EP0142464A1 - Verfahren und Vorrichtung zum Feststellen der Position eines Objektes mit Hinsicht auf eine Referenz - Google Patents

Verfahren und Vorrichtung zum Feststellen der Position eines Objektes mit Hinsicht auf eine Referenz Download PDF

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Publication number
EP0142464A1
EP0142464A1 EP84810435A EP84810435A EP0142464A1 EP 0142464 A1 EP0142464 A1 EP 0142464A1 EP 84810435 A EP84810435 A EP 84810435A EP 84810435 A EP84810435 A EP 84810435A EP 0142464 A1 EP0142464 A1 EP 0142464A1
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EP
European Patent Office
Prior art keywords
light
waves
lens
surface element
wave
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP84810435A
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English (en)
French (fr)
Inventor
Daniel Gross
Claus Dähne
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Battelle Memorial Institute Inc
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Battelle Memorial Institute Inc
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Publication date
Application filed by Battelle Memorial Institute Inc filed Critical Battelle Memorial Institute Inc
Publication of EP0142464A1 publication Critical patent/EP0142464A1/de
Withdrawn legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
    • G01B2210/50—Using chromatic effects to achieve wavelength-dependent depth resolution

Definitions

  • the subject of the present invention is a method and a device for determining the position of a surface element of an object with respect to a reference scale, of the type in which a light beam focusing including a plurality of light waves is focused. a plurality of points corresponding to the foci of each wave, and the wavelength whose focal point is on this surface element is determined.
  • Patent DE 19 62515 deals with a non-contact optical distance sensor, in which a light beam is focused in a plurality of distinct focal points.
  • This sensor makes it possible to determine the position of an object located between two of these foci. We compare the respective intensity of the two light waves reflected by the object and converging in these foci. The position of the object relative to the sensor is defined when these waves have an equal intensity. We move the sensor to obtain this equality. The final position of the sensor makes it possible to locate the object.
  • This sensor is in fact a hybrid sensor, since it includes a mechanical (location of the sensor position) and optical (location of the object relative to the sensor) measurement system.
  • Patent GB 2 077 421 describes an optical sensor and a method for measuring the displacement of an object, where two monochromatic beams of different color, of equal intensity, with identical axes are focused, in order to obtain two distinct focal points. located equidistant from a reference plane.
  • the relative intensity of the light waves of the two beams is measured, after reflection by the object.
  • This relative intensity can be characterized by the difference or by the quotient of the respective intensities of the light waves.
  • the evolution of the value of this relative intensity is characteristic of the object's movements.
  • the object of the present invention is to remedy the faults of existing sensors.
  • the invention firstly relates to a method for measuring the position of a surface element relative to a reference, according to claim 1.
  • the invention further relates to a device for implementing this method, according to claim 3.
  • the device of FIG. 1 comprises a polychromatic light source 1, generating a light beam.
  • This source can for example be a tungsten filament lamp, a concentrated arc lamp, or the like.
  • the axis 2 of this beam is directed onto a surface element 4 whose position is to be determined and capable of at least partially reflecting the light waves.
  • a holographic lens 3 with circular concentric lines of a common type, focuses the various waves constituting the beam as a function of their respective wavelength ⁇ 1 , ⁇ 2 .... ⁇ n .
  • the waves of the spectrum of the reflected light, diffracted by the grid 6, converge on the array of photodetectors (P l , P2 ⁇ P n ) in zones whose respective surfaces are all the larger as the corresponding focal points (F 1 , F 2 ... F n ) of the location F are distant from the surface element 4. It is therefore sufficient to measure the light intensity in each of these zones from time to time, using one or more several photodetectors, to obtain information characteristic of the light density in this area, therefore of the density of the light wave converging in this area.
  • An analyzer 8 compares the respective intensities of the electrical signals (I 1 , I 2 ...
  • I n I n coming from the photodetectors, representative of the respective density of the light waves directed at each of said photodetectors, to search for the wave ⁇ 2 of the spectrum of reflected light with maximum density.
  • a computer 9 introduces this wavelength ⁇ 2 into a calibration function r (A) specific to the lens 3. This function associates a focusing distance with each wave focused by the lens.
  • FIG. 1 represents only one light source, but it is obvious that a plurality of sources can be used, for example arranged side by side in a plane substantially orthogonal to axis 2 of the light beam, these sources can be aligned on one or more rows.
  • the entire device is then designed so as to be able to compare the respective densities of several images each consisting of a set of zones aligned on one or more rows.
  • FIG. 2 shows an example of a calibration curve for a holographic lens with 270 circular concentric lines, the external line of which is approximately 5 mm in diameter. The focusing distances are shown on the abscissa and the wavelengths on the ordinate. To obtain this curve, six monochromatic light beams of known wavelength were focused by means of the holographic lens to be calibrated. A mirror was then placed in the focal point of the lens, and the position of the mirror for which the density of the reflected light was maximum was measured for each beam.
  • the position of the reference point is defined by the calibration curve r ( ⁇ ).
  • the reference point can for example be constituted by the lens 3.
  • the reference scale can in particular consist of all or part of the focal point F.
  • the diffractions of the second order focus a portion of the waves of wavelength ⁇ 1 ⁇ 2 ... ⁇ n on focal points F i , F 2 ... F n constituting a secondary focal point F 'situated between the focal point F and the lens.
  • the intensity of the waves focused at F ' is lower than that of the waves focused at F. It is nevertheless possible to analyze the spectrum of light reflected by a possible object placed in this place of secondary focusing. It is thus possible to define at least two focal points for each holographic lens and therefore to define at least two distinct measurement domains for the same sensor.
  • a portion of light from the beam from source 1 is reflected by the holographic lens 3.
