EP0144838B1 - Cathode-magnétron pour la pulvérisation de cibles ferromagnétiques - Google Patents

Cathode-magnétron pour la pulvérisation de cibles ferromagnétiques Download PDF

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Publication number
EP0144838B1
EP0144838B1 EP84113852A EP84113852A EP0144838B1 EP 0144838 B1 EP0144838 B1 EP 0144838B1 EP 84113852 A EP84113852 A EP 84113852A EP 84113852 A EP84113852 A EP 84113852A EP 0144838 B1 EP0144838 B1 EP 0144838B1
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EP
European Patent Office
Prior art keywords
target
projection
air gap
cathode
gap
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
EP84113852A
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German (de)
English (en)
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EP0144838A2 (fr
EP0144838A3 (en
Inventor
Peter Dr.-Phys. Wirz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
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Filing date
Publication date
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Priority to AT84113852T priority Critical patent/ATE47253T1/de
Publication of EP0144838A2 publication Critical patent/EP0144838A2/fr
Publication of EP0144838A3 publication Critical patent/EP0144838A3/de
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Publication of EP0144838B1 publication Critical patent/EP0144838B1/fr
Expired legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3414—Targets
    • H01J37/3426—Material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
    • H01J37/3405—Magnetron sputtering
    • H01J37/3408—Planar magnetron sputtering

