CA1184675A - Providing x-rays - Google Patents
Providing x-raysInfo
- Publication number
- CA1184675A CA1184675A CA000395769A CA395769A CA1184675A CA 1184675 A CA1184675 A CA 1184675A CA 000395769 A CA000395769 A CA 000395769A CA 395769 A CA395769 A CA 395769A CA 1184675 A CA1184675 A CA 1184675A
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- CA
- Canada
- Prior art keywords
- enclosure
- rays
- wall
- opening
- target
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21G—CONVERSION OF CHEMICAL ELEMENTS; RADIOACTIVE SOURCES
- G21G4/00—Radioactive sources
Abstract
PROVIDING X-RAYS
ABSTRACT
Apparatus for providing X-rays (11) to an object (12) in air. A lens (13) directs energy (14) from a laser (27) onto a target (15) to produce X-rays (11) of a selected spectrum and intensity. A substantially fluid-tight first enclosure (16) around the target (15) has a pressure therein substantially below atmospheric pressure, and has at least a portion of one wall (19) in common with an adjoining substantially fluid-tight second enclosure (18) containing only helium or hydrogen.
The common wall portion (19) has an opening (20) large enough to permit X-rays (11) to pass through and yet small enough that gas (21) can be evacuated from the first enclosure (16) at least as fast as it enters through the opening (20). The target (15) is located close to the opening (20) and emits a substantial portion of the X-rays (11) through the opening (20) and on toward a wall (22) of the second enclosure (18) having a portion (25) that is highly transparent to them, so that the object (12) to which the X-rays (11) are to be provided may be located outside the second enclosure (18) and adjacent thereto and thus receive the X-rays (11) substantially unimpeded by air or other undesired intervening matter.
ABSTRACT
Apparatus for providing X-rays (11) to an object (12) in air. A lens (13) directs energy (14) from a laser (27) onto a target (15) to produce X-rays (11) of a selected spectrum and intensity. A substantially fluid-tight first enclosure (16) around the target (15) has a pressure therein substantially below atmospheric pressure, and has at least a portion of one wall (19) in common with an adjoining substantially fluid-tight second enclosure (18) containing only helium or hydrogen.
The common wall portion (19) has an opening (20) large enough to permit X-rays (11) to pass through and yet small enough that gas (21) can be evacuated from the first enclosure (16) at least as fast as it enters through the opening (20). The target (15) is located close to the opening (20) and emits a substantial portion of the X-rays (11) through the opening (20) and on toward a wall (22) of the second enclosure (18) having a portion (25) that is highly transparent to them, so that the object (12) to which the X-rays (11) are to be provided may be located outside the second enclosure (18) and adjacent thereto and thus receive the X-rays (11) substantially unimpeded by air or other undesired intervening matter.
Description
PROVIDING X-RAYS
FIELD
This invention relates to apparatus for providing X-rays to an object that may be in an ordinaxy environ-ment such as air at approximately atmospheric pressure.
Apparatus according to the present invention is especially useful for applications wherein it is expensive, tim~ consuming, or otherwise inconvenient to move objects that are to receive soft X-xays into and out of a special environment, such as a vacuum chamber in which the X-rays are produced. ~ypical applications of this type include laser produced X-ray systems for high resolution lithography, for extended X-ray absorption fine structure ~EXAFS) spectroscopy, and for X-ray microscopy.
BACKGROUND
X-rays usually are produced in a vacuum, but for many purposes it is desirable to apply them in air.
For soft X-rays, especially those having photon energies of less than about 5 keV, a problem arises in bringing the X-rays from the vacuum into air, because a window that is thick enough and strong enough to withstand the pressure difference between the vacuum and the air is opaque to the X-rays, except in ~ery small windows. The problem is especially serious in X-ray lithography, where it is desirabl~ to illuminate large areas.
The present invention provides simple, inexpensive, convenient means for overcoming the problem.
It is shown in Vnited State Patent 4,058,486, November 15, 1977, of P.J. Mallozzi, H.M. Epstein, R.G.
Jung, D.C. Applebaum, B.P. Fairand, and W.J. Gallagher, for Producing X-rays, that an intense point source of X-rays can be generated by focusing a laser beam onto a solid target. Neodymium laser light focused onto a solid slab target has been converted into X-rays wi~h an efficiency greater than `25 percent, with several tens of joules of X-rays emanating from an essentially point source (about 100 microns diameter) in a nanosec~nd.
The X-ray pattern produced with iron targets irradiated with about 100-joule laser pulses ~t a 45 degxee angle of incidence is substantially omnidirectional. The con-version efficiency of greater than 25 percent refers to X-rays which are radiated away from the slab and pass perpendicularly through 3000 Angstroms of plastic (paraline) coated with 2000 Angstroms of aluminum. This conversion efficiency is thus a lower bound and refers only to the portion of the spectrum above about 300 electron volts. Most of the observed X-rays lie betwePn about 0.3 and 1.5 keV, with a small but useful fraction having energies as high as 10 to 100 keV. In a densi-tometer tracing of a bent crystal spectrograph taken witha KAP crystal, the radiation appears to be mostly lines in the spectral interval of about 0.7 to 1.2 keV. The unusual sharpness of the spectral detail is due to the tiny dimensi.ons of the source. This novel point source of X-rays provides a spectrum tuneable throughout a range of about 0.1 to 100 ke~.
Apparatus according ~o the present invention typically employs X-ray producing means of the type described above~ It may, however, use other somewhat similar means~ such as equipment that uses an electron beam, rather than a laser beam~ for producing the X-rays.
DISCLOSURE
Typical apparatus according to the present invention for providing X-rays to an object that may be in an ordinary environment such as air at approxima~ely atmospheric pressure comprises means for directing energy onto a target to produce X-rays of a selected spectrum and intensity at the target, a substantially fluid-tight first enclosure around the target, means for reducing the quantity of gas in the first enclosure to maintain the pressure therein substantially below atmospheric pressure, a substantially fluid-tight second enclosure adjoining the first enclosure, with the two enclosures having at least a portion of one wall in con~non, the common wall portion having therein an opening large enough to permit X-rays to pass through it and yet small enough that the pressure reducing means can evacuate gas from the first enclosure at least as fast as it enters through the opening, the target being located close enough to the opening and so positioned as to emit a substantial portion of the X-rays produced toward the opening, to pass through it and on toward a wall of the second enclosure located opposlte the opening, means for conveying into the second enclosure a gas that is highly transparent to X-rays, to the substantial exclusion of other gases, and the wall of the second enclosure to which the X-rays travel having a portion that is highly transparent to them, so that the object to which the X-rays are to be provided may be located outside the second enclosure and adjacent thereto and thus receive the X-rays substantially unimpeded by air or other undesired intervening matter.