  • This stray light is superimposed on the waves reflected by the surface element 4, thus constituting a non-negligible source of background noise.
  • it is possible to remedy this defect by replacing the lens 3 with circular concentric lines by a lens with slightly elliptical concentric lines, inclined at most a few degrees of angle relative to in the plane normal to axis 2 of the light beam.
  • This arrangement makes it possible to direct the portion of stray light reflected by the lens out of the beam of waves reflected by the surface element 4.
  • a diaphragm with a circular orifice 10 between the mirror 5 and the concave diffraction grid of the spectral analysis system, at the place of minimum section of the portion of the light beam reflected by the surface element, of wavelength ⁇ 2 .
  • This diaphragm eliminates from the reflected beam a portion of the waves which are focused outside the surface element, these waves each appearing on this surface element in the form of a disc whose diameter is proportional to the distance separating the respective focal points from these waves of the surface element; provided that the diameters of these discs are greater than the diameter of the diaphragm.
  • the diaphragm also partially stops the waves reflected by the lens 3; it allows to better highlight the wave A 2 focused on the surface element.
  • a removable conventional optical system consisting of at least one refractive lens, is placed between the lens 3 and its focal point F. It makes it possible to adapt a single lens 3 to many different applications, by moving the location F relative to the lens 3 as desired.
  • a refractive lens with high chromatic aberration in place of the holographic lens 3, for focusing the light waves of the beam 2 into a plurality of focus F 1 P 2 ... F n .
  • the focal point of such a refractive lens is significantly shorter than that of a halographic lens; as such, the two types of lenses are complementary.
  • a holographic lens with parallel lines is used, called a cylindrical holographic lens.
  • This type of lens differs from lenses with circular lines by the shape of its focal point consisting of a plurality of focal points F 1 , F 2 , ... F n in the form of straight line segments parallel to the lines of the lens.
  • This embodiment can be used to measure the distance separating two non-coplanar adjacent surface elements a and b.
  • the system for analyzing the spectrum of the reflected light highlights two light waves ⁇ a and ⁇ b focused on the surface element a, respectively on the surface element b.
  • the distance sought is the difference of the respective distances from each surface element to the lens. These distances are determined beforehand using the calibration curve specific to the lens with parallel lines.
  • This embodiment also makes it possible to find the lateral position in the focal point of the line of separation of the surface elements a and b by comparing the relative intensity of the waves ⁇ a and ⁇ b reflected by each of said elements. of surface.
  • FIG. 3 describes a seventh embodiment of the invention using a miltimode 26 optical fiber, the diameter of the core of which is between approximately 10 and 100 ⁇ m connecting a measurement head 20 and an optoelectric system 21.
  • This system 21 is intended to generate a polychranatic light beam and to analyze the light reflected by a surface element 31 whose position is sought.
  • a polychromatic light source 22 makes it possible to direct a diverging beam towards a first refractive lens 23 intended to make this beam parallel.
  • a second refractive lens 24 focuses said beam on the first end 25 of the optical fiber 26 fixed by a connector 27.
  • a second connector 29 makes the second end 28 of the optical fiber 26 integral with the measuring head 20.
  • the end 28 acts as a point light source and directs the waves ⁇ 1 to ⁇ n constituting the beam from the source 22 on a holographic lens 30.
  • This lens converts the light waves as a function of their wavelength respective, to form a focal point F.
  • the waves reflected by the surface element 31 on the lens 30 are focused by the latter on the end 28 of the optical fiber 26.
  • the end 25 acts as a point source of light waves reflected by the surface element 31 on the lens 30, to direct these on the lens 24 whose role is to form a parallel beam of said reflected waves.
  • a semi-transparent mirror 32 placed between the lenses 23 and 24, directs the parallel beam of the reflected waves towards a converging refractive lens 33 which directs these waves on a diffraction grid 34 similar to the grid 6 of FIG. 1.
  • the waves diffracted by the grid 34 are directed onto a network of photodetectors 35, analogous to the network 7 of FIG. 1.
  • the electrical signals coming from the photodetectors are processed by a logic assembly 36 associating the functions of the comparator 8 and of the computer 9 of FIG. 1 .
  • a diaphragm such as the diaphragm 10 of FIG. 1 is not useful because the inlet 28 of the optical fiber 26 has an effect similar to this diaphragm as regards the at least partial elimination of the waves focused outside the surface element and as regards the stopping of the waves reflected by the lens 30
  • the sensor according to the invention obviously makes it possible to carry out dynamic measurements by studying the modifications of the spectrum of the reflected light as a function of time. Analysis of this spectrum at regular intervals measure the displacements of a surface element.
  • This last variant of use can in particular find an application in the servo-control in position, in speed, or in acceleration, of a robot arm, or in the control of machining machines.
  • the device according to the invention can advantageously be used in all cases where a contactless distance measurement is desirable.
  • the light spectrum analysis system described above is given by way of example. Those skilled in the art can easily adopt any other existing spectral analysis system. It will, for example, be possible to use an analysis system comprising a diffraction grid animated by oscillatory movements to successively direct each diffracted wave on a single photodetector. When the photodetector measures a maximum light intensity, the corresponding position of the grid will be representative of the position of the surface element in the focal point of the lens, therefore of the distance separating the surface element from the sensor. In another embodiment of the spectrum analysis system of the reflected light, the diffraction grid could be fixed and the photodetector mobile.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
EP84810435A 1983-09-12 1984-09-10 Verfahren und Vorrichtung zum Feststellen der Position eines Objektes mit Hinsicht auf eine Referenz Withdrawn EP0142464A1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CH4950/83 1983-09-12
CH4950/83A CH663466A5 (fr) 1983-09-12 1983-09-12 Procede et dispositif pour determiner la position d'un objet par rapport a une reference.