Definitions

  • the invention relates to a magnetic cathode according to the preamble of patent claim 1.
  • Magnetron cathodes with flat or curved atomizing surfaces are well known.
  • a spatially defined arrangement of permanent and / or electromagnets is provided in such a position relative to the atomizing surface that an annular tunnel of magnetic field lines is created above the atomizing surface, through which the glow deposit causing the atomizing process and onto an area in the immediate vicinity of the atomizing surface limited, thereby increasing the atomization rate by more than a power of ten.
  • the atomizing surface is the effective target surface exposed to the glow discharge from which the atomized particles emanate, usually the target front surface (DE-AS 24 31 832).
  • magnetron cathodes have become known in several variants, which either have a limited application and / or do not fully meet the expectations placed on them.
  • the pole faces of the magnet system are arranged behind the target, so that the majority of the magnetic field lines penetrate the target area twice.
  • Such a design is, however, for targets made of magnetic materials, the z. B. are required for the production of magnetic recording tapes, either not or only useful in conjunction with additional measures.
  • a magnetron cathode is known from US Pat. No. 4,198,283, in which the target consisting of several sections is clamped between soft magnetic pole pieces. Due to the type of clamping, any air gap is avoided and the use of targets made of ferromagnetic materials is excluded, because in such a case the magnetic field lines from the pole pieces would enter the target in the transverse direction, so that it no longer forms a magnetic tunnel or the magnetron effect comes.
  • US-A-4 391 697 discloses a magnetron cathode in which the one magnetic pole is arranged behind the central part of the target made of magnetic material.
  • This central part surrounded by a single air gap, is surrounded by a peripheral target part, which to a certain extent has the function of pole pieces.
  • the magnetic field lines can only enter the central target part in the area of the circumferential air gap from the peripheral target part, the maximum atomization effect occurring in the area of the air gap, which for this purpose must be wider than the dark space distance required under operating conditions, i.e. at least 3 mm wide got to.
  • the field lines emerging at the collar edges are guided in a very short way into the target material, from which, following the path of least resistance, they re-enter the opposite poles of the permanent magnets, since the ferroma magnetic target, the ferromagnetic support plate and the permanent magnets sit directly on top of each other.
  • the result is a narrow limitation of the “magnetic trap”, so that instead of a flat removal of the target material which is desirable per se, the result is two trench-shaped erosion zones below the collar edges.
  • the arrangement of the collars makes the manufacturing process significantly more expensive, which is disadvantageous insofar as the pole shoes themselves take part in the atomization process, so that the result is only a short service life.
  • the invention is therefore based on the object of improving a magnetron cathode of the type described above in such a way that with it ferromagnetic target materials economically, ie. H. can be atomized in long-term operation, with a high specific atomizing capacity and with high material utilization, without this requiring a complicated cathode structure.
  • the width «s» of the air gap can be between 0.5 and 2.5 mm.
  • an air gap limited over a small area of plane-parallel walls is formed which is so narrow that no glow discharge can form in this gap, which could cause atomization at this point.
  • the magnetron cathode according to the invention can also atomize thick plane-parallel target plates. This possibility is given in particular because magnetic saturation of the target material is not necessary. This is associated with a long service life of the magnetron cathode until the target is changed, so that the entire system can also be used economically. As is well known, such an investment requires a large amount of capital.
  • the projections of the target parts overlap by a dimension “d” in a plane that is parallel to the atomizing surface, essentially in a constant wide area, including the at least one air gap.
  • This degree of overlap can vary are between 2 and 10 mm depending on the target thickness.
  • the measure described above achieves a doubling of the effect and thus an even greater increase in the degree of utilization of the target material or a higher atomization power of the entire magnetron.
  • layer thicknesses of the same size or greater layer thicknesses can be generated in the same time either in a shorter time.
  • This is particularly advantageous when large-area substrates are moved relative to the magnetron cathode.
  • greater layer thicknesses can be achieved either with the same movement speed or greater movement speeds with the same layer thickness and thus larger throughputs can be achieved by a system equipped with the magnetron cathode.
  • FIG. 1 shows a magnetron cathode 1 which has a cup-shaped hollow body 2, which consists of a frame 3 and a base 4, both of which enclose an approximately cylindrical cavity 5.
  • the hollow body 2 is attached to a support plate, not shown, via which the magnetron cathode is in turn connected to a vacuum chamber, also not shown. Details of such an arrangement can be found in DE-OS 30 47 113.
  • a magnet system 6 which consists of numerous permanent magnets 7 and 8.
  • the permanent magnet 7 is a cylindrical magnet, while a closed, circular row of permanent magnets 8 surrounds the central permanent magnet 7 at a distance.
  • the permanent magnets have a pole position defined by the arrows, i.e. H. in the middle permanent magnet 7, for example, the north pole is at the top, while in the outer permanent magnet 8, all south poles are at the top.
  • the magnetic poles are separated by an annular space 5a, which surrounds the permanent magnet 7.