The energy directing means comprises means for directing energy from a laser onto the target, as by focusing the energy onto a spot on the target having a diameter of about 1 to 200 micrometers. Typically the opening in the common wall portion is about 0.2 to 2 millimeters in diameter, and the distance between the opening and the spot on the target is about 0.2 to 5 centimeters.
Typically the gas conveyed into the second enclosure is helium, hydrogen, or a hydrocarbon;
preferably helium; maintained, at least in the vicinity of the highly transparent portion of the wall thereof, at a pressure of about 0.9 to 1 atmosphere. Typically the highly transparent portion of the wall of the second enclosure comprises a thin foil that typically compxises essentially beryllium or a plastic material. The thickness of the foil typically is about 2 to 20 micro-meters. The X-rays produced at the target typically have energies predominantly of about 0.3 to 2 keV.
Where the gas in the second enclosure, at least in the vicinity of the highly transparent portion of the wall thereof, is maintained at approximately the pressure of the ambient air, the highly transparent portion of the wall of the second enclosure may comprise an opening therein; and the gas inside the second enclosure can be substantially separated from the air around it; either by a gas curtain passing along the opening; or by the object to which the X-rays are to be provided, or a component associated with the object, placed against the wall and coYering the opening.
The second enclosure may have an intermediate compartment between the common wall portion and the wall having the highly transparent portion; the gas in the intermediate compartment being maintained at a pressure less than the pressure in the vicinity of the highly transparent portion of the wall of the second enclosure and yreater than the pressure in the first enclosure.
Apparatus according to the in~ention for obtaining EXAFS data of a material, typically comprises also spectral dispersive means in the second enclosure so located as to receive X-rays that pass through the opening and to direct the spectrally resolved X-rays on toward the highly transparent portion of the wall adjacent to the object to which the X-rays are to be provided, and the object typica:Lly comprises recording means. Such apparatus typically comprises also means for positioning a sample of material in the optical path of the X-rays/ either in the second enclosure or outside of the second enclosure and between the highly trans-parent portion of the wall and the recording means.
7~
DRAWINGS
Figure 1 is a schematic plan view of typical apparatus according to the present invention.
Figure 2 is a similar view of a typical embodiment of the invention for obtaining EX~FS data of a material~
CARRYING OVT THE INVENTION
Referring to the drawings, and now especially to ~igure 1, typical apparatus according to the present invention for provid.ing X-rays 11 to an object 12 that may be in an ordinary environment such as air at appraximately atmospheric pressure comprises means such as a lens 13 for directing energy 14 onto a target 15 to produce X-rays 11 of a selected spectxum and intensity at the target 15, a substantially fluid-tight first enclosure 16 around the target 15, means as indicated by the arrow 17 (such as a vacuum pump, not shown) for reducing the ~uantity of gas in the first enclosure 16 to maintain the pressure therein substan-tially below a~mospheric pressure (typically less than about 1 torr), a substantially fluid-tight second enclosure 18 adjoining the first enclosure 16, with the two enclosures 16,18 having at least a portion of one wall 19 in common, the common wall portion 19 having therein an opening 20 large enough to permit X-rays 11 to pass through it (20) and yet small enough that the pressure reducing means can evacuate gas 21 from the first enclosure 16 at least as fast as it enters through the opening 20, the target 15 being located close enough to the opening 20 and so positioned as to emit a substantial portion of the X-rays 11 produced toward the opening 20, to pass through it (20) and on toward a wall 22 of the second enclosure lB located opposite the opening 20, means as indicated by the arrow 23 (such as a pump, not shown) fox conveying into the second enclosure 18 a gas 24 that is highly transparent to X-rays 11, to the substantial exclusion of other yases, and the wall 22 of the second enclosure 18 to which the X-rays 11 travel having a portion 25 that is highly transparent to them (11), so that the object 12 to which the X~rays 11 are to be provided may be located outside the second enclosure 18 and adjacent thereto and thus receive the X-rays 11 substantially unimpeded by air or other undesired intervening mattex.
Where only specific regions of the object 12 are to receive the X-rays 11, as in X-ray lithography, a mask 26 may be placed between the highly transparent portion 25 of the wall 22 and the object 12 to block the X-rays ~ proceeding toward the other regions of the object 12.
~ he energy directing means typically comprises a lens 13 for directing energy 14, passing through a window 29 in the first enclosure 16, from a laser 27, onto the target 15, as by focusing the energy 14 onto a spot 28 on the target 15 having a diameter of about 1 to 200 micrometers. Typically the opening 20 in the common wall portion 19 is about 0.2 to 2 millimeters in diameter, and the distance between the opening 20 and the spot 28 on the target 15 is about 0.2 to 5 centimeters.
Typically the gas 24 conveyed into the second enclosure 18 is helium, hydrogen, or a hydrocarbon, such as methane; maintained at a pressure of about 0.9 to 1 atmosphere,at least in the vicinity of the highly transparent portion of the wall thereof. Preferably the gas 24 comprises essentially helium, which is known to be highly transparent to X-rays as well as substantially inert.
Typically the highly transparent portion 25 of the wall 22 of the second enclosure 18 comprises a thin foil 25 that typically comprises essentially beryllium or a plastic material. The thickness of the foil 25 typically is about 2 to 20 micrometers. Other materials, preferably having atomic numbers of not more than about 8, may also be used. Where a less transparent material is used it must be very thin. The X-rays 11 produced at the target 15 typically have energies predominantly of about 0.3 to 2 keV.
Where the pressure of the gas 24 in the second 5 enclosure 18 is maintained at approximately atmospheric pressure, the highly transparent portion 25 of the wall 22 may be very thin, because the pressure on each side of it is approximately the same. It may even comprise only a gas curtain, rather than a solid material; or the mask 26 in Figure 1 or the sample 32 in Figure 2 may be placed against the thick "frame" formed by the wall 22 to substantially separate the gas 24 inside the second enclosure 18 from the air around it. Where an adjacen~
mask or sample is not used~ the object 12 may be placed against the wall 22 to substantially separate the gas 24 inside the second enclosure 18 from the air around it.