Publications (1)

Publication Number Publication Date
EP0142464A1 true EP0142464A1 (de) 1985-05-22

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EP84810435A Withdrawn EP0142464A1 (de) 1983-09-12 1984-09-10 Verfahren und Vorrichtung zum Feststellen der Position eines Objektes mit Hinsicht auf eine Referenz

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US (1) US4585349A (de)
EP (1) EP0142464A1 (de)
JP (1) JPS6073405A (de)
CH (1) CH663466A5 (de)

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WO1996041123A1 (en) * 1995-06-07 1996-12-19 Keravision, Inc. Distance measuring confocal microscope
FR2738343A1 (fr) * 1995-08-30 1997-03-07 Cohen Sabban Joseph Dispositif de microstratigraphie optique
WO1998044375A2 (de) * 1997-03-29 1998-10-08 Carl Zeiss Jena Gmbh Konfokale mikroskopische anordnung
WO2008058281A2 (en) * 2006-11-09 2008-05-15 Amo Wavefront Sciences, Llc Method and apparatus for obtaining the distance from an optical measurement instrument to and object under test
WO2010097523A1 (fr) 2009-02-25 2010-09-02 Altatech Semiconductor Dispositif et procédé d'inspection de plaquettes semi-conductrices
EP3567339A1 (de) * 2018-05-10 2019-11-13 Nanovea, Inc. 3d-oberflächenabtastende weisslicht-axialchromatismus vorrichtung und verfahren

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