  • This base has a contact surface 4a, which is designed as an annular surface and to which a congruent, annular target part 12 is connected under flat support, for example by surface soldering.
  • the target part 12 also has an annular atomizing surface 12a, as well as an opening 12b, which was created by cutting out a cylindrical part.
  • a projection 4b protrudes into this opening, which can be part of the base 4, but can also be formed by soldering on a correspondingly shaped cylinder piece.
  • This projection is electrically conductive, and is generally made of copper, since the frame 3 and the bottom 4 are usually made of copper.
  • the projection 4b protrudes beyond the atomizing surface 12a and carries a target part 13 which, like the target part 12, consists of a ferromagnetic material. Projection 4b and target part 13 are in flat contact in a flat contact surface 4c.
  • the target part 13 has an outer surface 13a, which consists of identical ferromagnetic material; however, the entire target part 13 preferably consists of a homogeneous ferromagnetic material.
  • annular air gap 14 on their circumference in the depth direction of the cathode (parallel to the axis AA), which is limited by plane-parallel walls due to the overlap described below, and a width between 0.5 mm and 2.5 mm and - in the projection - lies within the space 5a.
  • the overlap results from the fact that the projections of the target parts 12 and 13 overlap in a plane parallel to the atomizing surface 12a, and that the overlap is of equal width over the entire circumference. No glow discharge burns in the air gap, so that no atomization takes place at this point.
  • the target part 13 has a lateral boundary surface 13b, which in the present case is a cylindrical surface and whose generatrix consequently runs perpendicular to the atomizing surface 12a.
  • the lateral boundary surface 13b is at the same time the exit surface or pole surface from which a large part of the magnetic field lines exit in the direction of the target part 12.
  • some of the field lines also emerge from the outer surface 13a, with a decreasing tendency towards the center.
  • the field lines essentially have the course shown in FIG. 1, and because of the different radial position of the culmination points of the field lines relative to one another, it can be concluded that there is a correspondingly wide erosion trench which arises in the target part 12 after a long period of atomization.
  • the field line course shown is only possible because the target parts 12 and 13 enclose the air gap 14 between them, which prevents a magnetic short circuit and forces the flow to exit or enter in the manner shown.
  • the course of the air gap 14 is geometrically similar to the course of the intermediate space, and, as can be seen from FIG. 1, the contact surfaces 4a and 4c and thus the target parts 12 and 13 are staggered in the depth direction.
  • FIG. 1 shows an axial section through a rotationally symmetrical magnetron cathode. It will be shown with the aid of FIGS. 3 and 4, however, that the invention is not restricted to a rotationally symmetrical system, but can also be applied to so-called oval or rectangular cathodes. To simplify the description, however, the following explanations are also given using a rotationally symmetrical system.
  • the target is interrupted by a circumferential gap 12c, which has a width of a few mm and through which, in addition to the circular-shaped target part 12, a circular-shaped target part 12 'is formed.
  • the floor 4 has an additional bearing surface 4d, which lies in a common plane with the bearing surface 4a. With the same thickness of the target parts 12 and 12 ', their delimiting surfaces on both sides also lie in common planes.
  • the gap 12c has a geometrically similar course to the intermediate space 5a, ie both run coaxially, the mean diameter Knife of the gap 12c can differ to a certain extent compared to the average diameter of the space 5a.
  • the bottom 4 has a projection 4e which is essentially complementary to the gap 12c, namely an annular projection which extends beyond the atomizing surface 12a, which is distributed over both target parts 12 and 12 '.
  • the projection can also be produced here in a manner analogous to that in FIG. 1 by soldering on a short hollow cylinder.
  • the projection 4e has an annular surface (not designated in any more detail) on which an annular target part 16 is fastened, which is made of the same material as the target parts 12 or 12 '.
  • the target part 16 protrudes on both sides by approximately the same amount beyond the projection 4e.
  • an air gap 14 or 15 delimited by plane-parallel walls is produced on both sides of the projection 4e.
  • Both air gaps 14 and 15 have an analogous design and function as the air gap 14 which is only present in FIG. 1, there is only the difference that the air gap 15 is directed radially inwards, so that now the atomizing surface 12a of the inner target part 12 ' serves as the entry surface for the magnetic flux, which emerges from the target part 16 predominantly in the region of the inner cylindrical boundary surface.
  • FIG. 2 The basic course of the magnetic field lines is also indicated in FIG. 2, and it can be seen that a further plasma trap or a further magnetron effect is formed in the interior of the target part 16, so that the process is doubled in principle. This significantly increases the performance, based on the entire underside of the magnetron cathode, depending on the geometric shape of the cathode (FIGS. 3 and 4) up to twice the value.
  • the target can also be interrupted several times with repeated repetition of this principle, as a result of which both the atomization performance and the degree of utilization of the target material can be increased further.
  • FIG. 3 cutouts from magnetron cathodes with different geometric shapes are shown - in a top view of the atomizing surface 12 a.
