EP0181122B1 - Methode und Vorrichtung zur Pruefung von Oeffnungen auf der Oberflaeche eines Gegenstandes - Google Patents

Methode und Vorrichtung zur Pruefung von Oeffnungen auf der Oberflaeche eines Gegenstandes Download PDF

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Publication number
EP0181122B1
EP0181122B1 EP85307650A EP85307650A EP0181122B1 EP 0181122 B1 EP0181122 B1 EP 0181122B1 EP 85307650 A EP85307650 A EP 85307650A EP 85307650 A EP85307650 A EP 85307650A EP 0181122 B1 EP0181122 B1 EP 0181122B1
Authority
EP
European Patent Office
Prior art keywords
aperture
apertures
article
information
lamp
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
EP85307650A
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English (en)
French (fr)
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EP0181122A2 (de
EP0181122A3 (en
Inventor
Katsuichi Kitagawa
Kouichi Tamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toray Industries Inc
Original Assignee
Toray Industries Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toray Industries Inc filed Critical Toray Industries Inc
Publication of EP0181122A2 publication Critical patent/EP0181122A2/de
Publication of EP0181122A3 publication Critical patent/EP0181122A3/en
Application granted granted Critical
Publication of EP0181122B1 publication Critical patent/EP0181122B1/de
Expired legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2433—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures for measuring outlines by shadow casting
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates

Definitions

  • the present invention relates to a method and an apparatus for location and inspection of apertures on a surface of an article.
  • a spinneret having a nozzle plate with a plurality of holes is utilized for spinning a filament from a liquid-state material. It is important to maintain the dimensions of the nozzle holes to within a certain range so as to enable a stable spinning operation and uniform fiber quality. Therefore, the inspection of holes is a daily job in the spinning factory. Spinnerets are periodically examined and, if the nozzle holes have been damaged, are replaced.
  • the present invention is not limited to this purpose. It may be utilized for assembly of electronic components on a circuit board, in which leads of the components are automatically inserted into apertures in the circuit board.
  • inspection of an aperture in an article surface is carried out by means of a microscope.
  • each aperture of the article must be sequentially brought in the field of view of the microscope.
  • the overall image of the article to be inspected is taken by a visual sensor, such as a TV camera, prior to examination of each aperture, for obtaining positional information on the apertures and generating signals for sequentially positioning the apertures to an inspecting point.
  • the image often tends to be distorted due to the tilt of the sensor and/or the article and, further, signal distortion inherent to the instrument, whereby inaccurate information is provided from the sensor, which, in turn, prevents correct positioning of the aperture within the field of view of the microscope.
  • One of the most preferable embodiments of the inspection system according to the present invention is for inspection of a hole of a nozzle plate of a spinneret.
  • DE-A-3,114,918 describes such a method in which a body with marking points thereon is filmed by a television camera. The position of the marking points is noted and stored in digital form. When the same body is to be brought into the same position as before, the immediate position of the body is similarly noted in digital form, these data are compared with the stored data, and the difference between the data is used in moving the body to its former position. In the present invention, in contrast, positional information of the apertures in their first position is compared with predetermined positional information according to design data.
  • Figs. 1 and 2 Prior to the description of the embodiment of the present invention, the principle of the present invention will be explained with reference to Figs. 1 and 2.
  • an inspection tool such as a microscope.
  • this alignment is carried out by having a table holding the article to be inspected moved in accordance with a signal based on positional information of the points obtained by a visual sensor, such as a TV camera.
  • a visual sensor such as a TV camera.
  • the image of the points tends to deform due to the tilt of the table and/or signal distortion inherent to the sensor. That is, for example, even if the points are arranged on a circle as shown in Fig.
  • the image is flattened to an oval as shown in Fig. 2.
  • the alignment operation of a point with the sensor may fail due to this erroneous positional information.
  • the positional information from the image is referred to as "apparent positional information”.
  • the true positional information of the points is obtained by correcting the apparent positional information by predetermined design data of the arrangement of the points.
  • the present invention is only applicable to an article on which a plurality of apertures are arranged with a predetermined known relationship.
  • a system for automatically inspecting a nozzle plate of a spinneret to which the present invention applies is schematically illustrated.
  • the system comprises substantially two subsystems; a first subsystem for recognizing position of apertures P arranged on the surface of a nozzle plate A to be inspected and a second subsystem for inspecting each aperture.
  • the former subsystem includes a TV camera 1 utilized as a visual sensor for obtaining apparent positional information of the apertures P, an analog-to-digital (A/D) converter 2 for converting an analog signal of the apparent positional information from the TV camera 1 to a digital signal, a memory 3 for storing the digital signal and the predetermined design data of the position of the apertures therein, and a computer 4 for accessing to the memory 3 and obtaining the modified positional information of the apertures P.
  • the latter subsystem comprises a microscope 5, a TV camera 6, the A/D converter 2, the memory 3, and the computer 4.
  • the AID converter 2, the memory 3, and the computer 4 are common to both subsystems.
  • the nozzle plate A is placed substantially horizontal on an X-Y-Z table 7 movable in three dimensional directions and can selectively occupy two positions: a first one beneath the TV camera 1 for detection of the arrangement of the aperture P and a second one beneath the microscope 5 for inspection of the apertures, in accordance with the movement of the table 7.
  • a through opening is provided on a part of the table 7 where the nozzle plate A is placed for a path of a light projected from the underside of the table 7, as stated later.
  • the apertures P are bored on the surface of the nozzle plate A with an accurate positional relationship to each other based on predetermined design data, as stated before.
  • the plate A is positioned beneath the TV camera 1 while a light beam is projected from a lamp 8 disposed underside from the table 7.
  • the beam passing through the apertures P is received by the TV camera 1 and converted to an analog signal of an image of the apertures.
  • the image signal is converted to a digital one through the A/D converter 2 and stored in the memory 3 as apparent positional information of the apertures P for controlling the disposition of the plate A in the subsequent subsystem, so that the apertures P are sequentially aligned with the axis of the microscope 5.
  • This positional information stored in the memory 3, however, tends to be deformed, as stated before.
  • the modified data X' i and Y'; of the positional information of the apertures P are sequentially transmitted to a drive (not shown) of the table 7 as the inspecting operation of one aperture is over, and the table 7 is moved to position the nozzle plate A so that the next aperture to be inspected is aligned with the axis of the microscope 5.
  • the object of the abovesaid procedures is detection of the discrepancy of the position of the geometrical center of gravity of the apparent position of the apertures from that of the design data and detection of the deviation angle of the respective apertures from the design data.
  • the coordinates of the apparent positional information of the apertures are corrected by the detected discrepancy and the deviation angle.
  • the present invention is also applicable to other arrangements, provided the positional design data of the apertures is known. Even in such a case, the procedures (1) to (5) are effective, though a little modification is required. That is, prior to calculation of equation (e) of procedure (4), the apparent position of each aperture must match with the respective design data. For example, if the respective r; , or R; are sufficiently different from each other, as shown in Figs.
  • the object of this inspection is to determine nozzle plates A having worn holes so that such plates can be replaced. Wear of the hole mainly occurs in the outer edge portion of the aperture P. Therefore, the inspection aims to detect the degree of deformation of the outer edge of a periphery of the aperture.
  • FIG. 6 and 7 An enlarged view of a hole, in other words, the aperture P, is shown in Figs. 6 and 7.
  • the outer edge of a periphery of the aperture P is chamferred and constitutes a border portion 28 of a truncated conical shape, while an inner wall 26 is of a strict cylindrical shape.
  • the inner wall 26 may perpendicularly intersect an outer surface 24 of the aperture P, in such a case the border portion 28 being a circle.
  • the shape of the border portion 28 is very important for the spinning operation of synthetic fiber. If the deformation of the border portion 28 exceeds a certain amount, the quality of the resultant fiber is degraded.
  • the aperture P to be inspected is disposed on the table 7, with the outer surface 24 upside, beneath the microscope 5 while being aligned with the axis of the microscope 5 in accordance with a command from the computer 4, as stated before.
  • a light beam is projected onto the spinneret plate A from a third lamp 9 disposed beneath the table 7.
  • the beam passes upward through the aperture P to be inspected and is received by the microscope 5.
  • This beam forms a lighted image of the cross-section of the aperture P bordered by the inner wall 26, as illustrated in Fig. 8.
  • the image is input to the TV camera 6 and converted to an analog signal including information of the cross-section of the aperture P, which signal is, in turn, converted to a digital signal by the A/D converter 2 and stored as a first data in the memory 3.
  • a first value corresponding to an area S i of the lighted cross-section is obtained from the first data.
  • a derived value corresponding to a radius R 1 is obtained according to the equation
  • a second lamp 10 disposed above the table 7 projects a light beam onto the plate A, which beam is reflected from the upper surface 24 of the plate A and is received by the microscope 5.
  • the beam forms a dark image of the aperture P including information of the border portion 28 because the aperture P itself and the chamferred border portion 28 reflect substantially no beam receivable in the microscope 5.
  • the image is stored as second data in the memory 3 in a manner similar to the first data.
  • a second value 8 2 corresponding to an area of the dark image and, next, a derived value R 2 corresponding to a radius thereof are obtained from the second data in a manner similar to the above case, wherein R 2 is derived from the equation
  • the value W represents an average width of the border portion 28. Excess of this value W over the design data means wear of the aperture. Therefore, the value may be referred to a "deformation value”. If this value is out of the predetermined allowance, an alarm signal is generated from the computer 4 so that the plate A may be replaced for maintaining fiber quality.
  • reference numeral 11 designates a touch sensor for preventing the microscope 5 from contact with the table 7 when focusing; 12 an autofocusing device for the microscope 5; 13 a monitoring display for the image of the aperture to be inspected; 14 a printer for outputting the abovesaid various data from the computer; 15 a disc drive for storing the data from the computer; and 16 a key board with a display for inputting various data to the computer.
  • the nozzle plates had a diameter of 110 mm and were provided with a plurality of holes arranged on the periphery of concentric circles, the number of which is in a range of from 24 to 72 and a size of which is within a range of from 200 ⁇ m to 400 u.m.
  • the manufacturing accuracy of the hole was within ⁇ 20 ⁇ m relative to the design data.
  • the field of view of the TV camera for obtaining the image of the arrangement of the holes was 150 mm x 150 mm. According to this system, the apparent position detected by the image had a maximum distortion of 3 mm relative to the design data.
  • the positional information of the hole was corrected to have an error of less than 0.5 mm, whereby the hole to be inspected could be brought into the field of view of the microscope ranged in 0.8 mm x 0.8 mm.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Control Of Position Or Direction (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Claims (4)

