CA1184675A - Radiographie - Google Patents

Radiographie

Info

Publication number
CA1184675A
CA1184675A CA000395769A CA395769A CA1184675A CA 1184675 A CA1184675 A CA 1184675A CA 000395769 A CA000395769 A CA 000395769A CA 395769 A CA395769 A CA 395769A CA 1184675 A CA1184675 A CA 1184675A
Authority
CA
Canada
Prior art keywords
enclosure
rays
wall
opening
target
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA000395769A
Other languages
English (en)
Inventor
Philip J. Mallozzi
Harold M. Epstein
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Battelle Development Corp
Original Assignee
Battelle Development Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Battelle Development Corp filed Critical Battelle Development Corp
Application granted granted Critical
Publication of CA1184675A publication Critical patent/CA1184675A/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21G—CONVERSION OF CHEMICAL ELEMENTS; RADIOACTIVE SOURCES
    • G21G4/00—Radioactive sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • X-Ray Techniques (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
CA000395769A 1981-02-09 1982-02-08 Radiographie Expired CA1184675A (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US23277481A 1981-02-09 1981-02-09
US232,774 1981-02-09

Publications (1)

Publication Number Publication Date
CA1184675A true CA1184675A (fr) 1985-03-26

Family

ID=22874523

Family Applications (1)

Application Number Title Priority Date Filing Date
CA000395769A Expired CA1184675A (fr) 1981-02-09 1982-02-08 Radiographie

Country Status (3)

Country Link
EP (1) EP0058137A3 (fr)
JP (1) JPS57150000A (fr)
CA (1) CA1184675A (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4484339A (en) * 1981-02-09 1984-11-20 Battelle Development Corporation Providing X-rays
JPS6119752U (ja) * 1984-07-11 1986-02-05 理学電機株式会社 Ｘ線誘導筒
CA1254261A (fr) * 1984-11-08 1989-05-16 James M. Forsyth Cible de longue duree utile pour emissions de radiographie
US4692934A (en) * 1984-11-08 1987-09-08 Hampshire Instruments X-ray lithography system
JPH01140100A (ja) * 1987-11-26 1989-06-01 Nec Corp Ｘ線取出し方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4852075A (fr) * 1971-10-29 1973-07-21
US3870882A (en) * 1973-05-23 1975-03-11 Gca Corp Esca x-ray source
US4119855A (en) * 1977-07-08 1978-10-10 Massachusetts Institute Of Technology Non vacuum soft x-ray lithographic source

Also Published As

Publication number Publication date
JPS57150000A (en) 1982-09-16
EP0058137A3 (fr) 1983-03-16
EP0058137A2 (fr) 1982-08-18

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Legal Events

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