EP0107357A2 - Appareil et procédé pour la fabrication de dispositifs semi-conducteurs de grande surface pourvus de réflecteurs à l'arrière - Google Patents

Appareil et procédé pour la fabrication de dispositifs semi-conducteurs de grande surface pourvus de réflecteurs à l'arrière Download PDF

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Publication number
EP0107357A2
EP0107357A2 EP83305680A EP83305680A EP0107357A2 EP 0107357 A2 EP0107357 A2 EP 0107357A2 EP 83305680 A EP83305680 A EP 83305680A EP 83305680 A EP83305680 A EP 83305680A EP 0107357 A2 EP0107357 A2 EP 0107357A2
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EP
European Patent Office
Prior art keywords
substrate
further characterized
reflective material
reflector
amorphous semiconductor
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Application number
EP83305680A
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German (de)
English (en)
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EP0107357A3 (fr
Inventor
Masatsugu Izu
John Curtis Mcgill
Wolodymyr Czubatyj
Richard William Seguin
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Energy Conversion Devices Inc
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Energy Conversion Devices Inc
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Application filed by Energy Conversion Devices Inc filed Critical Energy Conversion Devices Inc
Publication of EP0107357A2 publication Critical patent/EP0107357A2/fr
Publication of EP0107357A3 publication Critical patent/EP0107357A3/fr
Withdrawn legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
    • H01L31/075—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PIN type, e.g. amorphous silicon PIN solar cells
    • H01L31/076—Multiple junction or tandem solar cells
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/042—PV modules or arrays of single PV cells
    • H01L31/047—PV cell arrays including PV cells having multiple vertical junctions or multiple V-groove junctions formed in a semiconductor substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/054—Optical elements directly associated or integrated with the PV cell, e.g. light-reflecting means or light-concentrating means
    • H01L31/056—Optical elements directly associated or integrated with the PV cell, e.g. light-reflecting means or light-concentrating means the light-reflecting means being of the back surface reflector [BSR] type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/20—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof such devices or parts thereof comprising amorphous semiconductor materials
    • H01L31/206—Particular processes or apparatus for continuous treatment of the devices, e.g. roll-to roll processes, multi-chamber deposition
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/52—PV systems with concentrators
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/548—Amorphous silicon PV cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Definitions