  • Half H 1 and H 2 of the magnetron cathode according to FIG. 2 are shown above and below, ie the union of the two halves H 1 and H 2 leads to a rotationally symmetrical magnetron according to FIG. 2. If the two halves H 1 and H 2 are placed between a rectilinear part T in which all atomizing surfaces, side surfaces, outlet surfaces and air gaps open continuously into the corresponding parts of the rotationally symmetrical halves, this results in an elongated magnetron cathode of almost any length dimensions.
  • Such magnetron cathodes can be produced with lengths of approximately 4 m and widths of approximately 0.2 to 0.5 m, so that they can also be used to coat large-area substrates, such as architectural glass, by executing a relative movement.
  • the geometrical design and arrangement of the permanent magnets 7 and 8 and their pole faces 10 and 11 is indicated by dashed lines and hatching.
  • the circumferential edges of the projection 4e on which the target part 16 is fastened are also indicated by dashed lines.
  • the cross section according to FIG. 2 can also be transferred to the cross section of the straight part T.
  • the course of the plasma captured by the magnetic fields corresponds to the course of the target part 16, so that the term “racetrack” is also used for the closed areas in which the plasma is formed.
  • FIG. 5 only those parts are shown using the same reference numerals that have a significant influence on the course of the magnetic flux. It is the magnet system 6 with the permanent magnets 7 and 8 and the target parts 12 or 12 'and 16 each with the omission of the bottom 4 of the hollow body 2 which keeps these parts at a distance from one another. The arrangement is shown in an upside-down position compared to FIG the measurements of the magnetic fields, the result of which is shown in FIGS. 6 and 7, were carried out in this position.
  • the mutual overlaps "d" of the target part 16 compared to the target parts 12 and 12 ' are shown as being the same size.
  • the overlap zones can also be designed to have different widths for influencing the gap depth and thus the distribution of the magnetic flux, it only being necessary to ensure that the dimension of the overlap “d” is at least as large as the thickness of the target part 16. since the material in the area of the overlap is practically used up or atomized until the target material is exhausted.
  • the thickness of the target part 16 should be at least 0.5 mm due to the service life of the target, but should preferably correspond to the thickness of the target parts 12 or 12 ', which can easily be 10 to 15 mm.
  • the side surfaces 16b and 16c run at least initially perpendicular to the atomizing surface 12a, that is to say these surfaces are cylindrical surfaces in the case of a rotationally symmetrical cathode system. But it is also possible to use these areas to be designed as conical surfaces, the cross section of the target part 16 decreasing with increasing distance from the atomizing surface. In an analogous manner, it is also possible to round off the outer peripheral edges of the target part 16 well.
  • FIG. 5 also shows the dimension “s” for the gap width of the air gaps.
  • This gap width is chosen between 0.5 and 2.5 mm.
  • the gap must not be too narrow, so that it could become clogged by ferromagnetic material, and on the other hand, it must not be too large, so that the glow discharge could extend into the gap.
  • the relationships according to FIG. 5 are to scale (2: 1).
  • the target parts 12, 12 'and 16 consisted of 3 mm thick iron sheet.
  • the magnet system 6 corresponded to that of a commercially available magnetron cathode from Leybold-Heraeus GmbH in Hanau / Federal Republic of Germany, as it is sold under the type designation PK 75 (75 mm diameter).
  • the gap width «s was 1 mm, since the height of the projection 4e ( Figure 2) was 4 mm.
  • the dimension «d for the overlap was 16 4 mm on both sides of the target part.
  • the horizontal component of the magnetic field strength (H x ) was first measured on such a magnetron cathode and plotted over the radius «r of the target.
  • the abscissa values of FIGS. 6 and 7 also correspond to the scale of FIG. 5.
  • a horizontal dashed boundary line “G” is entered. The position of this boundary line determines the field strength above which a noticeable atomization effect takes place.
  • the target material is dusted, ie it can be seen that two relatively wide atomization zones are achieved by a single magnet system, which significantly increase the degree of utilization of the target material. Utilization rates between about 40 and 50% were measured.
  • the vertical component of the magnetic field strength distribution is plotted in FIG. 7 on the same scale as in FIG. With regard to this curve, the zero crossings are of interest. There are three zero crossings on each side, which theoretically suggest three erosion graves. However, it can be seen from FIG. 6 that with this arrangement the belly between the maxima lying on both sides of the ordinate is so deep that a sufficient atomization rate is not to be expected at the location of the middle zero crossings.
  • By adjusting the thickness of the target part 16 it is thus possible to fasten it by means of screws which lie on the central radius without these screws being atomized.
  • By changing the magnetic field it is also possible to use all three erosion channels. In this case, the screw fastening is replaced by soldering or bonding the target part in question.
  • the dark space distance is a size which determines the construction of sputtering cathodes.
  • the sputtering causing the glow discharge is stable for reasons of lonisations programmingkeit only in a very specific range of pressures ierenowski ⁇ ig-x 10- 4 mbar is between 2 x 10- 2 and 5.
  • FIG. The resulting pressure-dependent dark room distances are above 0.5 mm, but below about 2.0 to 2.5 mm, ie the gap width «s must be in the specified range of 0.5 to a maximum of 2.5 mm if should be prevented with certainty that a glow discharge is formed in the correspondingly dimensioned gap.
  • a gap width “s” of 1.5 mm has also proven to be optimal for the above standard pressure range with regard to manufacturing tolerances for operation.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Microwave Tubes (AREA)