1. Verfahren zur Lokalisierung und Untersuchung von Öffnungen (P) auf der Oberfläche eines Gegenstandes in einem System zur Untersuchung von Öffnungen mit den Stufen der
Ermittlung der offensichtlichen Positionsinformation der Öffnungen (P) von einem Bild der Anordnung der Öffnungen (P);
Ermittlung einer relativen Differenz zwischen der offensichtlichen Positionsinformation und einer vorbestimmten Positionsinformation aufgrund von Konstruktionsdaten der Anordnung der Öffnungen (P);
Modifizierung der offensichtlichen Positionsinformation durch die relative Differenz, welche modifizierte Information auf ein nachfolgendes System übertragen wird, in dem jede Öffnung (P) in eine Position für die Untersuchung gebracht wird;
Empfangen eines Strahls, der von einer Oberfläche des Gegenstandes (A) reflektiert wird, auf der die Öffnung (P) geöffnet wird, wobei der Strahl Information eines äußeren Randes einer Peripherie der Öffnung (P) enthält;
Empfangen eines andere Strahles, der von der gegenüberliegenden Seite des Gegenstandes (A) durch die Öffnung (P) projiziert wird, wobei der Strahl Informationen eines Querschnittes der Öffnung (P) enthält; und Ermittlung eines Deformationswertes des Randes durch Vergleich der erhaltenen die Öffnung betreffenden Informationen.
2. Verfahren nch Anspruch 1, in dem die Öffnung (P) ein Loch einer Düsenplatte einer Spinndüse ist.
3. Vorrichtung für die Untersuchung von Öffnungen (P), die auf der Oberfläche eines Gegenstandes (A) in einem vorbestimmten Verhältnis zueinander angeordnet sind, mit Mitteln zum Erhalt eines Bildes der Anordnung der Öffnungen (P) mit einer ersten Lampe (8) für die Projektion eines Strahles durch die Öffnungen (P) und einer ersten TV-Kamera (1) für den Empfang des Strahles von der ersten Lampe (8), wobei das Bild eine offensichtliche Positionsinformation der Anordnung der Öffnungen (P) aufweist;
Mitteln für die Untersuchung einer Öffnung (P) mit einer zweiten Lampe (10) und einer dritten Lampe (9) sowie einem Mikroskop (5), das an eine zweite TV-Kamera (6) angeschlossen ist, wobei die zweite Lampe (10) einen Strahl von einer Seite des Gegenstandes (A) auf eine Oberfläche hiervon projiziert und wobei die dritte Lampe (9) einen anderen Strahl von der anderen Seite des Gegenstandes (A) durch die Öffnung (P) projiziert und wobei das Mikroskop (5) wechselweise den Strahl von der zweiten Lampe (10) empfängt, der von der Oberfläche des Gegenstandes reflektiert wird, und der Informationen eines äußeren Randes einer Peripherie der Öffnung enthält, und wobei der andere Strahl von der dritten Lampe (9), der durch die Öffnung übertragen wird, Informationen eines Querschnittes der Öffnung enthält, wobei die Informationen nachfolgend auf die zweite TV-Kamera (6) übertragen werden,
einem Tisch (7), der unterhalb der Mittel angeordnet ist und in drei Dimensionen mittels eines Antriebes bewegbar ist, während der Gegenstand (A) praktisch horizontal gehalten wird; und einem Computer (4), erstens für den Empfang der offensichtlichen Positionsinformationen von den Öfffnungen (P) von der ersten TV-Kamera (1), wobei die offensichtliche Position der Öffnungen (P) modifiziert wird, durch Vergleich der Informationen bei einer vorbestimmten Anordnung der entsprechenden Öffnungen (P), die hierin vorhanden sind und Erzeugung einer Reihe von Signalen für den Antrieb des Tisches (7), so daß jede Öffnung nacheinander mit der Achse des Mikroskops (5) für die Untersuchung ausgerichtet wird, und zweitens für den Empfang der Informationen des äußeren Randes der Öffnung (P) sowie des Querschnitts der Öffnung (P) von der zweiten TV-Kamera (6) sowie zur Gewinnung eines Deformationswertes eines äußeren Randes der Peripherie der Öffnung (P).
4. Vorrichtung nach Anspruch 3, in der die Öffnung (P) ein Loch einer Düsenplatte einer Spinndüse ist.
EP85307650A 1984-10-29 1985-10-23 Methode und Vorrichtung zur Pruefung von Oeffnungen auf der Oberflaeche eines Gegenstandes Expired EP0181122B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP225793/84 1984-10-29
JP59225793A JPS61105623A (ja) 1984-10-29 1984-10-29 物体上の位置の認識装置

