EP0058137A3 - Appareil à rayons X - Google Patents

Appareil à rayons X Download PDF

Info

Publication number
EP0058137A3
EP0058137A3 EP82810049A EP82810049A EP0058137A3 EP 0058137 A3 EP0058137 A3 EP 0058137A3 EP 82810049 A EP82810049 A EP 82810049A EP 82810049 A EP82810049 A EP 82810049A EP 0058137 A3 EP0058137 A3 EP 0058137A3
Authority
EP
European Patent Office
Prior art keywords
rays
enclosure
opening
target
wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP82810049A
Other languages
German (de)
English (en)
Other versions
EP0058137A2 (fr
Inventor
Philip J. Mallozzi
Harold M. Epstein
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Battelle Development Corp
Original Assignee
Battelle Development Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Battelle Development Corp filed Critical Battelle Development Corp
Publication of EP0058137A2 publication Critical patent/EP0058137A2/fr
Publication of EP0058137A3 publication Critical patent/EP0058137A3/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21G—CONVERSION OF CHEMICAL ELEMENTS; RADIOACTIVE SOURCES
    • G21G4/00—Radioactive sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • X-Ray Techniques (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
EP82810049A 1981-02-09 1982-02-05 Appareil à rayons X Withdrawn EP0058137A3 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US23277481A 1981-02-09 1981-02-09
US232774 1981-02-09

Publications (2)

Publication Number Publication Date
EP0058137A2 EP0058137A2 (fr) 1982-08-18
EP0058137A3 true EP0058137A3 (fr) 1983-03-16

Family

ID=22874523

Family Applications (1)

Application Number Title Priority Date Filing Date
EP82810049A Withdrawn EP0058137A3 (fr) 1981-02-09 1982-02-05 Appareil à rayons X

Country Status (3)

Country Link
EP (1) EP0058137A3 (fr)
JP (1) JPS57150000A (fr)
CA (1) CA1184675A (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4484339A (en) * 1981-02-09 1984-11-20 Battelle Development Corporation Providing X-rays
JPS6119752U (ja) * 1984-07-11 1986-02-05 理学電機株式会社 Ｘ線誘導筒
CA1254261A (fr) * 1984-11-08 1989-05-16 James M. Forsyth Cible de longue duree utile pour emissions de radiographie
US4692934A (en) * 1984-11-08 1987-09-08 Hampshire Instruments X-ray lithography system
JPH01140100A (ja) * 1987-11-26 1989-06-01 Nec Corp Ｘ線取出し方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3870882A (en) * 1973-05-23 1975-03-11 Gca Corp Esca x-ray source
US4119855A (en) * 1977-07-08 1978-10-10 Massachusetts Institute Of Technology Non vacuum soft x-ray lithographic source

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4852075A (fr) * 1971-10-29 1973-07-21

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3870882A (en) * 1973-05-23 1975-03-11 Gca Corp Esca x-ray source
US4119855A (en) * 1977-07-08 1978-10-10 Massachusetts Institute Of Technology Non vacuum soft x-ray lithographic source

Also Published As

Publication number Publication date
JPS57150000A (en) 1982-09-16
EP0058137A2 (fr) 1982-08-18
CA1184675A (fr) 1985-03-26

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Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AK Designated contracting states

Designated state(s): AT BE CH DE FR GB IT LU NL SE

PUAL Search report despatched

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AK Designated contracting states

Designated state(s): AT BE CH DE FR GB IT LI LU NL SE

17P Request for examination filed

Effective date: 19830907

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION HAS BEEN WITHDRAWN

18W Application withdrawn

Withdrawal date: 19831216

RIN1 Information on inventor provided before grant (corrected)

Inventor name: EPSTEIN, HAROLD M.

Inventor name: MALLOZZI, PHILIP J.