EP0363497A4 - Cryogenic adsorption pump - Google Patents
Cryogenic adsorption pumpInfo
- Publication number
- EP0363497A4 EP0363497A4 EP19890903491 EP89903491A EP0363497A4 EP 0363497 A4 EP0363497 A4 EP 0363497A4 EP 19890903491 EP19890903491 EP 19890903491 EP 89903491 A EP89903491 A EP 89903491A EP 0363497 A4 EP0363497 A4 EP 0363497A4
- Authority
- EP
- European Patent Office
- Prior art keywords
- pump
- unit
- vessel
- reservoir
- adsorbent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S417/00—Pumps
- Y10S417/901—Cryogenic pumps
Definitions
- the vessel is empty and has a clean economy.
- ⁇ a- chivayuschii elemen ⁇ vy ⁇ lnen as ⁇ ltsev ⁇ g ⁇ s ⁇ suda for ⁇ i- ⁇ agen ⁇ a, ⁇ dnshtsu ⁇ g ⁇ ⁇ iva ⁇ en dis ⁇ vyi ⁇ e ⁇ l ⁇ v ⁇ d and 5- ⁇ bechae ⁇ ⁇ e ⁇ l ⁇ v ⁇ d ⁇ v and ⁇ bechae ⁇ - ⁇ is ⁇ y ⁇ e ⁇ an ⁇ v, ⁇ as ⁇ l ⁇ - zhenny ⁇ ⁇ a ⁇ sialn ⁇ s ⁇ sudu and za ⁇ e ⁇ lenny ⁇ on dis ⁇ v ⁇ m ⁇ e ⁇ l ⁇ ⁇ v ⁇ de.
- the spaces between the processing bins and the adjacent processing bins are filled with adsorbent, and the spaces between the adjacent billing facilities
- the conditioned screen contains a ready-to-use vessel for the installed agent, a ready-to-use unit, and a fully-equipped
- the cross section of the pipe is fitted with a Chevron, which has a warm contact with a radiating vessel.
- the vessel of the radioactive discharge is filled with liquid nitrogen, and the vessel of the discharging element is filled with
- the pump mode in this area is set to a pressure lower than ⁇ 0 ⁇ 4 Pa, due to which a reliable decrease in the process pressure of the industrial gases is ensured.
- the upper end of the pipe is hermetically connected to the vessel of the discharging element.
- the system is free of charge and the external end of the pipe is closed and the pump is running.
- the pump should be equipped with a large vessel, housed inside and inside the radiating vessel and discharging two pipes.
- this optional 35 vessel plays a role of a nitrogen trap, all in all , for a radioactive agent.
- Fig. ⁇ depicts the proposed adsorbent pump in a separate section, Fig. 2 - through section P-P line ⁇ and Fig. 3 - through section W-III line 2.
- processors are manufactured from simple materials, and the other processors 7 have processing. ⁇ réelle On the other hand, the material for the support 9 may be used
- ⁇ at the top of the 5th vessel 4 are hermetically sealed two tubes - 6 -
- the discharging element is shaken off by the radiation shield to reduce the thermal radiation of the emergency room I.
- the emergency shielding consists of a cargo vessel 15 (fig. 3)
- a supplementary screen 23 has been installed, designed to reduce the thermal radiation of the external housing of the I radio frequency drive.
- the pump contains a vacuum free warming area 24, made in the form of a quick access boiler
- a small bridge 24 of 35 is made from a thick stainless steel tape with a thickness of 0.15-0.2 mm, so that its cross-sectional area was much smaller, and the hour was longer. Efficient 24-hour heat sinks - 7 - reduction of the output cost of the output of the 16 radiation unit for the discharging element.
- valve 34 (FIG. 2) mounted on a 2-bar edge.
- the inside of the vessel 15 of the radiation screen is located on the third floor 38, which has section 39 (Fig. 3), a hermetic
- one of these off-flanges connects through a panel to a mechanical vacuum pump, and the other is also pumped out.
- unit 43 is used for connecting via a valve and a large vacuum pump and a working camera.
- VARIOUS VALVES 44 and 45 serve to prevent the destruction of ava ry-gniny situations 24 (fig. 3), which has a comparatively small diameter.
- Chevron screens 17 and 29 have a thickness of at least 200 microns and a steady frequency of at least 0.99 in a range of lengths of 2-200 microns.
- 3 connects the proper working camera (not shown) through a plug (not shown), and the inlet is non-hazardous (non-hazardous)
- the working chamber is disconnected from the pump and connected to it through the valve (not shown), one of the flanges, connected to one of them (40).
- the 35th flange also through the valve connects to the mechanical pump and discharges the chamber through 38 pressure vessels, I Pa.
- This vessel 38 With this vessel 38, the function of a nitrogen pond for steaming oils of a vacuum pump is not available. -10 - any falling into the pumped volume. This completes the process of initial vacuum operation of the working camera.
