EP0276731B1 - Procédé de guidage de faisceau d'électrons avec sélection d'énergie et spectromètre d'électrons - Google Patents

Procédé de guidage de faisceau d'électrons avec sélection d'énergie et spectromètre d'électrons Download PDF

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Publication number
EP0276731B1
EP0276731B1 EP88100724A EP88100724A EP0276731B1 EP 0276731 B1 EP0276731 B1 EP 0276731B1 EP 88100724 A EP88100724 A EP 88100724A EP 88100724 A EP88100724 A EP 88100724A EP 0276731 B1 EP0276731 B1 EP 0276731B1
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EP
European Patent Office
Prior art keywords
energy
dispersive
lens
focusing
specimen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP88100724A
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German (de)
English (en)
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EP0276731A3 (en
EP0276731A2 (fr
Inventor
Harald Ibach
Heinz-Dieter Bruchmann
Sieghart Lehwald
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Forschungszentrum Juelich GmbH
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Forschungszentrum Juelich GmbH
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Publication of EP0276731A3 publication Critical patent/EP0276731A3/de
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/06—Electron- or ion-optical arrangements

Definitions

  • the invention relates to a method for electron beam guidance with focussing energy selection in an energy-dispersive system with different focussing in two mutually perpendicular directions (especially in the energy selection direction and perpendicular to it with systems focusing only in one plane), and to electron spectrometers with at least one energy-dispersive system with such a beam guidance.
  • Bundled electrons with a certain energy are used for the treatment and investigation of surfaces and gases.
  • energy-dispersive systems are known which are used either individually as analyzers or as monochromators or in combination of analyzer and monochromator as so-called electron impact spectrometers.
  • Energy-dispersive systems as analyzers are used, for example, in UV or X-ray photoelectron spectroscopy (also known under the name ESCA) and in Auger spectroscopy.
  • ESCA UV or X-ray photoelectron spectroscopy
  • Auger spectroscopy electrons emitted by the sample are transmitted through analyzes the analyzer for its kinetic energy.
  • a lens system located between the sample and the analyzer takes care of the beam transport, the adaptation of the electron energy to the transmission energy of the analyzer and the necessary enlargement or reduction of the image of the imaged area of the sample to adapt to the input slot of the analyzer.
  • Energy dispersive systems are also used to produce monochromatic electron beams, such as in inverse photoemission spectroscopy. Similar to the analyzer described above, lens systems are used between the monochromator and the sample for beam transport, for adjusting the energy and the image size.
  • the electrons emitted by a cathode are monochromatized in one or more monochromators and directed onto a sample through a lens system, the energy of the electrons on the sample usually being different from the energy in the monochromators.
  • the electrons hitting the sample are scattered by the sample and suffer characteristic energy losses, for example through excitation of oscillation quanta.
  • the scattered electrons are directed through a lens system onto the entrance slit of one or more energy-dispersive elements conducted, which analyze the scattered electrons with regard to their energy distribution, and detected in a detector.
  • Electron spectrometers of this type are used in particular for vibration spectroscopy and for the investigation of electronic losses on solid surfaces and are manufactured by a number of companies.
  • the invention is therefore based on the object of providing such a beam guide with focusing energy selection or an electron spectrometer, by means of which a high energy resolution with a high electron current is achieved on the sample or on the detector.
