EP0292967A3 - Procédé de réalisation de filmes minces supraconducteurs et solutions pour sa réalisation - Google Patents

Procédé de réalisation de filmes minces supraconducteurs et solutions pour sa réalisation Download PDF

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Publication number
EP0292967A3
EP0292967A3 EP88108423A EP88108423A EP0292967A3 EP 0292967 A3 EP0292967 A3 EP 0292967A3 EP 88108423 A EP88108423 A EP 88108423A EP 88108423 A EP88108423 A EP 88108423A EP 0292967 A3 EP0292967 A3 EP 0292967A3
Authority
EP
European Patent Office
Prior art keywords
forming
group
compound selected
mol
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP88108423A
Other languages
German (de)
English (en)
Other versions
EP0292967A2 (fr
Inventor
Toshihisa Nonaka
Keisuke Kobayashi
Hiroyuki Igaki
Michiyasu Matsuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toray Industries Inc
Original Assignee
Toray Industries Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toray Industries Inc filed Critical Toray Industries Inc
Publication of EP0292967A2 publication Critical patent/EP0292967A2/fr
Publication of EP0292967A3 publication Critical patent/EP0292967A3/fr
Withdrawn legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B12/00—Superconductive or hyperconductive conductors, cables, or transmission lines
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23—Oxides
    • C03C17/25—Oxides by deposition from the liquid phase
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/45—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on copper oxide or solid solutions thereof with other oxides
    • C04B35/4504—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on copper oxide or solid solutions thereof with other oxides containing rare earth oxides
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
    • C04B41/5025—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials with ceramic materials
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81—Coating or impregnation
    • C04B41/85—Coating or impregnation with inorganic materials
    • C04B41/87—Ceramics
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0268—Manufacture or treatment of devices comprising copper oxide
    • H10N60/0296—Processes for depositing or forming copper oxide superconductor layers
    • H10N60/0324—Processes for depositing or forming copper oxide superconductor layers from a solution
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C03C2217/229—Non-specific enumeration
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C03C2217/23—Mixtures
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/10—Deposition methods
    • C03C2218/11—Deposition methods from solutions or suspensions
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/10—Deposition methods
    • C03C2218/11—Deposition methods from solutions or suspensions
    • C03C2218/113—Deposition methods from solutions or suspensions by sol-gel processes
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/725—Process of making or treating high tc, above 30 k, superconducting shaped material, article, or device
    • Y10S505/734—From organometallic precursors, e.g. acetylacetonates
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/725—Process of making or treating high tc, above 30 k, superconducting shaped material, article, or device
    • Y10S505/734—From organometallic precursors, e.g. acetylacetonates
    • Y10S505/735—From organometallic precursors, e.g. acetylacetonates by sol-gel process

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
  • Compositions Of Oxide Ceramics (AREA)
EP88108423A 1987-05-29 1988-05-26 Procédé de réalisation de filmes minces supraconducteurs et solutions pour sa réalisation Withdrawn EP0292967A3 (fr)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP13109387 1987-05-29
JP131093/87 1987-05-29
JP18630487 1987-07-24
JP186304/87 1987-07-24
JP14009/88 1988-01-25
JP1400988 1988-01-25

Publications (2)

Publication Number Publication Date
EP0292967A2 EP0292967A2 (fr) 1988-11-30
EP0292967A3 true EP0292967A3 (fr) 1989-10-25

Family

ID=27280497

Family Applications (1)

Application Number Title Priority Date Filing Date
EP88108423A Withdrawn EP0292967A3 (fr) 1987-05-29 1988-05-26 Procédé de réalisation de filmes minces supraconducteurs et solutions pour sa réalisation

Country Status (4)

Country Link
US (2) US4920093A (fr)
EP (1) EP0292967A3 (fr)
KR (1) KR880014593A (fr)
AU (1) AU607219B2 (fr)

