EP0214277B1 - Procede et dispositif de regeneration de cryopompes - Google Patents

Procede et dispositif de regeneration de cryopompes Download PDF

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Publication number
EP0214277B1
EP0214277B1 EP19860902122 EP86902122A EP0214277B1 EP 0214277 B1 EP0214277 B1 EP 0214277B1 EP 19860902122 EP19860902122 EP 19860902122 EP 86902122 A EP86902122 A EP 86902122A EP 0214277 B1 EP0214277 B1 EP 0214277B1
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EP
European Patent Office
Prior art keywords
cryopump
gas
gases
stage
array
Prior art date
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Expired
Application number
EP19860902122
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German (de)
English (en)
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EP0214277A1 (fr
Inventor
Bruce R. Andeen
Robert C. Pandorf
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Azenta Inc
Original Assignee
Helix Technology Corp
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Application filed by Helix Technology Corp filed Critical Helix Technology Corp
Publication of EP0214277A1 publication Critical patent/EP0214277A1/fr
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • F04B37/085—Regeneration of cryo-pumps

Definitions

  • This invention relates to the regeneration of cryopumps.
  • a low temperature array usually operating in the range of 4 to 25 K, is the primary pumping surface. This surface is surrounded by a higher temperature radiation shield, usually operated in the temperature range of 70 to 130 K, which provides radiation shielding to the lower temperature array.
  • the radiation shield generally comprises a housing which is closed except at a frontal array positioned between the primary pumping surface and the chamber to be evacuated. This higher temperature, first stage frontal array serves as a pumping site for higher boiling point gases such as water vapor.
  • high boiling point gases such as water vapor are condensed on the frontal array.
  • Lower boiling point gases pass through that array and into the volume within the radiation shield and condense on the lower temperature array.
  • a surface coated with an adsorbent such as charcoal or a molecular sieve operating at or below the temperature of the colder array may also be provided in this volume to remove the very low boiling point gases such as hydrogen. With the gases thus condensed and/or adsorbed onto. the pumping surfaces, only a vacuum remains in the work chamber.
  • the cooler In systems cooled by closed cycle coolers, the cooler is typically a two stage refrigerator having a cold finger which extends through the rear of the radiation shield.
  • the cold end of the second, coldest stage of the cryocooler is at the tip of the cold finger.
  • the primary pumping surface, or cryopanel is connected to a heat sink at the coldest end of the second stage of the cold finger.
  • This cryopanel may be a simple metal plate or an array of metal baffles arranged around and connected to the second stage heat sink.
  • This second stage cryopanel also supports the low temperature adsorbent.
  • the radiation shield is connected to a heat sink, or heat station at the coldest end of the first stage of the refrigerator.
  • the shield surrounds the second stage cryopanel in such a way as to protect it from radiant heat.
  • the frontal array is cooled by the first stage heat sink through the side shield or, as disclosed in U.S. Patent 4,356,701, through thermal struts.
  • the gases which have condensed onto the cryopanels, and in particular the gases which are adsorbed, begin to saturate the system.
  • a regeneration procedure must then be followed to warm the cryopump and thus release the gases and remove the gases from the system.
  • the gases evaporate, the pressure in the cryopump increases.
  • the gases are exhausted from the cryopump at about 18 pounds per square inch (PSIA) (0,1242 x 10 6 Pa).
  • PSIA pounds per square inch
  • the cryopump is often purged with warm nitrogen gas. The nitrogen gas hastens warming of the cryopanels and also serves to flush water and other vapors from the system.
  • Nitrogen is the usual purge gas because it is inert.
  • the nitrogen gas dilutes any mixture of combustible gases such as hydrogen and oxygen which may be released by the cryopump.
  • the adsorbent on the second stage array is generally the component of the system which first requires regeneration.
  • the amount of adsorbent carried by the second stage is increased.
  • an increased amount of adsorbent increases the amount of hydrogen which can be collected by the system and thus also increases the danger due to combustion of the hydrogen during regeneration.
  • gases which evaporate during regeneration are simultaneously evacuated from the cryopump by means of an ejector pump actuated by a substantially inert fluid.
  • any released inflammable gas may be further diluted with inert gas to minimize the danger of combustion external to the vacuum vessel.
  • inert gas such as nitrogen
  • any released inflammable gas may be further diluted with inert gas to minimize the danger of combustion external to the vacuum vessel.
  • the amount of hydrogen which mixes with the later evaporated oxygen in the cryopump is substantially reduced.
  • the pressure of the cryopump chamber the system may be held, in the unlikely event of combustion within the chamber, to acceptable pressure levels.
  • the cryopump of Fig. 1 comprises a main housing 12 which is mounted to a work chamber or a valve housing 13 along a flange 14.
  • a front opening 16 in the cryopump housing 12 communicates with a circular opening in the work chamber or valve housing.