  • This invention relates generally to methods and systems for making photovoltaic devices of the type including a plurality of amorphous semiconductor materials deposited onto a continuous conductive substrate having thereon a back reflector.
  • the present invention more particularly relates to methods and systems for making such devices wherein the substrate has either a specular reflector or diffuse reflector for increasing the efficiencies of such devices. Additionally, the methods and systems of the present invention are adapted for the continuous production of such semiconductor photovoltaic devices on large area substrates.
  • This invention relates to methods and systems for continuously producing photovoltaic devices by depositing successive amorphous silicon alloy semiconductor layers on a substrate in each of a plurality of deposition chambers.
  • the present invention more particularly relates to methods and systems to provide the devices, during the continuous production thereof, with back reflectors, either specular or diffuse, for increasing the efficiencies of the devices.
  • the multiple cell structures therein discussed utilized p-n junction crystalline semiconductor devices. Essentially the concept is directed to utilizing different band gap devices to more efficiently generate open circuit voltage (Voc.).
  • the tandem cell device has two or more cells with the light directed serially through each cell, with a large band gap material followed by a smaller band gap material to absorb the light passed through the first cell or layer.
  • the generated current from the cell is substantially matched so that the overall open circuit voltage can be maximized.
  • amorphous silicon alloys can be deposited in multiple layers over large area substrates to form solar cells in a high volume, continuous processing system.
  • a substrate may be continuously advanced through a succession of deposition chambers, wherein each chamber is dedicated to the deposition of a specific material.
  • each amorphous layer is dependent upon the particular process gases introduced into each of the deposition chambers.
  • the gases introduced into the deposition chambers are carefully controlled and isolated from the gases introduced into adjacent deposition chambers.
  • the deposition chambers are operatively connected by a relatively narrow gas gate passageway through which the web of substrate material passes and which is adapted to isolate the process gases introduced into adjacent deposition chambers.
  • the first chamber is dedicated for depositing a p-type amorphous silicon alloy
  • the second chamber is dedicated for depositing an intrinsic amorphous silicon alloy
  • the third chamber is dedicated for depositing an n-type amorphous silicon alloy.
  • the present invention provides methods and systems for forming back reflectors on the surface of the substrate upon which the amorphous semiconductor materials are deposited.
  • the back reflector can be either a specular reflector or a diffuse reflector. With either type of reflector, light which has initially passed through the active region or regions of the devices but which is unabsorbed or unused is redirected through the active regions of the devices. This provides increased photon absorption and charge carrier generation in the active region or regions providing increased short circuit currents. In the case of a specular reflector, the unused light is generally redirected for one additional pass through the device active regions.
  • the light is redirected through the active regions at angles sufficient to cause the redirected light to be substantially confined within the devices. This provides multiple reflections of the redirected light in the active regions.
  • specular and diffuse back reflectors provide for increased short circuit currents and thus increased efficiencies.
  • Another advantage of the diffuse reflector is that since the directed light passes through the active regions at an angle, the active region or regions can be made thinner to reduce charge carrier recombination while maintaining efficient charge carrier generation and collection.
  • back reflectors of the specular and diffuse type have only been provided in photovoltaic devices fabricated in the laboratory.
  • the present invention provides systems and methods for the high volume manufacturing of photovoltaic devices of the type including a plurality of amorphous semiconductor materials deposited onto a continuous conductive substrate and a reflector on the surface of the substrate upon which the amorphous semiconductor materials are deposited to improve the efficiencies thereof.
  • the reflector can be either a specular reflector or a diffuse reflector.
  • the specular reflector can be formed by vapor depositing a reflective material such as gold, silver, aluminum, copper, chromium, or molybdenum onto the substrate.
  • the diffuse reflector can be formed by imparting a roughened texture to the substrate surface by, for example, sandblasting the substrate surface or by sputtering a first reflective material thereon.
  • a second reflective material can be vapor deposited over the diffuse reflector prior to the deposition of the amorphous semiconductor materials.
  • the reflectors can be formed either immediately prior to the deposition of the amorphous semiconductor.materials or at a remote location whereat the substrate is wound onto a take-up roll and thereafter transported to a plurality of deposition chambers for the later deposition of the amorphous semiconductor materials.
  • a first object of the invention is to provide a system for making photovoltaic devices of the type including a plurality of amorphous semiconductor materials deposited onto a continuous conductive substrate, the system includes a supply source of the continuous conductive substrate, a plurality of deposition chambers, each chamber arranged to deposit a respective one of the semiconductor materials onto the substrate as the substrate is advanced therethrough, and is characterized by substrate surface preparation means disposed between the substrate supply source and the deposition chambers for forming a reflector on the surface of the substrate upon which the amorphous semiconductor materials are deposited.