  • the inventive method of the type mentioned is characterized in that the different focusing of the electrons in the two mutually perpendicular directions is corrected by a non-circularly symmetrical lens system connected downstream or upstream of the energy-dispersive system in such a way that either the virtual or the real one Input aperture of the energy dispersive system on a given image level outside of the energy dispersive System or a sample outside the energy-dispersive system on the virtual or real output aperture of the same is mapped.
  • the lens systems to be used for this purpose described with different focusing in two mutually perpendicular directions are designed or dimensioned in consideration of the focus specification and the electron trajectories in the energy-dispersive system.
  • rectangular lens cross-sectional profiles can be used, in which the height and width are matched to one another in such a way that the described image occurs in cooperation with the different focusing of the electrons in the two mutually perpendicular directions within the energy-dispersive system.
  • the symmetry axes of the rectangular profile must then be parallel or perpendicular to the radial plane.
  • the required height and width of the lens cross-sectional profiles are calculated by solving the Laplace equation in three dimensions and calculating the electron orbits in three dimensions in the manner known to the person skilled in the art.
  • Devices with beam guidance include electron monochromators with a subsequent corrective lens system between the monochromator and sample, analyzers with an upstream corrective lens system between the sample and analyzer, and electron impact spectrometers with such a lens system between the monochromator and sample and / or between the sample and analyzer.
  • electron monochromators with a subsequent corrective lens system between the monochromator and sample analyzers with an upstream corrective lens system between the sample and analyzer
  • electron impact spectrometers with such a lens system between the monochromator and sample and / or between the sample and analyzer.
  • an electron impact spectrometer as described, consists of a monochromator part with a downstream lens system and an analyzer part with a preceding lens system
  • the invention can, however, also be used separately for the monochromator with a downstream lens system and the analyzer with an upstream lens system for the various applications.
  • plate capacitors can also be used, which also focus only in one plane. It is also possible to use energy-dispersive systems which have a different, in each case non-zero, focusing in two mutually perpendicular directions, in which case the lens system must be suitably adapted (selection of the height and width of the lens profiles) in such a way that the desired focusing occurs .
  • the electron impact spectrometer shown in Figure 1 comprises a cathode system 1, two monochromators 2 and 3, each a lens system consisting of three elements 4, 5 and 6 or 8, 9 and 10 between the monochromators and the sample 7 and between the sample 7 and the Analyzers 11 and 12, two analyzers 11 and 12 and a detector 13.
  • the two lens systems between the monochromator and the sample and between the sample and the analyzer are symmetrical to one another, so that the lens elements 4 and 10, 5 and 9 and 6 and 8 are identical to one another.
  • FIGS. 2 and 3 The cross-sectional profiles of these lens elements 4 to 6 (or 8 to 10) are shown in FIGS. 2 and 3: Of these, the lens element 4 is tapered in a trapezoidal or stepped manner and the elements 5 and 6 are designed in a rectangular shape.
  • the height and width of the profiles of the lens elements 8, 9 and 10 are coordinated so that in the radial plane the sample is imaged on the inlet slit of the first analyzer, perpendicularly the sample is imaged on the outlet slit of the last analyzer, so that a total of one image the sample is created at the exit slit of the second analyzer.
  • the monochromatic current achieved using the lens system according to the invention, measured on the detector, as a function of the resolution is shown in FIG. 5, curve a.
  • curve b shows analog values for a spectrometer which does not have the lens system according to the invention, but is otherwise identical in terms of monochromators and analyzers.
  • the results refer to one Electron energy on the sample of 100 eV, while the energy of the electrons in the monochromators and analyzers (depending on the resolution) is less than 1 eV.