In some embodiments of the invention it may be desirable to form at least one intermediate compartment 34 in the second enclosure 18, as shown in Figure 1 between the wall 19' (having an opening 20' therein for the X-rays 11 to pass through) and the wall 19~ The pressure in each such compartment is maintained between the pressures in the ad~acent enclosed regions. As indicated by the arrow 17', means such as a vacuum pump (not ~shown) can maintain the proper pressure. Where more than one intermediate compartment 34 is provided in the second enclosure 18, a differential evacuation system of the type used for the emission of electron beams into the atmosphere may be desirable.
Where the gas 24 in the second enclosure 18, at least in the vicinity of the highly transparent portion 25 of the wall 22 thereof, is maintained at approximately the pressure of the ambient air, the highly transparent portion 25 of the wall 22 of the second enclosure 18 may comprise an opening therein; and the gas 24 inslde the second enclosure 18 can be substantlally separated from 7~
the air around it; either by a gas curtain passing along the opening at 25; or by the object 12 to which the X-rays 11 are to be provided, or a CQmpOnent associated with the object 12 (such as the mask 25 in Figure 1 or the sample 32 in Figure 2), placed against the wall 22 and covering the opening at 25.
The second enclosure 18 may have an intermediate compartment 34, as in Figure 1, between the common wall portion 19 and the wall 22 having the highly transparent portion 25; the gas in the intermediate compar~ment 34 being maintained at a pressure less than ~he pressure in the vicinity of the highly transp~rent portion 25 of the wall 22 of the second enclosure 18 and greater than the pressure in the first enclosure 16.
As is shown in Figure 2I typical apparatus accord-ing to the invention for obtaining EXAFS data of a material~ comprises also spectral dispersive means such as a monochromator 30 in the second enclosure 18 so located as to receive X-rays 11 that pass through the opening and to direct the spectrally resolved X-rays llR on toward the highly transparent portion 25 of the wall 22 adjacent to the ob~ect 12 to which the X-rays llR axe to be pro~ided, and the object 12 typically comprises recording means such as a photographic film 12.
Such apparatus t~pically comprises also means such as a support (not shown) for positioning a sample of material 31 in the ~ptical path of the X-rays ll,llR, either in th~ second enclosure 18 as indicated by the dashed line 31, or outside of the second enclosure 18 and between the highly transparent portion 25 of the wall 22 and the recording means 12, as indicated at 32O The latter position 32 usually is more convenient than positions (such as 31~ in the second enclosure 1~.
Typically the radiant energy 14 is directed to the target 15 in a single pulse in such manner as to produce soft X-rays 11 ~rom the target 15 in a ~ingle pulse in 72~
such manner as to produce soft X-rays 11 from the target 15 suitable for obtaining the EXA~S spectrum of the material 32, which typically is an element having an atomic number of less than 40~
EXAFS apparatus as in Figure 2 may comprise also means for moving the surface of the target 15 typically in a rotating and advancing motion (not shown3 to pro~ide a helical locus of points on a cylindrical surface of the target 15 travelling through the location of the focal spot 28 where the laser light energy 14 strikes the surface. In such a case the energy 14 typically is directed to the moving target surface at 28 in a series of pulses in such manner as to produce soft X-rays 11 from the target 15 suitable for obtaining the EXAFS spectrum of the material 32.
The X-rays frorll the taxget 15 preferably comprise continuum radiation in a selected EXA~S spectral regime of the sample 32. Typically the target 15 comprises essentially an element having a continuum just above the L-lines that includes a selected EXAFS spectr~l regime of the sample 32. Or the target 15 may comprise a plural-ity of elements whose lines are spaced ~losely enough to form virtual.ly a co~tinuum in a selected EXA~S spectral regime of the sample 11. Such a target 15 typically comprises a mixture of elements of adjacent atomic numbers.
The radiant energy typically comprises a laser pulse 14 with a power density of at least about 1013 watts per square centimeter, and the target 15 typically comprises a solid (typically metal) surface, whereby a sur~ace plasma is formed and raised to the kilovolt temperature regime. Some EXA~S can be obtained, however, in the ul~raviolet and ultrasoft X-ray regime using lower power densities down to about 1011 watts per square centimeter. The laser pulse 14 typically is focused to strike the focal spot 28 on the taget 15 abQut 1 to 200 micrometers in diameter.
Further typical and preferred details of apparatus of the type shown in Figure 2 for obtaining ~XAFS data of a material are contained in the ~nited States pa~ent application of Philip J. Mallozzi, Harold M. Epstein, Rober E. Schwerzel, and Bernerd E. Campbell, for Laser EXAFS; Serial No. 105,816, filed December 20, 1979; now United States Patent ~,3/?,~ issued ~A~C* Z~ 8Z.
As is explained in detail in the United States patent of Mallozzi et al., referred to in the Background section herein, a typical method of producing X-rays for use in the present invention comprises directing radiant energy from a laser onto a target, and conversion effi-ciency of at least about 3 percent is obtained by provid~
ing the radiant energy in a low-power precursor pulse of approximately uniform effective intensity focused onto the surface of the target for about 1 to 30 nanoseconds so as to generate an e~panding unconfined coronal plasma having less than normal solid density throughout and comprising a low-density (underdense) region wherein the plasma frequency is less than the laser radiation fre-quency and a higher-density (overdense) region wherein the plasma frequency is greater than the laser radiation fre-quency and, about 1 to 30 nanoseconds after the precursor pulse stri~es the target, a higher-power main pulse focused onto the plasma for about 10-3 to 30 nanoseconds and having such power density and total energy that the radiant energy is absorbed in the underdense region and conducted into the overdense region to heat it and thus to produce X-rays therefrom with the plasma remaining substantially below normal solid density and thus facilitating the substantial emission o~ X-rays in the form of spectral lines arising from nonequilibrium ionization states.
The target typically consists essentially of an element having a high atomic number Z, i.e., an atomic number Z greater than 10. Typically the target consists essentially of iron, calcium, chromium, nickel, aluminum, lead, tungsten, or cJold.
The amplitude, duration, and shape of the precursor pulse typically are adjusted to control the intensity and spectral content of the X-rays. The precursor pulse typically comprises about 0.01 to 5 joules (a~out 101 to 1012 watts per square centimeter) in about 1 to 30 nanoseconds, and strikes the target at an angle of about 20 to 70 degrees from its surface.
The main pulse typically comprises at least 0.1 joule, preferably about 10 to 200 joules in about 1 to 3 nanoseconds.