  • a second object of the invention is to provide a method of making a photovoltaic device of the type including a plurality of amorphous semiconductor materials deposited on a continuous conductive substrate.
  • the method is characterized by the steps of forming a reflector on the surface of the substrate and depositing a plurality of amorphous semiconductor materials onto the reflector by advancing the substrate through each of a corresponding plurality of amorphous semiconductor deposition chambers.
  • a photovoltaic cell formed of a plurality of successive p-i-n layers, each of which includes an amorphous semiconductor alloy and including a substrate 11 prepared in accordance with the present invention, is shown generally by the numeral 10. It is for the production of this type of photovoltaic device 10, wherein the substrate 11 of the device is provided with a specular or diffuse reflector before the amorphous alloy layers are continuously deposited onto the moving web of substrate material 11 in successive isolated deposition chambers, that the present invention is most applicable.
  • Fig. 1 shows a p-i-n type photovoltaic device such as a solar cell made up of individual p-i-n type cells 12a, 12b, and 12c.
  • a substrate 11 which may be formed from a metallic material such as stainless steel, aluminum, tantalum, molybdenum, or chrome.
  • the substrate 11 of the device 10 illustrated in Fig. 1 includes a diffuse reflector formed in accordance with the present invention. To that end, the substrate 11 has a roughened surface 13 and a thin layer 15 of reflective material over the roughened surface.
  • the layer 15 can be formed from silver, aluminum, gold, or copper and can be deposited by vapor deposition.
  • the roughened surface 13 can be formed by either sandblasting the substrate 11 or by sputter depositing a reflective material, such as aluminum, over the substrate.
  • a reflective material such as aluminum
  • the device 10 can be provided with a specular reflector instead of the diffuse reflector as illustrated.
  • the roughening step is eliminated and only the reflective layer 15 need be deposited.
  • the reflective layer can be formed by vapor depositing silver, gold, copper, chromium, molybdenum, or aluminum, for example, over the substrate 11.
  • This form of reflector also reflects light not absorbed during the initial pass through the active regions of the device back through the device.
  • the specular reflector provides for only one additional pass.
  • amorphous silicon alloys are good light absorbers, the one additional pass of the unabsorbed light through the device also provides a significant increase in short circuit current and device efficiency.
  • Each of the cells 12a, 12b and 12c are fabricated with an amorphous alloy body containing at least a silicon alloy.
  • Each of the alloy bodies includes a p-type conductivity region or layer 16a, 16b and 16c; an intrinsic region or layer 18a, 18b and 18c; and an n-type conductivity region or layer 20a, 20b and 20c.
  • cell 12b is an intermediate cell and, as indicated in Fig. 1, additional intermediate cells may be stacked atop the illustrated cells without departing from the spirit or scope of the present invention.
  • p-i-n cells are illustrated, the present invention also pertains to multiple n-i-p cells as well.
  • a further deposition process may be either performed in a separate environment or as a part of a continuous process.
  • a TCO (transparent conductive oxide) layer 22 is added.
  • An electrode grid 24 may be added to the device where the cell is of a sufficiently large area, or if the conductivity of the TCO layer 22 is insufficient. The grid 24 shortens the carrier path and increases the collection efficiency.
  • FIG. 2 a diagrammatic representation of a multiple chamber glow discharge deposition apparatus for the continuous production of photovoltaic cells is generally illustrated by the reference numeral 26.
  • the apparatus 26 includes a substrate surface preparation chamber 21, a metal vapor deposition chamber 23, and a plurality of isolated, dedicated deposition chambers 28, 30 and 32, each chamber of which is interconnected by a gas gate through which a sweep gas flows in a nonviolant manner.
  • the apparatus 26 is adapted to produce a high volume of large area, amorphous photovoltaic cells having a p-i-n configuration on the deposition surface of a substrate material 11 which is processed to include one of the back reflectors previously described and continually fed therethrough.
  • the substrate 11 Prior to being continuously advanced through the deposition chambers to be described hereafter, the substrate 11 is first provided with either a specular or diffuse back reflector. To that end, the substrate web is advanced from a supply roll 11a into a substrate surface preparation chamber 21. In this chamber 21, the substrate is provided with a roughened surface.
  • the chamber 21 can comprise a sandblasting chamber.
  • Sandblasting well known to technologies other than photovoltaics, includes projecting fine granular particles against a surface to provide the surface with a roughened texture.
  • sandblasting can be used to provide the surface of the substrate, formed from a metal such as stainless steel, aluminum, tantalum, molybdenum or chrome with a roughened texture to form a diffuse reflecting surface.
  • the chamber 21 can comprise a sputtering chamber.
  • a reflective material can be sputtered onto the surface of the substrate in a manner which results in the formation of a roughened surface.
  • aluminum can be sputtered by radio frequency diode sputtering at a frequency of 13.56 Megahertz.
  • the system includes an aluminum target of high purity which is sputtered at a power density of approximately 2 watts per square centimeter.
  • the chamber 21 is preferably maintained at a pressure of about .006 Torr and contains about 1 to 8 percent and preferably 5 percent hydrogen diluted in argon gas which is flowed into the chamber at a rate of 15 standard cubic centimeters per minute (SCCM). Under these conditions, a textured aluminum layer can be formed at a rate of 45.7 angstroms per minute.
