-Технического Объединения Ан Ссср Криогенный конденсационный насос
SU1682628A1 (ru) * 1988-03-10 1991-10-07 Институт Аналитического Приборостроения Научно-Технического Объединения Ан Ссср Криоадсорбционный насос

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
KEINE WEITERE DOKUMENTEN ERMITTELT. *
See also references of WO8908780A1 *

Also Published As

Publication number Publication date
JPH02503462A (ja) 1990-10-18
EP0394452A4 (en) 1991-01-23
US4979369A (en) 1990-12-25
EP0394452A1 (fr) 1990-10-31
SU1682628A1 (ru) 1991-10-07
US5014517A (en) 1991-05-14
JPH02503461A (ja) 1990-10-18
WO1989008780A1 (fr) 1989-09-21
AU3286389A (en) 1989-10-05
WO1989008781A1 (fr) 1989-09-21
AU623387B2 (en) 1992-05-14
AU615342B2 (en) 1991-09-26
EP0363497A1 (fr) 1990-04-18
AU4188589A (en) 1989-10-05

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