CA2047001A1 - Procede de deposition d'une seconde pellicule mince sur un supraconducteur a base d'oxyde - Google Patents

Procede de deposition d'une seconde pellicule mince sur un supraconducteur a base d'oxyde

Info

Publication number
CA2047001A1
CA2047001A1 CA2047001A CA2047001A CA2047001A1 CA 2047001 A1 CA2047001 A1 CA 2047001A1 CA 2047001 A CA2047001 A CA 2047001A CA 2047001 A CA2047001 A CA 2047001A CA 2047001 A1 CA2047001 A1 CA 2047001A1
Authority
CA
Canada
Prior art keywords
thin film
oxide superconductor
depositing
different thin
deposited
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA2047001A
Other languages
English (en)
Other versions
CA2047001C (fr
Inventor
Michitomo Iiyama
Mitsuchika Saitoh
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of CA2047001A1 publication Critical patent/CA2047001A1/fr
Application granted granted Critical
Publication of CA2047001C publication Critical patent/CA2047001C/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0268—Manufacture or treatment of devices comprising copper oxide
    • H10N60/0661—Processes performed after copper oxide formation, e.g. patterning
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0884—Treatment of superconductor layers by irradiation, e.g. ion-beam, electron-beam, laser beam or X-rays
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0912—Manufacture or treatment of Josephson-effect devices
    • H10N60/0941—Manufacture or treatment of Josephson-effect devices comprising high-Tc ceramic materials
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/725—Process of making or treating high tc, above 30 k, superconducting shaped material, article, or device
    • Y10S505/73—Vacuum treating or coating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/725—Process of making or treating high tc, above 30 k, superconducting shaped material, article, or device
    • Y10S505/73—Vacuum treating or coating
    • Y10S505/731—Sputter coating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/725—Process of making or treating high tc, above 30 k, superconducting shaped material, article, or device
    • Y10S505/73—Vacuum treating or coating
    • Y10S505/732—Evaporative coating with superconducting material

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
CA002047001A 1990-07-12 1991-07-12 Procede de deposition d'une seconde pellicule mince sur un supraconducteur a base d'oxyde Expired - Fee Related CA2047001C (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP184867/1990 1990-07-12
JP18486790 1990-07-12

Publications (2)

Publication Number Publication Date
CA2047001A1 true CA2047001A1 (fr) 1992-01-13
CA2047001C CA2047001C (fr) 1996-07-23

Family

ID=16160702

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002047001A Expired - Fee Related CA2047001C (fr) 1990-07-12 1991-07-12 Procede de deposition d'une seconde pellicule mince sur un supraconducteur a base d'oxyde

Country Status (4)

Country Link
US (1) US5234901A (fr)
EP (1) EP0466607B1 (fr)
CA (1) CA2047001C (fr)
DE (1) DE69115775T2 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6399569B1 (en) 1991-03-11 2002-06-04 Curis, Inc. Morphogen treatments for limiting proliferation of epithelial cells
DE19634118A1 (de) * 1996-08-23 1998-02-26 Forschungszentrum Juelich Gmbh Schichtenfolge sowie eine solche enthaltendes Bauelement
US6221812B1 (en) 1998-07-20 2001-04-24 Board Of Regents, The University Of Texas System Jc in high magnetic field of bi-layer and multi-layer structures for high temperature superconductive materials
US6974501B1 (en) * 1999-11-18 2005-12-13 American Superconductor Corporation Multi-layer articles and methods of making same

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63283086A (ja) * 1987-05-14 1988-11-18 Furukawa Electric Co Ltd:The 超電導薄膜の製造方法
JP2584003B2 (ja) * 1988-09-26 1997-02-19 松下電器産業株式会社 超電導素子及びその製造方法
EP0392437B1 (fr) * 1989-04-11 1996-08-14 Matsushita Electric Industrial Co., Ltd. Méthode de recuit de films minces supraconducteurs

Also Published As

Publication number Publication date
EP0466607A2 (fr) 1992-01-15
DE69115775D1 (de) 1996-02-08
CA2047001C (fr) 1996-07-23
EP0466607B1 (fr) 1995-12-27
EP0466607A3 (en) 1992-05-20
DE69115775T2 (de) 1996-09-05
US5234901A (en) 1993-08-10

Similar Documents

Publication Publication Date Title
EP0292967A3 (fr) Procédé de réalisation de filmes minces supraconducteurs et solutions pour sa réalisation
CA2051154A1 (fr) Methode de fabrication de composants electroniques, electro-optiques et optiques
CA2029355A1 (fr) Film mince d'un compose d'oxyde supraconducteur comportant une couche tampon
GR3023916T3 (en) Process for making thin polymer film by pulsed laser evaporation.
CA2020302A1 (fr) Substrat enduit d'une pellicule supraconductrice
JPS6441282A (en) Method of depositing superconducting oxide material thin layer
CA2060399A1 (fr) Methode de preparation de materiau supraconducteur d'oxydes
CA2047001A1 (fr) Procede de deposition d'une seconde pellicule mince sur un supraconducteur a base d'oxyde
CA2062294A1 (fr) Couche mince de supraconducteur a orientations cristallines localement differentes et sa methode de fabrication
CA2021821A1 (fr) Pellicule mince supraconductrice d'oxyde compose et procede de fabrication connexe
CA2115716A1 (fr) Methode de fabrication de couches minces d'oxydes supraconducteurs configurees
FI945234A0 (fi) Menetelmä askelman muodostamiseksi oksidisuprajohdetta käyttävää suprajohtavaa laitetta varten tarkoitetun substraatin kasvatuspinnalle
CA2064169A1 (fr) Procede pour l'obtention d'un compose d'oxyde supraconducteur en couche mince
CA2045267A1 (fr) Processus de fabrication de minces pellicules supraconductrices et appareil connexe
CA2052378A1 (fr) Dispositif a supraconducteur et sa methode de fabrication
EP0463741A3 (en) Semiconductor memory device containing a capacitor and method for manufacturing same
CA2103085A1 (fr) Methode de fabrication de couches minces supraconductrices faites d'un oxyde supraconducteur a haute temperature
CA2056523A1 (fr) Tube supraconducteur pour blindage magnetique et methode de fabrication connexe
EP0492583A3 (en) Method of coating the surface of polymeric articles with inorganic films
CA2093729A1 (fr) Methode de fabrication de couches minces d'oxydes supraconducteurs
CA2056309A1 (fr) Materiau de blindage magnetique a oxyde supraconducteur et sa methode de fabrication
EP0973208A3 (fr) Dispositif à adaptation de grille et procédé pour sa fabrication
CA2043541A1 (fr) Procede de preparation a haute temperature, de films minces supraconducteurs
CA2064273A1 (fr) Procede de fabrication d'un substrat multicouches comportant au moins une couche mince d'oxyde supraconducteur
CA2038601A1 (fr) Procede de fabrication de pellicule supraconductrice a base d'oxyde

Legal Events

Date Code Title Description
EEER Examination request
MKLA Lapsed