Claims (5)

1. Cathode-magnétron (1) pour la pulvérisation de cibles (12, 12') en matériaux ferromagnétiques, se composant d'un corps de cathode possédant au moins une surface d'appui (4a, 4c, 4d) pour la cible, un système magnétique (6) avec une culasse (9) et, sur celle-ci, des pôles magnétiques de polarité opposée, formant une unité polaire le long d'un périmètre continu, où la projection sur un plan commun du périmètre intérieur du pôle magnétique extérieur entoure la projection du périmètre extérieur du pâle magnétique intérieur. et où la cible est subdivisée par au moins un entrefer (14, 15) dont la forme est géométriquement similaire à celle des périmètres en au moins deux parties de cible (12, 12', 13, 16) qui sont placées de manière décalée dans la direction de la base de la culasse (9) sur au moins une surface d'appui (4a, 4c, 4d), le système magnétique (6), lorsqu'on regarde dans la direction de la base de la culasse (9), se trouvant derrière la surface d'appui (4a, 4c) la plus reculée des parties de cible (12, 12', 13, 16), caractérisée en ce que la largeur (s) de l'entrefer (14, 15) minimal dans la direction de la base de la culasse (9) est inférieure à l'espace sombre nécessaire dans les conditions d'exploitation.
2. Cathode-magnétron selon la revendication 1, caractérisée en ce que la surface d'appui (4a, 4c, 4d) est subdivisée en gradins par une saillie (4b, 4e) non ferromagnétique mais électriquement conductrice, en ce que les parties de cible (12, 13 et 12, 12' et 16) sont disposées sur les différents gradins et en ce que la saillie (4b, 4e) ne dépasse la surface de pulvérisation (12a) de la partie de cathode (12 ou 12/12') la plus reculée que de la valeur nécessaire pour que la largeur de l'entrefer (14, 15) soit inférieure à l'espace sombre nécessaire dans les conditions d'exploitation.
3. Cathode-magnétron selon la revendication 1 ou 2, caractérisée, dans le cas d'une cible en trois parties,
a) en ce qu'une plaque de cible est divisée par une fente (12c) continue en deux parties de cible (12, 12') situées entre des plans communs, la forme de la fente étant géométriquement similaire à celle de l'espace entre les pôles opposés (N, S),
b) en ce que la fente (12c) est remplie par la saillie (4e) en matériau non ferromagnétique mais électriquement conducteur qui dépasse les surfaces de pulvérisation (12a) des parties de cible (12, 12'),
c) en ce qu'une troisième partie de cible (16), de forme annulaire fermée, est placée sur la saillie (4e), sa forme suivant la forme de la saillie et
d) en ce que la troisième partie de cible (16) dépasse de part et d'autre de la saillie (4e) et forme un entrefer (14, 15) de chaque côté par rapport aux parties de la cible (12, 12') (figure 2).
4. Cathode-magnétron selon l'une des revendications 1 à 3, caractérisée en ce que la cote « d » de recouvrement est au moins égale à un tiers de l'épaisseur de la cible.
5. Cathode-magnétron selon l'une des revendications 1 à 4, caractérisée en ce que la largeur « s de l'entrefer est comprise entre 0,5 et 2,5 mm.
EP84113852A 1983-12-05 1984-11-16 Cathode-magnétron pour la pulvérisation de cibles ferromagnétiques Expired EP0144838B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AT84113852T ATE47253T1 (de) 1983-12-05 1984-11-16 Magnetronkatode zum zerstaeuben ferromagnetischer targets.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3343875 1983-12-05
DE3343875 1983-12-05

Publications (3)

Publication Number Publication Date
EP0144838A2 EP0144838A2 (fr) 1985-06-19
EP0144838A3 EP0144838A3 (en) 1986-07-30
EP0144838B1 true EP0144838B1 (fr) 1989-10-11

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EP84113852A Expired EP0144838B1 (fr) 1983-12-05 1984-11-16 Cathode-magnétron pour la pulvérisation de cibles ferromagnétiques

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Country Link
US (1) US4601806A (fr)
EP (1) EP0144838B1 (fr)
JP (1) JPS60193236A (fr)
KR (1) KR920000912B1 (fr)
AT (1) ATE47253T1 (fr)
DE (1) DE3480145D1 (fr)