  • the aluminum layer thus formed can have a thickness of about 1600 angstroms requiring a deposition time of about 35 minutes.
  • the substrate 11 Prior to the deposition of the textured aluminum layer, the substrate 11 can first be subjected to an initial cleaning step. To initially clean the substrate surface, the substrate can first be advanced through another sputtering chamber wherein the substrate is sputter etched under the same power density and pressure as previously mentioned.
  • the substrate is then advanced through a metal vapor deposition chamber 23.
  • a reflective metal such as silver, aluminum, gold, or copper is deposited over the textured surface.
  • the roughened substrate surface itself is capable of acting as a sufficient diffuse reflector, this additional metal deposition can enhance the reflection efficiency of the diffuse reflector.
  • the substrate 11 can be provided with a specular reflector.
  • the chamber 21 can comprise a metal vapor deposition chamber for depositing, for example, a layer of silver, gold, copper, chromium, molybdenum, or aluminum onto the substrate.
  • the chamber 23 can either be eliminated or used to deposit a transparent conductor of indium tin oxide, cadmium stannate, doped tin oxide, vanadium oxide, germanium tin oxide, or cuprous oxide over the vapor deposited reflective metal.
  • transparent conductors provide enhanced reflection of light from the reflective metals.
  • the apparatus 26 includes at least one triad of deposition chambers.
  • Each triad comprises: a first deposition chamber 28 in which a p-type conductivity amorphous alloy layer is deposited onto the deposition surface of the substrate 11 as the substrate 11 passes therethrough; a second deposition chamber 30 in which an intrinsic amorphous alloy layer is deposited atop the p-type alloy layer on the deposition surface of the substrate 11 as the substrate 11 passes therethrough; and a third deposition chamber 32 in which an n-type conductivity alloy layer is deposited atop the intrinsic layer on the deposition surface of the substrate 11 as the substrate 11 passes therethrough.
  • the substrate 11 is advanced into the first chamber 28 over an idler roller 11c and continuously through the other chambers to a take-up core 11b shown in the deposition chamber 32.
  • the cores 11a and 11b would be housed in separate chambers operatively connected to the deposition chambers.
  • Each deposition chamber 28, 30 and 32 of the triad is adapted to deposit a single amorphous silicon alloy, by glow discharge deposition onto the conductive substrate 11.
  • each of the deposition chambers 28, 30 and 32 includes: an electrode assembly 34; a gas supply conduit 35; an out-gassing conduit 36; a radio frequency generator 38; a tuning network 39; a plurality of radiant heating elements 40; and a gas gate 42 operatively connecting the intrinsic deposition chamber (30) to each of the dopant chambers 28 and 32.
  • the supply conduits 35 are operatively associated with the respective electrode assemblies 34 to deliver process gas mixtures to the plasma regions created in each deposition chamber.
  • the radio frequency generators 38 operate in conjunction with the electrode assemblies 34, the radiant heaters 40 and the grounded substrate 11 to form the plasma regions by dissociating the elemental reaction gases entering the deposition chambers into deposition species.
  • the deposition species are then deposited onto a surface of the substrate 11 as amorphous semiconductor layers.
  • the tuning networks 39 match the output impedance of the generators 38 to the input impedance of the electrode assemblies 34. This provides efficient power transfer between the generators 39 and the electrode assemblies 34.
  • a p-type amorphous silicon layer is deposited onto the substrate 11 in the deposition chamber 28, an intrinsic amorphous silicon alloy layer is deposited atop the p-type layer in the deposition chamber 30 and an n-type amorphous silicon alloy layer is deposited atop the intrinsic layer in the deposition chamber 32.
  • the apparatus 26 deposits at least three amorphous silicon alloy layers onto the substrate 11 wherein the intrinsic layer deposited in deposition chamber 30 differs in composition from the layers deposited in deposition chambers 28 and 32 by the absence of at least one element which will be referred to as the dopant or doping species.
  • each of the alloy layers (and particularly the intrinsic layer) deposited onto a surface of the substrate 11 be of high purity in order to produce high efficiency photovoltaic devices 10.
  • the gas gates 42 substantially prevent the back diffusion of process gases from the dopant chambers 28 and 32 into the intrinsic deposition chamber 30.
  • Figs. 3 through 5 they illustrate that the substrate 11 can be provided with the specular or diffuse reflectors at a location remote from the glow discharge continuous deposition chambers in accordance with the present invention.
  • Fig. 3 illustrates a metal vapor deposition chamber 50 for forming a specular reflector onto a substrate 11.
  • the substrate is continuously advanced from a supply core 11a, through the chamber 50, and onto a take-up core 11b. Once the substrate processing is completed, the core 11b is then transported to the amorphous silicon alloy deposition system.
  • the specular reflector provided by the chamber 50 can be a layer of, for example, silver, gold, chromium, molybdenum, or aluminum vapor deposited onto the substrate 11.
  • Figs. 4 and 5 illustrate that the substrate 11 can be provided with a textured or roughened surface in a process remote from the amorphous silicon alloy deposition system.
  • a sputtering chamber 52 is utilized to sputter aluminum onto a continuous substrate 11.
  • the sputtering parameters can be the same as previously described.
  • a sandblasting chamber 54 is alternatively employed.
  • the take-up cores 11b can be transferred to the vapor deposition chamber 50 of Fig. 3 to receive a layer of reflective metal such as silver, aluminum, gold, or copper.
  • the substrate is ready for transport to the amorphous silicon alloy deposition system.