In a typical emhodiment, the target consists essen-tially of iron and the duration of the precursor pulse is about 8 to 10 nanoseconds.
The electron density in the low-density region of the plasma typically is about 1016 to 1021 per cubic centimeter, and in the higher-density region about 1019 to 1025 per cubic centimeter. The radiant energy typically is focused onto a spot on the target having a diametex of about 1 to 1000 micrometers~ The volume of the plasma typically is about 10 6 to 10-3 cubic centi-meter, the thickness of the plasma in any direction being about 0.001 to 0.1 ~entimeter.
For low energy applications the X-rays are emitted predominantly in the form of spectral lines.
Th~ radiant energy may be focused onto a spot on the target having a diameter of about 1 to 100 micro-meters, generating a plasma of about the same diameter, to form sub~tantially a point source of X-rays and thus to provide substantially the advantages of stimulated emission of X~rays.
In some embodiments of the invention the composi-t:ion of the target and the temperature of the plasma are selected to provide a substantial amount of stimulated emission of X-rays.
In other embodiments Y-rays are directed to impinge upon a f1uorescent target so as to remove inner shell electrons from atoms thereof and thereby create a population inversion.
In a typical method of providing stimulated emission of X-rays by directing radiant energy onto a target to create by means of a pumping mechanism some upper and lower laser levels, the required population inversion is not established by the pumping mechanism alone, but by the combined action of the pumping mechanism and a quenchiny mechanism that extinguishes the lower laser level at a rate sufficient to establish and continuously maintain the inversion. The pumping mechanism typically comprises excitation by collisions of electrons and ions or by dielectronic recombination.
The ~uenching mechanism typically comprises Auger transitions, Coster-Krohig transitions, or collisions.
The radiant energy may be from a laser, or it may comprise a beam of electrons. The pumping mechanism may comprise a beam o~ electrons.
APPLICABILITY
Apparatus according to the present invention is especially useful for applications wherein it is expensive, time consuming, or otherwise inconvenient to move objects that are to receive soft X-rays into and out of a special environment, such as a vacuum ch~mber in which the X-rays are produced. Typical applications o' this type include laser produced X-ray systems for hish resolution lithography, for extended X-ray absorption rine structure (EXAFS) spectroscopy, and for X-ray microscopy.
X rzys usually are produced in a ~acuum, but for many purposes it is desirable to apply them in air.
~or soft X-rays, especially those having photon energies of less than about 5 keV, a problem arises in bringing ~he X-rays ~rom the vaeuum into air, because a window that is thick enough and strong enough to withstand the pressure difference between the vacuum and the air is ~ 3 opaque to the X-rays, except in very small windows. I'he problem is especially serious in X-ray lithography, where it is desirable to illuminate large areas.
The present invention provides simple, inexpensive convenient; means for overcoming the problem of providing X-rays to an object that may be in an ordinary environ-ment such as air at approximately atmospheric pressure.
Appaxatus according to this invention is useful and advantageous not only in X-ray lithography but also in laser EXAFS, and especially in fast EXAFS spectroscopy with a single pulse of laser-produced X-rays, or with a plurality of such pulses.
The technique of Extended X-ray Absorption Pine Structure (E~AFS) spectroscopy is becoming an increas-ingly important tool for the study of chemical structurein samples which lack long-range order, such as amor?hous solids, solutions of biologically important materials, and gases. These studies have gained impetus in recent years by virtue of the availability o~ synchrotron radiation, which provides a continuous and intense spec-trum of the soft X-rays required for EXAFS. A synchrotron, however, is an expensive, cumbersome source of X-rays, to which scientists must travel in order to perform their experiments. A laser X-ray source, on the other hand, is relatively compact, inexpensive, and simple to opPrate and maintain. Furthermore, there are a variety of novel EXAFS experiments which are inherently beyond tne capa-bilities of synchrotron radiation sources. These experiments, which require short pulse width, intense fluxes of low-energy tc4 keV) X-rays, and/or a continuum or a closely packed spectral line structure, are ideally suited to laser-produced X-rays.
The E~AFS spectrum of aluminum has been measured with a nanosecond pulse of soft X-rays generated by a laser-produced plasma. This technique provides a ?ractical alternative to synchrotron radiation for the ~ 6'~ l`3 acquisition of EX~FS data. It also provides a unique capability for the analysis of molecular structure in highly transient chemical species.
While the forms of the invention herein disclosed constitute presently preferred embodiments, many others are possible. It is not intended herein to mention all of the possible e~uivalent forms of ramifications of the invention. It is to be understood that the terms used herein are merely descriptive rather than limiting, and that various changes may be made without departing from the spirit or scope of the invention.
FIELD
This invention relates to apparatus for providing X-rays to an object that may be in an ordinaxy environ-ment such as air at approximately atmospheric pressure.
Apparatus according to the present invention is especially useful for applications wherein it is expensive, tim~ consuming, or otherwise inconvenient to move objects that are to receive soft X-xays into and out of a special environment, such as a vacuum chamber in which the X-rays are produced. ~ypical applications of this type include laser produced X-ray systems for high resolution lithography, for extended X-ray absorption fine structure ~EXAFS) spectroscopy, and for X-ray microscopy.
BACKGROUND
X-rays usually are produced in a vacuum, but for many purposes it is desirable to apply them in air.
For soft X-rays, especially those having photon energies of less than about 5 keV, a problem arises in bringing the X-rays from the vacuum into air, because a window that is thick enough and strong enough to withstand the pressure difference between the vacuum and the air is opaque to the X-rays, except in ~ery small windows. The problem is especially serious in X-ray lithography, where it is desirabl~ to illuminate large areas.
The present invention provides simple, inexpensive, convenient means for overcoming the problem.
It is shown in Vnited State Patent 4,058,486, November 15, 1977, of P.J. Mallozzi, H.M. Epstein, R.G.
Jung, D.C. Applebaum, B.P. Fairand, and W.J. Gallagher, for Producing X-rays, that an intense point source of X-rays can be generated by focusing a laser beam onto a solid target. Neodymium laser light focused onto a solid slab target has been converted into X-rays wi~h an efficiency greater than `25 percent, with several tens of joules of X-rays emanating from an essentially point source (about 100 microns diameter) in a nanosec~nd.