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DE3619194A1 (de) * 1986-06-06 1987-12-10 Leybold Heraeus Gmbh & Co Kg Magnetron-zerstaeubungskatode fuer vakuum-beschichtungsanlagen
DE3624150C2 (de) * 1986-07-17 1994-02-24 Leybold Ag Zerstäubungskatode nach dem Magnetronprinzip
US4885074A (en) * 1987-02-24 1989-12-05 International Business Machines Corporation Plasma reactor having segmented electrodes
EP0295649B1 (fr) * 1987-06-16 1994-12-14 Hitachi, Ltd. Appareil de pulvérisation magnétron et procédé pour former des films utilisant un tel appareil
DE3727901A1 (de) * 1987-08-21 1989-03-02 Leybold Ag Zerstaeubungskathode nach dem magnetronprinzip
US4865708A (en) * 1988-11-14 1989-09-12 Vac-Tec Systems, Inc. Magnetron sputtering cathode
US4892633A (en) * 1988-11-14 1990-01-09 Vac-Tec Systems, Inc. Magnetron sputtering cathode
JPH0774439B2 (ja) * 1989-01-30 1995-08-09 三菱化学株式会社 マグネトロンスパッタ装置
DE3929695C2 (de) * 1989-09-07 1996-12-19 Leybold Ag Vorrichtung zum Beschichten eines Substrats
GB2241710A (en) * 1990-02-16 1991-09-11 Ion Tech Ltd Magnetron sputtering of magnetic materials in which magnets are unbalanced
DE4038497C1 (fr) * 1990-12-03 1992-02-20 Leybold Ag, 6450 Hanau, De
DE4120690A1 (de) * 1991-06-22 1992-12-24 Leybold Ag Targetvorrichtung aus ferromagnetischem material fuer eine magnetron-elektrode
DE4136951C2 (de) * 1991-11-11 1996-07-11 Leybold Ag Vorrichtung zur Beschichtung von Substraten für Kathodenzerstäubungsanlagen
US5262028A (en) * 1992-06-01 1993-11-16 Sierra Applied Sciences, Inc. Planar magnetron sputtering magnet assembly
DE4304581A1 (de) * 1993-02-16 1994-08-18 Leybold Ag Vorrichtung zum Beschichten eines Substrats
DE19819933A1 (de) * 1998-05-05 1999-11-11 Leybold Systems Gmbh Target für eine Kathodenzerstäubungsvorrichtung zur Herstellung dünner Schichten
US6497802B2 (en) 1999-02-12 2002-12-24 Applied Materials, Inc. Self ionized plasma sputtering
US6290825B1 (en) * 1999-02-12 2001-09-18 Applied Materials, Inc. High-density plasma source for ionized metal deposition
US6306265B1 (en) * 1999-02-12 2001-10-23 Applied Materials, Inc. High-density plasma for ionized metal deposition capable of exciting a plasma wave
US6183614B1 (en) 1999-02-12 2001-02-06 Applied Materials, Inc. Rotating sputter magnetron assembly
EP1336985A1 (fr) * 2002-02-19 2003-08-20 Singulus Technologies AG Cathode de pulvérisation, et dispositif et méthode pour le dépôt d'une pluralité de couches sur un substrat
US20080067058A1 (en) * 2006-09-15 2008-03-20 Stimson Bradley O Monolithic target for flat panel application
US20080308412A1 (en) * 2007-06-15 2008-12-18 Oc Oerlikon Balzers Ag Multitarget sputter source and method for the deposition of multi-layers
US20150060263A1 (en) * 2012-03-29 2015-03-05 Toray Industries, Inc. Vacuum film deposition device and vacuum film deposition method
US9928997B2 (en) * 2014-12-14 2018-03-27 Applied Materials, Inc. Apparatus for PVD dielectric deposition

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Also Published As

Publication number Publication date
EP0144838A2 (fr) 1985-06-19
KR850005005A (ko) 1985-08-19
JPH0558210B2 (fr) 1993-08-26
JPS60193236A (ja) 1985-10-01
EP0144838A3 (en) 1986-07-30
ATE47253T1 (de) 1989-10-15
KR920000912B1 (ko) 1992-01-31
US4601806A (en) 1986-07-22
DE3480145D1 (en) 1989-11-16

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