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  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Development (AREA)
  • Sustainable Energy (AREA)
  • Photovoltaic Devices (AREA)
  • Physical Vapour Deposition (AREA)
EP83305680A 1982-09-24 1983-09-23 Appareil et procédé pour la fabrication de dispositifs semi-conducteurs de grande surface pourvus de réflecteurs à l'arrière Withdrawn EP0107357A3 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US42268882A 1982-09-24 1982-09-24
US422688 1982-09-24

Publications (2)

Publication Number Publication Date
EP0107357A2 true EP0107357A2 (fr) 1984-05-02
EP0107357A3 EP0107357A3 (fr) 1985-04-10

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EP83305680A Withdrawn EP0107357A3 (fr) 1982-09-24 1983-09-23 Appareil et procédé pour la fabrication de dispositifs semi-conducteurs de grande surface pourvus de réflecteurs à l'arrière

Country Status (7)

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EP (1) EP0107357A3 (fr)
JP (1) JPS5982778A (fr)
KR (1) KR840005934A (fr)
AU (1) AU1938583A (fr)
BR (1) BR8305223A (fr)
ES (2) ES8502289A1 (fr)
IL (1) IL69756A0 (fr)

Cited By (7)

* Cited by examiner, † Cited by third party
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DE4324320A1 (de) * 1992-07-24 1994-01-27 Fuji Electric Co Ltd Verfahren und Vorrichtung zur Herstellung einer als dünne Schicht ausgebildeten fotovoltaischen Umwandlungsvorrichtung
EP0766322A2 (fr) * 1995-09-28 1997-04-02 Canon Kabushiki Kaisha Dispositif photovoltaique ayant une couche réflectrice améliorée et son procédé de fabrication
EP0793277A2 (fr) * 1996-02-27 1997-09-03 Canon Kabushiki Kaisha Dispositif photovoltaique comportant un substrat opaque avec une structure de surface spécifique irrégulière
EP0834595A1 (fr) * 1996-09-27 1998-04-08 METAPLAS IONON Oberflächenveredelungstechnik GmbH Appareil pour revêtement de têtes de vis
US6706960B2 (en) 2001-05-17 2004-03-16 Canon Kabushiki Kaisha Coating material and photovoltaic element
CN102189490A (zh) * 2011-03-30 2011-09-21 江苏艾德太阳能科技有限公司 一种太阳能电池用单晶硅片的机械式制绒方法
WO2018162546A1 (fr) 2017-03-10 2018-09-13 Gebr. Schmid Gmbh Procédé pour la production de plaquettes texturées et dispositif de traitement d'abrasion par pulvérisation

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2784841B2 (ja) * 1990-08-09 1998-08-06 キヤノン株式会社 太陽電池用基板
JP2908067B2 (ja) * 1991-05-09 1999-06-21 キヤノン株式会社 太陽電池用基板および太陽電池
DE102007061687B4 (de) 2007-12-19 2010-04-29 Cpi Chemiepark Institut Gmbh Verfahren zum Mattierungsätzen von Siliziumsubstraten und Ätzmischung zur Durchführung des Verfahrens