- the outgoing element one of which is 5 side 13, is filled with a coolant with a lower tempera- ture than the one in the vessel, the ⁇ roy
- the decrease in the temperature of the refrigerant in the vessel 5 the discharging element is reached by pumping it through the pipe
- the accessory Simultaneously with the vessel 5 through the devices 6, 7 and 8, the accessory, which is in the slots of the 10 wetting element, is cooled. It absorbs gases emitted from the working chamber, ensuring a minimum pressure of ⁇ 0 ⁇ 7 Pa and lower. With a temperature of about 50 ⁇ a special operation
- the calculation of the total pressure of the discharging element for example, in the case of pumping, the pressure of 0.1 Pa decreases by 2.3.
- the intentional use of the invention may be used to pump dust and plasma installations, for example, in electrical
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Nitrogen And Oxygen Or Sulfur-Condensed Heterocyclic Ring Systems (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
- Filling Or Discharging Of Gas Storage Vessels (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SU884391234A SU1682628A1 (ru) | 1988-03-10 | 1988-03-10 | Криоадсорбционный насос |
SU4391234 | 1988-03-10 |
Publications (2)
Publication Number | Publication Date |
---|---|
EP0363497A1 EP0363497A1 (de) | 1990-04-18 |
EP0363497A4 true EP0363497A4 (en) | 1991-01-23 |
Family
ID=21360806
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP19890903491 Withdrawn EP0363497A4 (en) | 1988-03-10 | 1989-02-10 | Cryogenic adsorption pump |
EP19890903490 Withdrawn EP0394452A4 (en) | 1988-03-10 | 1989-02-10 | Cryogenic adsorption pump |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP19890903490 Withdrawn EP0394452A4 (en) | 1988-03-10 | 1989-02-10 | Cryogenic adsorption pump |
Country Status (6)
Country | Link |
---|---|
US (2) | US4979369A (de) |
EP (2) | EP0363497A4 (de) |
JP (2) | JPH02503462A (de) |
AU (2) | AU623387B2 (de) |
SU (1) | SU1682628A1 (de) |
WO (2) | WO1989008780A1 (de) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SU1682628A1 (ru) * | 1988-03-10 | 1991-10-07 | Институт Аналитического Приборостроения Научно-Технического Объединения Ан Ссср | Криоадсорбционный насос |
WO1992008894A1 (de) * | 1990-11-19 | 1992-05-29 | Leybold Aktiengesellschaft | Verfahren zur regeneration einer kryopumpe sowie zur durchführung dieses verfahrens geeignete kryopumpe |
US5261244A (en) * | 1992-05-21 | 1993-11-16 | Helix Technology Corporation | Cryogenic waterpump |
AT398849B (de) * | 1992-09-08 | 1995-02-27 | Sitte Hellmuth | Kammer zur gefriertrocknung durch kryosorption |
US5537833A (en) * | 1995-05-02 | 1996-07-23 | Helix Technology Corporation | Shielded cryogenic trap |
US5799493A (en) * | 1996-09-05 | 1998-09-01 | Helix Technology Corporation | Corrosion resistant cryopump |
US6154478A (en) * | 1998-06-30 | 2000-11-28 | The Boeing Company | Chemical oxygen-iodine laser (coil)/cryosorption vacuum pump system |
US6650681B1 (en) | 2000-04-25 | 2003-11-18 | The Boeing Company | Sealed exhaust chemical oxygen-iodine laser system |
US6621848B1 (en) | 2000-04-25 | 2003-09-16 | The Boeing Company | SECOIL reprocessing system |
US6438992B1 (en) * | 2000-10-18 | 2002-08-27 | Thermal Products Development, Inc. | Evacuated sorbent assembly and cooling device incorporating same |
US7320224B2 (en) * | 2004-01-21 | 2008-01-22 | Brooks Automation, Inc. | Method and apparatus for detecting and measuring state of fullness in cryopumps |
US20070051242A1 (en) * | 2005-09-08 | 2007-03-08 | Petrik Viktor I | Configurations and methods for assisted condensation |
Family Cites Families (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL112391C (de) * | 1960-05-06 | 1900-01-01 | ||
NL251342A (de) * | 1960-05-07 | |||
US3335550A (en) * | 1964-04-24 | 1967-08-15 | Union Carbide Corp | Cryosorption apparatus |
US3310227A (en) * | 1965-04-12 | 1967-03-21 | Milleron Norman | Surge and backstreaming porous diaphragm filter for vacuum system |