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)

Claims (9)

  1. Procédé de commande d'un faisceau électronique avec sélection de l'énergie par focalisation dans un système dispersant l'énergie avec une focalisation différente dans deux directions mutuellement perpendiculaires,
    caractérisé en ce que la focalisation différente des électrons dans les deux directions mutuellement perpendiculaires est, par un système de lentilles symétrique non circulaire suivant ou précédant le système dispersant l'énergie, corrigée de telle sorte que, soit l'ouverture d'entrée virtuelle ou réelle du système dispersant l'énergie est reproduite sur un plan d'image alloué en dehors du système dispersant l'énergie, soit un échantillon en dehors du système dispersant l'énergie est reproduit sur l'ouverture de sortie virtuelle ou réelle de ce dernier.
  2. Procédé selon la revendication 1, caractérisé en ce qu'on utilise des systèmes de lentilles avec un profil de section rectangulaire des lentilles, notamment rectangulaire rétréci.
  3. Spectromètre électronique avec un système d'émission et avec au moins un système dispersant l'énergie avec une focalisation différente dans deux directions mutuellement perpendiculaires, caractérisé par, à la suite d'un système dispersant l'énergie (2, 3) pour la sélection de l'énergie avant l'échantillon (7), un système de lentilles (4 - 6) à focalisation non circulaire, différente dans les deux directions mutuellement perpendiculaires, système qui, en coopération avec les propriétés de focalisation du système dispersant l'énergie, produit à l'endroit de l'échantillon une image de l'ouverture d'entrée virtuelle ou réelle du système dispersant l'énergie (2, 3), et/ou par, avant un système dispersant l'énergie (11, 12) pour la sélection de l'énergie après un échantillon (7), un système de lentilles (8 - 10) à focalisation non circulaire, différente dans les deux directions mutuellement perpendiculaires, système qui, en coopération avec les propriétes de focalisation du système dispersant l'énergie, reproduit l'image a l'endroit de l'échantillon sur une ouverture de sortie virtuelle ou réelle du système dispersant l'énergie (11, 12).
  4. Spectromètre électronique selon la revendication 3, caractérisé en ce que le système dispersant l'énergie (2, 3) ne focalise que dans une direction avant l'échantillon (7), et/ou le système dispersant l'énergie (11, 12) ne focalise que dans une direction après l'échantillon (7).
  5. Spectromètre électronique selon la revendication 3 ou 4, caractérisé en ce qu'un ou plusieurs profits de section intérieure des lentilles des systèmes de lentilles (4 - 6 ou 8 - 10) possèdent une configuration non circulaire.
  6. Spectromètre électronique selon la revendication 5, caractérisé en ce qu'un ou plusieurs profils de section intérieure des lentilles sont rectangulaires.
  7. Spectromètre électronique selon la revendication 5, caractérisé en ce qu'un ou plusieurs profils de section intérieure des lentilles des systèmes de lentilles présentent, le long d'un axe, un rétrécissement en forme de trapèze, de gradin ou de courbe.
  8. Spectromètre électronique selon l'une quelconque des revendications 3 à 7, caractérisé en ce que le système dispersant l'énergie (2, 3) pour la sélection de l'énergie avant l'échantillon est constitué d'un premier et d'un second monochromateurs, directement consécutifs.
  9. Spectromètre électronique selon l'une quelconque des revendications 3 à 8, caractérisé en ce que les systèmes dispersant l'énergie sont constitués par des condensateurs cylindriques.
EP88100724A 1987-01-30 1988-01-20 Procédé de guidage de faisceau d'électrons avec sélection d'énergie et spectromètre d'électrons Expired - Lifetime EP0276731B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3702696 1987-01-30
DE19873702696 DE3702696A1 (de) 1987-01-30 1987-01-30 Verfahren zur elektronenstrahl-fuehrung mit energieselektion und elektronenspektrometer

Publications (3)

Publication Number Publication Date
EP0276731A2 EP0276731A2 (fr) 1988-08-03
EP0276731A3 EP0276731A3 (en) 1990-01-24
EP0276731B1 true EP0276731B1 (fr) 1993-03-10

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ID=6319818

Family Applications (1)

Application Number Title Priority Date Filing Date
EP88100724A Expired - Lifetime EP0276731B1 (fr) 1987-01-30 1988-01-20 Procédé de guidage de faisceau d'électrons avec sélection d'énergie et spectromètre d'électrons

Country Status (4)

Country Link
US (1) US4845361A (fr)
EP (1) EP0276731B1 (fr)
JP (1) JP2529712B2 (fr)
DE (2) DE3702696A1 (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69027602T2 (de) * 1990-08-08 1997-01-23 Philips Electronics Nv Energiefilter für Ladungsträgervorrichtung
JP2636113B2 (ja) * 1992-03-26 1997-07-30 広島大学長 帯域フィルター型逆光電子分光検出装置
US5466933A (en) * 1992-11-23 1995-11-14 Surface Interface, Inc. Dual electron analyzer
DE19633496B4 (de) * 1996-08-20 2006-06-08 Ceos Corrected Electron Optical Systems Gmbh Monchromator für die Elektronenoptik, insbesondere Elketronenmikroskopie
EP1139091B1 (fr) * 2000-03-27 2009-08-19 ELLCIE Maintenance GmbH Spectromètre élétronique avec unité de déflection
KR20060088272A (ko) * 2005-02-01 2006-08-04 삼성전자주식회사 Ｘ-선 광전자 분광분석장치

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2856244A1 (de) * 1978-12-27 1980-07-03 Kernforschungsanlage Juelich Elektronenstosspektrometer
US4742223A (en) * 1984-05-23 1988-05-03 Indiana University Foundation High resolution particle spectrometer
US4559449A (en) * 1984-05-23 1985-12-17 Indiana University Foundation High resolution particle spectrometer

Also Published As

Publication number Publication date
JP2529712B2 (ja) 1996-09-04
EP0276731A3 (en) 1990-01-24
EP0276731A2 (fr) 1988-08-03
DE3702696A1 (de) 1988-08-11
JPS63276861A (ja) 1988-11-15
US4845361A (en) 1989-07-04
DE3878939D1 (de) 1993-04-15

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