Families Citing this family (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4897378A (en) * 1987-05-22 1990-01-30 Massachusetts Institute Of Technology Preparation of thin film superconducting oxides
DE3854400T3 (de) * 1987-06-17 1999-09-16 Nippon Telegraph And Telephone Corp., Tokio/Tokyo Verfahren zur herstellung von supraleitenden oxyden.
AU610260B2 (en) * 1987-10-16 1991-05-16 Furukawa Electric Co. Ltd., The Oxide superconductor shaped body and method of manufacturing the same
US4847239A (en) * 1987-12-07 1989-07-11 Texas Alkyls, Inc. Hydrocarbon soluble copper alkoxide compositions
IL89718A0 (en) * 1988-04-01 1989-09-28 Ppg Industries Inc Formation of superconducting metal oxide film by pyrolysis
KR900017216A (ko) * 1988-04-30 1990-11-15 나까하라 쯔네오 초전도체 박막을 가지는 반도체 기판과 그 제조 방법
EP0369533A3 (fr) * 1988-11-14 1991-07-24 Akzo N.V. Alkoxydes métalliques solubilisés dans un solvant alkoxyalkanol
US5252247A (en) * 1988-11-14 1993-10-12 Akzo America Inc. Metal (dialkylaminoalcoholate) solutions
US5089785A (en) * 1989-07-27 1992-02-18 Cornell Research Foundation, Inc. Superconducting linear accelerator loaded with a sapphire crystal
US5084201A (en) * 1989-11-14 1992-01-28 Akzo N.V. Soluble copper amino alkoxides
CA2029789A1 (fr) * 1989-12-04 1991-06-05 Kenton D. Budd Fibres souples supraconductrices revetues de zircone
JPH07110766B2 (ja) * 1989-12-11 1995-11-29 財団法人国際超電導産業技術研究センター 酸化物超電導体の製造方法
US5169969A (en) * 1990-06-07 1992-12-08 Akzo Nv Process for forming mixed bimetal alkoxide-carboxylate composition and novel compositions thereof
US5063199A (en) * 1990-06-15 1991-11-05 Minnesota Mining And Manufacturing Company Method of depositing thin films of high temperature Bi-Sr-Ca-Cu-O-based ceramic oxide superconductors
US5087609A (en) * 1990-09-24 1992-02-11 Akzo Nv Formation of high temperature superconductor thin films by sol-gel techniques
EP0607967B1 (fr) * 1993-01-20 2000-06-14 Murata Manufacturing Co., Ltd. Production de films minces du système plomb-titanate
US5607503A (en) * 1993-09-03 1997-03-04 Refract-A-Gard Pty Limited Silica-based binder
US5549880A (en) * 1994-03-31 1996-08-27 Koksbang; Rene Method of making lithium-vanadium-oxide active material
US5560957A (en) * 1994-10-28 1996-10-01 Xerox Corporation Electroluminescent device
US5662737A (en) * 1996-05-13 1997-09-02 Quantum Group, Inc. Method for making rare earth metal oxide ceramic precursor compounds and use thereof
TW346447B (en) * 1996-12-16 1998-12-01 Matsushita Electric Ind Co Ltd Chemically bonding material and method for manufacturing the same
US5942376A (en) * 1997-08-14 1999-08-24 Symetrix Corporation Shelf-stable liquid metal arylketone alcoholate solutions and use thereof in photoinitiated patterning of thin films
US6440211B1 (en) * 1997-09-02 2002-08-27 Ut-Battelle, Llc Method of depositing buffer layers on biaxially textured metal substrates
US5962654A (en) * 1998-01-30 1999-10-05 International Business Machines Operation Alkoxyalkoxides and use to form films
US6002031A (en) * 1998-09-04 1999-12-14 International Business Machines Corporation Metal alkoxyalkoxidecarboxylates and use to form films
JP2976028B1 (ja) 1998-10-13 1999-11-10 工業技術院長 緻密でエピタキシャルな金属酸化物膜の製造方法と、その金属酸化物前駆体及びその製造方法
CN1103328C (zh) * 2000-04-06 2003-03-19 中国科学院上海技术物理研究所 钛酸锶钡薄膜材料的制备方法
KR100393486B1 (ko) * 2000-09-08 2003-08-06 학교법인 포항공과대학교 솔 코팅법에 의한 란탄함유 티탄산 비스무스 박막의 경제적인 제조방법
KR100612570B1 (ko) * 2004-04-21 2006-08-11 주식회사 엘지화학 신규 결정 구조를 갖는 금속 복합 산화물 및 이들의 이온전도체로서의 용도
JP4573790B2 (ja) * 2006-03-27 2010-11-04 スリーエム イノベイティブ プロパティズ カンパニー 独立ガラスフィルムの製造方法
JP4566149B2 (ja) * 2006-03-27 2010-10-20 スリーエム イノベイティブ プロパティズ カンパニー 独立ガラスフィルムの製造方法
US7615385B2 (en) 2006-09-20 2009-11-10 Hypres, Inc Double-masking technique for increasing fabrication yield in superconducting electronics
DE102008032127A1 (de) * 2008-07-08 2010-02-04 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Sol und Verfahren zur Herstellung einer Delafossit-Mischoxidschicht-Struktur auf einem Substrat sowie mit einem Mischoxid beschichtetes Substrat
US20100015340A1 (en) * 2008-07-17 2010-01-21 Zenergy Power Inc. COMPOSITIONS AND METHODS FOR THE MANUFACTURE OF RARE EARTH METAL-Ba2Cu3O7-delta THIN FILMS
JP5421561B2 (ja) * 2008-08-20 2014-02-19 住友電気工業株式会社 酸化物超電導薄膜の製造方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0277020A2 (fr) * 1987-01-30 1988-08-03 Director-General of the Agency of Industrial Science and Technology Procédé de fabrication d'un matériau supraconducteur
EP0280292A2 (fr) * 1987-02-26 1988-08-31 Sumitomo Electric Industries Limited Procédé de la fabrication d'une couche en matériau d'oxyde supraconducteur
EP0287258A1 (fr) * 1987-04-10 1988-10-19 AT&T Corp. Méthode pour la fabrication d'une couche d'un matériau supraconducteur
WO1988008609A1 (fr) * 1987-04-24 1988-11-03 General Atomics Fabrication de ceramique supraconductrice a degre de purete eleve
EP0301591A2 (fr) * 1987-07-31 1989-02-01 Mitsubishi Materials Corporation Composition et procédé pour la préparation de composés d'oxydes métalliques