US3371499A (en) * | 1966-11-02 | 1968-03-05 | Union Carbide Corp | Cryosorption vacuum pumping system |
US3416326A (en) * | 1967-06-02 | 1968-12-17 | Stuffer Rowen | Efficient nitrogen trap |
FR1549434A (de) * | 1967-10-20 | 1968-12-13 | ||
FR2048253A5 (de) * | 1969-12-01 | 1971-03-19 | Air Liquide | |
DE2208743A1 (de) * | 1971-02-26 | 1972-09-07 | Air Liquide | Verfahren und Vorrichtung zur Gasübertragung |
FR2146100B2 (de) * | 1971-07-16 | 1974-03-29 | Air Liquide | |
SU547549A1 (ru) * | 1974-07-05 | 1977-02-25 | Предприятие П/Я А-3605 | Адсорбционный насос |
SU659792A2 (ru) * | 1977-12-06 | 1979-04-30 | Предприятие П/Я В-8851 | Форвакуумна криогенна ловушка |
SU696176A2 (ru) * | 1978-04-12 | 1979-11-05 | Предприятие П/Я В-8851 | Адсорбционный насос |
SU769080A1 (ru) * | 1978-07-31 | 1980-10-07 | Предприятие П/Я В-8851 | Криогенный вакуумный насос |
SU992814A2 (ru) * | 1981-12-31 | 1983-01-30 | Физико-технический институт низких температур АН УССР | Криогенный конденсационный насос |
US4494381A (en) * | 1983-05-13 | 1985-01-22 | Helix Technology Corporation | Cryopump with improved adsorption capacity |
JPS6065287A (ja) * | 1983-09-20 | 1985-04-15 | Toshiba Corp | クライオソープシヨンポンプ |
SU1333833A1 (ru) * | 1985-08-19 | 1987-08-30 | Организация П/Я М-5273 | Криоадсорбционный насос |
SU1439278A1 (ru) * | 1987-03-09 | 1988-11-23 | Предприятие П/Я Р-6681 | Сорбционный вакуумный насос |
SU1698481A1 (ru) * | 1987-12-17 | 1991-12-15 | Институт Аналитического Приборостроения Научно-Технического Объединения Ан Ссср | Криогенный адсорбционный насос |
SU1698482A1 (ru) * | 1988-01-08 | 1991-12-15 | Институт Анатилического Приборостроения Научно-Технического Объединения Ан Ссср | Криогенный конденсационный насос |
SU1682628A1 (ru) * | 1988-03-10 | 1991-10-07 | Институт Аналитического Приборостроения Научно-Технического Объединения Ан Ссср | Криоадсорбционный насос |
-
1988
- 1988-03-10 SU SU884391234A patent/SU1682628A1/ru active
-
1989
- 1989-02-10 WO PCT/SU1989/000035 patent/WO1989008780A1/ru not_active Application Discontinuation
- 1989-02-10 AU AU32863/89A patent/AU623387B2/en not_active Ceased
- 1989-02-10 US US07/439,368 patent/US4979369A/en not_active Expired - Fee Related
- 1989-02-10 JP JP1503248A patent/JPH02503462A/ja active Pending
- 1989-02-10 AU AU41885/89A patent/AU615342B2/en not_active Ceased
- 1989-02-10 US US07/439,366 patent/US5014517A/en not_active Expired - Fee Related
- 1989-02-10 WO PCT/SU1989/000036 patent/WO1989008781A1/ru not_active Application Discontinuation
- 1989-02-10 JP JP1503247A patent/JPH02503461A/ja active Pending
- 1989-02-10 EP EP19890903491 patent/EP0363497A4/de not_active Withdrawn
- 1989-02-10 EP EP19890903490 patent/EP0394452A4/de not_active Withdrawn
Non-Patent Citations (2)
Title |
---|
KEINE WEITERE DOKUMENTEN ERMITTELT. * |
See also references of WO8908780A1 * |
Also Published As
Publication number | Publication date |
---|---|
AU4188589A (en) | 1989-10-05 |
AU615342B2 (en) | 1991-09-26 |
EP0363497A1 (de) | 1990-04-18 |
AU623387B2 (en) | 1992-05-14 |
JPH02503462A (ja) | 1990-10-18 |
JPH02503461A (ja) | 1990-10-18 |
EP0394452A1 (de) | 1990-10-31 |
SU1682628A1 (ru) | 1991-10-07 |
EP0394452A4 (en) | 1991-01-23 |
US5014517A (en) | 1991-05-14 |
WO1989008780A1 (en) | 1989-09-21 |
US4979369A (en) | 1990-12-25 |
AU3286389A (en) | 1989-10-05 |
WO1989008781A1 (en) | 1989-09-21 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
17P | Request for examination filed |
Effective date: 19891109 |
|
AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): DE FR GB SE |
|
A4 | Supplementary search report drawn up and despatched |
Effective date: 19901203 |
|
AK | Designated contracting states |
Kind code of ref document: A4 Designated state(s): DE FR GB SE |
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STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN |
|
18D | Application deemed to be withdrawn |
Effective date: 19920903 |