The X-ray pattern produced with iron targets irradiated with about 100-joule laser pulses ~t a 45 degxee angle of incidence is substantially omnidirectional. The con-version efficiency of greater than 25 percent refers to X-rays which are radiated away from the slab and pass perpendicularly through 3000 Angstroms of plastic (paraline) coated with 2000 Angstroms of aluminum. This conversion efficiency is thus a lower bound and refers only to the portion of the spectrum above about 300 electron volts. Most of the observed X-rays lie betwePn about 0.3 and 1.5 keV, with a small but useful fraction having energies as high as 10 to 100 keV. In a densi-tometer tracing of a bent crystal spectrograph taken witha KAP crystal, the radiation appears to be mostly lines in the spectral interval of about 0.7 to 1.2 keV. The unusual sharpness of the spectral detail is due to the tiny dimensi.ons of the source. This novel point source of X-rays provides a spectrum tuneable throughout a range of about 0.1 to 100 ke~.
Apparatus according ~o the present invention typically employs X-ray producing means of the type described above~ It may, however, use other somewhat similar means~ such as equipment that uses an electron beam, rather than a laser beam~ for producing the X-rays.
DISCLOSURE
Typical apparatus according to the present invention for providing X-rays to an object that may be in an ordinary environment such as air at approxima~ely atmospheric pressure comprises means for directing energy onto a target to produce X-rays of a selected spectrum and intensity at the target, a substantially fluid-tight first enclosure around the target, means for reducing the quantity of gas in the first enclosure to maintain the pressure therein substantially below atmospheric pressure, a substantially fluid-tight second enclosure adjoining the first enclosure, with the two enclosures having at least a portion of one wall in con~non, the common wall portion having therein an opening large enough to permit X-rays to pass through it and yet small enough that the pressure reducing means can evacuate gas from the first enclosure at least as fast as it enters through the opening, the target being located close enough to the opening and so positioned as to emit a substantial portion of the X-rays produced toward the opening, to pass through it and on toward a wall of the second enclosure located opposlte the opening, means for conveying into the second enclosure a gas that is highly transparent to X-rays, to the substantial exclusion of other gases, and the wall of the second enclosure to which the X-rays travel having a portion that is highly transparent to them, so that the object to which the X-rays are to be provided may be located outside the second enclosure and adjacent thereto and thus receive the X-rays substantially unimpeded by air or other undesired intervening matter.
The energy directing means comprises means for directing energy from a laser onto the target, as by focusing the energy onto a spot on the target having a diameter of about 1 to 200 micrometers. Typically the opening in the common wall portion is about 0.2 to 2 millimeters in diameter, and the distance between the opening and the spot on the target is about 0.2 to 5 centimeters.
Typically the gas conveyed into the second enclosure is helium, hydrogen, or a hydrocarbon;
preferably helium; maintained, at least in the vicinity of the highly transparent portion of the wall thereof, at a pressure of about 0.9 to 1 atmosphere. Typically the highly transparent portion of the wall of the second enclosure comprises a thin foil that typically compxises essentially beryllium or a plastic material. The thickness of the foil typically is about 2 to 20 micro-meters. The X-rays produced at the target typically have energies predominantly of about 0.3 to 2 keV.
Where the gas in the second enclosure, at least in the vicinity of the highly transparent portion of the wall thereof, is maintained at approximately the pressure of the ambient air, the highly transparent portion of the wall of the second enclosure may comprise an opening therein; and the gas inside the second enclosure can be substantially separated from the air around it; either by a gas curtain passing along the opening; or by the object to which the X-rays are to be provided, or a component associated with the object, placed against the wall and coYering the opening.
The second enclosure may have an intermediate compartment between the common wall portion and the wall having the highly transparent portion; the gas in the intermediate compartment being maintained at a pressure less than the pressure in the vicinity of the highly transparent portion of the wall of the second enclosure and yreater than the pressure in the first enclosure.
Apparatus according to the in~ention for obtaining EXAFS data of a material, typically comprises also spectral dispersive means in the second enclosure so located as to receive X-rays that pass through the opening and to direct the spectrally resolved X-rays on toward the highly transparent portion of the wall adjacent to the object to which the X-rays are to be provided, and the object typica:Lly comprises recording means. Such apparatus typically comprises also means for positioning a sample of material in the optical path of the X-rays/ either in the second enclosure or outside of the second enclosure and between the highly trans-parent portion of the wall and the recording means.
7~
DRAWINGS
Figure 1 is a schematic plan view of typical apparatus according to the present invention.
Figure 2 is a similar view of a typical embodiment of the invention for obtaining EX~FS data of a material~
CARRYING OVT THE INVENTION
Referring to the drawings, and now especially to ~igure 1, typical apparatus according to the present invention for provid.ing X-rays 11 to an object 12 that may be in an ordinary environment such as air at appraximately atmospheric pressure comprises means such as a lens 13 for directing energy 14 onto a target 15 to produce X-rays 11 of a selected spectxum and intensity at the target 15, a substantially fluid-tight first enclosure 16 around the target 15, means as indicated by the arrow 17 (such as a vacuum pump, not shown) for reducing the ~uantity of gas in the first enclosure 16 to maintain the pressure therein substan-tially below a~mospheric pressure (typically less than about 1 torr), a substantially fluid-tight second enclosure 18 adjoining the first enclosure 16, with the two enclosures 16,18 having at least a portion of one wall 19 in common, the common wall portion 19 having therein an opening 20 large enough to permit X-rays 11 to pass through it (20) and yet small enough that the pressure reducing means can evacuate gas 21 from the first enclosure 16 at least as fast as it enters through the opening 20, the target 15 being located close enough to the opening 20 and so positioned as to emit a substantial portion of the X-rays 11 produced toward the opening 20, to pass through it (20) and on toward a wall 22 of the second enclosure lB located opposite the opening 20, means as indicated by the arrow 23 (such as a pump, not shown) fox conveying into the second enclosure 18 a gas 24 that is highly transparent to X-rays 11, to the substantial exclusion of other yases, and the wall 22 of the second enclosure 18 to which the X-rays 11 travel having a portion 25 that is highly transparent to them (11), so that the object 12 to which the X~rays 11 are to be provided may be located outside the second enclosure 18 and adjacent thereto and thus receive the X-rays 11 substantially unimpeded by air or other undesired intervening mattex.
Where only specific regions of the object 12 are to receive the X-rays 11, as in X-ray lithography, a mask 26 may be placed between the highly transparent portion 25 of the wall 22 and the object 12 to block the X-rays ~ proceeding toward the other regions of the object 12.