Family Cites Families (5)

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CA1217927A (fr) * 1983-04-15 1987-02-17 Tsutomu Nanao Materiau composite inorganique, et sa preparation
US4614673A (en) * 1985-06-21 1986-09-30 The Boeing Company Method for forming a ceramic coating
US4636440A (en) * 1985-10-28 1987-01-13 Manville Corporation Novel process for coating substrates with glass-like films and coated substrates
AU1067988A (en) * 1987-01-22 1988-08-04 Director-General Of Agency Of Industrial Science And Technology Superconductive material and method of preparing same
US4880770A (en) * 1987-05-04 1989-11-14 Eastman Kodak Company Metalorganic deposition process for preparing superconducting oxide films

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0277020A2 (fr) * 1987-01-30 1988-08-03 Director-General of the Agency of Industrial Science and Technology Procédé de fabrication d'un matériau supraconducteur
EP0280292A2 (fr) * 1987-02-26 1988-08-31 Sumitomo Electric Industries Limited Procédé de la fabrication d'une couche en matériau d'oxyde supraconducteur
EP0287258A1 (fr) * 1987-04-10 1988-10-19 AT&T Corp. Méthode pour la fabrication d'une couche d'un matériau supraconducteur
WO1988008609A1 (fr) * 1987-04-24 1988-11-03 General Atomics Fabrication de ceramique supraconductrice a degre de purete eleve
EP0301591A2 (fr) * 1987-07-31 1989-02-01 Mitsubishi Materials Corporation Composition et procédé pour la préparation de composés d'oxydes métalliques

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
1988 PROCEEDINGS 38TH ELECTRONIC COMPONENTS CONFERENCE, 9th - 11th May 1988, pages 176-180, IEEE, New York, US; E.J.A. POPE et al.: "Metalorganic polymer route to superconducting yttrium-barium-copper-oxide wire" *
JAPANESE JOURNAL OF APPLIED PHYSICS, vol. 27, no. 1, January 1988, pages L53-L54, Tokyo, JP; S. SHIBATA et al.: "Superconducting oxides by the sol-gel method using alkoxides" *
MATERIALS RESEARCH SOCIETY - PROCEEDINGS OF HIGH-TEMPERATURE SUPERCONDUCTORS SYMPOSIUM, Boston, 30th November - 4th December 1987, vol. 99, pages 323-326; S. KRAMER et al.: "Preparation of thin film YBa2Cu3O6+x ceramic superconductors by the sol-gel process" *

Also Published As

Publication number Publication date
AU607219B2 (en) 1991-02-28
EP0292967A2 (fr) 1988-11-30
US5001110A (en) 1991-03-19
AU1656888A (en) 1988-12-01
US4920093A (en) 1990-04-24
KR880014593A (ko) 1988-12-24

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