Classifications

• • G—PHYSICS
  • G01—MEASURING; TESTING
  • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
  • G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
  • G01K7/16—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements
  • G01K7/18—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a linear resistance, e.g. platinum resistance thermometer
  • G01K7/183—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a linear resistance, e.g. platinum resistance thermometer characterised by the use of the resistive element
• • G—PHYSICS
  • G01—MEASURING; TESTING
  • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
  • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
  • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
  • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
  • G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
  • G01F1/69—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element of resistive type
  • G01F1/692—Thin-film arrangements
• • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
  • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
  • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
  • Y10T29/00—Metal working
  • Y10T29/49—Method of mechanical manufacture
  • Y10T29/49002—Electrical device making
  • Y10T29/49082—Resistor making
  • Y10T29/49085—Thermally variable

Definitions

• Yerfaliren for producing a measuring probe for use in measuring the temperature or mass of a flowing medium.
• the invention relates to a method for producing a measuring probe according to the preamble of the main claim.
• a measuring probe is known from DE-OS 23 02 61.
• a temperature-dependent elek ⁇ tric resistance for a measuring probe is described-, which has a preferably from Gol 'd existing coating as a temperature-dependent measuring resistor.
• the shape of the resistor is made by masking on a thin plastic film.
• the film is fastened to a support body which has a recess spanned by the film in the region of the film opposite the resistance layer.
• the method according to the invention with the characterizing feature of claim 1 and claim 2 provides the advantage that the sensitive film lies over the entire surface of the substrate during the application of the metal layer and, if appropriate, the cover film and thus against damage caused by pressure and the like ⁇ same is better protected than in the known arrangement, in which the recess in the supporting body is made before the film is attached to it. Moreover, a measuring probe manufactured according to the proposed method is mechanically very stable, so that even when used in rapidly flowing media there are no deformations of the resistance layer which could result in undesired changes in resistance.
• FIG. 1 shows a section through a probe for measuring the temperature or mass of a flowing medium
• FIG. 2 shows a plan view of the measuring probe according to FIG. 1 with the cover film omitted.
• the probe illustrated in the Figures has a Sus ⁇ sheet 1 of heat resistant polymer, beispiels ⁇ example of polyimide, .with single or dual layer of fluoro-carbons and a cover sheet 2 of the same "material.
• the measuring probe has a supporting body 3, on the surface of which the film 1 is attached by welding or gluing.
• the support body 3 is a flat plate, which consists of a metallic material, preferably a CuBe alloy.
• the thickness of the plate is of the order of about 0.3 mm.
• the plate has a recess h in the form of a window-like, rectangular opening, which will be discussed in more detail below.
• the film 1 is metallized after its attachment to the supporting body 3 with a layer system 5, 6 made of resistance materials by vacuum coating over the entire surface.
• a group of temperature-dependent resistors 7, temperature-independent resistors 8 and conductor tracks 9 is then formed from this full-surface coating, as can be seen from FIG. 2, using a mask etching process, the temperature-independent resistors 8 being based on tantalum and the temperature-dependent resistors 7 being based on nickel can.
• a resistance comparison can also be carried out by removing 7 constituents from the resistors by cutting away material, in the case of the temperature-independent layer anodic oxidation or the like.
• the cover film 2 is then placed on and tightly and firmly connected to the carrier film 1, for example by welding and / or by a chemical reaction, the contact connection points 10 and likewise the connections 11 on the conductor tracks 9 being left free.
• the recess k is then produced on the supporting body 3 by means of a mask etching process. This creates a frame-like structure in the exemplary embodiment, which carries the measuring probe and gives it mechanical .. stability.
• the recess h extends over a region of the film 1 opposite the measuring resistors 7 S 8, which has the advantage that between the resistors and the support body, as the medium flow changes, table no more heat flow takes place, whereby the probe has a high response speed when changing the mass and / or temperature of the medium flow. With the recess k, a good thermal decoupling of the measuring resistors 7 5 8 against one another and against their mechanical holder is achieved.
• the recess k is formed in the support body 3 only when the measuring probe is finished. This means that the entire, uninterrupted surface of the support body 3 is initially available as a support for the carrier film 1, on which it can be supported during the manufacture of the sensor arrangement until it is finished and when the cover film 2 is applied. This effectively prevents damage to the resistors and the foils due to mechanical influences during the manufacturing process and also simplifies the manufacturing process as such.

Landscapes

• Physics & Mathematics (AREA)
• General Physics & Mathematics (AREA)
• Fluid Mechanics (AREA)
• Measuring Volume Flow (AREA)
• Thermistors And Varistors (AREA)
• Measuring Temperature Or Quantity Of Heat (AREA)
• Details Of Resistors (AREA)

Applications Claiming Priority (2)

Publications (1)

Family

ID=6243145

Family Applications (1)

Country Status (5)

Families Citing this family (18)

Family Cites Families (12)

• 1984
  • 1984-08-16 DE DE19843430075 patent/DE3430075A1/de active Granted
• 1985
  • 1985-07-19 US US06/852,808 patent/US4708769A/en not_active Expired - Fee Related
  • 1985-07-19 EP EP85903654A patent/EP0191785A1/de not_active Ceased
  • 1985-07-19 JP JP60503284A patent/JPS61503049A/ja active Pending
  • 1985-07-19 WO PCT/DE1985/000247 patent/WO1986001290A1/de not_active Application Discontinuation

Non-Patent Citations (1)

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