~ he energy directing means typically comprises a lens 13 for directing energy 14, passing through a window 29 in the first enclosure 16, from a laser 27, onto the target 15, as by focusing the energy 14 onto a spot 28 on the target 15 having a diameter of about 1 to 200 micrometers. Typically the opening 20 in the common wall portion 19 is about 0.2 to 2 millimeters in diameter, and the distance between the opening 20 and the spot 28 on the target 15 is about 0.2 to 5 centimeters.
Typically the gas 24 conveyed into the second enclosure 18 is helium, hydrogen, or a hydrocarbon, such as methane; maintained at a pressure of about 0.9 to 1 atmosphere,at least in the vicinity of the highly transparent portion of the wall thereof. Preferably the gas 24 comprises essentially helium, which is known to be highly transparent to X-rays as well as substantially inert.
Typically the highly transparent portion 25 of the wall 22 of the second enclosure 18 comprises a thin foil 25 that typically comprises essentially beryllium or a plastic material. The thickness of the foil 25 typically is about 2 to 20 micrometers. Other materials, preferably having atomic numbers of not more than about 8, may also be used. Where a less transparent material is used it must be very thin. The X-rays 11 produced at the target 15 typically have energies predominantly of about 0.3 to 2 keV.
Where the pressure of the gas 24 in the second 5 enclosure 18 is maintained at approximately atmospheric pressure, the highly transparent portion 25 of the wall 22 may be very thin, because the pressure on each side of it is approximately the same. It may even comprise only a gas curtain, rather than a solid material; or the mask 26 in Figure 1 or the sample 32 in Figure 2 may be placed against the thick "frame" formed by the wall 22 to substantially separate the gas 24 inside the second enclosure 18 from the air around it. Where an adjacen~
mask or sample is not used~ the object 12 may be placed against the wall 22 to substantially separate the gas 24 inside the second enclosure 18 from the air around it.
In some embodiments of the invention it may be desirable to form at least one intermediate compartment 34 in the second enclosure 18, as shown in Figure 1 between the wall 19' (having an opening 20' therein for the X-rays 11 to pass through) and the wall 19~ The pressure in each such compartment is maintained between the pressures in the ad~acent enclosed regions. As indicated by the arrow 17', means such as a vacuum pump (not ~shown) can maintain the proper pressure. Where more than one intermediate compartment 34 is provided in the second enclosure 18, a differential evacuation system of the type used for the emission of electron beams into the atmosphere may be desirable.
Where the gas 24 in the second enclosure 18, at least in the vicinity of the highly transparent portion 25 of the wall 22 thereof, is maintained at approximately the pressure of the ambient air, the highly transparent portion 25 of the wall 22 of the second enclosure 18 may comprise an opening therein; and the gas 24 inslde the second enclosure 18 can be substantlally separated from 7~
the air around it; either by a gas curtain passing along the opening at 25; or by the object 12 to which the X-rays 11 are to be provided, or a CQmpOnent associated with the object 12 (such as the mask 25 in Figure 1 or the sample 32 in Figure 2), placed against the wall 22 and covering the opening at 25.
The second enclosure 18 may have an intermediate compartment 34, as in Figure 1, between the common wall portion 19 and the wall 22 having the highly transparent portion 25; the gas in the intermediate compar~ment 34 being maintained at a pressure less than ~he pressure in the vicinity of the highly transp~rent portion 25 of the wall 22 of the second enclosure 18 and greater than the pressure in the first enclosure 16.
As is shown in Figure 2I typical apparatus accord-ing to the invention for obtaining EXAFS data of a material~ comprises also spectral dispersive means such as a monochromator 30 in the second enclosure 18 so located as to receive X-rays 11 that pass through the opening and to direct the spectrally resolved X-rays llR on toward the highly transparent portion 25 of the wall 22 adjacent to the ob~ect 12 to which the X-rays llR axe to be pro~ided, and the object 12 typically comprises recording means such as a photographic film 12.
Such apparatus t~pically comprises also means such as a support (not shown) for positioning a sample of material 31 in the ~ptical path of the X-rays ll,llR, either in th~ second enclosure 18 as indicated by the dashed line 31, or outside of the second enclosure 18 and between the highly transparent portion 25 of the wall 22 and the recording means 12, as indicated at 32O The latter position 32 usually is more convenient than positions (such as 31~ in the second enclosure 1~.
Typically the radiant energy 14 is directed to the target 15 in a single pulse in such manner as to produce soft X-rays 11 ~rom the target 15 in a ~ingle pulse in 72~
such manner as to produce soft X-rays 11 from the target 15 suitable for obtaining the EXA~S spectrum of the material 32, which typically is an element having an atomic number of less than 40~
EXAFS apparatus as in Figure 2 may comprise also means for moving the surface of the target 15 typically in a rotating and advancing motion (not shown3 to pro~ide a helical locus of points on a cylindrical surface of the target 15 travelling through the location of the focal spot 28 where the laser light energy 14 strikes the surface. In such a case the energy 14 typically is directed to the moving target surface at 28 in a series of pulses in such manner as to produce soft X-rays 11 from the target 15 suitable for obtaining the EXAFS spectrum of the material 32.
The X-rays frorll the taxget 15 preferably comprise continuum radiation in a selected EXA~S spectral regime of the sample 32. Typically the target 15 comprises essentially an element having a continuum just above the L-lines that includes a selected EXAFS spectr~l regime of the sample 32. Or the target 15 may comprise a plural-ity of elements whose lines are spaced ~losely enough to form virtual.ly a co~tinuum in a selected EXA~S spectral regime of the sample 11. Such a target 15 typically comprises a mixture of elements of adjacent atomic numbers.
The radiant energy typically comprises a laser pulse 14 with a power density of at least about 1013 watts per square centimeter, and the target 15 typically comprises a solid (typically metal) surface, whereby a sur~ace plasma is formed and raised to the kilovolt temperature regime. Some EXA~S can be obtained, however, in the ul~raviolet and ultrasoft X-ray regime using lower power densities down to about 1011 watts per square centimeter. The laser pulse 14 typically is focused to strike the focal spot 28 on the taget 15 abQut 1 to 200 micrometers in diameter.
Further typical and preferred details of apparatus of the type shown in Figure 2 for obtaining ~XAFS data of a material are contained in the ~nited States pa~ent application of Philip J. Mallozzi, Harold M. Epstein, Rober E. Schwerzel, and Bernerd E. Campbell, for Laser EXAFS; Serial No. 105,816, filed December 20, 1979; now United States Patent ~,3/?,~ issued ~A~C* Z~ 8Z.