Publications (3)

Publication Number Publication Date
EP0181122A2 EP0181122A2 (de) 1986-05-14
EP0181122A3 EP0181122A3 (en) 1988-02-24
EP0181122B1 true EP0181122B1 (de) 1991-04-17

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EP85307650A Expired EP0181122B1 (de) 1984-10-29 1985-10-23 Methode und Vorrichtung zur Pruefung von Oeffnungen auf der Oberflaeche eines Gegenstandes

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US (1) US4693608A (de)
EP (1) EP0181122B1 (de)
JP (1) JPS61105623A (de)
DE (1) DE3582553D1 (de)

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GB0308509D0 (en) * 2003-04-12 2003-05-21 Antonis Jan Inspection apparatus and method
CN103673883A (zh) * 2013-12-20 2014-03-26 沪东中华造船(集团)有限公司 用于船舶管系法兰中心位置的测量工装及测量方法
TWI650549B (zh) * 2016-12-19 2019-02-11 財團法人工業技術研究院 多孔洞檢測系統、裝置及方法
JP6904208B2 (ja) * 2017-10-10 2021-07-14 トヨタ自動車株式会社 軸ずれ判定装置
CN112985290B (zh) * 2019-12-02 2022-05-27 东华大学 一种导孔及微孔圆度的检测设备及方法
CN113138193B (zh) * 2020-01-20 2023-01-17 东华大学 集群变径深孔的批量检测设备及方法

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Also Published As

Publication number Publication date
JPH049332B2 (de) 1992-02-19
US4693608A (en) 1987-09-15
EP0181122A2 (de) 1986-05-14
DE3582553D1 (de) 1991-05-23
EP0181122A3 (en) 1988-02-24
JPS61105623A (ja) 1986-05-23

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