EP0311317A3 - Verbrennungsverfahren für spezifische Abgase mit schädlichen Stoffen - Google Patents

Verbrennungsverfahren für spezifische Abgase mit schädlichen Stoffen Download PDF

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Publication number
EP0311317A3
EP0311317A3 EP88309126A EP88309126A EP0311317A3 EP 0311317 A3 EP0311317 A3 EP 0311317A3 EP 88309126 A EP88309126 A EP 88309126A EP 88309126 A EP88309126 A EP 88309126A EP 0311317 A3 EP0311317 A3 EP 0311317A3
Authority
EP
European Patent Office
Prior art keywords
exhaust gases
combustion method
gases containing
specific exhaust
flame
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP88309126A
Other languages
English (en)
French (fr)
Other versions
EP0311317A2 (de
Inventor
Makoto Saito
Tetsu Shinagawa
Masahiko Hatano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyo Sanso Ltd
Original Assignee
Toyo Sanso Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyo Sanso Ltd filed Critical Toyo Sanso Ltd
Publication of EP0311317A2 publication Critical patent/EP0311317A2/de
Publication of EP0311317A3 publication Critical patent/EP0311317A3/de
Withdrawn legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23GCREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F23G7/061Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
    • F23G7/065Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating using gaseous or liquid fuel
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23GCREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G2209/00Specific waste
    • F23G2209/14Gaseous waste or fumes
    • F23G2209/142Halogen gases, e.g. silane
EP88309126A 1987-10-06 1988-09-30 Verbrennungsverfahren für spezifische Abgase mit schädlichen Stoffen Withdrawn EP0311317A3 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP25226287A JPH0195214A (ja) 1987-10-06 1987-10-06 特殊材料ガスの燃焼方法
JP252262/87 1987-10-06

Publications (2)

Publication Number Publication Date
EP0311317A2 EP0311317A2 (de) 1989-04-12
EP0311317A3 true EP0311317A3 (de) 1990-03-28

Family

ID=17234785

Family Applications (1)

Application Number Title Priority Date Filing Date
EP88309126A Withdrawn EP0311317A3 (de) 1987-10-06 1988-09-30 Verbrennungsverfahren für spezifische Abgase mit schädlichen Stoffen

Country Status (2)

Country Link
EP (1) EP0311317A3 (de)
JP (1) JPH0195214A (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5510093A (en) * 1994-07-25 1996-04-23 Alzeta Corporation Combustive destruction of halogenated compounds
DE19511644A1 (de) * 1995-03-30 1996-10-02 Das Duennschicht Anlagen Sys Verfahren und Einrichtung zur Reinigung von schadstoffhaltigen Abgasen durch chemische Umsetzung
GB9608061D0 (en) * 1996-04-16 1996-06-19 Boc Group Plc Removal of noxious substances from gas streams
US6017611A (en) * 1998-02-20 2000-01-25 Felix Schoeller Technical Papers, Inc. Ink jet printable support material for thermal transfer
GB0509163D0 (en) * 2005-05-05 2005-06-15 Boc Group Plc Gas combustion apparatus
GB0509944D0 (en) 2005-05-16 2005-06-22 Boc Group Plc Gas combustion apparatus
CN103471108B (zh) * 2013-07-22 2016-08-31 北京航天动力研究所 笑气焚烧燃烧器
JP7027817B2 (ja) * 2017-11-02 2022-03-02 株式会社Ihi 燃焼装置及びボイラ
DE102021103365B4 (de) * 2021-02-12 2024-02-15 Das Environmental Expert Gmbh Verfahren und Brenner zur thermischen Entsorgung von Schadstoffen in Prozessgasen

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB708970A (en) * 1951-02-07 1954-05-12 Schweizerhall Saeurefab Process for the preparation of finely divided metal oxides and silicon dioxide
US3365274A (en) * 1964-07-13 1968-01-23 Cabot Corp Metal and metalloid oxide production
EP0160524A2 (de) * 1984-04-27 1985-11-06 Toyo Sanso Co., Ltd. Vorrichtung zur Verbrennung von gasförmigen Silan-enthaltenden Abgasen
EP0262561A2 (de) * 1986-09-29 1988-04-06 Mitsubishi Jushi Engineering Co., Ltd. Verfahren zur Verbrennung der Abgase aus Halbleiterherstellungsverfahren und Gerät zur Verbrennung dieser Abgase
EP0285485A1 (de) * 1987-03-18 1988-10-05 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Verfahren und Vorrichtung zur Vernichtung von giftigen Abgasen

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2241891C3 (de) * 1972-08-25 1980-04-03 Didier-Engineering Gmbh, 4300 Essen Verfahren und Vorrichtung zur Verbrennung von bei der Reinigung von Koksofengasen anfallenden Ammoniakschwaden
JPS5984019A (ja) * 1982-11-05 1984-05-15 Toyo Sanso Kk 排ガス処理におけるモノ・シランガス燃焼方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB708970A (en) * 1951-02-07 1954-05-12 Schweizerhall Saeurefab Process for the preparation of finely divided metal oxides and silicon dioxide
US3365274A (en) * 1964-07-13 1968-01-23 Cabot Corp Metal and metalloid oxide production
EP0160524A2 (de) * 1984-04-27 1985-11-06 Toyo Sanso Co., Ltd. Vorrichtung zur Verbrennung von gasförmigen Silan-enthaltenden Abgasen
EP0262561A2 (de) * 1986-09-29 1988-04-06 Mitsubishi Jushi Engineering Co., Ltd. Verfahren zur Verbrennung der Abgase aus Halbleiterherstellungsverfahren und Gerät zur Verbrennung dieser Abgase
EP0285485A1 (de) * 1987-03-18 1988-10-05 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Verfahren und Vorrichtung zur Vernichtung von giftigen Abgasen

Also Published As

Publication number Publication date
EP0311317A2 (de) 1989-04-12
JPH0195214A (ja) 1989-04-13

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