As is explained in detail in the United States patent of Mallozzi et al., referred to in the Background section herein, a typical method of producing X-rays for use in the present invention comprises directing radiant energy from a laser onto a target, and conversion effi-ciency of at least about 3 percent is obtained by provid~
ing the radiant energy in a low-power precursor pulse of approximately uniform effective intensity focused onto the surface of the target for about 1 to 30 nanoseconds so as to generate an e~panding unconfined coronal plasma having less than normal solid density throughout and comprising a low-density (underdense) region wherein the plasma frequency is less than the laser radiation fre-quency and a higher-density (overdense) region wherein the plasma frequency is greater than the laser radiation fre-quency and, about 1 to 30 nanoseconds after the precursor pulse stri~es the target, a higher-power main pulse focused onto the plasma for about 10-3 to 30 nanoseconds and having such power density and total energy that the radiant energy is absorbed in the underdense region and conducted into the overdense region to heat it and thus to produce X-rays therefrom with the plasma remaining substantially below normal solid density and thus facilitating the substantial emission o~ X-rays in the form of spectral lines arising from nonequilibrium ionization states.
The target typically consists essentially of an element having a high atomic number Z, i.e., an atomic number Z greater than 10. Typically the target consists essentially of iron, calcium, chromium, nickel, aluminum, lead, tungsten, or cJold.
The amplitude, duration, and shape of the precursor pulse typically are adjusted to control the intensity and spectral content of the X-rays. The precursor pulse typically comprises about 0.01 to 5 joules (a~out 101 to 1012 watts per square centimeter) in about 1 to 30 nanoseconds, and strikes the target at an angle of about 20 to 70 degrees from its surface.
The main pulse typically comprises at least 0.1 joule, preferably about 10 to 200 joules in about 1 to 3 nanoseconds.
In a typical emhodiment, the target consists essen-tially of iron and the duration of the precursor pulse is about 8 to 10 nanoseconds.
The electron density in the low-density region of the plasma typically is about 1016 to 1021 per cubic centimeter, and in the higher-density region about 1019 to 1025 per cubic centimeter. The radiant energy typically is focused onto a spot on the target having a diametex of about 1 to 1000 micrometers~ The volume of the plasma typically is about 10 6 to 10-3 cubic centi-meter, the thickness of the plasma in any direction being about 0.001 to 0.1 ~entimeter.
For low energy applications the X-rays are emitted predominantly in the form of spectral lines.
Th~ radiant energy may be focused onto a spot on the target having a diameter of about 1 to 100 micro-meters, generating a plasma of about the same diameter, to form sub~tantially a point source of X-rays and thus to provide substantially the advantages of stimulated emission of X~rays.
In some embodiments of the invention the composi-t:ion of the target and the temperature of the plasma are selected to provide a substantial amount of stimulated emission of X-rays.
In other embodiments Y-rays are directed to impinge upon a f1uorescent target so as to remove inner shell electrons from atoms thereof and thereby create a population inversion.
In a typical method of providing stimulated emission of X-rays by directing radiant energy onto a target to create by means of a pumping mechanism some upper and lower laser levels, the required population inversion is not established by the pumping mechanism alone, but by the combined action of the pumping mechanism and a quenchiny mechanism that extinguishes the lower laser level at a rate sufficient to establish and continuously maintain the inversion. The pumping mechanism typically comprises excitation by collisions of electrons and ions or by dielectronic recombination.
The ~uenching mechanism typically comprises Auger transitions, Coster-Krohig transitions, or collisions.
The radiant energy may be from a laser, or it may comprise a beam of electrons. The pumping mechanism may comprise a beam o~ electrons.
APPLICABILITY
Apparatus according to the present invention is especially useful for applications wherein it is expensive, time consuming, or otherwise inconvenient to move objects that are to receive soft X-rays into and out of a special environment, such as a vacuum ch~mber in which the X-rays are produced. Typical applications o' this type include laser produced X-ray systems for hish resolution lithography, for extended X-ray absorption rine structure (EXAFS) spectroscopy, and for X-ray microscopy.
X rzys usually are produced in a ~acuum, but for many purposes it is desirable to apply them in air.
~or soft X-rays, especially those having photon energies of less than about 5 keV, a problem arises in bringing ~he X-rays ~rom the vaeuum into air, because a window that is thick enough and strong enough to withstand the pressure difference between the vacuum and the air is ~ 3 opaque to the X-rays, except in very small windows. I'he problem is especially serious in X-ray lithography, where it is desirable to illuminate large areas.
The present invention provides simple, inexpensive convenient; means for overcoming the problem of providing X-rays to an object that may be in an ordinary environ-ment such as air at approximately atmospheric pressure.
Appaxatus according to this invention is useful and advantageous not only in X-ray lithography but also in laser EXAFS, and especially in fast EXAFS spectroscopy with a single pulse of laser-produced X-rays, or with a plurality of such pulses.
The technique of Extended X-ray Absorption Pine Structure (E~AFS) spectroscopy is becoming an increas-ingly important tool for the study of chemical structurein samples which lack long-range order, such as amor?hous solids, solutions of biologically important materials, and gases. These studies have gained impetus in recent years by virtue of the availability o~ synchrotron radiation, which provides a continuous and intense spec-trum of the soft X-rays required for EXAFS. A synchrotron, however, is an expensive, cumbersome source of X-rays, to which scientists must travel in order to perform their experiments. A laser X-ray source, on the other hand, is relatively compact, inexpensive, and simple to opPrate and maintain. Furthermore, there are a variety of novel EXAFS experiments which are inherently beyond tne capa-bilities of synchrotron radiation sources. These experiments, which require short pulse width, intense fluxes of low-energy tc4 keV) X-rays, and/or a continuum or a closely packed spectral line structure, are ideally suited to laser-produced X-rays.
The E~AFS spectrum of aluminum has been measured with a nanosecond pulse of soft X-rays generated by a laser-produced plasma. This technique provides a ?ractical alternative to synchrotron radiation for the ~ 6'~ l`3 acquisition of EX~FS data. It also provides a unique capability for the analysis of molecular structure in highly transient chemical species.