  • the cryopump arrays may protrude into the chamber and a vacuum seal be made at a rear flange.
  • a two stage cold finger 18 of a refrigerator protrudes into the housing 12 through an opening 20.
  • the refrigerator is a Gifford-MacMahon refrigerator but others may be used.
  • a two stage displacer in the cold finger 18 is driven by a motor 22.
  • helium gas introduced into the cold finger under pressure through line 26 is expanded and thus cooled and then exhausted through line 24.
  • a refrigerator is disclosed in U.S. Patent No. 3,218,815 to Chellis et al.
  • a first stage heat sink, or heat station 28 is mounted at the cold end of the first stage 29 of the refrigerator.
  • a heat sink 30 is mounted to the cold end of the second stage 32.
  • Suitable temperature sensor and vapor pressure sensor elements 34 and 36 are mounted to the rear of the heat sink 30.
  • the primary pumping surface is a cryopanel array mounted to the heat sink 30.
  • This array comprises a disc 38 and a set of circular chevrons 40 arranged in a vertical array and mounted to disc 38.
  • the cylindrical surface 42 holds a low temperature adsorbent. Access to this adsorbent by low boiling point gases is through chevrons.
  • a cup shaped radiation shield 44 is mounted to the first stage, high temperature heat sink 28.
  • the second stage of the cold finger extends through an opening 45 in that radiation shield.
  • This radiation shield 44 surrounds the primary cryopanel array to the rear and sides to minimize heating of the primary cryopanel array by radiation.
  • the temperature of this radiation shield from about 100°K. at the heat sink 28 to about 130°K. adjacent to the opening 16.
  • a frontal cryopanel array 46 serves as both a radiation shield for the primary cryopanel array and as a cryopumping surface for higher boiling temperature gases such as water vapor.
  • This panel comprises a circular array of concentric louvers and chevrons 48 joined by spoke-like plates 50.
  • the configuration of this cryopanel 46 need not be confined to circular concentric components; but it should be so arranged as to act as a radiant heat shield and a higher temperature cryopumping panel while providing a path for lower boiling temperature gases to the primary cryopanel.
  • Thermal struts 54 extend between a plate 56 mounted to the heat sink 28 and the frontal array. Those struts extend through clearance openings 58 in the primary panel 38 and are thus isolated from that panel.
  • the cryopump is regenerated by turning off the refrigerator and allowing the system to warm. As the temperature of the system increases the gases evaporate thus increasing the pressure in the system. As the pressure reaches about 18 PSIA (0.1242 x 10 6 Pa) the released gases are exhausted from the system through a relief valve 60.
  • a warm inert gas such as nitrogen may be introduced from a supply 62 through a valve 64 and a purge port 66.
  • the purge port releases the nitrogen near to the second stage array to minimize the back flow of water vapor from the first stage array to the second stage.
  • gas which is released from the cryopump during regeneration is removed rapidly from the system through a valve 68 by means of an ejector 70.
  • An ejector also referred to as jet pump or venturi pump, aspirates the gas from the cryopump chamber by means of a high velocity jet of fluid from a nozzle 72 or some other venturi for generating high velocity flow.
  • the actuating fluid forced through the nozzle 72 is nitrogen gas valved through a valve 74 from the nitrogen supply 62.
  • Nitrogen gas is inert, that is it does not react with the hydrogen or oxygen in the system. The nitrogen thus further dilutes the hydrogen and oxygen which is aspirated from the cryopump.
  • An alternative ejector in which the aspirated fluid is drawn through a side port in a venturi is the UItravakTM air ejector available from Air-Vak Engineering Co., Inc., Milford, Connecticut.
  • the present system serves to minimize the danger of any combustion in the cryopump housing by reducing the pressure.
  • the pressure can increase approximately seven-fold.
  • the internal pressure of the cryopump chamber is about 1 atmosphere (0,1016 x 10 6 Pa) the pressure can be expected to rise to 7 atmospheres (0,7110 x 10 6 Pa) in the event of combustion.
  • the pressure in the cryopump chamber is promptly reducing the pressure in the cryopump chamber to about 2 PSIA (0,138 x 10 6 Pa)
  • the pressure even with combustion, does not rise above 1 atmosphere (0,1016 x 10 6 Pa).
  • the pressure in the vacuum chamber remains at safe levels.
  • the present system further minimizes the dangers of combustion by reducing the amount of hydrogen and oxygen which are mixed at any given time in the cryopump chamber.
  • Much of the hydrogen is released from the adsorbent before oxygen is evaporated from the cryopanels.
  • By evacuating the cryopump chamber as the hydrogen is released most of the hydrogen can be removed before significant amount of oxygen is evaporated. By the time a substantial amount of oxygen has evaporated most of the hydrogen has been removed from the system.
  • the nitrogen purse is less necessary with the use of an aspirator, the nitrogen may still be useful in helping to warm the system, to dry the system, and to initially dilute the released gases before they reach the ejector.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

Une cryopompe est régénérée à l'aide d'une pompe à éjection (70) qui aspire le gaz de la cryopompe, pendant que cette dernière est chauffée. L'éjecteur (70) est actionné par un gaz inerte. Ce même gaz inerte peut être utilisé pour purger la pompe pendant l'évacuation.