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USB561732I5 (fr) * 1973-08-29 1976-02-03
US4116718A (en) * 1978-03-09 1978-09-26 Atlantic Richfield Company Photovoltaic array including light diffuser
EP0041773A1 (fr) * 1980-05-19 1981-12-16 Energy Conversion Devices, Inc. Production de cellules solaires
EP0042458A1 (fr) * 1980-05-20 1981-12-30 Solarex Corporation Module de cellules solaires et procédé d'accroissement du courant de sortie de ce module
US4328390A (en) * 1979-09-17 1982-05-04 The University Of Delaware Thin film photovoltaic cell
WO1982002459A1 (fr) * 1980-12-31 1982-07-22 Co Boeing Procedes et appareil pour la formation de cellules solaires a film mince a heterojonction a partir de composes de chalcopyrite i-iii-vi2, et cellules solaires ainsi obtenues
EP0079790A2 (fr) * 1981-11-16 1983-05-25 Allen M. Barnett Cellule solaire photovoltaique en film mince et son procédé de fabrication

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USB561732I5 (fr) * 1973-08-29 1976-02-03
US4116718A (en) * 1978-03-09 1978-09-26 Atlantic Richfield Company Photovoltaic array including light diffuser
US4116718B1 (fr) * 1978-03-09 1983-06-07
US4328390A (en) * 1979-09-17 1982-05-04 The University Of Delaware Thin film photovoltaic cell
EP0041773A1 (fr) * 1980-05-19 1981-12-16 Energy Conversion Devices, Inc. Production de cellules solaires
EP0042458A1 (fr) * 1980-05-20 1981-12-30 Solarex Corporation Module de cellules solaires et procédé d'accroissement du courant de sortie de ce module
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Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4324320A1 (de) * 1992-07-24 1994-01-27 Fuji Electric Co Ltd Verfahren und Vorrichtung zur Herstellung einer als dünne Schicht ausgebildeten fotovoltaischen Umwandlungsvorrichtung
DE4324320B4 (de) * 1992-07-24 2006-08-31 Fuji Electric Co., Ltd., Kawasaki Verfahren und Vorrichtung zur Herstellung einer als dünne Schicht ausgebildeten fotovoltaischen Umwandlungsvorrichtung
EP0766322A2 (fr) * 1995-09-28 1997-04-02 Canon Kabushiki Kaisha Dispositif photovoltaique ayant une couche réflectrice améliorée et son procédé de fabrication
EP0766322A3 (fr) * 1995-09-28 1998-12-16 Canon Kabushiki Kaisha Dispositif photovoltaique ayant une couche réflectrice améliorée et son procédé de fabrication
EP0793277A2 (fr) * 1996-02-27 1997-09-03 Canon Kabushiki Kaisha Dispositif photovoltaique comportant un substrat opaque avec une structure de surface spécifique irrégulière
EP0793277A3 (fr) * 1996-02-27 1998-09-09 Canon Kabushiki Kaisha Dispositif photovoltaique comportant un substrat opaque avec une structure de surface spécifique irrégulière
EP0834595A1 (fr) * 1996-09-27 1998-04-08 METAPLAS IONON Oberflächenveredelungstechnik GmbH Appareil pour revêtement de têtes de vis
US6706960B2 (en) 2001-05-17 2004-03-16 Canon Kabushiki Kaisha Coating material and photovoltaic element
CN102189490A (zh) * 2011-03-30 2011-09-21 江苏艾德太阳能科技有限公司 一种太阳能电池用单晶硅片的机械式制绒方法
WO2018162546A1 (fr) 2017-03-10 2018-09-13 Gebr. Schmid Gmbh Procédé pour la production de plaquettes texturées et dispositif de traitement d'abrasion par pulvérisation

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ES525910A0 (es) 1984-12-16
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BR8305223A (pt) 1984-05-02
AU1938583A (en) 1984-03-29
JPS5982778A (ja) 1984-05-12
IL69756A0 (en) 1983-12-30
KR840005934A (ko) 1984-11-19
ES8600569A1 (es) 1985-09-16
ES534760A0 (es) 1985-09-16

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