While the forms of the invention herein disclosed constitute presently preferred embodiments, many others are possible. It is not intended herein to mention all of the possible e~uivalent forms of ramifications of the invention. It is to be understood that the terms used herein are merely descriptive rather than limiting, and that various changes may be made without departing from the spirit or scope of the invention.
Claims (20)
1. Apparatus for providing X-rays to an object that may be in an ordinary environment such as air at approximately atmospheric pressure, comprising means for directing energy onto a target to produce X-rays of a selected spectrum and intensity at the target, a substantially fluid-tight first enclosure around the target, means for reducing the quantity of gas in the first enclosure to maintain the pressure therein substan-tially below atmospheric pressure, a substantially fluld-tight second enclosure adjoin-ing the first enclosure, with the two enclosures having at least a portion of one wall in common, the common wall portion having therein an opening large enough to permit X-rays to pass through it and yet small enough that the pressure reducing means can evacuate gas from the first enclosure at least as fast as it enters through the opening the target being located close enough to the opening and so positioned as to emit a substantial portion of the X-rays produced toward the opening, to pass through it and on toward a wall of the second enclosure located opposite the opening, means for conveying into the second enclosure a gas that is highly transparent to X-rays t to the substantial exclusion of other gases, and the wall of the second enclosure to which the X-rays travel having a portion that is highly transparent to them, so that the object to which the X-rays are to be provided may be located outside the second enclosure and adjacent thereto and thus receive the X-rays substan-tially unimpeded by air or other undesired intervening matter.
2. Apparatus as in Claim 1, wherein the energy directing means comprises means for directing energy from a laser onto the target.
3. Apparatus as in Claim 1, wherein the energy directing means comprises means for focusing the energy onto a spot on the target having a diameter of about 1 to 200 micrometers.
4. Apparatus as in Claim 1, wherein the opening in the common wall portion is about 0.2 to 2 millimeters in diameter.
5. Apparatus as in Claim 1, wherein the distance between the opening and the spot on the target is about 0.2 to 5 centimeters.
6. Apparatus as in Claim 1, wherein the gas con-veyed into the second enclosure is helium, hydrogen, or a hydrocarbon.
7. Apparatus as in Claim 1, wherein the gas con-veyed into the second enclosure is helium.
8. Apparatus as in Claim 1, wherein the gas in the second enclosure, at least in the vicinity of the highly transparent portion of the wall thereof, is maintained at a pressure of about 0.9 to 1 atmosphere.
9. Apparatus as in Claim 8, wherein the highly transparent portion of the wall of the second enclosure comprises a thin foil.
10. Apparatus as in Claim 9, wherein the foil comprises essentially beryllium or a plastic material.
11. Apparatus as in Claim 10, wherein the thickness of the foil is about 2 to 20 micrometers.
12. Apparatus as in Claim 1, wherein the X-rays produced at the target have energies predominantly of about 0.3 to 2 keV.
13. Apparatus as in Claim 1, wherein the gas in the second enclosure, at least in the vicinity of the highly transparent portion of the wall thereof, is maintained at approximately the pressure of the ambient air.
14. Apparatus as in Claim 13; wherein the highly transparent portion of the wall of the second enclosure comprises an opening therein; and the gas inside the second enclosure is substantially separated from the air around it; either by a gas curtain passing along the opening; or by the object to which the X-rays are to be provided, or a component associated with the object, placed against the wall and covering the opening.
15. Apparatus as in Claim 1, wherein the second enclosure has an intermediate compartment between the common wall portion and the wall having the highly transparent portion.
16. Apparatus as in Claim 15, wherein the gas in the intermediate compartment is maintained at a pressure less than the pressure in the vicinity of the highly transparent portion of the wall of the second enclosure and greater than the pressure in the first enclosure.
17, Apparatus as in Claim 1 for obtaining EXAFS
data of a material, comprising also spectral dispersive means in the second enclosure so located as to receive X-rays that pass through the opening and to direct the spectrally resolved X-rays on toward the highly trans-parent portion of the wall adjacent to the object to which the X-rays are to be provided, and wherein the object comprises recording means.
data of a material, comprising also spectral dispersive means in the second enclosure so located as to receive X-rays that pass through the opening and to direct the spectrally resolved X-rays on toward the highly trans-parent portion of the wall adjacent to the object to which the X-rays are to be provided, and wherein the object comprises recording means.
18. Apparatus as in Claim 17, comprising also means for positioning a sample of material in the optical path of the X-rays.
19. Apparatus as in Claim 18, wherein the sample is positioned in the second enclosure.
20, Apparatus as in Claim 18, wherein the sample is positioned outside of the second enclosure and between the highly transparent portion of the wall and the recording means.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US23277481A | 1981-02-09 | 1981-02-09 | |
| US232,774 | 1988-08-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1184675A true CA1184675A (en) | 1985-03-26 |
Family
ID=22874523
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA000395769A Expired CA1184675A (en) | 1981-02-09 | 1982-02-08 | Providing x-rays |
Country Status (3)
| Country | Link |
|---|---|
| EP (1) | EP0058137A3 (en) |
| JP (1) | JPS57150000A (en) |
| CA (1) | CA1184675A (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4484339A (en) * | 1981-02-09 | 1984-11-20 | Battelle Development Corporation | Providing X-rays |
| JPS6119752U (en) * | 1984-07-11 | 1986-02-05 | 理学電機株式会社 | X-ray guide tube |
| CA1254261A (en) * | 1984-11-08 | 1989-05-16 | James M. Forsyth | Long life x-ray source target |
| US4692934A (en) * | 1984-11-08 | 1987-09-08 | Hampshire Instruments | X-ray lithography system |
| JPH01140100A (en) * | 1987-11-26 | 1989-06-01 | Nec Corp | Method of taking-out x-ray |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4852075A (en) * | 1971-10-29 | 1973-07-21 | ||
| US3870882A (en) * | 1973-05-23 | 1975-03-11 | Gca Corp | Esca x-ray source |
| US4119855A (en) * | 1977-07-08 | 1978-10-10 | Massachusetts Institute Of Technology | Non vacuum soft x-ray lithographic source |
-
1982
- 1982-02-05 EP EP82810049A patent/EP0058137A3/en not_active Withdrawn
- 1982-02-08 CA CA000395769A patent/CA1184675A/en not_active Expired
- 1982-02-09 JP JP1952182A patent/JPS57150000A/en active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57150000A (en) | 1982-09-16 |
| EP0058137A3 (en) | 1983-03-16 |
| EP0058137A2 (en) | 1982-08-18 |
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