Claims (7)

1. Méthode de régénération d'une cyropumpe comprenant le chauffage de la cryopompe pour évaporer ou évacuer des gaz précédemment condensés ou adsorbés caractérisée en ce qu'elle consiste à vider simultanément la cryopumpe avec une pompe d'éjection actionné par un fluide sensiblement inerte.
2. Méthode suivant la revendication 1 caractérisée en ce qu'un mélange de gaz combustibles est évaporé ou évacué, la plus grande part d'un premier gaz étant ôtée par la pompe d'éjection avant l'évaporation ou l'évacuation substantielle du second gaz pour réduire sensiblement le mélange de gaz combustibles.
3. Méthode suivant la revendication 1 ou 2 caractérisée en ce que le fluide inerte est de l'azote.
4. Méthode suivant la revendication 3 caractérisée en ce qu'elle consiste à purger la cryopompe avec de l'azote.
5. Méthode suivant l'une quelconque des revendications précédentes caractérisée en ce qu'elle comprend la purge de la cryopompe avec un gaz inerte.
6. Dispositif de mise en oeuvre du procédé suivant la revendication 1 comprenant une cryopompe pour l'évacuation d'une chambre, caractérisée en ce qu'elle comprend une pompe d'éjection en communication directe avec la cryopompe à travers une vanne (68), pour ôter le gaz de la cryopompe au cours de la régénération, et en ce qu'il comporte une source de gaz sous pression sensiblement inerte en communication avec la pompe d'éjection (70) pour déplacer le fluide dans la pompe d'éjection.
7. Dispositif suivant la revendication 6 caractérisé en ce que le gaz sensiblement inerte est de l'azote.
EP19860902122 1985-03-01 1986-03-03 Procede et dispositif de regeneration de cryopompes Expired EP0214277B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US70746785A 1985-03-01 1985-03-01
US707467 1985-03-01

Publications (2)

Publication Number Publication Date
EP0214277A1 EP0214277A1 (fr) 1987-03-18
EP0214277B1 true EP0214277B1 (fr) 1990-06-13

Family

ID=24841815

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19860902122 Expired EP0214277B1 (fr) 1985-03-01 1986-03-03 Procede et dispositif de regeneration de cryopompes

Country Status (4)

Country Link
EP (1) EP0214277B1 (fr)
JP (1) JPS62502276A (fr)
DE (1) DE3671940D1 (fr)
WO (1) WO1986005240A1 (fr)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5228299A (en) * 1992-04-16 1993-07-20 Helix Technology Corporation Cryopump water drain
US5301511A (en) * 1992-06-12 1994-04-12 Helix Technology Corporation Cryopump and cryopanel having frost concentrating device
DE4336035A1 (de) * 1993-10-22 1995-04-27 Leybold Ag Verfahren zum Betrieb einer Kryopumpe sowie Vakuumpumpensystem mit Kryopumpe und Vorpumpe
DE19781645T1 (de) * 1996-03-20 1999-03-25 Helix Tech Corp Reinigungs- und Grob- bzw. Vorvakuum-Cryopumpenregenerationsverfahren, Cryopumpe und Steuer- bzw. Regeleinrichtung
US5906102A (en) * 1996-04-12 1999-05-25 Helix Technology Corporation Cryopump with gas heated exhaust valve and method of warming surfaces of an exhaust valve
JP6053588B2 (ja) * 2013-03-19 2016-12-27 住友重機械工業株式会社 クライオポンプ、及び非凝縮性気体の真空排気方法
TWI580865B (zh) * 2013-03-25 2017-05-01 Sumitomo Heavy Industries Low temperature pump

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1380205A (fr) * 1964-01-21 1964-11-27 Leybold Hochvakuum Anlagen Trompe d'aspiration à jet de gaz
CH652804A5 (en) * 1981-03-10 1985-11-29 Balzers Hochvakuum Method for regenerating the low-temperature condensation surfaces of a cryopump and cryopump appliance for implementing the method
US4438632A (en) * 1982-07-06 1984-03-27 Helix Technology Corporation Means for periodic desorption of a cryopump

Also Published As

Publication number Publication date
WO1986005240A1 (fr) 1986-09-12
EP0214277A1 (fr) 1987-03-18
JPS62502276A (ja) 1987-09-03
DE3671940D1 (de) 1990-07-19

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